JPH08205060A - Light controller - Google Patents

Abstract

PURPOSE: To provide a light controller in which a projected image is much more made bright. CONSTITUTION: An actuator 40a is formed by applying etching processing to an actuator board 40 being one metallic board and providing a through-parts 40d, 40e. Furthermore, hinges 40f, 40g are located by the through-part 40e and easily bent. The board 40 is inserted between two glass plates having transparent electrodes corresponding to pixels via a spacer 41. The actuator 40a is displaced by keeping a prescribed potential to the board 40 and generating an electric field with equal absolute value but different sign to the two transparent electrodes. Thus, the reflected light of the actuator 40 is controlled. Since the hinge parts 40f, 40g are specified for the actuator 40a and driven in a push- pull way, the actuator 40a is displaced linearly.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light control device used in a video projection device.

[0002]

2. Description of the Related Art Conventionally, image projection apparatuses of various types have been commercialized. Examples of the method include a cathode ray tube projection method in which a screen of a cathode ray tube is enlarged and projected on a screen through a lens, or a method in which light from a light source is controlled by a liquid crystal device and is projected on the screen through a lens.

[0003]

Among these, the cathode ray tube projection system has problems that the brightness of the projected image is insufficient and the apparatus becomes large.

Further, in the method using the liquid crystal device, the characteristics of the liquid crystal are affected by the temperature, so that the heat generated from the light source is affected, and the increase in the light amount of the light source is limited. Therefore, this method also has a problem that the brightness of the projected image is insufficient.

By the way, in the above-mentioned video projection apparatus, it is naturally required to enlarge the projected image. This means that the projected image must be brighter. However, it has been difficult to make the projected image brighter with the projection method as described above.

In order to solve this problem, a method has been proposed in which a light control element in which a microactuator and a mirror surface body are combined is used, and light from a light source is reflected on the light control element to perform projection. FIG. 19 shows an example of the structure of one pixel of a digital micromirror device which is an example of a light control element using this microactuator. 19A shows this structure from above, and FIG. 19B shows
It is the figure seen from the side surface.

Reference numeral 201 is a movable mirror. 202a and 202b are torsion support springs. The torsion support springs 202a and 202b are formed integrally with the movable mirror 201. 203a and 203b are support columns. 204a and 204b are drive electrodes.
These drive electrodes 204a and 204b have an SRAM structure. Further, 205a and 205b are stoppers. The movable mirror 201 has a torsion support spring 20.
2a and 202b through the support columns 203a and 20
It is supported by 3b. Such a structure is integrally formed by a semiconductor process.

A voltage having a constant potential, for example, (-20V) is applied to the movable mirror 201. At this time,
For example, voltages having the same absolute value and different signs are applied to the drive electrodes 204a and 204b. This is applied, for example, to the drive electrode 204a (+ 5V) and to the drive electrode 204b (-5V). As a result, the movable mirror 2
01 and the drive electrodes 204a and 204b generate electric fields. This electric field causes the movable mirror 20
In this example, 1 attracts each other on the drive electrode 204a side and repels each other on the drive electrode 204b side. As a result, the torsion support springs 202a and 202b are twisted, and the movable mirror 201 can be tilted about the line connecting the support columns 203a and 203b. FIG. 19C is a diagram showing this state. The allowable range of the tilt angle is, for example, about ± 10 °.

The microactuator having such a structure is used as one pixel, and a large number of the microactuators are arranged to form a light control element. FIG. 20 shows an example of a video projection device using this light control element. In the figure, 213 is this light control element.
The light from the light source 210 enters the light control element 213 via the lens 211 and the color filter 212. The color filter 212 is controlled by a motor (not shown), and the light passing through the filter is frame-sequentially colored. This light that has entered the light control element 213 is controlled and reflected by the movable mirror 201 of the light control element 213 and is projected onto the screen 215 via the projection lens 214.

By the way, the light control element is formed as an integral structure by the semiconductor process as described above, which causes various problems.

First, there is a problem that the yield of the device is poor and the cost is disadvantageous.

Further, since all the constituent elements are integrally structured, there are many structural restrictions and there is a problem that the displacement of the movable mirror cannot be made large.

Further, since it is integrally manufactured by a semiconductor process, usable materials are limited. Therefore, there is a problem that the torsion support spring has a limit in mechanical durability and cannot be used for a long period of time.

Therefore, an object of the present invention is to provide a light control device capable of making a projected image brighter.

Another object of the present invention is to provide an inexpensive light control device for brighter projected images.

[0016]

In order to solve the above-mentioned problems, the present invention connects an actuator corresponding to a pixel, a base portion which is a frame plate separated by an actuator and a through slit, and the actuator and the base portion. An actuator member formed by processing a thin plate having conductivity with the actuator, the support portion, and the base portion continuously, and on at least one side facing the actuator, An optical control device comprising: an actuator driving unit that displaces an actuator according to an electric field corresponding to a video signal.

In order to solve the above problems, the present invention is an optical control device characterized in that a driving member is provided on both sides of the actuator surface and the actuator is displaced by push-pull.

Further, in order to solve the above-mentioned problems, the present invention provides that the actuator comprises first and second supporting portions, and the first and second supporting portions are positioned relative to the midpoint position of the actuator surface. In the light control device, a drive unit is provided corresponding to each portion of the actuator, which is provided at positions symmetrical with respect to each other and is divided by a line connecting the first and second support units. is there.

In order to solve the above-mentioned problems, the present invention is an optical control device characterized in that the thickness of the supporting portion is smaller than the thickness of the actuator.

[0020]

According to the above structure, in the present invention, since the movable mirror which is the actuator and the drive electrode for driving the movable mirror can be separately formed, the yield can be increased.

Further, since the material of the movable mirror which is the actuator is relatively free to be selected, the mechanical durability of the element can be improved.

Further, since the thickness of the movable portion is smaller than that of the other portions, the displacement of the actuator can be increased.

[0023]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows the overall configuration of a video projector 1 according to the present invention. This configuration is an application of Schlieren optics. 2 is a light source, 3 is a first lattice-like slit plate, 4 is a lens, 6 is a lens, 7 is a second lattice-like slit plate, 8 is a projection lens, and 9 is a screen.

The light emitted from the light source 2 passes through the first lattice slit plate 3 and the lens 4 and is reflected by the half mirror 5 to reach the light control element 10. This light is reflected by the light control element 10, passes through the half mirror 5 and the lens 6, and further passes through the second lattice slit plate 7 and the projection lens 8
Is projected onto the screen 9.

At this time, the first grid-like slit plate 4 described above is used.
And the positional relationship between the second lattice slit plate 7 is adjusted so that the light passing through the first lattice slit plate 3 is blocked by the second lattice slit plate 7 when the light control element 10 is a plane.

In such a structure, when the light control element 10 is a flat surface, no light is projected on the screen 9. on the other hand,
When a part of the light control element 10 deviates from the plane, that is, when the angle of the light with respect to the incident direction changes from 90 °, the light hitting that part can pass through the second lattice-shaped slits, and that part of the light is changed. The dots are projected on the screen 9.

The light control elements 10 are, for example, 1920 in the horizontal direction (row direction) and 1 in the vertical direction (column direction).
It is composed of 035 pixels, that is, 1987200 pixels in total, and an image can be projected on the screen 8 by controlling the light control element 10 according to an image signal.

FIG. 2 is an enlarged view of a region for one pixel in the cross section of the light control element 10 in the row direction. 20 and 30
Is a glass substrate having an electrode made of a transparent material and a circuit for driving the electrode on one surface thereof. Four
Reference numeral 0 is an actuator plate made of a conductive metal plate having a thickness of several μm. Reference numeral 41 is a spacer attached to the actuator plate 40. This spacer 41 is
It is an insulator and is attached to both sides of the actuator plate 40.

The glass substrates 20 and 30 are such that the surfaces on which the electrodes are formed face each other and the glass substrates 20 and 30 are
The electrodes formed on and 30 are arranged correspondingly. The actuator plate 40 is sandwiched between these glass substrates 20 and 30 via a spacer 41. As an example of the size of this pixel, the glass substrate 2
The distance between 0 and 30 is about 10 to several tens of μm,
The length of one pixel in the row direction is about several tens of μm.

FIG. 3 shows an enlarged view of a region for several pixels when the glass substrate 20 is viewed from the A direction. In this example, the electrodes provided on the glass substrate 20 are composed of thin film transistors (TFTs). In FIG. 3, reference numeral 21 is a pixel electrode made of a transparent conductive material such as ITO, and 22 is a switching thin film transistor for driving the pixel electrode 21. A selection line 23 for selecting a row of each pixel is arranged between the rows of the pixel electrode 21 and the pixel electrode 2
A signal line 24 for supplying an image signal is arranged between the respective columns of 1.

In the thin film transistor 22, a gate electrode 25G integrally extending from the selection line 23 is formed on the gate portion of the semiconductor thin film made of a polycrystalline silicon film or an amorphous silicon film, for example, via a gate insulating film made of SiO ₂ or the like. This gate electrode 25G is formed, that is, both regions sandwiching the channel region under the electrode are configured as a source 25S and a drain 25D, and the source 25S is the signal line 2
4 and the drain 25D is connected to the pixel electrode 21. Reference numeral 26 is a pixel contact region to which the drain 25D and the pixel electrode 21 are connected, and 27 is a source contact region. Further, 28 is a storage capacitance forming region, and a capacitor is formed in this portion (hereinafter, this storage capacitance forming region 28 is referred to as a capacitor 28). Reference numeral 29 is an electrode wiring for the capacitor 28.

Further, FIG. 4 shows an enlarged view of several pixels when the glass substrate 30 is viewed from the B direction. Like the glass substrate 20, the electrodes provided on the glass substrate 30 are also composed of thin film transistors. Further, as can be seen from the drawing, the structure of the electrodes of the glass substrate 20 described above is turned upside down. This is because when the glass substrates 20 and 30 are arranged so as to face each other, the same portions correspond to each other.

In FIG. 4, reference numeral 31 is a transparent pixel electrode which constitutes a pixel, and 32 is a thin film transistor. Also, 3
3 is a selection line, 34 is a signal line, 35S is a source, 35D is a drain, and 35G is a gate. Further, 36 is a pixel contact region, 37 is a source contact region, 38 is a storage capacitor forming region (hereinafter referred to as capacitor 38), 39
Is an electrode wiring for the capacitor 38.

FIG. 5 shows an enlarged view of a region of several pixels of the actuator plate 40. 40a is an actuator. Further, 40b is a column-direction frame, 40c is a row-direction frame, 40d and 40e are penetrating portions, 40f.
And 40g are hinge parts. Each part of the actuator plate 40 is made of a conductive metal plate as described above, but it is preferable to use a material having a coefficient of thermal expansion close to that of the glass material used for the glass substrates 20 and 30. In this example, a thin stainless plate is used for this material. Further, the penetrating portions 40d and 40e are formed by etching one metal plate,
As a result, the entire actuator plate 40 has an integrated structure.

As mentioned above, the spacer 41 is attached to the actuator plate 40. At this time, the shape of the spacer 41 is such that the actuator 40a
Actuator 40a so as not to hinder the movement of the
It is in the form of a mesh that exposes. This spacer 41
Is formed by laminating an insulator such as SiO ₂ on the actuator plate 40 and etching the same. The spacer 41 may be formed on the electrode structure of the glass substrates 20 and 30 described above.

FIG. 6 shows an equivalent circuit of the light control element 10 including the electrodes formed on the glass substrates 20 and 30 and the actuator plate 40 according to the first embodiment. Corresponding selection lines 23 and 33 in the row direction on the glass substrates 20 and 30 are connected and connected to the vertical scanning circuit 52. Further, each signal line 24 in the column direction on the glass substrate 20 is connected to the video signal sample hold circuit 50. On the other hand, each signal line 34 in the column direction on the glass substrate 30 is connected to the video signal sample hold circuit 51.

The drain of the thin film transistor 22 is connected to the capacitor 28 and the pixel electrode 21. Similarly, the drain of the thin film transistor 32 is
It is connected to the capacitor 38 and the pixel electrode 31.

In the configuration as described above, the selection line 23
A state in which 33 and 33 are turned on by the vertical scanning circuit 50 will be described. A voltage is applied to the gate 25G of the thin film transistor 22 by the selection line 23. As a result, the source 25S and the drain 25D become conductive, and the capacitor 28 is charged according to the voltage supplied from the sample hold circuit 51 via the signal line 24,
Electric charges are generated in the pixel electrode 21. For example, if the voltage applied to the signal line 24 is (+ 5V), a corresponding (+) charge is generated in the pixel electrode 21.

At the same time, the signal line 3 of the glass substrate 30
A voltage having the same absolute value and the opposite sign to that of the voltage applied to the signal line 24 by the sample hold circuit 52, that is, (-5 V) is applied to the signal No. 4. At this time, the thin film transistor 32 is also in the conductive state by the voltage supplied from the selection line 33, like the above-described thin film transistor 22. Therefore, the capacitor 38 is charged with (−5V), and the pixel electrode 31 generates (−) charge corresponding to the (−5V).

The actuator plate 40 is connected to the DC power source 53 and is applied with a constant voltage such as (-20 V). As a result, as shown in FIG. 7, the actuator 40a charged with the (−) charge is
While being attracted to the pixel electrode 21 charged with (+) electric charges, it repels the pixel electrode 31 and bends upward in this figure.

That is, the actuator 40a is
The pixel electrodes 21 and 31 are driven by push-pull. The charges of the pixel electrode 21 and the pixel electrode 31 are charged in the capacitor 28 and the capacitor 38, respectively. Therefore, the actuator 40a
Maintains its displacement until the next signal is applied.

The surface of the actuator 40a is a mirror surface or a state close to a mirror surface. Therefore, the angle of the reflected light can be changed by controlling the displacement of the actuator 40a. Further, at this time, in the actuator plate 40, since the penetrating portion 40e is provided, the hinge portions 40f and 40g are specified, and it is easy to bend at this portion. Therefore, the hinge portions 40f and 40g are deformed intensively,
Furthermore, since the actuator 40a is driven by push-pull as described above, the actuator 40a, which is a portion facing the pixel electrode, is displaced in a plane.

When the actuator plate 40 is processed, only the hinge portions 40f and 40g are made thinner than other portions by, for example, partially etching in the thickness direction. The effect of the deformation in 40g can be further enhanced, and the actuator 40a can be displaced more planarly.

According to the present invention, the change in the light reflection direction due to the displacement of the actuator 40a is projected on the screen as the change in the luminance of the pixel. Therefore, when the actuator 40a is displaced as described above, the plane of the actuator 40a itself is maintained, so that the incident light and the reflected light with respect to the light control element 10 are changed as compared with the case where the actuator 40a is displaced and curved. The relationship becomes more linear, the brightness can be easily controlled, and the actuator 40a can be effectively used.

Further, since the light control element 10 is for reflecting light as described above, the electrode formed on the glass substrate on the side where light does not enter does not necessarily need to be transparent. . However, in the actual manufacturing process, it is considered advantageous that the front and back have the same structure. Also, by using a transparent structure on both the front and back sides, it is possible to use from both sides.

As a modification of the first embodiment, it is possible to arrange the pixel electrode and the thin film transistor only on one side of the actuator 40a. in this case,
Although it is advantageous in terms of cost, the planarity when the actuator 40a is displaced is impaired, and thus it is inferior to the method of arranging on both sides in terms of brightness control, reflection efficiency, and the like.

Next, a second embodiment of the present invention will be described with reference to the drawings. In the above-described first embodiment, the hinge portion of the actuator plate is formed on one side of the actuator, but in this example, the support portion is provided on the center line of the actuator which is line-symmetric. .

FIG. 8 is an enlarged view showing a region for one pixel in the cross section in the row direction of the light control element according to the second embodiment.
Reference numeral 70 denotes a glass substrate having an electrode formed of a transparent material and a circuit for driving the electrode on one surface thereof. The glass substrate 70 has a pixel electrode 71 and a pixel electrode 73 which are transparent to the left and right in this figure with respect to the center line thereof.
Is arranged. These pixel electrodes 71 and 73 do not exist independently of each other, but by combining two pixel electrodes, they function as one pixel.

Reference numeral 80 denotes a transparent glass plate, which is provided mainly for the purpose of protecting the element. Therefore, the glass plate 80 is not essential in principle, and no electrodes or the like are formed. Reference numeral 60 is an actuator plate. Also, 6
Reference numeral 1 is a spacer attached to the actuator plate 60. The spacer 61 is an insulator and is attached to both surfaces of the actuator plate 60. The actuator plate 60 is sandwiched between the glass plate 80 and the glass substrate 70 via the spacer 61.

FIG. 9 shows an enlarged view of a region of several pixels of the glass substrate 70. Also in the second embodiment, the electrodes provided on the glass substrate 70 are composed of thin film transistors, as in the first embodiment. In FIG. 9, 71 and 73 are pixel electrodes made of a transparent conductive material such as ITO. Reference numeral 72 is a switching thin film transistor for driving the pixel electrode 71. Similarly, 74 is a switching thin film transistor for driving the pixel electrode 73.

Select lines 75 and 76 for selecting the row of each pixel are arranged between the rows of the pixel electrodes 71 and 73. The same signal is always supplied to these select lines 75 and 76. Further, signal lines 77 and 78 for supplying an image signal are arranged between the respective columns of the pixel electrodes 71 and 73. Of these, the signal line 77 is for supplying a signal to the thin film transistor 72 and the pixel electrode 71. On the other hand, the signal line 78 is connected to the thin film transistor 74.
And for supplying a signal to the pixel electrode 73. Signals having the same absolute value and different signs are simultaneously supplied to these signal lines 77 and 78.

Since the structure of the thin film transistors 72 and 74 themselves is the same as that of the thin film transistors 22 and 32 in the above-described first embodiment, detailed description thereof will be omitted to avoid complexity.

FIG. 10 shows an enlarged view of a region for several pixels of the actuator plate in this example. 60a
Is an actuator. Further, 60b is a column direction frame, 60c is a row direction frame, 60d and 60e are penetrating portions, and 60f and 60g are supporting portions. These supporting portions 60f and 60g are arranged on the center line of the actuator 60a which is line symmetrical. Further, the penetrating portions 60d and 60e are formed by etching a single metal plate, so that the entire actuator plate 60 has an integral structure. This actuator plate 60
The material of is the same as that of the first embodiment described above. A spacer 61 is attached to the actuator plate 60 as in the first embodiment.

With such a configuration, the thin film transistor 72
When signals 74 and 74 are turned on by the signals from the selection lines 75 and 76, signals having the same absolute value and different signs are supplied from the signal lines 77 and 78, respectively. Then 1
In the two pixel electrodes 71 and 73 forming the pixel, electric charges are generated by signals having the same absolute value and different signs corresponding to the signals supplied from the signal lines 77 and 78. For example, when the (+) charge is generated in the pixel electrode 71, the (-) charge is generated in the pixel electrode 73.

At this time, it is assumed that a constant DC voltage such as (-20 V) is applied to the actuator plate 60. Then, the actuator 60a
11, the pixel electrode 71 side attracts each other, and the pixel electrode 73 side repels each other.
It is displaced with 0f and 60g as fulcrums. This allows
Also in this second embodiment, the light reflection angle can be changed.

In the second embodiment, the pixel electrodes and the like are arranged on only one side of the actuator plate 60, which is advantageous in terms of cost and in terms of aperture ratio.
In addition, the movable range of the actuator 60a can be set wider than that of the first embodiment, and the dynamic range of luminance can be increased.

As a modification of the second embodiment, a method in which two pixel electrodes in the row direction are paired to form one pixel can be considered. The actuator plate in this case is shown in FIG. 12A.
FIG. 12B shows the structure of the glass substrate on which electrodes and the like are formed.
Shown in In FIG. 12B, 90 and 91 are signal lines. By simultaneously supplying signals having the same absolute value and different signs to the signal lines 90 and 91, the angle of the actuator can be displaced in the row direction.

As another modification of the second embodiment, as shown in FIG. 13, the pixel electrode 94 is provided on the lower glass substrate on one side of the supporting portion 93 of the actuator 92, and the supporting portion 93 is provided. On the other side, the pixel electrode 95 may be provided on the upper glass substrate. In this case, the actuator 92 can be displaced by causing the pixel electrodes 94 and 95 to generate electric charges having the same absolute value and the same sign.

In the second embodiment, the support portion 60
Although f and 60g are provided on the axisymmetric center line of the actuator 60a, this is not limited to this example, and FIG.
4, as shown in FIG.
It is sufficient that f and 60g are provided.

Next, a third embodiment of the present invention will be described with reference to the drawings. In this example, two pixels similar to those of the above-described first embodiment are combined around the hinge portion to form one pixel. Further, in this example, the actuator is driven by the same electrode structure as that of the second embodiment described above.

FIG. 15 shows an enlarged view of a region of several pixels of the actuator plate in this example. 100
a and 110a are actuators. Also, 10
0b is a column direction frame, and 100c is a row direction frame. Further, 100d, 100e, 110d, and 1
10e is a penetration part, 100f, 100g, 110
f and 110g are hinge parts. This actuator plate 100 is formed by etching one metal plate as in the first and second embodiments, and has an integral structure.

The actuator plate 100 also includes
The spacer 120 is attached. At this time, the shape of the spacer 120 is a mesh shape in which the actuators 100a and 110a are exposed so as not to hinder the movement of the actuators 100a and 110a.

FIG. 16 is an enlarged view showing a region for one pixel in the cross section in the row direction of the light control element according to the third embodiment. Note that, in FIG. 16, parts corresponding to those in FIG. 8 are designated by the same reference numerals, and description thereof will be omitted. This example is different from the structure of the second embodiment shown in FIG. 8 in that the spacer 120 is present between the pair of pixel electrodes 71 and 73.

A case where the actuator plate 100 is driven with such a structure will be described. The actuator plate 100 is kept at a constant potential, for example (-20V). Here, signals having the same absolute value but different signs are supplied to the thin film transistors that drive the pixel electrodes 71 and the thin film transistors that drive the pixel electrodes 73. For example, it is assumed that (+ 5V) is applied to the thin film transistor driving the pixel electrode 71 and (−5V) is applied to the thin film transistor driving the pixel electrode 73. At this time, the pixel electrode 71 and the pixel electrode 73 are
Electric charges corresponding to the voltage applied to the thin film transistors driving each of them are generated. Thereby, as shown in FIG. 17, the actuator 100a and the actuator 110a can be respectively displaced.

As a modification of the third embodiment, as in the modification of the second embodiment described above, a method in which two pixel electrodes in the row direction are paired to form one pixel electrode, and an actuator is used. A method of driving the actuators 100a and 110a by arranging the pixel electrode on the lower side of 100a and the pixel electrode on the upper side of the actuator 110a, and generating charges of the same sign on the respective pixel electrodes is known. Conceivable.

In the present invention, the circuit for driving the pixel electrode is constructed by using the thin film transistor as described in the first, second and third embodiments, but this is not limited to this example. For example, a thin film diode or the like can be used instead.

Further, in the present invention, by forming a color filter on the glass substrate on the side where light is incident,
It is also possible to support color display.

Further, by expanding the optical system shown in FIG.
For example, by using the configuration shown in FIG.
Color display can be supported. In this figure, 130, 131 and 132 are dichroic mirrors. For example, the dichroic mirror 130 is R (red) reflection and G (green) and B (blue) transmission, the dichroic mirror 131 is G reflection and B transmission, and the dichroic mirror 132 is B reflection.

133a, 133b and 133c are half mirrors, and 134a, 134b and 134c are lenses 136.
Reference numerals a, 136b, 136c are light sources. Also, 137
Reference numerals a, 137b and 137c are light control elements according to the present invention, and these are controlled by predetermined color signals. In this example, the light control element 137a is controlled for R, the light control element 137b is controlled for G, and the light control element 137c is controlled for B signal.

Further, 135a, 135b and 135c are first lattice-like slit plates, which are light control elements 137a and 137 with respect to the second lattice-like slit plate 139.
When b and 137c are planes, the positional relationship is adjusted so that the light passing through the first lattice-shaped slit plates 135a, 135b, and 135c is blocked by the second lattice-shaped slit plate 139.

With such a structure, the dichroic mirrors 132, 131, and 130 combine the signals of R, G, and B colors, pass through the lens 138, and further pass through the second lattice slit plate 139 to project the projection lens 140. Is projected onto the screen 141.

Further, in the present invention, the Schlieren optical system is used in the configuration of the image projection apparatus, but this is not limited to this example, and the light control element in the optical system as shown in FIG. 20, for example. It is also possible to use the light control element according to the present invention for 213.

[0073]

As described above, according to the present invention, since the light control element is composed of a heat resistant component such as a glass substrate or a metal plate, even in an environment where a large amount of heat is generated. Can be used. Therefore, it is possible to use a strong light source, and it is possible to brighten the projected image on the screen.

Further, according to the present invention, since the actuator is driven by push-pull, there is an effect that the change efficiency of the light with respect to the signal is good and the displaced actuator becomes linear.

Further, according to the present invention, since it is considered that the deformed portions at the time of displacement of the actuator are concentrated on the hinge portion, the displaced actuator becomes linear, and the linearity of the change of light with respect to the signal is linear. Has good effect and deep modulation.

Further, according to the present invention, since the actuator is made of a metal material, it is resistant to bending, and therefore the displacement of the actuator can be made larger.

Further, according to the present invention, the actuator section and the drive section for displacing the actuator section can be manufactured separately, and since the manufacturing technology of these is known, the yield can be improved. There is also a manufacturing effect. Therefore, there is an effect that the device can be inexpensive.

Further, according to the second and third embodiments of the present invention, since it is not necessary to form an electrode or the like on the side on which light is incident, the manufacturing cost can be further suppressed, and
This has the effect of significantly increasing the aperture ratio.

[Brief description of drawings]

FIG. 1 is a schematic diagram showing an overall configuration of a video projection device according to the present invention.

FIG. 2 shows a first embodiment of the light control element according to the present invention.
It is an approximate line figure showing the section for a pixel.

FIG. 3 is a schematic diagram showing a circuit of a glass substrate according to a first embodiment of the light control element of the present invention.

FIG. 4 is a schematic diagram showing a circuit of a glass substrate according to a first embodiment of the light control element of the present invention.

FIG. 5 is a schematic diagram showing an actuator plate according to the first embodiment of the light control element of the present invention.

FIG. 6 is a schematic diagram showing an equivalent circuit of the light control element of the present invention.

FIG. 7 is a schematic diagram illustrating an example of displacement of the actuator according to the first embodiment.

FIG. 8 is a view showing one of the light control elements according to the second embodiment of the present invention.
It is an approximate line figure showing the section for a pixel.

FIG. 9 is a schematic diagram showing a circuit of a glass substrate according to a second embodiment of the light control element of the present invention.

FIG. 10 is a schematic diagram showing an actuator plate according to a second embodiment of the light control element of the present invention.

FIG. 11 is a schematic diagram illustrating an example of displacement of the actuator according to the second embodiment.

FIG. 12 is a schematic diagram showing a circuit of a glass substrate according to a modification of the second embodiment of the light control element of the present invention.

FIG. 13 is a schematic diagram showing a cross section of one pixel of a light control element according to another modification of the second embodiment of the present invention.

FIG. 14 is a schematic diagram showing a modified example of the actuator plate according to the second embodiment of the light control element of the present invention.

FIG. 15 is a schematic diagram showing an actuator plate according to a third embodiment of the light control element of the present invention.

FIG. 16 is a schematic diagram showing a cross section of one pixel of a light control element according to a third embodiment of the present invention.

FIG. 17 is a schematic diagram illustrating an example of displacement of the actuator according to the third embodiment.

FIG. 18 is a schematic diagram showing an example of an optical system when color matching is applied to the present invention.

FIG. 19 is a schematic diagram showing an example of the structure of one pixel of a digital micromirror device.

FIG. 20 is a schematic diagram showing an example of a video projection device using a digital micromirror device.

[Explanation of symbols]

 10 Light Control Element 20 Glass Substrate 21 Pixel Electrode 30 Glass Substrate 31 Pixel Electrode 40 Actuator Plate 40a Actuator 40d Through Portion 40e Through Portion 40f Hinge Portion 40g Hinge Portion 41 Spacer

Claims (4)

[Claims] 1. A light control device, comprising: an actuator corresponding to a pixel; a base portion which is a frame plate separated from the actuator by a through slit; and a support portion for connecting the actuator and the base portion, The actuator, the support portion, and the base portion are continuously and integrally formed with an actuator member formed by processing a conductive thin plate, and on at least one side facing the actuator,
An optical control device comprising: an actuator driving unit that displaces and drives the actuator according to an electric field corresponding to a video signal. 2. The light control device according to claim 1, wherein a driving member is provided on both sides of the actuator surface,
An optical control device characterized in that the actuator is displaced by push-pull. 3. The light control device according to claim 1, wherein the actuator comprises first and second support portions, and the first and second support portions are located at a midpoint position of an actuator surface. Are provided at positions symmetrical with respect to each other,
A light control device, wherein a drive portion is provided corresponding to each part of the actuator divided by a line connecting the first and second support portions. 4. The light control device according to claim 1, wherein the thickness of the support portion is smaller than the thickness of the actuator.