JPH08103738A - Parts cleaning method and its device and parts - Google Patents
Parts cleaning method and its device and partsInfo
- Publication number
- JPH08103738A JPH08103738A JP19523695A JP19523695A JPH08103738A JP H08103738 A JPH08103738 A JP H08103738A JP 19523695 A JP19523695 A JP 19523695A JP 19523695 A JP19523695 A JP 19523695A JP H08103738 A JPH08103738 A JP H08103738A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- component
- water
- shower
- protective film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Detergent Compositions (AREA)
Abstract
(57)【要約】
【課題】 引火点の低い可燃性溶剤でしか洗浄できなか
た部品に付着している樹脂汚れなどを、不燃性の準水系
洗浄剤により除去可能にして、環境破壊物質に設定され
た塩素系溶剤の使用量の削減あるいは廃絶を行う。
【解決手段】 被洗浄物6に付着した不要な保護層また
は樹脂汚れ7を除去する部品洗浄方法において、洗浄剤
に不燃性洗浄剤を用い、第1の浸漬槽2において前記不
燃性洗浄剤による超音波洗浄処理を第1条件で行い、続
く第2の槽のシャワー槽4において前記不燃性洗浄剤を
使用して第2条件でシャワー洗浄処理を行い、前記保護
層または樹脂汚れを除去する。
(57) [Abstract] [Problem] Setting as an environmentally destructive substance by using a non-combustible semi-aqueous cleaning agent to remove resin stains that adhere to parts that could only be cleaned with a flammable solvent with a low flash point. Reduce or eliminate the amount of chlorine-based solvents used. In a component cleaning method for removing an unnecessary protective layer or resin stain 7 adhering to an object to be cleaned 6, a nonflammable cleaning agent is used as a cleaning agent, and the nonflammable cleaning agent is used in the first dipping tank 2. The ultrasonic cleaning process is performed under the first condition, and then the shower cleaning process is performed under the second condition in the shower tank 4 of the second tank using the nonflammable cleaning agent to remove the protective layer or the resin stain.
Description
【0001】[0001]
【発明の属する技術分野】本発明は、レンズ、ミラー、
プリズム等の精密光学部品洗浄において、光学部品表面
に付着している保護膜を含む樹脂、接着剤層を除去する
部品洗浄方法及びその装置と部品に関するものである。TECHNICAL FIELD The present invention relates to a lens, a mirror,
The present invention relates to a part cleaning method for removing a resin including a protective film adhering to the surface of an optical part and an adhesive layer in cleaning precision optical parts such as prisms, and an apparatus and part thereof.
【0002】[0002]
【従来の技術】従来より、レンズ等のガラス多面体光学
部品の製造工程においては、ガラス面が水分と接触する
ことにより発生する「やけ」を生じさせないようにする
ためにガラス面に保護膜を塗布することがある。この保
護膜には、耐水性や耐摩耗性等の耐久性が必要とされる
ことから、保護膜として、これらの要求を満足する仕様
の樹脂が用いられる。2. Description of the Related Art Conventionally, in the manufacturing process of glass polyhedron optical parts such as lenses, a protective film is applied to the glass surface in order to prevent "burn" caused by the contact of the glass surface with moisture. I have something to do. Since this protective film is required to have durability such as water resistance and abrasion resistance, a resin having specifications that satisfy these requirements is used as the protective film.
【0003】この種の樹脂には、例えばクロロプレンゴ
ム系や酢酸ビニル系の樹脂があり、これらをレンズ表面
に塗布して保護膜として使用し、これらの保護膜は水分
と接触する工程が終了すれば不要となるので、少なくと
もレンズコーティングの工程の前には、洗浄工程におい
て光学部品表面から保護膜を完全に除去しなければなら
ならず、これを樹脂汚れと言う。即ち、レンズに塗布し
た樹脂であって、この樹脂は研磨が終了するまでは必要
なものだが、研磨終了後はレンズに付いている不必要な
もの(=汚れ)とみなすため、汚れと以下表現する。Resins of this type include, for example, chloroprene rubber-based resins and vinyl acetate-based resins, which are used as protective films by coating them on the lens surface, and these protective films are completed after the step of contacting with water. Since it is unnecessary, the protective film must be completely removed from the surface of the optical component in the cleaning step at least before the lens coating step, which is called resin stain. That is, it is the resin applied to the lens, which is necessary until the end of polishing, but after the end of polishing, it is considered as unnecessary (= dirt) on the lens. To do.
【0004】そこで、従来の保護膜洗浄工程によれば、
テトラクロロエチレンに代表される塩素系溶剤が洗浄剤
として使用されている。これらの塩素系溶剤は浸透力や
洗浄力が大きいという性質を有するため、洗浄除去が困
難な樹脂に対する洗浄に使用すると効果的であることに
よるものである。但し、強固な樹脂の場合には、テトラ
クロロエチレンを使用して洗浄した場合でも完全に保護
膜を除去することは容易ではないことから、一般的な樹
脂洗浄方法によれば、塩素系溶剤を用いた超音波洗浄に
より被洗浄物表面に付着している樹脂を予め膨張させて
おき、この後に手拭などにより完全に除去する方法が採
られている。Therefore, according to the conventional protective film cleaning process,
A chlorine-based solvent represented by tetrachloroethylene is used as a cleaning agent. This is because these chlorine-based solvents have properties of high penetrating power and detergency, and are effective when used for washing resins that are difficult to remove by washing. However, in the case of a strong resin, it is not easy to completely remove the protective film even if it is washed by using tetrachloroethylene. Therefore, according to a general resin washing method, a chlorine-based solvent was used. A method is employed in which the resin attached to the surface of the object to be cleaned is expanded in advance by ultrasonic cleaning and then completely removed by hand wiping or the like.
【0005】[0005]
【発明が解決しようとする課題】上述のように、テトラ
クロロエチレン等の塩素系溶剤は浸透力や洗浄力が高い
ことから洗浄剤として優れた性質を持ち、樹脂の付着汚
れや強固な接着剤等も洗浄除去することが可能である。
しかしながら、テトラクロロエチレンは、近年土壌汚染
の問題や作業環境濃度に対する規制の対象として認定さ
れており、今後の大量使用あるいは恒久的な使用が好ま
しくないとされている。さらにまた、近年になり、世界
的に塩素系溶剤によるオゾン層破壊問題が取り上げられ
ており、その理由からもテトラクロロエチレンに代わる
非塩素系洗浄剤への要求が急速に高まりつつある。As described above, a chlorine-based solvent such as tetrachloroethylene has excellent penetrating power and detergency, and therefore has excellent properties as a cleaning agent. It can be removed by washing.
However, tetrachlorethylene has recently been certified as a subject of regulations on soil pollution problems and working environment concentrations, and it is said that future large-scale use or permanent use thereof is not preferable. Furthermore, in recent years, the problem of ozone layer depletion due to chlorine-based solvents has been taken up worldwide, and for that reason, the demand for non-chlorine-based cleaning agents that replace tetrachloroethylene is rapidly increasing.
【0006】そこで、テトラクロロエチレンに代わる洗
浄剤として石油系洗浄剤、準水系洗浄剤、水系洗浄剤が
検討されている。しかし、石油系溶剤の内、第一石油類
や第二石油類等の引火点の低い溶剤は、消防法上から総
量が規制される等の理由により、取り扱いが容易でな
く、洗浄工程でこれらの溶剤を使用するためには付帯設
備等にかかるコストが大きくなってしまう。Therefore, petroleum-based cleaning agents, quasi-water-based cleaning agents, and water-based cleaning agents have been investigated as cleaning agents that replace tetrachloroethylene. However, among petroleum-based solvents, solvents with a low flash point, such as the first petroleums and the second petroleums, are not easy to handle because the total amount is regulated by the Fire Service Law, and they are not easily handled in the washing process. The cost of incidental equipment and the like is increased due to the use of the solvent.
【0007】また、第三石油類以下の引火点の高い溶剤
の場合では、指定数量が大きくなる等の理由から、取り
扱いは容易になり付帯設備投資も最小限にできるが、そ
の反面洗浄力が低下するという欠点を持つ。このため
に、引火点の高い溶剤による洗浄によれば、樹脂のよう
な物質に対しては洗浄除去することが困難となる。Further, in the case of a solvent having a high flash point such as a third petroleum or less, the handling becomes easy and the incidental equipment investment can be minimized because the designated quantity becomes large, etc. It has the drawback of decreasing. Therefore, cleaning with a solvent having a high flash point makes it difficult to clean and remove substances such as resin.
【0008】一方、引火点の無い水系や準水系洗浄剤
は、安全性や法律上の取り扱いの容易さから各方面で洗
浄剤として期待されている。しかしながら、これらの水
系や準水系洗浄剤は、表面張力や浸透力および洗浄力な
どが石油系溶剤や塩素系溶剤よりも劣ることから、樹脂
汚れを十分に除去することは極めて困難である。On the other hand, a water-based or semi-water-based cleaning agent having no flash point is expected in various fields as a cleaning agent because of its safety and ease of legal handling. However, since these water-based and semi-water-based cleaning agents are inferior in surface tension, penetrating power and cleaning power to petroleum-based solvents and chlorine-based solvents, it is extremely difficult to sufficiently remove resin stains.
【0009】したがって、本発明は上述した事情に鑑み
てなされたものであり、従来は塩素系溶剤あるいは引火
点の低い可燃性溶剤でしか洗浄できなかった部品に付着
している樹脂汚れ等を、引火点の高い第三石油類の洗浄
により除去可能にして、環境破壊物質に認定された塩素
系溶剤の使用量の減少あるいは廃絶を行うことを目的と
している。Therefore, the present invention has been made in view of the above-mentioned circumstances, and it is possible to remove resin stains and the like attached to parts which could be washed only with a chlorine solvent or a flammable solvent having a low flash point. The purpose is to reduce the amount of chlorine-based solvents certified as environmentally destructive substances or to eliminate them by making it possible to remove tertiary oils with high flash points by washing.
【0010】また、従来は塩素系溶剤あるいは引火点の
低い可燃性溶剤でしか洗浄できなかた部品に付着してい
る樹脂汚れなどを、不燃性洗浄剤により除去可能にし
て、環境破壊物質に設定された塩素系溶剤の使用料の削
減あるいは廃絶を行うことを目的としている。そして、
引火点の低い可燃性溶剤でしか洗浄できなかた部品に付
着している樹脂汚れなどを、不燃性の準水系洗浄剤によ
り除去可能にして、環境破壊物質に設定された塩素系溶
剤の使用料の削減あるいは廃絶を行うことを目的として
いる。Further, it has been set as an environmentally destructive substance by using a nonflammable cleaning agent to remove resin stains and the like adhering to parts that could only be cleaned with a chlorine-based solvent or a flammable solvent having a low flash point. The purpose is to reduce or eliminate the use of chlorine-based solvents. And
It is possible to remove resin stains etc. attached to parts that could only be cleaned with a flammable solvent with a low flash point with a non-flammable semi-aqueous cleaning agent. The purpose is to reduce or eliminate.
【0011】[0011]
【課題を解決するための手段】上記課題を解決し、目的
を達成するために、本発明は、第三石油類であるNメチ
ル2ピロリドンを洗浄剤として用い、超音波浸漬洗浄と
シャワー洗浄の2槽洗浄を行うことで、例えば被洗浄物
である精密光学部品表面から樹脂汚れ他を完全に除去す
るものである。詳細には、第1槽でNメチル2ピロリド
ンにより超音波浸漬洗浄し、続く第2槽で同じくNメチ
ル2ピロリドンによりシャワー洗浄することで接着剤等
の硬化性樹脂のように除去が困難なものを完全に洗浄除
去するように働く。In order to solve the above-mentioned problems and to achieve the object, the present invention uses N-methyl-2-pyrrolidone, which is a third petroleum, as a cleaning agent for ultrasonic immersion cleaning and shower cleaning. By performing the two-tank cleaning, for example, resin stains and the like are completely removed from the surface of the precision optical component that is the object to be cleaned. Specifically, it is difficult to remove like a curable resin such as an adhesive by performing ultrasonic immersion cleaning with N-methyl-2pyrrolidone in the first tank and then shower-cleaning with N-methyl-2pyrrolidone in the second tank as well. It works as if you were cleaning it completely.
【0012】また、好ましくは、不燃性の準水系洗浄剤
を洗浄剤として用い、超音波浸漬洗浄とシャワー洗浄の
2槽洗浄を行うことで、たとえば被洗浄物である精密光
学部品表面から樹脂汚れ他を完全に除去するものであ
る。詳細には、第1槽で不燃性の準水系洗浄により超音
波浸漬洗浄し、続く第2槽で同じく不燃性の準水系洗浄
剤によりシャワー洗浄することで接着剤などの硬化性樹
脂のように除去が困難なものを完全に洗浄除去するよう
に働く。Preferably, a non-combustible semi-aqueous cleaning agent is used as a cleaning agent, and ultrasonic bath immersion cleaning and shower cleaning are performed in two tanks so that, for example, the surface of the precision optical component, which is the object to be cleaned, is stained with resin. It completely removes the others. In detail, ultrasonic cleaning is performed in the first tank by non-combustible semi-aqueous cleaning, and then in the second tank by shower cleaning with the same non-combustible semi-aqueous cleaning agent so that a curable resin such as an adhesive can be obtained. It works to completely clean and remove those that are difficult to remove.
【0013】不燃性の準水系洗浄材は水溶性の溶剤と水
を混合したものである。水溶性の溶剤としては例えば、
メタノール、エタノール、i−プロピルアルコール、n
−プロピルアルコール、3メチル3メトキシブタノール
等のアルコール類、Nメチル2ピロリドン、酢酸、アセ
トン、アセトアルデヒド、ピリジン、エチレングリコー
ル、グリセリン等があり、これらの溶剤にはそれぞれの
樹脂との適性があり、洗浄剤として選択する際には溶解
性パラメータ等により選択する。これらの水溶性の溶剤
と水を混合することで、不燃性にするわけであるが、そ
の混合比率は溶剤によりことなるが、ほとんどの場合水
分比率40%以下で不燃性を示す。The non-combustible semi-aqueous cleaning material is a mixture of a water-soluble solvent and water. As the water-soluble solvent, for example,
Methanol, ethanol, i-propyl alcohol, n
-Propyl alcohol, alcohols such as 3-methyl-3-methoxybutanol, N-methyl-2-pyrrolidone, acetic acid, acetone, acetaldehyde, pyridine, ethylene glycol, glycerin, etc. are available. When it is selected as an agent, it is selected according to the solubility parameter and the like. By mixing these water-soluble solvents with water, the mixture is rendered incombustible. The mixing ratio varies depending on the solvent, but in most cases, the composition exhibits noncombustibility at a water content of 40% or less.
【0014】[0014]
【発明の実施の形態】以下に本発明の実施の形態につい
て、添付図面を参照して述べる。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the accompanying drawings.
【0015】図1は各実施の形態に共通な部品洗浄のモ
デル図である。本図に示すように被洗浄物はそのガラス
面が水分と接触することにより発生する「やけ」を生じ
させないようにするための樹脂7が付着した被洗浄物6
である。FIG. 1 is a model diagram of component cleaning common to each embodiment. As shown in the figure, the object to be cleaned 6 has an object to be cleaned 6 to which a resin 7 is attached so as not to cause “burn” caused by the contact of the glass surface with moisture.
Is.
【0016】この被洗浄物6を温度が20℃以上好まし
くは40℃以上に保温された状態になっているNメチル
2ピロリドン2液中に置いてから、超音波浸漬する。こ
のために第1の槽1は底部において超音波発振装置3が
固定されており、周波数が20〜100kHz好ましく
は28〜40kHzで、出力が300W以上好ましくは
500W以上、出力密度0.3W/cm2 以上好ましく
は0.5W/cm2 以上で超音波洗浄が行われる。この
超音波浸漬により被洗浄物6は1分以上、好ましくは3
分以上の時間経過に、被洗浄物6に付着している樹脂7
が膨張及び一部溶解する。The article 6 to be cleaned is placed in a 2 liquid of N-methyl-2pyrrolidone kept at a temperature of 20 ° C. or higher, preferably 40 ° C. or higher, and then ultrasonically dipped. For this reason, the ultrasonic oscillating device 3 is fixed at the bottom of the first tank 1, the frequency is 20 to 100 kHz, preferably 28 to 40 kHz, the output is 300 W or more, preferably 500 W or more, and the output density is 0.3 W / cm 2. Ultrasonic cleaning is preferably performed at 0.5 W / cm 2 or more. By this ultrasonic immersion, the cleaning target 6 is kept for 1 minute or more, preferably 3
The resin 7 adhering to the object 6 to be cleaned after a lapse of more than a minute
Expands and partially dissolves.
【0017】この第1の槽1での超音波洗浄が終了した
後に、被洗浄物6は第2の槽4のNメチル2ピロリドン
のシャワー洗浄槽に投入する。第2の槽4内にはシャワ
ー5が配設されており、300リットル/時間以上、好
ましくは500リットル/時間以上で、吹き出し口より
圧力1kg/cm2 以上、好ましくは5kg/cm2以
上で被洗浄物6上に噴射され、第2の槽4中において被
洗浄物6を1分以上、好ましくは3分以上シャワー洗浄
される。このシャワー洗浄により、第1の槽1で膨潤お
よび一部溶解した樹脂7が被洗浄物6上から完全に除去
されることになる。以下に諸条件を設定した、第1実施
の形態から第6実施の形態について述べる。After the ultrasonic cleaning in the first tank 1 is completed, the object 6 to be cleaned is put into the shower tank for cleaning N-methyl-2-pyrrolidone in the second tank 4. A shower 5 is provided in the second tank 4 and is to be cleaned at 300 liters / hour or more, preferably 500 liters / hour or more, and a pressure from the outlet of 1 kg / cm 2 or more, preferably 5 kg / cm 2 or more. The object 6 is sprayed onto the object 6 and the object 6 to be cleaned is shower-cleaned in the second tank 4 for 1 minute or longer, preferably 3 minutes or longer. By this shower cleaning, the resin 7 swollen and partially dissolved in the first tank 1 is completely removed from the object 6 to be cleaned. The first to sixth embodiments in which various conditions are set will be described below.
【0018】[第1実施の形態]第1実施の形態では、
直径が50mm、厚さが5mm、材質がBK7(ショッ
ト社によるガラスの命名法による表記であり、ガラスの
材質を表す)、両平面形状の光学レンズを被洗浄物とし
た場合であって、保護膜を形成するために酢酸ビニル系
接着剤の中に浸漬する。この浸漬後に、5cm/秒の速
度で引上げてから、大気中に80℃で24時間放置す
る。このようにして、レンズ表面に保護膜が完全に付着
した光学レンズを、超音波浸漬洗浄槽1中に投入し、5
0℃のNメチル2ピロリドンにより、28kHz、60
0Wの超音波により3分間、第1の洗浄を行う。この超
音波洗浄終了後にレンズを第2の槽4のNメチル2ピロ
リドンのシャワー洗浄槽に移し流量300リットル/時
間、圧力5kg/cm2 、温度50℃で3分間、シャワ
ー洗浄を行う。このシャワー洗浄終了後に、完全に被洗
浄物を乾燥させる。この後に、接着剤付着前と洗浄終了
乾燥後の被洗浄物の重量変化率を下記の式1で計算した
結果、「1」を得たことから、保護膜は100%洗浄で
きたことが確認できた。[First Embodiment] In the first embodiment,
The case where the diameter is 50 mm, the thickness is 5 mm, the material is BK7 (Shot Co., Ltd.'s nomenclature for glass, and represents the material of glass), and the optical lenses of both planes are used as the object to be cleaned, and protection is performed. Immerse in vinyl acetate adhesive to form a film. After this immersion, the film is pulled up at a speed of 5 cm / sec and then left in the atmosphere at 80 ° C. for 24 hours. In this way, the optical lens with the protective film completely attached to the lens surface is put into the ultrasonic immersion cleaning tank 1 and
With N-methyl-2-pyrrolidone at 0 ° C, 28 kHz, 60
The first washing is performed with 0 W ultrasonic waves for 3 minutes. After completion of this ultrasonic cleaning, the lens is transferred to the N-methyl-2-pyrrolidone shower cleaning tank in the second tank 4 and shower cleaning is performed at a flow rate of 300 liters / hour, a pressure of 5 kg / cm @ 2, and a temperature of 50 DEG C. for 3 minutes. After completion of the shower cleaning, the object to be cleaned is completely dried. After that, as a result of calculating the weight change rate of the object to be cleaned before adhesion of the adhesive and after completion of cleaning and drying by the following formula 1, "1" was obtained, and thus it was confirmed that the protective film could be cleaned 100%. did it.
【0019】[0019]
【式1】重量変化率=洗浄後の重量÷洗浄前の重量 [第2実施の形態]第2実施の形態では、直径が150
mm、厚さが50mm、材質がBK7、両平面形状の光
学レンズを、第1実施の形態と同様の条件で保護膜を塗
布、乾燥、洗浄を行い、洗浄終了後に完全に被洗浄物を
乾燥させた後に、保護膜付着と洗浄終了乾燥後の被洗浄
物の重量変化率を式1で計算した結果、「1」を得たこ
とから、保護膜は100%洗浄できたことが確認でき
た。[Formula 1] Weight change rate = Weight after washing / Weight before washing [Second Embodiment] In the second embodiment, the diameter is 150.
mm, thickness 50 mm, material BK7, biplanar optical lens, apply protective film under the same conditions as in the first embodiment, dry and wash, and completely dry the object to be washed after washing. After that, as a result of calculating the weight change rate of the object to be cleaned after adhesion of the protective film and completion of cleaning and drying with the formula 1, since "1" was obtained, it was confirmed that the protective film could be cleaned 100%. .
【0020】[第3実施の形態]第3実施の形態では、
直径が50mm、厚さが5mm、材質がBK7、両平面
形状の光学レンズを、酢酸エチルにより20%に希釈し
たポリビニルアルコ−ル系接着剤の中に浸漬してから、
5cm/秒の速度で引上げ80℃で24時間放置して保
護膜を形成する。この後に、上記第1実施の形態と同様
の条件で洗浄を行った後に被洗浄物を乾燥させ、保護膜
付着前と洗浄終了乾燥後の被洗浄物の重量変化率をを式
1で計算した結果、「1」を得たことから、保護膜は1
00%洗浄できたことが確認できた。[Third Embodiment] In the third embodiment,
After dipping an optical lens having a diameter of 50 mm, a thickness of 5 mm, a material of BK7, and a two-plane shape in a polyvinyl alcohol adhesive diluted to 20% with ethyl acetate,
It is pulled up at a speed of 5 cm / sec and left at 80 ° C. for 24 hours to form a protective film. After this, after washing under the same conditions as in the first embodiment, the article to be washed is dried, and the weight change rate of the article to be washed before adhesion of the protective film and after completion of washing is calculated by the formula 1. As a result, since "1" was obtained, the protective film was 1
It was confirmed that it could be washed by 00%.
【0021】[第4実施の形態]第4実施の形態では、
直径が50mm、厚さが5mm、材質がBK7、両平面
形状の光学レンズを、酢酸ビニル系接着剤の中に浸漬す
る。この浸漬後に、5cm/秒の速度で引上げ80℃で
30日間放置する。この後に、上記第1実施の形態と同
様の条件で洗浄を行った後に被洗浄物を乾燥させ、保護
膜付着前と洗浄終了乾燥後の被洗浄物の重量変化率を式
1で計算した結果、「1」を得たことから、保護膜は1
00%洗浄できたことが確認できた。[Fourth Embodiment] In the fourth embodiment,
An optical lens having a diameter of 50 mm, a thickness of 5 mm, a material of BK7, and a two-plane shape is immersed in a vinyl acetate adhesive. After this immersion, the film is pulled up at a speed of 5 cm / sec and left at 80 ° C. for 30 days. After this, after washing under the same conditions as in the above-described first embodiment, the article to be washed is dried, and the weight change rate of the article to be washed before adhesion of the protective film and after completion of washing and drying is calculated by the formula 1. , "1", so the protective film is 1
It was confirmed that it could be washed by 00%.
【0022】[第5実施の形態]第5実施の形態では、
直径が50mm、厚さが5mm、材質がBK7、両平面
形状の光学レンズを、酢酸ビニル系接着剤の中に浸漬す
る。この浸漬後に、5cm/秒の速度で引上げ80℃で
24時間放置する。このようにしてレンズ表面に接着剤
が完全に付着した状態のレンズを、超音波浸漬洗浄槽中
に投入し40℃のNメチル2ピロリドンにより、28k
Hz、1200Wの超音波で3分間、第1槽目の洗浄を
行う。超音波洗浄終了後レンズを第2槽のNメチル2ピ
ロリドンのシャワー洗浄装置に移し流量500リットル
/時間、圧力7kg/cm2 、温度40℃で3分間シャ
ワー洗浄を行う。シャワー洗浄終了後、完全に被洗浄物
を乾燥させる。接着付着前と洗浄終了乾燥後の被洗浄物
の重量変化率を式1で計算した結果、「1」を得たこと
から保護膜は100%洗浄できたことが確認できた。 [第6実施の形態]第6実施の形態では、直径が50m
m、厚さが5mm、材質がBK7、両平面形状の光学レ
ンズを、酢酸ビニル系接着剤の中に浸漬する。この浸漬
後に、5cm/秒の速度で引上げ80℃で24時間放置
する。このようにしてレンズ表面に接着剤が完全に付着
した状態のレンズを、超音波浸漬洗浄槽中に投入し70
℃のNメチル2ピロリドンにより、28kHz、600
Wの超音波で3分間、第1槽目の洗浄を行う。超音波洗
浄終了後レンズを第2槽のNメチル2ピロリドンのシャ
ワー洗浄装置に移し流量300リットル/時間、圧力5
kg/cm2 、温度40℃で3分間シャワー洗浄を行
う。シャワー洗浄終了後、完全に被洗浄物を乾燥させ
る。接着付着前と洗浄終了乾燥後の被洗浄物の重量変化
率を式1で計算した結果、「1」を得たことから、保護
膜は100%洗浄できたことが確認できた。以下に本発
明の第7実施の形態から第16実施の形態について、図
1の各実施の形態に共通なモデル図を参照して述べる。[Fifth Embodiment] In the fifth embodiment,
An optical lens having a diameter of 50 mm, a thickness of 5 mm, a material of BK7, and a two-plane shape is immersed in a vinyl acetate adhesive. After this immersion, the film is pulled up at a speed of 5 cm / sec and left at 80 ° C. for 24 hours. In this way, the lens with the adhesive completely adhered to the lens surface is put into an ultrasonic immersion cleaning tank, and it is treated with N-methyl-2pyrrolidone at 40 ° C.
The first tank is washed with ultrasonic waves of 1200 Hz for 3 minutes. After the ultrasonic cleaning is completed, the lens is transferred to the N-methyl-2-pyrrolidone shower cleaning device in the second tank, and shower cleaning is performed for 3 minutes at a flow rate of 500 liters / hour, a pressure of 7 kg / cm @ 2, and a temperature of 40.degree. After the shower cleaning is completed, the object to be cleaned is completely dried. As a result of calculating the weight change rate of the object to be cleaned before adhesion and after drying after completion of cleaning by the formula 1, it was confirmed that 100% of the protective film could be cleaned since "1" was obtained. [Sixth Embodiment] In the sixth embodiment, the diameter is 50 m.
An optical lens having a thickness of 5 mm, a thickness of 5 mm, a material of BK7, and a biplanar shape is immersed in a vinyl acetate adhesive. After this immersion, the film is pulled up at a speed of 5 cm / sec and left at 80 ° C. for 24 hours. In this way, the lens with the adhesive completely adhered to the lens surface is put in an ultrasonic immersion cleaning tank and
28 kHz, 600 with N-methyl-2-pyrrolidone at ℃
The first tank is cleaned with W ultrasonic waves for 3 minutes. After the ultrasonic cleaning, the lens was transferred to the N-methyl-2-pyrrolidone shower cleaning device in the second tank, and the flow rate was 300 liters / hour and the pressure was 5
Shower washing is carried out at a temperature of 40 ° C. for 3 minutes at kg / cm 2. After the shower cleaning is completed, the object to be cleaned is completely dried. As a result of calculating the weight change rate of the object to be cleaned before adhesion adhesion and after completion of cleaning and drying by Equation 1, as a result of “1”, it was confirmed that the protective film could be cleaned 100%. Hereinafter, seventh to sixteenth embodiments of the present invention will be described with reference to the model diagram common to each embodiment of FIG.
【0023】本図に示すように、被洗浄物はそのガラス
面が水分と接触することにより発生する「やけ」を生じ
させないようにするためのクロロプレン系、あるいは酢
酸ビニル系、あるいはポリビニルアルコール系の樹脂7
が付着した光学部品に被洗浄物6を、温度が40℃以上
好ましくは50℃以上に保温された状態になっている不
燃性の準水系洗浄剤液中に置いてから超音波浸漬する。As shown in the figure, the object to be cleaned is of a chloroprene type, a vinyl acetate type or a polyvinyl alcohol type in order to prevent "burn" which is caused by the contact of the glass surface with moisture. Resin 7
The object 6 to be cleaned is placed in the non-combustible semi-aqueous cleaning agent liquid kept at a temperature of 40 ° C. or higher, preferably 50 ° C. or higher, and then ultrasonically dipped in the optical component having adhered thereto.
【0024】このために第1の槽1は底部において超音
波発振装置3が固定されており、周波数が20〜100
kHz好ましくは28〜40kHZで出力が300W以
上好ましくは500W以上、出力密度0.1W/cm2以
上好ましくは0.5W/cm2以上で超音波洗浄する。こ
の超音波浸漬により被洗浄物6は3分以上好ましくは5
分以上の時間経過により、被洗浄物6に付着している樹
脂7が膨張及び一部溶解する。For this reason, the ultrasonic bath 3 is fixed at the bottom of the first tank 1, and the frequency is 20 to 100.
Ultrasonic cleaning is performed at a kHz of preferably 28 to 40 kHz and an output of 300 W or more, preferably 500 W or more, and an output density of 0.1 W / cm 2 or more, preferably 0.5 W / cm 2 or more. By the ultrasonic immersion, the object to be cleaned 6 is kept for 3 minutes or more, preferably 5
The resin 7 adhering to the article to be cleaned 6 expands and partially dissolves after a lapse of time of not less than minutes.
【0025】この第1の槽1での超音波洗浄が終了した
後に、被洗浄物6は第2の槽4の不燃性の準水系洗浄剤
のシャワー洗浄槽に投入する。第2の槽4内にはシャワ
ー5が配置されており、300リットル/時間以上、好
ましくは500リットル/時間以上で吹き出し口より圧
力1kg/cm2で被洗浄物6上に噴射され、第2の槽
4中において被洗浄物6を3分以上、好ましくは5分以
上シャワー洗浄を行うことにより、第1の槽1中で膨潤
及び一部溶解した樹脂7が被洗浄物6状から完全に除去
されることになる。After the ultrasonic cleaning in the first tank 1 is completed, the object 6 to be cleaned is put into the shower cleaning tank of the non-combustible semi-aqueous cleaning agent in the second tank 4. A shower 5 is arranged in the second tank 4 and is sprayed onto the article to be cleaned 6 at a pressure of 1 kg / cm 2 from a blow-out port at a rate of 300 liters / hour or more, preferably 500 liters / hour or more. By subjecting the article 6 to be cleaned in the tank 4 to shower cleaning for 3 minutes or more, preferably 5 minutes or more, the resin 7 swollen and partially dissolved in the first tank 1 is completely removed from the article 6 to be cleaned. Will be done.
【0026】以上述べた、洗浄液温度、超音波周波数、
超音波出力、超音波出力密度、洗浄時間、シャワー流
量、シャワー圧力、シャワー洗浄時間が上記の各条件を
満足できない場合には、洗浄効果は落ち、十分に樹脂が
除去できなくなる。以下に諸条件を設定した第7実施の
形態〜第16実施の形態について述べる。The cleaning liquid temperature, ultrasonic frequency,
When the ultrasonic output, the ultrasonic output density, the cleaning time, the shower flow rate, the shower pressure, and the shower cleaning time do not satisfy the above conditions, the cleaning effect is deteriorated and the resin cannot be sufficiently removed. Seventh to sixteenth embodiments in which various conditions are set will be described below.
【0027】[第7実施の形態]第7実施の形態では、
直径が50mm、厚さが5mm,材質がBK7、両平面
形状の光学レンズを被洗浄物とした場合であって、保護
膜を形成するためにクロロプレン系接着剤の中に浸漬す
る。この浸漬後に、5cm/秒の速度で引き上げてか
ら、大気中に80℃で24時間放置する。このようにし
て、レンズ表面に保護膜が完全ンい付着した光学レンズ
を、超音波浸漬洗浄槽1に投入し、50℃のNメチル2
ピロリドン85体積%と水15体積%の混合洗浄剤によ
り、28kHz、600W、.1W/cm2の超音波に
より5分間、第1の洗浄を行う。この混合液はタグ密閉
引火点試験により不燃性であることを確認済みである。[Seventh Embodiment] In the seventh embodiment,
In the case where an optical lens having a diameter of 50 mm, a thickness of 5 mm, a material of BK7, and a two-plane shape is used as an object to be cleaned, it is immersed in a chloroprene adhesive to form a protective film. After this immersion, the substrate is pulled up at a speed of 5 cm / sec and then left in the atmosphere at 80 ° C. for 24 hours. In this way, the optical lens with the protective film completely attached to the lens surface is put into the ultrasonic immersion cleaning tank 1 and the N 2
With a mixed detergent of 85% by volume of pyrrolidone and 15% by volume of water, 28 kHz, 600 W ,. A first wash is performed with 1 W / cm 2 ultrasonic waves for 5 minutes. It has been confirmed that this mixed solution is nonflammable by the tag closed flash point test.
【0028】この超音波洗浄終了後にレンズを第2の槽
4のNメチル2ピロリドン85体積%と水15体積%の
混合洗浄剤のシャワー洗浄槽に移し、流量300リット
ル/時間、圧力5kg/cm2で5分間シャワー洗浄を
行う。このシャワー洗浄終了後、完全に被洗浄物を乾燥
させる。この後に、接着剤付着前と洗浄乾燥後の被洗浄
物の重量変化率を上記の式1で計算した結果、「1」を
得たことから、保護膜は100%洗浄できたことが確認
できた。After completion of the ultrasonic cleaning, the lens is transferred to the shower cleaning tank of the second tank 4 containing 85% by volume of N-methyl-2-pyrrolidone and 15% by volume of water, and a flow rate of 300 liters / hour and a pressure of 5 kg / cm 2. Shower wash for 5 minutes. After completion of the shower cleaning, the object to be cleaned is completely dried. After that, as a result of calculating the weight change rate of the object to be cleaned before the adhesion of the adhesive and after the cleaning and drying by the above-mentioned formula 1, since "1" was obtained, it was confirmed that the protective film could be cleaned 100%. It was
【0029】[第8実施の形態]第8実施の形態では、
直径が150mm、厚さが50mm、材質がBK7、両
平面形状の光学ガラスを、上記の第7実施の形態と同様
の条件で保護膜を塗布、乾燥、洗浄を行い、洗浄終了後
に完全に被洗浄物を乾燥させた後に、保護膜付着と洗浄
終了乾燥後の被洗浄物の重量変化率を上記の式1で計算
した。この結果、「1」を得たことから、保護膜は10
0%洗浄できたことが確認できた。[Eighth Embodiment] In the eighth embodiment,
An optical glass having a diameter of 150 mm, a thickness of 50 mm, a material of BK7, and a two-plane shape is coated with a protective film under the same conditions as in the seventh embodiment, dried and washed, and completely covered after the washing is completed. After the washed material was dried, the weight change rate of the object to be cleaned after the adhesion of the protective film and the completion of washing and drying was calculated by the above formula 1. As a result, since "1" was obtained, the protective film was 10
It was confirmed that 0% cleaning was possible.
【0030】[第9実施の形態]第9実施の形態では、
直径が50mm、厚さが5mm、材質がBK7、両平面
形状の光学ガラス(レンズ)を、第7実施の形態と同様
の条件で保護膜を塗布、乾燥を行った後に、50℃のC
Nメチル2ピロリドン85体積%と水15体積%の混合
洗浄剤を使用して、40kHz、600W、0.1W/
cm2の超音波により5分間、第1の洗浄を行う。[Ninth Embodiment] In the ninth embodiment,
After a protective film is applied and dried on an optical glass (lens) having a diameter of 50 mm, a thickness of 5 mm, a material of BK7, and a biplanar shape under the same conditions as in the seventh embodiment, C at 50 ° C.
Using a mixed detergent of 85% by volume of N-methyl-2-pyrrolidone and 15% by volume of water, 40 kHz, 600 W, 0.1 W /
A first wash is performed for 5 minutes with ultrasonic waves of cm 2.
【0031】この超音波洗浄終了後に、レンズを第2の
槽4のNメチル2ピロリドン85体積%と水15体積%
の混合洗浄剤のシャワー洗浄槽に移し、流量300リト
ル/時間、圧力5kg/cm2で5分間のシャワー洗浄
を行う。After completion of this ultrasonic cleaning, the lens was placed in the second tank 4 and contained 85% by volume of N-methyl-2-pyrrolidone and 15% by volume of water.
The mixture is transferred to the shower cleaning tank of the mixed cleaning agent, and shower cleaning is performed for 5 minutes at a flow rate of 300 Little / hour and a pressure of 5 kg / cm 2.
【0032】このシャワー洗浄終了後に、完全に被洗浄
物を乾燥させた後に、保護膜付着と洗浄終了乾燥後の被
洗浄物の重量変化比率を上記の式1で計算した結果、
「1」を得たことから、保護膜は100%洗浄できたこ
とが確認できた。After the completion of the shower cleaning, the object to be cleaned is completely dried, and then the weight change ratio of the object to be cleaned after adhesion of the protective film and the completion of the cleaning is calculated by the above formula 1,
Since "1" was obtained, it was confirmed that the protective film could be washed 100%.
【0033】[第10実施の形態]第10実施の形態で
は、直径が50mm、厚さが5ミリ、材質がBK7、両
平面形状の光学ガラスを、第1実施の形態と同様の条件
で保護膜を塗布、乾燥を行った後80℃のNメチル2ピ
ロリドン85体積%と水15体積%の混合洗浄剤のシャ
ワー洗浄槽に移し流量300リットル/時間、圧力5k
g/cm2で5分間シャワー洗浄を行う。このシャワー
洗浄終了後、完全に被洗浄物を乾燥させた後に、保護膜
付着と洗浄終了乾燥後の被洗浄物の重量変化率を式1で
計算した結果、「1」を得たことから、保護膜は100
%洗浄できたことが確認できた。[Tenth Embodiment] In the tenth embodiment, an optical glass having a diameter of 50 mm, a thickness of 5 mm, a material of BK7, and a biplanar shape is protected under the same conditions as in the first embodiment. After coating and drying the film, the film was transferred to a shower washing tank of a mixed detergent of 85% by volume of N-methyl-2-pyrrolidone and 15% by volume of water at 80 ° C., the flow rate was 300 liters / hour, and the pressure was 5 k.
Perform shower washing at g / cm2 for 5 minutes. After completion of this shower cleaning, after completely drying the object to be cleaned, calculation of the weight change rate of the object to be cleaned after adhesion of the protective film and drying after completion of cleaning, as a result, "1" was obtained. 100 protective film
It was confirmed that the cleaning could be completed.
【0034】[第11実施の形態]第11実施の形態で
は、直径が50mm、厚さが5ミリ、材質がBK7、両
平面形状の光学レンズを第1実施の形態と同様の条件で
保護膜を塗布、乾燥を行った後、50℃の3メチル3メ
トキシブタノール80体積%と水20体積%の混合洗浄
剤により、第7実施の形態と同様に洗浄を行い、洗浄終
了後に被洗浄物を乾燥させた後に、保護膜付着と洗浄終
了後の被洗浄物の重量変化を上記の式1で計算した結
果、「1」を得たことから、保護膜は100%洗浄でき
たことが確認できた。また、3メチル3メトキシブタノ
ール80体積%と水20体積%の混合洗浄剤の混合液は
タグ密閉引火点試験で不燃性を確認済みである。[Eleventh Embodiment] In the eleventh embodiment, an optical lens having a diameter of 50 mm, a thickness of 5 mm, a material of BK7 and a biplanar shape is used as a protective film under the same conditions as in the first embodiment. Was applied and dried, and then washed with a mixed detergent of 80% by volume of 3-methyl-3-methoxybutanol and 20% by volume of water at 50 ° C. in the same manner as in the seventh embodiment. As a result of calculating the adhesion of the protective film after drying and the change in the weight of the object to be cleaned after the cleaning with the above-mentioned formula 1 to obtain “1”, it can be confirmed that the protective film could be cleaned 100%. It was In addition, a mixed solution of a mixed detergent containing 80% by volume of 3-methyl-3-methoxybutanol and 20% by volume of water has been confirmed to be nonflammable by a tag closed flash point test.
【0035】[第12実施の形態]第12実施の形態で
は、洗浄剤として50℃の3メチル3メトキシブタノー
ル80体積%と水20体積%の混合洗浄剤を用い、第8
実施の形態と同様に洗浄テストを行った後に、保護膜付
着と洗浄終了後の被洗浄物の重量変化率を上記の式1で
計算した。この結果、「1」を得たことから、保護膜は
100%洗浄できたことが確認できた。[Twelfth Embodiment] In the twelfth embodiment, a mixture of 80% by volume of 3-methyl-3-methoxybutanol and 20% by volume of water at 50 ° C. is used as a cleaning agent.
After performing the cleaning test as in the embodiment, the weight change rate of the object to be cleaned after the adhesion of the protective film and the cleaning was calculated by the above formula 1. As a result, since "1" was obtained, it was confirmed that the protective film could be washed 100%.
【0036】[第13実施の形態]第13実施の形態で
は、洗浄剤として50℃の3メチル3メトキシブタノー
ル80体積%と水20体積%の混合洗浄剤を用い、第9
実施の形態と同様に洗浄テストを行った後に、保護膜付
着と洗浄終了乾燥後の被洗浄物の重量変化率を上記の式
1で計算した。この結果、「1」を得たことから、保護
膜は100%洗浄できたことが確認できた。[Thirteenth Embodiment] In the thirteenth embodiment, a mixed detergent of 80% by volume of 3-methyl-3-methoxybutanol and 20% by volume of water at 50 ° C. is used as a detergent.
After performing the cleaning test as in the embodiment, the weight change rate of the object to be cleaned after the adhesion of the protective film and the completion of the cleaning and the drying was calculated by the above formula 1. As a result, since "1" was obtained, it was confirmed that the protective film could be washed 100%.
【0037】[第14実施の形態]第14実施の形態で
は、洗浄剤として50℃の3メチル3メトキシブタノー
ル80体積%と水20体積%の混合洗浄剤を用い、第1
0実施の形態と同様に洗浄テストを行った後に、保護膜
付着と洗浄終了乾燥後の被洗浄物の重量変化率を上記の
式1で計算した。この結果、「1」を得たことから、保
護膜は100%洗浄できたことが確認できた。[Fourteenth Embodiment] In the fourteenth embodiment, a mixed detergent of 80% by volume of 3-methyl-3-methoxybutanol and 20% by volume of water at 50 ° C. is used as the detergent.
After performing a cleaning test in the same manner as in the 0th embodiment, the weight change rate of the object to be cleaned after adhesion of the protective film and completion of cleaning and drying was calculated by the above formula 1. As a result, since "1" was obtained, it was confirmed that the protective film could be washed 100%.
【0038】[第15実施の形態]第15実施の形態で
は、直径が50mm、厚さが5mm、材質がBK7、両
平面形状の光学レンズを被洗浄物とした場合であって、
保護膜を形成するためにポリビニルアルコール系接着剤
の中に浸漬する。この浸漬後に、5cm/秒の速度で引
き上げてから、大気中に80℃で24時間放置する。こ
のようにして、レンズ表面に保護膜が完全に付着した光
学レンズを、50℃のNメチル2ピロリドン85体積%
と水15体積%の混合洗浄剤により、第7実施の形態と
同様に洗浄を行い、洗浄終了後の被洗浄物の重量変化率
を上記の式1で計算した。この結果、「1」を得たこと
から、保護膜は100%洗浄できたことが確認できた。[Fifteenth Embodiment] In the fifteenth embodiment, a case where an optical lens having a diameter of 50 mm, a thickness of 5 mm, a material of BK7, and a two-plane shape is used as an object to be cleaned,
Immerse in a polyvinyl alcohol-based adhesive to form a protective film. After this immersion, the substrate is pulled up at a speed of 5 cm / sec and then left in the atmosphere at 80 ° C. for 24 hours. In this way, the optical lens with the protective film completely adhered to the lens surface is treated with 85% by volume of N-methyl-2-pyrrolidone at 50 ° C.
Washing was performed in the same manner as in the seventh embodiment with a mixed detergent containing 15% by volume of water and 15% by volume of water, and the weight change rate of the article to be washed after completion of washing was calculated by the above formula 1. As a result, since "1" was obtained, it was confirmed that the protective film could be washed 100%.
【0039】[第16実施の形態]第16実施の形態で
は、直径が50mm、厚さが5mm、材質がBK7、両
平面形状の光学レンズを被洗浄物とした場合であって、
保護膜を形成するために酢酸ビニル系接着剤の中に浸漬
する。この浸漬後に、5cm/秒の速度で引き上げてか
ら、大気中に80℃で24時間放置する。[Sixteenth Embodiment] In the sixteenth embodiment, a case where an optical lens having a diameter of 50 mm, a thickness of 5 mm, a material of BK7, and a two-plane shape is used as an object to be cleaned,
Immerse in a vinyl acetate adhesive to form a protective film. After this immersion, the substrate is pulled up at a speed of 5 cm / sec and then left in the atmosphere at 80 ° C. for 24 hours.
【0040】このようにして、レンズ表面に保護膜が完
全に付着した光学レンズを、50℃のNメチル2ピロリ
ドン85体積%の混合洗浄剤により、第7実施の形態と
同様に洗浄を行い、洗浄後に完全に被洗浄物を乾燥させ
た後に、保護膜付着と洗浄終了後の被洗浄物の重量変化
率を上記の式1で計算した。この結果、「1」を得たこ
とから、保護膜は100%洗浄できたことが確認でき
た。In this way, the optical lens with the protective film completely attached to the lens surface is washed with a mixed detergent of N-methyl-2-pyrrolidone 85% by volume at 50 ° C. in the same manner as in the seventh embodiment, After the object to be cleaned was completely dried after cleaning, the rate of change in weight of the object to be cleaned after adhesion of the protective film and the completion of cleaning was calculated by the above-mentioned formula 1. As a result, since "1" was obtained, it was confirmed that the protective film could be washed 100%.
【0041】以下は、比較のために行った比較例であっ
て、Nメチル2ピロリドンの代わりにイソプロピルアル
コールを使用する場合と、洗浄の条件を代えた場合を示
したものであり、洗浄結果は十分でないことが判明し
た。The following are comparative examples carried out for comparison, showing the case of using isopropyl alcohol instead of N-methyl-2-pyrrolidone and the case of changing the washing conditions. Turned out not enough.
【0042】[比較例1]比較例1は、直径が50m
m、厚さが5mm、材質がBK7、両平面形状の光学レ
ンズを、第1実施の形態と同様の方法で保護膜を塗布、
乾燥させる。この乾燥後に第1実施の形態と同様の方法
で、イソプロピルアルコールにより洗浄を行う。洗浄終
了後完全に被洗浄物を乾燥させる、接着剤付着前と洗浄
終了乾燥後の被洗浄物の重量変化率を式1で計算した結
果、「1.041」を得たことから、保護膜の洗浄は十
分でないことが判明した。[Comparative Example 1] In Comparative Example 1, the diameter is 50 m.
m, thickness 5 mm, material BK7, biplanar optical lens, coated with a protective film in the same manner as in the first embodiment,
dry. After this drying, washing with isopropyl alcohol is performed by the same method as in the first embodiment. "1.041" was obtained as a result of calculating the weight change rate of the object to be cleaned before the adhesion of the adhesive and after completion of the cleaning and drying by the equation 1 to completely dry the object to be cleaned after the cleaning. Was found to be inadequate.
【0043】[比較例2]比較例2は、直径が50m
m、厚さが5mm、材質がBK7、両平面形状の光学レ
ンズを、酢酸ビニル系接着剤の中に浸漬する。この浸漬
後に、5cm/秒の速度で引上げて、80℃で24時間
放置する。表面に接着剤が完全に付着したこのレンズを
50℃のNメチル2ピロリドンにより、28kHz、6
00Wの超音波で3分間第1槽目の洗浄のみを行う。こ
の超音波洗浄終了後完全に被洗浄物を乾燥させる。接着
剤付着前と洗浄終了乾燥の被洗浄物の重量変化率を式1
で計算した結果、「1.022」を得たことから、保護
膜(接着剤)の洗浄は超音波洗浄のみでは十分できない
ことが判明した。Comparative Example 2 In Comparative Example 2, the diameter is 50 m.
An optical lens having a thickness of 5 mm, a thickness of 5 mm, a material of BK7, and a biplanar shape is immersed in a vinyl acetate adhesive. After this immersion, the film is pulled up at a speed of 5 cm / sec and left at 80 ° C. for 24 hours. This lens with the adhesive completely adhered to the surface was treated with N-methyl-2-pyrrolidone at 50 ° C at 28 kHz, 6
Only the first tank is cleaned for 3 minutes with an ultrasonic wave of 00W. After completion of the ultrasonic cleaning, the object to be cleaned is completely dried. The rate of change in weight of the object to be washed before adhesion of the adhesive and after washing is calculated using Equation 1
As a result of the calculation in step 1, "1.022" was obtained, which proves that the ultrasonic cleaning alone cannot sufficiently clean the protective film (adhesive).
【0044】[比較例3]比較例3は、直径が50m
m、厚さが5mm、材質がBK7、両平面形状の光学レ
ンズを、酢酸ビニル系接着剤の中に浸漬する。この浸漬
後に、5cm/秒の速度で引上げ80℃で24時間放置
する。表面に接着剤が完全に付着したこのレンズを、N
メチル2ピロリドンのシャワー洗浄槽に投入し流量30
0リットル/時間、圧力5kg/cm2 、温度50℃で
3分間シャワー洗浄を行う。シャワー洗浄終了後、完全
に被洗浄物を乾燥させる。接着付着前と洗浄終了乾燥後
の被洗浄物の重量変化率を式1で計算した結果、「1.
036」を得たことから、保護膜(接着剤)の洗浄はシ
ャワー洗浄のみでは十分でないことが判明した。[Comparative Example 3] In Comparative Example 3, the diameter is 50 m.
An optical lens having a thickness of 5 mm, a thickness of 5 mm, a material of BK7, and a biplanar shape is immersed in a vinyl acetate adhesive. After this immersion, the film is pulled up at a speed of 5 cm / sec and left at 80 ° C. for 24 hours. This lens with the adhesive completely attached to the surface
Flow into the shower washing tank of methyl 2 pyrrolidone at a flow rate of 30
Shower cleaning is performed for 3 minutes at a pressure of 5 kg / cm @ 2 and a temperature of 50.degree. After the shower cleaning is completed, the object to be cleaned is completely dried. As a result of calculating the weight change rate of the object to be cleaned before adhesion and after completion of cleaning and drying by Equation 1, "1.
It was found that the shower cleaning alone is not sufficient for cleaning the protective film (adhesive).
【0045】[比較例4]比較例4では、直径が50m
m、厚さが5ミリ、材質がBK7、両平面形状の光学ガ
ラスを、上記の第7実施の形態と同様の条件で保護膜を
塗布、乾燥を行った後30℃のNメチル2ピロリドン8
5体積%と水15体積%の混合洗浄剤により、28kH
z、600W、0.1W/cm2の超音波により5分
間、第1の超音波洗浄終了後に、レンズを第2の槽4の
Nメチル2ピロリドン85体積%と水15体積%の混合
洗浄剤のシャワー洗浄槽に移し、流量300リットル/
時間、圧力5kg/cm2で5分間シャワー洗浄を行
う。このシャワー洗浄終了後、完全に被洗浄物を乾燥さ
せた後に、保護膜付着と洗浄終了後の被洗浄物の重量変
化率を式1で計算した結果、「1.028」を得たこと
から、保護膜の洗浄は十分でないことが確認された。[Comparative Example 4] In Comparative Example 4, the diameter is 50 m.
m, thickness 5 mm, material BK7, biplanar optical glass, a protective film was applied and dried under the same conditions as in the seventh embodiment, and then dried at 30 ° C. N-methyl-2pyrrolidone 8
28kH by mixed detergent of 5% by volume and 15% by volume of water
After completion of the first ultrasonic cleaning for 5 minutes with ultrasonic waves of z, 600 W and 0.1 W / cm 2, the lens was washed with a mixed cleaning agent containing 85% by volume of N-methyl-2pyrrolidone in the second tank 4 and 15% by volume of water. Transferred to the shower washing tank, flow rate 300 liters /
Shower cleaning is performed for 5 minutes at a pressure of 5 kg / cm2. After completion of this shower cleaning, after drying the object to be cleaned completely, the protective film adhesion and the weight change rate of the object to be cleaned after completion of the cleaning were calculated by the formula 1, and as a result, "1.028" was obtained. It was confirmed that the protective film was not sufficiently washed.
【0046】[比較例5]比較例5では、直径が50m
m、厚さが5mm、材質がBK7、両平面形状の光学カ
ラスを、上記の第7実施の形態と同様の条件で保護膜を
塗布、乾燥を行った後に、50℃のNメチル2ピロリド
ン85体積%と水15体積%の混合洗浄剤により、28
kHz、200W、0.03W/cm2の超音波により
5分間、第1の洗浄を行う。[Comparative Example 5] In Comparative Example 5, the diameter is 50 m.
m, thickness 5 mm, material BK7, biplanar optical crow, protective film was applied and dried under the same conditions as in the above-mentioned seventh embodiment, and then N-methyl-2pyrrolidone 85 at 50 ° C. 28% by volume of mixed detergent with 15% by volume of water
The first cleaning is performed for 5 minutes by ultrasonic waves of kHz, 200 W and 0.03 W / cm 2.
【0047】この超音波洗浄終了後に、レンズを第2の
槽4のNメチル2ピロリドン85体積%と水15体積%
の混合洗浄剤のシャワー洗浄槽に移し流量600リット
ル/時間、圧力5kg/cm2で5分間シャワー洗浄を
行う。このシャワー洗浄終了乾燥後の被洗浄物の重量変
化率を上記の式1で計算した。この結果、「1.03
0」を得たことから、保護膜の洗浄は十分でないことが
確認できた。After completion of this ultrasonic cleaning, the lens was put in the second tank 4 with 85% by volume of N-methyl-2-pyrrolidone and 15% by volume of water.
It is transferred to the shower cleaning tank of the mixed cleaning agent of (1) and shower washed for 5 minutes at a flow rate of 600 liters / hour and a pressure of 5 kg / cm 2. The rate of change in weight of the object to be cleaned after the completion of shower cleaning and drying was calculated by the above formula 1. As a result, "1.03
Since "0" was obtained, it was confirmed that the protective film was not sufficiently washed.
【0048】[比較例6]比較例6では、直径が50m
m、厚さが5mm、材質がBK7、両平面形状の光学ガ
ラスを、第7実施の形態と同様の条件で保護膜を塗布
し、乾燥を行った後に50℃のNメチル2ピロリドン8
5体積%と水15体積%の混合洗浄剤により、28kH
z、600W、0.1W/cm2の超音波により0.5
分間、第1の洗浄を行う。この超音波洗浄終了後にレン
ズを第2の槽4のNメチル2ピロリドン85体積%と水
5体積%の混合洗浄剤のシャワー洗浄槽に移し流量30
0リットル/時間、圧力5kg/cm2で5分間シャワ
ー洗浄を行う。このシャワー洗浄終了後、完全に被洗浄
物を乾燥させた後に、保護膜付着と洗浄終了乾燥後の被
洗浄物の重量変化率を式1で計算した結果、「1.03
2」を得たことから、保護膜の洗浄は十分でないことが
確認できた。[Comparative Example 6] In Comparative Example 6, the diameter is 50 m.
m, thickness 5 mm, material BK7, biplanar optical glass, coated with a protective film under the same conditions as in the seventh embodiment, dried, and then dried at 50 ° C. with N-methyl-2pyrrolidone 8
28kH by mixed detergent of 5% by volume and 15% by volume of water
0.5 with ultrasonic waves of z, 600W, 0.1W / cm2
Perform a first wash for minutes. After completion of this ultrasonic cleaning, the lens is transferred to the shower cleaning tank of the second tank 4 containing 85% by volume of N-methyl-2-pyrrolidone and 5% by volume of water, which is a mixed cleaning agent.
Shower cleaning is performed for 5 minutes at 0 liter / hour and a pressure of 5 kg / cm 2. After the completion of the shower cleaning, the object to be cleaned was completely dried, and then the weight change rate of the object to be cleaned after adhesion of the protective film and the completion of cleaning was calculated by the formula 1.
2 ”was obtained, it was confirmed that the protective film was not sufficiently washed.
【0049】[比較例7]比較例7では、直径が50m
m、厚さが5mm、材質がBK7、両平面形状の光学ガ
ラスを、上記の第7実施の形態と同様の条件で保護膜を
塗布、乾燥を行った後50℃のNメチル2ピロリドン8
5体積%と水15体積%の混合洗浄剤により200kH
z、600W、0.1W/cm2の超音波により5分
間、第1の洗浄を行う。この超音波洗浄終了後のレンズ
を、第2の槽4のNメチル2ピロリドン85体積%と水
15体積%の混合洗浄剤のシャワー洗浄を行う。このシ
ャワー洗浄終了後、完全に被洗浄物を乾燥させた後に、
保護膜付着と洗浄終了乾燥後の被洗浄物の重量変化率を
式1で計算した結果、「1.022」を得たことから、
保護膜の洗浄は十分でないことが確認できた。[Comparative Example 7] In Comparative Example 7, the diameter was 50 m.
m, thickness 5 mm, material BK7, biplanar optical glass, a protective film was applied and dried under the same conditions as in the seventh embodiment, and then dried at 50 ° C. N-methyl-2pyrrolidone 8
200kH by the mixed detergent of 5% by volume and 15% by volume of water
The first cleaning is performed by ultrasonic waves of z, 600 W and 0.1 W / cm 2 for 5 minutes. After the ultrasonic cleaning, the lens is subjected to shower cleaning with a mixed cleaning agent containing 85% by volume of N-methyl-2-pyrrolidone and 15% by volume of water in the second tank 4. After completing this shower cleaning, after completely drying the object to be cleaned,
As a result of calculating the weight change rate of the object to be cleaned after adhesion of the protective film and the completion of cleaning by the equation 1 to obtain “1.022”,
It was confirmed that the protective film was not sufficiently washed.
【0050】[比較例8]比較例8では、直径が50m
m、厚さが5mm、材質がBK7、両平面形状の光学ガ
ラスを、第7実施の形態と同様の条件で保護膜を塗布
し、乾燥を行った後に50℃のNメチル2ピロリドン8
5体積%と水15体積%の混合洗浄剤により、28kH
z、600W、0.1W/cm2の超音波により5分
間、第1の洗浄を行う。この超音波洗浄終了後に、レン
ズを第2の槽4のNメチル2ピロリドン85体積%と水
15体積%の混合洗浄剤のシャワー洗浄槽に移し、流量
100リットル/時間、圧力1.7kg/cm2で5分
間シャワー洗浄を行う。このシャワー洗浄終了後、完全
に被洗浄物を乾燥させた後に、保護膜付着と洗浄終了乾
燥後の被洗浄物の重量変化率を式1で計算した結果、
「1.024」を得たことから、保護膜の洗浄は十分で
ないことが確認できた。[Comparative Example 8] In Comparative Example 8, the diameter is 50 m.
m, thickness 5 mm, material BK7, biplanar optical glass, coated with a protective film under the same conditions as in the seventh embodiment, dried, and then dried at 50 ° C. with N-methyl-2pyrrolidone 8
28kH by mixed detergent of 5% by volume and 15% by volume of water
The first cleaning is performed by ultrasonic waves of z, 600 W and 0.1 W / cm 2 for 5 minutes. After completion of this ultrasonic cleaning, the lens was transferred to the shower cleaning tank of the second tank 4 containing 85% by volume of N-methyl-2-pyrrolidone and 15% by volume of water as a cleaning agent, and the flow rate was 100 liters / hour and the pressure was 1.7 kg / cm 2. Shower wash for 5 minutes. After completion of this shower cleaning, after the article to be cleaned is completely dried, the weight change rate of the article to be cleaned after the adhesion of the protective film and the completion of washing is calculated by the formula 1,
Since "1.024" was obtained, it was confirmed that the cleaning of the protective film was not sufficient.
【0051】[比較例9]比較例9では、直径が50m
m、厚さが5mm、材質がBK7、両平面形状の光学ガ
ラスを、第7実施の形態と同様の条件で保護膜を塗布、
乾燥を行った後に、50℃のNメチル2ピロリドン85
体積%と水15体積%の混合洗浄剤により、28kH
z、600W、0.1W/cm2の超音波により5分
間、第1の洗浄を行う。この超音波洗浄終了後に、レン
ズを第2の槽4のNメチル2ピロリドン85体積%と水
15体積%の混合洗浄剤のシャワー洗浄槽に移し流量3
00リットル/時間、圧力5kg/cm2で0.5分間
シャワー洗浄を行う。このシャワー洗浄終了後、完全に
被洗浄物を乾燥させた後に、保護膜付着と洗浄終了乾燥
後の被洗浄物の重量変化率を式1で計算した結果、
「1.021」を得たことから、保護膜の洗浄は十分で
ないことが確認できた。[Comparative Example 9] In Comparative Example 9, the diameter was 50 m.
m, thickness 5 mm, material BK7, biplanar optical glass, coated with a protective film under the same conditions as in the seventh embodiment,
After drying, N-methyl-2-pyrrolidone 85 at 50 ° C
28kH by mixed detergent of volume% and water 15 volume%
The first cleaning is performed by ultrasonic waves of z, 600 W and 0.1 W / cm 2 for 5 minutes. After completion of this ultrasonic cleaning, the lens was transferred to a shower cleaning tank of a mixed cleaning agent of 85% by volume of N-methyl-2-pyrrolidone and 15% by volume of water in the second tank 4 and the flow rate was 3
Shower cleaning is carried out for 0.5 minutes at a pressure of 5 kg / cm 2 at 00 liter / hour. After completion of this shower cleaning, after the article to be cleaned is completely dried, the weight change rate of the article to be cleaned after the adhesion of the protective film and the completion of washing is calculated by the formula 1,
Since "1.021" was obtained, it was confirmed that the cleaning of the protective film was not sufficient.
【0052】[比較例10]比較例10は、直径が50
mm、厚さが5mm、材質がBK7、両平面形状の光学
ガラスを、第7実施の形態と同様の条件で保護膜を塗
布、乾燥を行った後に、レンズ表面に完全に保護膜が付
着した光学レンズを、超音波浸漬洗浄槽1に投入し、5
0℃のNメチル2ピロリドン85体積%と水15体積%
の混合洗浄剤により28kHz、600W、0.1W/
cm2の超音波により5分間洗浄を行う。この洗浄終了
後、完全に被洗浄物を乾燥させた後に、保護膜付着と洗
浄終了乾燥後の被洗浄物の重量変化率を式1で計算した
結果、「1.025」を得たことから。保護膜の洗浄は
十分でないことが確認できた。[Comparative Example 10] Comparative Example 10 has a diameter of 50.
mm, thickness 5 mm, material BK7, biplanar optical glass, after applying a protective film and drying under the same conditions as in the seventh embodiment, the protective film was completely attached to the lens surface. Insert the optical lens into the ultrasonic immersion cleaning tank 1 and
85% by volume of N-methyl-2-pyrrolidone and 15% by volume of water at 0 ° C
28kHz, 600W, 0.1W /
Wash with ultrasonic waves of cm 2 for 5 minutes. After completion of this washing, after the article to be washed is completely dried, the weight change rate of the article to be washed after adhesion of the protective film and washing completion drying was calculated by the formula 1, and as a result, "1.025" was obtained. . It was confirmed that the protective film was not sufficiently washed.
【0053】[比較例11]比較例11は、直径が50
mm、厚さが5mm、材質がBK7、両平面形状の光学
ガラスを、第7実施の形態と同様の条件で保護膜を塗
布、乾燥を行った後に、レンズ表面に完全に保護膜が付
着した光学レンズを、槽4のNメチル2ピロリドン85
体積%と水15体積%の混合洗浄剤のシャワー洗浄槽に
投入し、流量300リットル/時間、圧力5kg/cm
2、温度50℃で5分間シャワー洗浄を行う。このシャ
ワー洗浄終了後、完全に被洗浄物を乾燥させた後に、保
護膜付着と洗浄終了乾燥後の被洗浄物の重量変化率を式
1で計算した結果、「1.034」を得たことから、保
護膜の洗浄は十分でないことが確認できた。[Comparative Example 11] Comparative Example 11 has a diameter of 50.
mm, thickness 5 mm, material BK7, biplanar optical glass, after applying a protective film and drying under the same conditions as in the seventh embodiment, the protective film was completely attached to the lens surface. The optical lens is the N methyl 2 pyrrolidone 85 in tank 4.
The mixture was poured into a shower cleaning tank of a mixed cleaning agent containing 15% by volume of water and 15% by volume of water, and the flow rate was 300 liters / hour and the pressure was 5 kg / cm.
2. Perform shower cleaning at a temperature of 50 ° C for 5 minutes. After completion of this shower washing, after the article to be washed is completely dried, the weight change rate of the article to be washed after adhesion of the protective film and washing and drying was calculated by the formula 1, and as a result, "1.034" was obtained. From this, it was confirmed that the protective film was not sufficiently washed.
【0054】したがって以上説明したように、精密光学
部品の洗浄において洗浄剤にNメチル2ピロリドンを使
用し、二槽における工程の洗浄法による洗浄で、第1槽
の浸漬槽では超音波では超音波洗浄浸漬し、また、続く
第2槽のシャワー槽ではシャワー洗浄を行うことによ
り、従来より、塩素系溶剤あるいは引火点の低い可燃性
溶剤でしか洗浄できなかった精密光学部品に付着してい
る樹脂汚れ等を、第三石油類であるNメチル2ピロリド
ンを使用しても除去できる。また、環境破壊物質である
塩素系溶剤の使用量の減少あるいは廃絶を行うことがで
き、地球環境に優しい洗浄方法を提供できる。Therefore, as described above, N-methyl-2-pyrrolidone is used as a cleaning agent in the cleaning of precision optical parts, and cleaning is performed by the cleaning method in the step of two tanks. Resin that adheres to precision optical parts that could only be cleaned with chlorine-based solvents or flammable solvents with a low flash point by washing and dipping and then performing shower cleaning in the second shower tank. Dirt and the like can also be removed by using N-methyl-2-pyrrolidone which is a third petroleum. In addition, it is possible to reduce or eliminate the use of chlorine-based solvent, which is an environmentally destructive substance, and to provide a global environment-friendly cleaning method.
【0055】また、洗浄対象:光学部品に付着した樹
脂、洗浄剤:水溶性剤に水を混入し、不燃性とした洗浄
剤、洗浄方法:超音波洗浄とシャワー洗浄を組み合わせ
た2槽洗浄する場合において、上記のような洗浄方法で
条件を最適化することにより、樹脂洗浄ができる。すな
わち、従来は塩素系洗浄剤あるいは引火点の低い(引火
性が高い)可燃性洗浄剤でのみ可能であった樹脂洗浄に
対し、引火点の高い(=引火性が低い)可燃性溶剤を用
いても洗浄可能であることを発見した。Further, cleaning target: resin attached to optical parts, cleaning agent: cleaning agent which is made non-combustible by mixing water with water-soluble agent, cleaning method: ultrasonic cleaning and shower cleaning combined in two tanks In this case, the resin can be washed by optimizing the conditions by the above washing method. That is, a flammable solvent with a high flash point (= low flammability) is used for resin cleaning, which was previously possible only with a chlorine-based cleaner or a flammable cleaner with a low flash point (high flammability). It was discovered that it can be washed even.
【0056】また、さらに不燃性洗浄剤でも可能である
ことを発見した。即ち、塩素系洗浄剤は、毒性高く、土
壌汚染があるので好ましくなく、また、一石(第一石油
類)、二石(第二石油類)洗浄剤は引火性が高いので好
ましくなく、また三石(第三石油類、常温下での引火点
が70℃以上200℃未満の引火性液体)以下の洗浄剤
は引火性は低いものの、可燃性であり装置面や操作面で
欠点を有しているが、上記の水溶性の溶剤に水を混合し
た混合状態の不燃性洗浄剤は引火がなくもっとも良い。
尚、水溶性の溶剤とは第三石油類に限定されず、第一石
油類や第二石油類が含まれる。Further, it has been discovered that a nonflammable detergent can be used. That is, chlorine-based detergents are not preferable because they are highly toxic and have soil pollution, and one-stone (first petroleum) and two-stone (second petroleum) detergents are not preferable because they are highly flammable. (Third petroleum, flammable liquid with a flash point of 70 ° C or more and less than 200 ° C at room temperature) The following cleaning agents have low flammability, but are flammable and have drawbacks in terms of equipment and operation. However, the non-flammable detergent in the mixed state in which water is mixed with the above water-soluble solvent is the best because it does not catch fire.
The water-soluble solvent is not limited to the third petroleum, and includes the first petroleum and the second petroleum.
【0057】また、準水系洗浄剤とは、洗浄分野での用
語で水系洗浄剤の中間的なものを指すものであり、脱脂
工程は洗浄剤を使用し、すすぎには水を使用し、乾燥に
は温風を使用するものを言う。このように水ですすぎを
行うけれど、成分は溶剤が主であるような洗浄剤であっ
て、上記各実施の形態ではすすぎ工程については記載し
ておりませんが、実際の生産工程では、洗浄工程の後に
適当なすすぎ工程が必要となることは言うまでもない。The term "quasi-water-based detergent" is a term in the field of cleaning, which is an intermediate of water-based detergents. The degreasing process uses a detergent, rinse is used with water, and drying is performed. Say something that uses warm air. Although it is rinsed with water like this, the cleaning agent is mainly composed of a solvent, and the rinsing process is not described in each of the above embodiments, but in the actual production process, the rinsing process is not described. It goes without saying that an appropriate rinsing step is required after the step.
【0058】一方、Nメチル2ピロリドンに水を混ぜ
て、不燃性にすれば準水系洗浄剤の範疇になる。また樹
脂洗浄が不燃性洗浄剤ですべてが洗浄可能かというと、
そうではなく実行可能なものはその一部に限定され、そ
の具体例としては実施の形態に記載したNメチル2ピロ
リドンと水を混合したもの、あるいは3メチル3メトシ
キブタノールなどのグリコールエーテル系溶剤を水と混
合したものなどが分かっている。On the other hand, if N-methyl-2-pyrrolidone is mixed with water to make it incombustible, it falls into the category of semi-aqueous detergent. In addition, whether resin cleaning can be done with a non-flammable cleaning agent,
However, what can be carried out is limited to a part thereof, and specific examples thereof include a mixture of N-methyl-2pyrrolidone and water described in the embodiment, or a glycol ether solvent such as 3-methyl-3-methoxybutanol. It is known that water is mixed with water.
【0059】以上説明した第1実施の形態〜第16実施
の形態の比較表を、図2の図表に示す。また、比較例1
〜11の比較表を図3の図表に示す。A comparison table of the first to sixteenth embodiments described above is shown in the table of FIG. Comparative Example 1
The comparison table of ~ 11 is shown in the chart of FIG.
【0060】[0060]
【発明の効果】以上説明したように、本発明によれば、
従来は塩素系溶剤あるいは引火点の低い可燃性溶剤でし
か洗浄できなかった部品に付着している樹脂汚れ等を、
引火点の高い第三石油類を使用して洗浄除去可能にし
て、環境破壊物質に認定された塩素系溶剤の使用量の減
少あるいは廃絶を行うことができる。As described above, according to the present invention,
Conventionally, resin stains etc. adhering to parts that could only be cleaned with chlorine-based solvents or flammable solvents with a low flash point,
It is possible to reduce the amount of chlorine-based solvents certified as environmentally destructive substances or to eliminate them by making it possible to wash and remove it by using tertiary oils with high flash points.
【0061】また、引火点の高い準水系洗浄剤を使用可
能にして設備を安価に構成でき、また作業の安全性を確
保できる効果がある。Further, there is an effect that the equipment can be constructed at a low cost by using a semi-aqueous detergent having a high flash point, and the safety of work can be secured.
【0062】[0062]
【図1】本発明の各実施の形態に共通な洗浄槽のモデル
図である。FIG. 1 is a model diagram of a cleaning tank common to each embodiment of the present invention.
【図2】第1実施の形態〜第16実施の形態の重量変化
率をまとめた図表である。FIG. 2 is a table summarizing the weight change rates of the first to sixteenth embodiments.
【図3】比較例1〜比較例11の重量変化率をまとめた
図表である。FIG. 3 is a table summarizing the weight change rates of Comparative Examples 1 to 11.
1 第1の槽 2 Nメチル2ピロリドン 3 超音波発振装置 4 第2の槽 5 シャワー 6 被洗浄物 7 保護膜 1 1st tank 2 N methyl 2 pyrrolidone 3 Ultrasonic oscillating device 4 2nd tank 5 Shower 6 Cleaning object 7 Protective film
───────────────────────────────────────────────────── フロントページの続き (72)発明者 保坂 明仁 東京都大田区下丸子3丁目30番2号 キヤ ノン株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akihito Hosaka 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc.
Claims (36)
は樹脂汚れを除去する部品洗浄方法において、 洗浄剤にNメチル2ピロリドンを用い、第1の槽の浸漬
槽において前記Nメチル2ピロリドンによる超音波洗浄
処理を第1条件で行い、 続く第2の槽のシャワー槽において前記Nメチル2ピロ
リドンを使用して第2条件でシャワー洗浄処理を行い、 前記保護膜層または樹脂汚れを除去することを特徴とす
る部品洗浄方法。1. A component cleaning method for removing an unnecessary protective film layer or resin stains attached to an object to be cleaned, wherein N-methyl-2pyrrolidone is used as a cleaning agent, and the N-methyl-2pyrrolidone is used in a dipping tank of a first tank. Ultrasonic cleaning treatment under the first condition, followed by shower cleaning treatment under the second condition using the N-methyl-2pyrrolidone in the shower tank of the second tank to remove the protective film layer or the resin stain. A method for cleaning parts, which is characterized in that
ゴム系の樹脂であることを特徴とする請求項1に記載の
部品洗浄方法。2. The component cleaning method according to claim 1, wherein the protective film layer is made of a water-resistant chloroprene rubber-based resin.
の樹脂であることを特徴とする請求項1に記載の部品洗
浄方法。3. The method of cleaning a component according to claim 1, wherein the protective film layer is made of a water resistant vinyl acetate resin.
ルコール系の樹脂であることを特徴とする請求項1に記
載の部品洗浄方法。4. The component cleaning method according to claim 1, wherein the protective film layer is made of a water-resistant polyvinyl alcohol-based resin.
間が1分間以上、前記Nメチル2ピロリドンの温度が2
0℃以上、超音波発生条件の振動数が20から100k
hz、出力が300w以上であり、 また前記第2条件は、シャワー洗浄時間が1分間以上、
シャワー洗浄流量が300リットル/時間以上、吹き出
し口圧力が1kg/cm2 以上であることを特徴とする
請求項1に記載の部品洗浄方法。5. The first condition is that the immersion time in the immersion tank is 1 minute or more, and the temperature of the N-methyl-2pyrrolidone is 2 or more.
The frequency of ultrasonic wave generation is 20 to 100k above 0 ℃
hz, the output is 300 w or more, and the second condition is that the shower cleaning time is 1 minute or more,
The parts cleaning method according to claim 1, wherein the shower cleaning flow rate is 300 liters / hour or more and the outlet pressure is 1 kg / cm 2 or more.
法を有するレンズ、ミラー、プリズム等の精密光学部品
であることを特徴とする請求項1に記載の部品洗浄方
法。6. The component cleaning method according to claim 1, wherein the object to be cleaned is a precision optical component such as a lens, a mirror or a prism having a predetermined outer shape and a predetermined dimension.
は樹脂汚れを除去する部品洗浄装置において洗浄剤にN
メチル2ピロリドンを用い、第1の槽の浸漬槽において
前記Nメチル2ピロリドンによる超音波洗浄処理を第1
条件で行い、 続く第2の槽のシャワー槽において前記Nメチル2ピロ
リドンを使用して第2条件でシャワー洗浄処理を行い、 前記保護膜層または樹脂汚れを除去することを特徴とす
る部品洗浄装置。7. The cleaning agent used in a component cleaning device for removing an unnecessary protective film layer or resin stain adhered to an object to be cleaned is N as a cleaning agent.
Methyl 2 pyrrolidone was used, and the ultrasonic cleaning treatment with the N methyl 2 pyrrolidone was performed first in the immersion tank of the first tank.
A cleaning device for parts, characterized in that the shower cleaning process is performed under the following conditions, and a shower cleaning process is performed under the second condition using the N-methyl-2pyrrolidone in the shower chamber of the second subsequent chamber to remove the protective film layer or the resin stain. .
ゴム系の樹脂であることを特徴とする請求項7に記載の
部品洗浄装置。8. The component cleaning apparatus according to claim 7, wherein the protective film layer is made of a water-resistant chloroprene rubber resin.
の樹脂であることを特徴とする請求項7に記載の部品洗
浄装置。9. The component cleaning apparatus according to claim 7, wherein the protective film layer is made of water resistant vinyl acetate resin.
アルコール系の樹脂であることを特徴とする請求項7に
記載の部品洗浄装置。10. The component cleaning apparatus according to claim 7, wherein the protective film layer is made of a water-resistant polyvinyl alcohol-based resin.
時間が1分間以上、前記Nメチル2ピロリドンの温度が
20℃以上、超音波発生条件の振動数が20から100
khz以上、出力が300w以上であり、 また前記第2条件は、シャワー洗浄時間が1分間以上、
シャワー洗浄流量が300リットル/時間以上、吹き出
し口圧力が1kg/cm2 以上であることを特徴とする
請求項7に記載の部品洗浄装置。11. The first condition is that the immersion time in the immersion tank is 1 minute or more, the temperature of the N-methyl-2pyrrolidone is 20 ° C. or more, and the frequency of ultrasonic wave generation is 20 to 100.
khz or more, output is 300 w or more, and the second condition is that the shower cleaning time is 1 minute or more,
The parts cleaning apparatus according to claim 7, wherein the shower cleaning flow rate is 300 liters / hour or more and the outlet pressure is 1 kg / cm 2 or more.
寸法を有するレンズ、ミラー、プリズム等の精密光学部
品であることを特徴とする請求項7に記載の部品洗浄装
置。12. The component cleaning apparatus according to claim 7, wherein the object to be cleaned is a precision optical component such as a lens, a mirror, a prism having a predetermined outer shape and a predetermined dimension.
たは樹脂汚れが除去される部品において洗浄剤にNメチ
ル2ピロリドンを用い、第1の槽の浸漬槽において前記
Nメチル2ピロリドンによる超音波洗浄処理を第1条件
で行い、 続く第2の槽のシャワー槽において前記Nメチル2ピロ
リドンを使用して第2条件でシャワー洗浄処理を行い、 前記保護膜層または樹脂汚れを除去することを特徴とす
る部品。13. N-methyl-2pyrrolidone is used as a cleaning agent in a part from which an unnecessary protective film layer or resin stain attached to an object to be cleaned is removed, and the N-methyl-2pyrrolidone is used as a cleaning agent in the first tank dipping tank. A sonic cleaning process is performed under the first condition, and then a shower cleaning process is performed under the second condition using the N-methyl-2pyrrolidone in the second shower chamber to remove the protective film layer or the resin stain. Characteristic parts.
ンゴム系の樹脂であることを特徴とする請求項13に記
載の部品。14. The component according to claim 13, wherein the protective film layer is made of a water-resistant chloroprene rubber-based resin.
系の樹脂であることを特徴とする請求項13に記載の部
品。15. The component according to claim 13, wherein the protective film layer is made of a water resistant vinyl acetate resin.
により所定濃度に希釈したポリビニルアルコール系の樹
脂であることを特徴とする請求項13に記載の部品。16. The component according to claim 13, wherein the protective film layer is a polyvinyl alcohol resin diluted to a predetermined concentration with water-resistant ethyl acetate.
時間が1分間以上、前記Nメチル2ピロリドンの温度が
20℃以上、超音波発生条件の振動数が20から100
khz、出力が300w以上であり、 また前記第2条件は、シャワー洗浄時間が2分間以上、
シャワー洗浄流量が300リットル/時間以上、吹き出
し口圧力が1kg/cm2 以上であることを特徴とする
請求項13に記載の部品。17. The first condition is that the immersion time in the immersion tank is 1 minute or more, the temperature of the N-methyl-2pyrrolidone is 20 ° C. or more, and the frequency of ultrasonic wave generation is 20 to 100.
khz, output is 300 w or more, and the second condition is that the shower cleaning time is 2 minutes or more,
14. The component according to claim 13, wherein the shower washing flow rate is 300 liters / hour or more and the outlet pressure is 1 kg / cm @ 2 or more.
寸法を有するレンズ、ミラー、プリズム等の精密光学部
品であることを特徴とする請求項13に記載の部品。18. The component according to claim 13, wherein the object to be cleaned is a precision optical component such as a lens, a mirror or a prism having a predetermined outer shape and a predetermined dimension.
は樹脂汚れを除去する部品洗浄方法において、洗浄剤に
不燃性洗浄剤を用い、第1の浸漬槽において前記不燃性
洗浄剤による超音波洗浄処理を第1条件で行い、 続く第2の槽のシャワー槽において前記不燃性洗浄剤を
使用して第2条件でシャワー洗浄処理を行い、前記保護
層または樹脂汚れを除去することを特徴とする部品洗浄
方法。19. A component cleaning method for removing an unnecessary protective layer or resin stain attached to an object to be cleaned, wherein a nonflammable cleaning agent is used as a cleaning agent, and ultrasonic waves generated by the nonflammable cleaning agent are used in the first immersion tank. The cleaning treatment is performed under the first condition, and then the shower cleaning treatment is performed under the second condition in the shower tank of the second tank using the nonflammable cleaning agent to remove the protective layer or the resin stain. How to clean parts.
溶剤に水を混合し、混合液の性質を不燃性とした洗浄剤
であることを特徴とする請求項19に記載の部品洗浄方
法。20. The part cleaning according to claim 19, wherein the non-flammable cleaning agent is a cleaning agent in which water is mixed with a water-soluble combustible solvent to make the property of the mixed solution non-combustible. Method.
系の樹脂であることを特徴とする請求項19に記載の部
品洗浄方法。21. The component cleaning method according to claim 19, wherein the protective layer is a water-resistant chloroprene-based resin.
の樹脂であることを特徴とする請求項19に記載の部品
洗浄方法。22. The component cleaning method according to claim 19, wherein the protective layer is a water-resistant vinyl acetate resin.
コール系の樹脂であることを特徴とする請求項19に記
載の部品洗浄方法。23. The component cleaning method according to claim 19, wherein the protective layer is made of a water-resistant polynyl alcohol resin.
法を有するレンズ、ミラー、プリズム等の光学部品であ
ることを特徴とする請求項19に記載の部品洗浄方法。24. The component cleaning method according to claim 19, wherein the object to be cleaned is an optical component having a predetermined outer shape and a predetermined dimension, such as a lens, a mirror or a prism.
は樹脂汚れを除去する部品洗浄装置において、洗浄剤に
不燃性洗浄剤を用い、第1の浸漬槽において前記不燃性
洗浄剤による超音波洗浄処理を第1条件で行い、 続く第2の槽のシャワー槽において前記不燃性洗浄剤を
使用して第2条件でシャワー洗浄処理を行い、前記保護
マーク層または樹脂汚れを除去することを特徴とする部
品洗浄装置。25. In a component cleaning apparatus for removing unnecessary protective layers or resin stains adhered to an object to be cleaned, a nonflammable cleaning agent is used as the cleaning agent, and ultrasonic waves generated by the nonflammable cleaning agent are used in the first immersion tank. The cleaning treatment is performed under the first condition, and then the shower cleaning treatment is performed under the second condition in the shower tank of the second tank using the nonflammable cleaning agent to remove the protective mark layer or the resin stain. Parts cleaning equipment.
溶剤に水を混合し、混合液のの性質を不燃性とした洗浄
剤であることを特徴とする請求項25に記載の部品洗浄
装置。26. The component according to claim 25, wherein the nonflammable cleaning agent is a cleaning agent in which water is mixed with a water-soluble combustible solvent to make the property of the mixed solution nonflammable. Cleaning device.
ン系の樹脂であることを特徴とする請求項25に記載の
部品洗浄装置。27. The component cleaning apparatus according to claim 25, wherein the protective film layer is made of a water-resistant chloroprene-based resin.
系の樹脂であることを特徴とする請求項25に記載の部
品洗浄装置。28. The component cleaning apparatus according to claim 25, wherein the protective film layer is made of water resistant vinyl acetate resin.
ルコール系の樹脂であることを特徴とする請求項25に
記載の部品洗浄装置。29. The component cleaning apparatus according to claim 25, wherein the protective layer is a water-resistant polyvinyl alcohol-based resin.
法を有するレンズ、ミラー、プリズム等の光学部品であ
ることを特徴とする請求項25に記載の部品洗浄装置。30. The component cleaning apparatus according to claim 25, wherein the object to be cleaned is an optical component such as a lens, a mirror, a prism having a predetermined outer shape and a predetermined dimension.
は樹脂汚れを除去される部品において、洗浄剤に不燃性
洗浄剤を用い、第1の浸漬槽において前記不燃性洗浄剤
による超音波処理を第1条件で行い、 続く第2の槽のシャワー槽においては前記不燃性洗浄剤
を使用して第2条件でシャワー洗浄処理を行い、前記保
護層または樹脂汚れを除去することを特徴とする部品。31. In a component from which an unnecessary protective layer or resin stain attached to an object to be cleaned is removed, a nonflammable cleaning agent is used as a cleaning agent, and ultrasonic treatment is performed by the nonflammable cleaning agent in the first immersion tank. Is carried out under the first condition, and in the subsequent shower tank of the second tank, the shower cleaning treatment is carried out under the second condition using the nonflammable cleaning agent to remove the protective layer or the resin stain. parts.
溶剤に水を混合し、混合液の性質を不燃性とした洗浄剤
であることを特徴とする請求項31に記載の部品。32. The component according to claim 31, wherein the non-combustible cleaning agent is a cleaning agent in which water is mixed with a water-soluble combustible solvent to make the mixed solution non-combustible.
系の樹脂であることを特徴とする請求項31に記載の部
品。33. The component according to claim 31, wherein the protective layer is a water-resistant chloroprene-based resin.
の樹脂であることを特徴とする請求項31に記載の部
品。34. The component according to claim 31, wherein the protective layer is a water resistant vinyl acetate resin.
ルコール系の樹脂であることを特徴とする請求項31に
記載の部品。35. The component according to claim 31, wherein the protective layer is a water-resistant polyvinyl alcohol-based resin.
有するレンズ、ミラー、プリズム等の光学用品であるこ
とを特徴とする請求項31に記載の部品。36. The component according to claim 31, wherein the article to be cleaned is an optical article such as a lens, a mirror or a prism having a predetermined outer shape and dimensions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19523695A JPH08103738A (en) | 1994-08-12 | 1995-07-31 | Parts cleaning method and its device and parts |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6-190266 | 1994-08-12 | ||
| JP19026694 | 1994-08-12 | ||
| JP19523695A JPH08103738A (en) | 1994-08-12 | 1995-07-31 | Parts cleaning method and its device and parts |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08103738A true JPH08103738A (en) | 1996-04-23 |
Family
ID=26505973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19523695A Withdrawn JPH08103738A (en) | 1994-08-12 | 1995-07-31 | Parts cleaning method and its device and parts |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08103738A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002046483A3 (en) * | 2000-12-06 | 2003-03-06 | Univ Northwestern | Silver stain removal from dna detection chips by cyanide etching or sonication |
| JP2015229128A (en) * | 2014-06-03 | 2015-12-21 | 伊藤光学工業株式会社 | Processing method of article |
-
1995
- 1995-07-31 JP JP19523695A patent/JPH08103738A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002046483A3 (en) * | 2000-12-06 | 2003-03-06 | Univ Northwestern | Silver stain removal from dna detection chips by cyanide etching or sonication |
| US6726847B2 (en) | 2000-12-06 | 2004-04-27 | Northwestern University | Silver stain removal by chemical etching and sonication |
| JP2015229128A (en) * | 2014-06-03 | 2015-12-21 | 伊藤光学工業株式会社 | Processing method of article |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20021001 |