JPH0878985A - Manufacture of piezoelectric resonator - Google Patents
Manufacture of piezoelectric resonatorInfo
- Publication number
- JPH0878985A JPH0878985A JP21542294A JP21542294A JPH0878985A JP H0878985 A JPH0878985 A JP H0878985A JP 21542294 A JP21542294 A JP 21542294A JP 21542294 A JP21542294 A JP 21542294A JP H0878985 A JPH0878985 A JP H0878985A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric resonator
- piezoelectric
- laser beam
- mother board
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 6
- 238000005520 cutting process Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、圧電共振子、特に発振
回路やフィルタ回路等に使用される圧電共振子の製造方
法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric resonator, and more particularly to a method for manufacturing a piezoelectric resonator used in an oscillation circuit, a filter circuit or the like.
【０００２】[0002]
【従来の技術と課題】例えば、面積振動モードにて振動
する圧電共振子において、スプリアスを低減するために
圧電共振子の端面を傾斜面にするとよいことが知られて
いる。従来、この傾斜面加工方法として、砥石による研
磨やダイヤモンドカッターによる切断があった。しかし
ながら、これらの方法は研磨や切断時に圧電共振子に機
械的ストレスがかかり、圧電共振子が割れたり、欠けた
り、チッピングし易く、スプリアスを安定して低減する
ことができなかった。この結果、量産した際に一定の共
振特性を有する圧電共振子が得られないという問題があ
った。2. Description of the Related Art For example, in a piezoelectric resonator vibrating in an area vibration mode, it is known that an end surface of the piezoelectric resonator should be an inclined surface in order to reduce spurious. Conventionally, as the method of processing the inclined surface, there have been polishing with a grindstone and cutting with a diamond cutter. However, in these methods, mechanical stress is applied to the piezoelectric resonator during polishing or cutting, the piezoelectric resonator is easily cracked, chipped, or chipped, and spurious cannot be stably reduced. As a result, there is a problem that a piezoelectric resonator having a certain resonance characteristic cannot be obtained in mass production.
【０００３】そこで、本発明の課題は、一定の共振特性
を有する圧電共振子を安定して製造することができる圧
電共振子の製造方法を提供することにある。Therefore, an object of the present invention is to provide a method of manufacturing a piezoelectric resonator, which can stably manufacture a piezoelectric resonator having a certain resonance characteristic.
【０００４】[0004]
【課題を解決するための手段と作用】以上の課題を解決
するため、本発明に係る圧電共振子の製造方法は、圧電
共振子の端面にレーザビームを走査しながら照射し、前
記端面を傾斜面とする工程を備えたことを特徴とする。
以上の方法により、レーザビームは圧電共振子に機械的
ストレスを与えることなく、圧電共振子の端面を傾斜面
とする。従って、圧電共振子に割れや欠けやチッピング
が生じず、スプリアスが安定して低減される。In order to solve the above problems, in the method of manufacturing a piezoelectric resonator according to the present invention, an end face of the piezoelectric resonator is irradiated with a laser beam while scanning, and the end face is inclined. It is characterized in that it has a step of forming a surface.
By the above method, the laser beam makes the end face of the piezoelectric resonator an inclined surface without giving mechanical stress to the piezoelectric resonator. Therefore, the piezoelectric resonator is not cracked, chipped, or chipped, and spurious is stably reduced.
【０００５】[0005]
【実施例】以下、本発明に係る圧電共振子の製造方法の
実施例について添付図面を参照して説明する。各実施例
は面積振動モードの圧電共振子を例にして説明するが、
面積振動モード以外の振動モード、例えば厚み振動モー
ドやすべり振動モードの圧電共振子であってもよいこと
は言うまでもない。Embodiments of the method of manufacturing a piezoelectric resonator according to the present invention will be described below with reference to the accompanying drawings. Each of the embodiments will be described by taking an area vibration mode piezoelectric resonator as an example.
It goes without saying that a piezoelectric resonator having a vibration mode other than the area vibration mode, for example, a thickness vibration mode or a shear vibration mode may be used.
【０００６】［第１実施例、図１〜図５］図１に示すよ
うに、広面積の圧電体マザーボード１の表裏面に振動電
極２，３を設ける。圧電体マザーボード１は、例えばＰ
ＺＴ等のセラミックスや水晶、ＬｉＴａＯ3等からな
る。振動電極２，３はスパッタリング、蒸着、めっき、
スプレー、浸漬、印刷等の手段にて形成される。振動電
極２，３の材料としては、Ａｕ，Ａｇ，Ｃｕ，Ｎｉ，Ｐ
ｄ及びその合金等がある。[First Embodiment, FIGS. 1 to 5] As shown in FIG. 1, vibrating electrodes 2 and 3 are provided on the front and back surfaces of a piezoelectric mother board 1 having a large area. The piezoelectric body motherboard 1 is, for example, P
It is made of ceramics such as ZT, crystal, LiTaO 3 or the like. The vibrating electrodes 2 and 3 are formed by sputtering, vapor deposition, plating,
It is formed by means of spraying, dipping, printing or the like. The material of the vibrating electrodes 2 and 3 is Au, Ag, Cu, Ni, P.
d and its alloys.
【０００７】マザーボード１は、一点鎖線Ｃに沿ってレ
ーザビームを走査することにより機械的ストレスがかか
ることなくスムーズに切断され、所定サイズの圧電共振
子５とされる。図２に示すように、レーザビームＬはレ
ンズ等の集光手段を利用して集光される。すなわち、集
光手段の焦点をマザーボード１の裏面に設定する。レー
ザとしては、Ｈｅ−Ｎｅレーザ、ＣＯ2レーザ、Ａｒイ
オンレーザ、Ｋｒイオンレーザ、Ｘｅレーザ等のガスレ
ーザ、あるいはルビーレーザ、ＹＡＧレーザ等の固体レ
ーザが使用される。The mother board 1 is smoothly cut by scanning the laser beam along the alternate long and short dash line C without any mechanical stress, and the piezoelectric resonator 5 of a predetermined size is obtained. As shown in FIG. 2, the laser beam L is condensed using a condensing unit such as a lens. That is, the focus of the light collecting means is set on the back surface of the motherboard 1. As the laser, a gas laser such as a He—Ne laser, a CO 2 laser, an Ar ion laser, a Kr ion laser, or a Xe laser, or a solid laser such as a ruby laser or a YAG laser is used.
【０００８】集光手段の焦点は、マザーボード１の手前
の位置に設定してもよいし、マザーボード１の後方の位
置に設定してもよい。このように、集光手段の焦点を移
動させることにより、圧電共振子５の端面５ａの傾斜角
を調整することができる。集光されたレーザビームＬの
強度及び走査スピードを任意に設定して最適な加工条件
でレーザビームＬをマザーボード１に照射する。例え
ば、ＰＺＴからなる板厚０．５ｍｍのマザーボード１
に、４ワットの強度のＹＡＧレーザビームを２ｍｍ／秒
の走査スピードで照射する。レーザビームＬの調整は電
気的に正確に行なうことができるので、安定した加工を
行なうことができる。The focus of the light collecting means may be set at a position in front of the mother board 1 or at a position at the rear of the mother board 1. In this way, by moving the focus of the light collecting means, the tilt angle of the end face 5a of the piezoelectric resonator 5 can be adjusted. The intensity and scanning speed of the focused laser beam L are arbitrarily set, and the mother beam 1 is irradiated with the laser beam L under optimum processing conditions. For example, a motherboard 1 made of PZT and having a thickness of 0.5 mm
Then, a YAG laser beam having an intensity of 4 watts is irradiated at a scanning speed of 2 mm / sec. Since the laser beam L can be adjusted electrically accurately, stable processing can be performed.
【０００９】図３に示すように、こうして得られた圧電
共振子５は端面５ａが傾斜面とされている。そして、圧
電共振子５には割れや欠けやチッピングは発生していな
い。従って、スプリアスが安定して低減され、この圧電
共振子５を量産した際には一定の共振特性を有する圧電
共振子が得られる。次に、この圧電共振子５を使用した
ラダー型フィルタを例にして圧電共振子５の作用効果を
説明する。As shown in FIG. 3, the piezoelectric resonator 5 thus obtained has an end face 5a which is an inclined face. The piezoelectric resonator 5 has no cracks, chips or chippings. Therefore, spurious is stably reduced, and when the piezoelectric resonator 5 is mass-produced, a piezoelectric resonator having a constant resonance characteristic can be obtained. Next, the function and effect of the piezoelectric resonator 5 will be described by taking a ladder type filter using the piezoelectric resonator 5 as an example.
【００１０】図４に示すように、ラダー型フィルタは、
略箱形状のケース１１、２枚の圧電共振子５，９、入力
端子１６、出力端子１７、グランド端子１８及びばね部
材２０で構成されている。圧電共振子５，９はその中央
部にノードを有する面積振動モードにて振動する。圧電
共振子９は、圧電共振子５と同様の製造方法で製作さ
れ、圧電体基板６の表裏面に振動電極７，８を設けたも
のである。As shown in FIG. 4, the ladder type filter is
It is composed of a substantially box-shaped case 11, two piezoelectric resonators 5 and 9, an input terminal 16, an output terminal 17, a ground terminal 18, and a spring member 20. The piezoelectric resonators 5 and 9 vibrate in an area vibration mode having a node in the center thereof. The piezoelectric resonator 9 is manufactured by the same manufacturing method as that of the piezoelectric resonator 5, and the vibrating electrodes 7 and 8 are provided on the front and back surfaces of the piezoelectric substrate 6.
【００１１】ケース１１は右側に開口部１１ａを有し、
その材料としては樹脂やセラミックス等が用いられてい
る。出力端子１７は、電極片部１７ａと折曲げ加工して
二重に重ね合わされた電極片部１７ｂと外部接続部１７
ｃと突起１７ｄ，１７ｅを備え、突起１７ｅが圧電共振
子９の下面に圧接し、突起１７ｄが圧電共振子５の上面
に圧接している。The case 11 has an opening 11a on the right side,
Resin, ceramics, etc. are used as the material. The output terminal 17 includes an electrode piece portion 17a and an external connection portion 17 which are formed by bending the electrode piece portion 17a and doubly overlapped with each other.
c and protrusions 17d and 17e, the protrusion 17e is in pressure contact with the lower surface of the piezoelectric resonator 9, and the protrusion 17d is in pressure contact with the upper surface of the piezoelectric resonator 5.
【００１２】入力端子１６は電極片部１６ａと外部接続
部１６ｂと突起１６ｃを備え、突起１６ｃが圧電共振子
５の下面に圧接している。グランド端子１８は電極片部
１８ａと外部接続部１８ｂと突起１８ｃを備え、突起１
８ｃが圧電共振子９の上面に圧接している。以上の圧電
共振子５，９及び端子１６〜１８をケース１１に収容す
る。ばね部材２０は、圧電共振子５，９と端子１６〜１
８間に適度の圧接力を発生させるべく、ケース１１と端
子１６の間に挟まれる。次に、ケース１１の開口部１１
ａの段部に絶縁紙２２をセットした後、ケース１１の開
口部１１ａに熱硬化性樹脂等の封止用シール剤２５を充
填、硬化させる。The input terminal 16 includes an electrode piece portion 16a, an external connection portion 16b, and a protrusion 16c, and the protrusion 16c is in pressure contact with the lower surface of the piezoelectric resonator 5. The ground terminal 18 includes an electrode piece portion 18a, an external connection portion 18b, and a protrusion 18c.
8c is in pressure contact with the upper surface of the piezoelectric resonator 9. The piezoelectric resonators 5 and 9 and the terminals 16 to 18 are housed in the case 11. The spring member 20 includes the piezoelectric resonators 5 and 9 and the terminals 16 to 1.
It is sandwiched between the case 11 and the terminal 16 so as to generate an appropriate pressure contact force between the eight. Next, the opening 11 of the case 11
After the insulating paper 22 is set on the stepped portion of a, the sealing agent 25 such as a thermosetting resin is filled in the opening 11a of the case 11 and cured.
【００１３】図５は得られたラダー型フィルタの電気等
価回路図である。入力端子１６と出力端子１７の間に直
列に接続した圧電共振子５と、並列に接続した圧電共振
子９とがラダー構造をなしている。圧電共振子５，９
は、レーザ加工によって割れや欠けやチッピングを発生
させることなく、その端面５ａ，９ａが傾斜面とされて
いるので、従来のラダー型フィルタと比較してスプリア
スが低減され、共振特性が優れたラダー型フィルタが得
られる。FIG. 5 is an electrical equivalent circuit diagram of the obtained ladder type filter. The piezoelectric resonator 5 connected in series between the input terminal 16 and the output terminal 17 and the piezoelectric resonator 9 connected in parallel form a ladder structure. Piezoelectric resonator 5,9
The laser processing does not cause cracks, chips or chippings, and its end surfaces 5a and 9a are inclined surfaces. Therefore, spurious is reduced compared to the conventional ladder type filter, and ladders having excellent resonance characteristics are provided. A mold filter is obtained.
【００１４】［第２実施例、図６及び図７］図６に示す
ように、前記第１実施例で説明した圧電体マザーボード
１に対して、斜め方向からレーザビームＬを照射してマ
ザーボード１を切断し、図７に示した圧電共振子３０を
切り出す。レーザビームＬは略平行光である。得られた
圧電共振子３０は、端面３０ａが傾斜面とされ、割れや
欠けやチッピングは発生しない。この圧電共振子３０
は、前記第１実施例の圧電共振子５と同様の作用効果を
奏する。[Second Embodiment, FIG. 6 and FIG. 7] As shown in FIG. 6, a laser beam L is radiated from an oblique direction to the piezoelectric mother board 1 described in the first embodiment so that the mother board 1 can be exposed. Is cut, and the piezoelectric resonator 30 shown in FIG. 7 is cut out. The laser beam L is substantially parallel light. The end face 30a of the obtained piezoelectric resonator 30 is an inclined face, and cracking, chipping, or chipping does not occur. This piezoelectric resonator 30
Has the same effects as the piezoelectric resonator 5 of the first embodiment.
【００１５】［他の実施例］なお、本発明に係る圧電共
振子の製造方法は前記実施例に限定するものではなく、
その要旨の範囲内で種々に変形することができる。特
に、前記実施例は、マザーボードを利用して圧電共振子
の切出し工程と端面を傾斜面にする工程を同時に行なう
という量産に適した方法について説明した。しかしなが
ら、単品状態で製造してもよいことは言うまでもない。
すなわち、マザーボードから切り出された製品サイズの
圧電共振子の端面（圧電共振子の表面に対して垂直な端
面で、未だ傾斜面となっていない端面）にレーザビーム
を照射して端面を切断、溶融あるいはエッチングして傾
斜面にしてもよい。[Other Embodiments] The method of manufacturing a piezoelectric resonator according to the present invention is not limited to the above-mentioned embodiment.
Various modifications can be made within the scope of the gist. In particular, in the above-mentioned embodiment, a method suitable for mass production has been described, in which the step of cutting out the piezoelectric resonator and the step of forming the end surface into the inclined surface are simultaneously performed by using the mother board. However, it goes without saying that it may be manufactured as a single product.
That is, the end surface of the product-sized piezoelectric resonator cut out from the motherboard (the end surface that is perpendicular to the surface of the piezoelectric resonator and is not yet an inclined surface) is irradiated with a laser beam to cut and melt the end surface. Alternatively, it may be etched to form an inclined surface.
【００１６】[0016]
【発明の効果】以上の説明で明らかなように、本発明に
よれば、圧電共振子の端面にレーザビームを走査しなが
ら照射し、この端面を傾斜面とするので、加工時には圧
電共振子に機械的ストレスがかからず、割れや欠けやチ
ッピングが生じない。このため、スプリアスが安定して
低減され、圧電共振子を量産した際には一定の共振特性
を有する圧電共振子が得られる。As is apparent from the above description, according to the present invention, the end face of the piezoelectric resonator is irradiated with the laser beam while being scanned, and the end face is an inclined surface. No mechanical stress, no cracking, chipping or chipping. For this reason, spurious noise is stably reduced, and a piezoelectric resonator having a certain resonance characteristic can be obtained when the piezoelectric resonator is mass-produced.
【図１】本発明に係る圧電共振子の製造方法の第１実施
例を示す斜視図。FIG. 1 is a perspective view showing a first embodiment of a method of manufacturing a piezoelectric resonator according to the present invention.
【図２】第１実施例のレーザビーム加工の状態を示す断
面図。FIG. 2 is a sectional view showing a state of laser beam processing according to the first embodiment.
【図３】第１実施例の圧電共振子の外観を示す斜視図。FIG. 3 is a perspective view showing the external appearance of the piezoelectric resonator of the first embodiment.
【図４】第１実施例の圧電共振子を使用したラダー型フ
ィルタを示す一部断面図。FIG. 4 is a partial cross-sectional view showing a ladder type filter using the piezoelectric resonator of the first embodiment.
【図５】図４に示したラダー型フィルタの電気等価回路
図。5 is an electrical equivalent circuit diagram of the ladder filter shown in FIG.
【図６】本発明に係る圧電共振子の製造方法の第２実施
例を示す断面図。FIG. 6 is a sectional view showing a second embodiment of the method for manufacturing a piezoelectric resonator according to the present invention.
【図７】第２実施例の圧電共振子の外観を示す斜視図。FIG. 7 is a perspective view showing the external appearance of a piezoelectric resonator according to a second embodiment.
１…圧電体マザーボード ２，３，７，８…振動電極 ５，９…圧電共振子 ５ａ，９ａ…端面 ６…圧電体基板 ３０…圧電共振子 ３０ａ…端面 Ｌ…レーザビーム DESCRIPTION OF SYMBOLS 1 ... Piezoelectric mother board 2, 3, 7, 8 ... Vibrating electrodes 5, 9 ... Piezoelectric resonator 5a, 9a ... End surface 6 ... Piezoelectric substrate 30 ... Piezoelectric resonator 30a ... End surface L ... Laser beam
Claims (1)
しながら照射し、前記端面を傾斜面とする工程を備えた
ことを特徴とする圧電共振子の製造方法。1. A method of manufacturing a piezoelectric resonator, comprising the step of irradiating an end surface of the piezoelectric resonator while scanning with a laser beam to make the end surface an inclined surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21542294A JPH0878985A (en) | 1994-09-09 | 1994-09-09 | Manufacture of piezoelectric resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21542294A JPH0878985A (en) | 1994-09-09 | 1994-09-09 | Manufacture of piezoelectric resonator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0878985A true JPH0878985A (en) | 1996-03-22 |
Family
ID=16672079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21542294A Pending JPH0878985A (en) | 1994-09-09 | 1994-09-09 | Manufacture of piezoelectric resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0878985A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002101923A1 (en) * | 2001-06-11 | 2002-12-19 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibrator and filter using the same |
| JP2010034712A (en) * | 2008-07-25 | 2010-02-12 | Citizen Finetech Miyota Co Ltd | Method for manufacturing crystal element |
| JP2010050687A (en) * | 2008-08-21 | 2010-03-04 | Kyocera Kinseki Corp | Method for adjusting outline of crystal piece |
-
1994
- 1994-09-09 JP JP21542294A patent/JPH0878985A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002101923A1 (en) * | 2001-06-11 | 2002-12-19 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibrator and filter using the same |
| US6836055B2 (en) | 2001-06-11 | 2004-12-28 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibrator and filter using the same |
| JP2010034712A (en) * | 2008-07-25 | 2010-02-12 | Citizen Finetech Miyota Co Ltd | Method for manufacturing crystal element |
| JP2010050687A (en) * | 2008-08-21 | 2010-03-04 | Kyocera Kinseki Corp | Method for adjusting outline of crystal piece |
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