JPH09147721A - Electrostatic matrix relay - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrostatic matrix relay capable of reducing the manufacturing cost by adopting a two-layer structure. SOLUTION: A stator board 10 is provided with multiple stator electrodes 11 arranged into a matrix shape on the upper face, and stationary contact points 5x, 5y are arranged adjacently to each stator electrode 11 respectively. A moving board 20 is provided with a moving piece 21 facing the stator electrode 11 and having moving contact points 6 capable of being connected/ disconnected to/from the stationary contact points 5x, 5y, and the moving boards 20 are layered on the stator board 10. The stator board 10 is a multi-layer wiring board wired with control lines applied with the voltage required for connecting/disconnecting the moving pieces 21 to/from the stator electrodes 11 and signal lines connected to the connection sections of the stationary contact sections 5x, 5y and the moving contact points 6 on an insulating board into multiple layers.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostatic matrix relay which is a kind of coordinate type selector switch using an electrostatic relay and is mainly used for networks such as telephone lines and LANs.

[0002]

2. Description of the Related Art Generally, a coordinate type selector switch having a latching type electromagnetic relay arranged at an intersection is used as a matrix relay used in a telephone line switch or the like. That is, this type of matrix relay has two signal line groups each including a plurality of signal lines parallel to each other.
A group is provided, and both signal line groups are wired so that they intersect with each other, and between the signal lines of one signal line group and the signal line of the other signal line group at each intersection of the signal lines in both signal line groups. It has a configuration in which a latching type electromagnetic relay having a contact portion inserted therein is connected. Therefore, by operating an electromagnetic relay provided at a desired intersection of the signal lines of both signal line groups, the signal lines sandwiching the intersection can be made conductive (NTT Journal, '9.
2.5). Here, in general, a control line for operating the electromagnetic relay is also arranged so as to intersect with the signal line, and both ends of the coil are connected to the signal lines intersecting with each other at the intersection of the control lines.

Since the matrix relay having the above-mentioned configuration is used for networks such as telephone lines and LANs, it is possible to use a low withstand voltage electromagnetic relay, and therefore a small electromagnetic relay is also used for downsizing. Is used. Further, by using a latching type electromagnetic relay, it is sufficient to energize only during operation, and the power consumption is kept relatively low.

By the way, in the above-described conventional structure, although the power consumption of each electromagnetic relay is relatively small, a large amount of electromagnetic relays must be supplied because a sufficient current must be applied to the coil to open and close the contact points. Increasing power consumption becomes a problem for large-scale matrix relays equipped with it. That is, the power source becomes large and the amount of heat generation also increases. In addition, the electromagnetic relay has a large number of parts and is troublesome to assemble, so there is a limit to downsizing, and there is a problem that the space occupied by the matrix relay becomes large. That is,
As described above, the power source is large, the amount of heat generated is large, and there is a limit to the miniaturization of electromagnetic relays. Nevertheless, there is a problem that miniaturization is hindered by other factors.

As a solution to these problems, the inventors of the present invention have previously proposed an electrostatic matrix switch in which the contact portion is opened and closed by utilizing Coulomb force instead of electromagnetic force (Japanese Patent Application No. Hei 10 (1999) -135242). 6-174119). That is, as shown in FIG. 18, the stator substrate 10 and the mover substrate 2
0 is laminated, and the stator electrode 11 is provided on the stator substrate 10.
And a voltage is applied between the movable piece 21 and the movable piece 21 of the movable element substrate 20, so that the movable piece 21 is attracted to the stator electrode 11 by the Coulomb force. Further, the movable piece 21 is provided with a movable contact 6 at the tip thereof, and the movable piece 21 has the movable electrode 21.
When the movable contact 6 is separated and contacted with the movable electrode 1, the movable contact 6 is separated and contacted with the fixed contacts 5x and 5y provided adjacent to the stator electrode 11.

[0006]

By the way, since the control line for applying a voltage between the stator electrode 11 and the movable piece 21 and the signal line connected to the fixed contacts 5x and 5y are wired crossing each other, In order to prevent the intersecting lines from electrically contacting each other, the stator substrate 10 is a base plate 30 made of a multilayer wiring substrate.
The base plate 30 is used for wiring. As a result, the base plate 30 has a three-layer structure except that the base plate 30 has a multi-layer structure, and the management of alignment is somewhat troublesome.

The present invention has been made in view of the above circumstances, and its object is to provide a conventional stator substrate and base plate by focusing attention on the fact that a technique for forming a multilayer wiring substrate has been established. By forming a stator substrate having a corresponding function, it can be relatively easily formed by the manufacturing technique of a multilayer wiring board, and the base plate is not required because the stator substrate also has the function of a base plate. An object is to provide an electrostatic matrix relay whose manufacturing cost can be reduced by adopting the structure.

[0008]

According to a first aspect of the present invention, there is provided an electrostatic matrix relay in which a plurality of electrostatic relays which are driven by voltage application to open and close a contact portion are arranged in a matrix form. A stator substrate in which a plurality of stator electrodes are arranged in a matrix and fixed contacts are arranged adjacent to each stator electrode on the one surface,
A plurality of electrostatic relays are formed by bonding them together in a laminated manner with a mover substrate that has a movable piece that has a movable contact that faces each stator electrode and that can contact and separate from the fixed contact. The sub-board is a multi-layer wiring in which a control line to which a voltage required for separating and contacting a stator electrode and a movable piece is applied and a signal line connected to a contact portion composed of a fixed contact and a movable contact are layered and wired on an insulating substrate. It is characterized by comprising a substrate.

According to this structure, since the electrostatic relay is used, the energy required for driving can be almost ignored as compared with the case where the electromagnetic relay is used.
The power consumption is low and the amount of heat generation is small. Also,
Since the electrostatic relay does not require a coil, it can be downsized as compared with the case where an electromagnetic relay is used. Furthermore, since the stator substrate is formed of a multi-layer wiring substrate and the control electrodes and signal lines are provided in multiple layers on this stator substrate in addition to the stator electrodes and fixed contacts, the previously required base plate is no longer necessary. That is, productivity is improved. Since the manufacturing technique of the multilayer wiring board has been established heretofore, it can be manufactured accurately by a conventionally known technique, and the matrix relay can be manufactured accurately by only managing the position of the mover substrate. it can. In addition, the base plate, which has been required in the past, is no longer necessary, which reduces the manufacturing cost.

According to a second aspect of the present invention, in the first aspect of the present invention, a joining pattern made of a conductive material is formed at a joining portion of the stator substrate with the mover substrate, and the joining pattern is formed on the mover substrate. A joining layer of a conductive material that is mechanically joined is formed, and the movable piece is electrically connected to the control line through the joining pattern and the joining layer. If this configuration is adopted, if the mover substrate is joined to the stator substrate, the electric connection with the control line for applying the voltage to the movable piece is performed, so compared with the case where the bonding wire is used for connection. Manufacturing work is greatly facilitated, productivity is improved, and contact reliability is improved as compared with the case where a bonding wire is used.

According to a third aspect of the present invention, in the first aspect of the present invention, the bonding pattern is formed on the one surface of the stator substrate on which the stator electrodes and the fixed contacts are formed, and the bonding pattern is at least one. It is formed so as to surround the stator electrode and the fixed contact adjacent to the stator electrode. In this configuration, since the stator electrode and the fixed contact are surrounded by the joining pattern of the conductive material, if the joining pattern is grounded, the joining pattern functions as an electromagnetic shield and the noise resistance performance is improved.

According to a fourth aspect of the present invention, in the first aspect of the present invention, the movable piece is coupled to the mover substrate such that one end forming the movable contact is a free end and the other end is a fixed end, and the stator electrode is The distance between the movable piece and the fixed end is smaller than the distance between the movable piece and the free end. Therefore, a large suction force acting between the movable piece and the stator electrode can be obtained while maintaining the opening distance between the movable contact provided on the free end side of the movable piece and the fixed contact, and high sensitivity is achieved. It can be expected to work.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION

(Embodiment 1) The matrix relay shown in this embodiment is
As shown in FIG. 1, a stator substrate 1 including a multilayer wiring substrate
0 and a plurality of mover substrates 20 stacked and joined on the stator substrate 10 are used to form a large number of electrostatic relays 2 arranged in a matrix. A control terminal 3x for giving a control signal to each electrostatic relay 2,
3y (see FIGS. 1 and 10) and signal terminals 4x and 4y (see FIG. 10) connected to the contacts of each electrostatic relay 2 are provided on the peripheral portion of the stator substrate 10. Therefore, the stator substrate 10 is also used as a connection substrate that connects the external circuit and the electrostatic relay 2.

As shown in FIG. 2, in each electrostatic relay 2, the distance between the stator electrode 11 formed on the stator substrate 10 and the stator substrate 10 on the mover substrate 20 is variable. The movable piece 21 provided on the surface of the movable piece 21 and the insulating layer 22 that is attached to the surface of the movable piece 21 facing the stator electrode 11 and functions as an electret. Therefore, the stator electrode 1
By applying a voltage between 1 and the movable piece 21 to apply a Coulomb force, the movable piece 21 can be brought into contact with and separated from the stator electrode 11 to open and close the contact portion. The movable piece 21 is a thin piece formed in a rectangular shape, and the movable piece substrate 2 is provided only on one side.
It is continuous with 0 and has flexibility so that the distance between the stator substrate 10 and the free end side is variable with the fixed portion being a continuous portion with the mover substrate 20. The movable piece 21 is the stator substrate 1
The control line 12x 'provided at 0 is connected via the bonding wire 23. Here, a pair of fixed contacts 5x and 5y is formed in a thick film on the stator substrate 10 for each electrostatic relay 2, and when the movable piece 21 is attracted to the stator electrode 11, the movable piece 21 is provided with a movable contact. Fixed contact 5 by contact 6
A short circuit is made between x and 5y.

By the way, a plurality of mover substrates 20 (four in FIG. 1) are provided for one stator substrate 10, and a plurality (4 × 4) are arranged in a matrix on the stator substrate 10. A mover substrate 20 is provided for each row of four) stator electrodes 11. That is, each mover substrate 20
Is provided with a plurality of (here, four) movable pieces 21.

The stator substrate 10 is formed as a multi-layer wiring substrate in which insulating substrates such as ceramics are laminated in multiple layers and wiring is provided in each layer (FIGS. 3 to 8 show the shape or wiring pattern of each layer). . Here, in FIGS. 3 to 8, four electrostatic relays 2 are set as one set, and each mover substrate 20 is set.
Is provided and a total of 16 sets (64 pieces) of electrostatic relays 2 are provided in 8 rows and 2 stages (see FIGS. 9 and 10). The uppermost (first layer) substrate 10a of the stator substrate 10 is formed in a frame shape as shown in FIG. 3 and forms sections B _{11 to} B ₈₁ and B _{12 to} B ₈₂ for accommodating the respective movable substrate 20. doing.

The second layer substrate 10b has the stator electrode 11, the fixed contacts 5x and 5y, the control line 12x ', and the bonding pattern 13 formed on the upper surface thereof as shown in FIG. The reference numeral 13 encloses the periphery of one set of four stator electrodes 11 in a U-shape leaving one side, and is connected to another set of bonding patterns 13 arranged in the same row via a control line 12x '. Therefore, eight control lines 12x 'are formed on one stator substrate 10. Further, a through hole 14x is formed in a part of the control line 12x ', and the position of each through hole 14x is different for each column.
That is, the through holes 14x in each row are formed so as to be sequentially displaced from the right row and upward in FIG. Through holes 15x and 15y corresponding to the fixed contacts 5x and 5y and through holes 14x corresponding to the stator electrode 11 are also formed in the second layer substrate 10b. Through holes 14x, 14y, 1 are provided between the substrates 10b to 10e of each layer.
It is electrically connected via 5x, 15y,
In the following, the through hole 14x at the same position in the other layers,
14y, 15x and 15y are indicated by the same reference numerals.

As shown in FIG. 5, a control line 12y connected to each stator electrode 11 is formed on the upper surface of the third-layer substrate 10c, and one end of each control line 12y is shown in FIG. To the upper edge of the substrate 10c. Further, as shown in FIG. 6, the fourth-layer substrate 10d has signal lines 16x connected to the fixed contacts 5x formed on the upper surface thereof, and one signal line 16x is provided for each column. At the same time, each end is extended to the lower edge of the substrate 10d in FIG.

The fifth layer substrate 10e has conductive patterns formed on the front and back surfaces, and the electrostatic relays 2 arranged in the horizontal direction are fixed on the upper surface (the surface facing the fourth layer substrate 10d) as shown in FIG. Eight signal lines 16y commonly connected to the contact 5y are formed. The control line 12x electrically connected to the control line 12x 'is also formed on the upper surface of the substrate 10e. On the other hand, on the lower surface of the substrate 10e, the terminal pieces 7 connected to the respective stator electrodes 11 are formed as shown in FIG.
The control terminal 3x (see FIG. 10) and the signal terminals 4x and 4y connected to the x and signal lines 16x and 16y, respectively, are arranged on each side of the substrate 10e. Here, the control terminal 3y is exposed on the upper surface of the stator substrate 10 as shown in FIG. Further, the control terminals 3x, 3y and the signal terminals 4x, 4y are formed at positions corresponding to the grooves 17 formed in plural on each side of the stator substrate 10. The groove portion 17 is formed in the substrates 10a to 10e of each layer and also has a function of positioning between the substrates 10a to 10e. A well-known technique such as through-hole plating is used to electrically connect the conductive patterns of the substrates 10a to 10e. As described above, the stator substrate 10 in which the five substrates 10a to 10e are laminated is formed. 9 and 10 show the upper surface and the lower surface of the completed stator substrate 10, respectively.

On the other hand, as shown in FIG. 11, the mover substrate 20 is provided with a substrate 24 made of a silicon single crystal wafer, and the stator substrate 1 on the substrate 24 is fixed.
An insulating layer 25 (see FIG. 2) is formed on the surface facing 0.
Further, the bonding layer 26 is formed on the insulating layer 25.
The bonding layer 26 is formed of a metal thin film or the like, and is bonded to the bonding pattern 13 formed on the stator substrate 10.

A rectangular movable piece 21 is provided at a portion of the substrate 24 facing each stator electrode 11. Each movable piece 21 is thinned by anisotropically etching the corresponding portion of the substrate 24 from both sides in the thickness direction, and a U-shaped slit is formed so as to span three sides of the thin portion formed in a rectangular shape. By forming 27 by etching, it is cantilevered. That is, one side on which the slit 27 is not formed is a fixed end, and a free end opposite to the fixed end is formed so as to be swingable in the thickness direction. In addition, the free end of the movable piece 21 is provided at a portion facing both the fixed contacts 5x and 5y.
A movable contact 6 formed as a thick film is attached so as to extend across x and 5y. The movable piece 21 has an area that is slightly larger than the stator electrode 11 and has a larger area.
Insulating layer 22 in which most of the surface facing to
(See FIG. 2).

The movable piece 21 is commonly connected to the control line 12x '. The movable piece 21 includes a stator substrate 10 and a movable substrate 20.
The positions are set so that the movable contact 6 forms a small gap between the fixed contacts 5x and 5y and a small gap between the stator electrode 11 and the movable piece 21 when they are overlapped with each other. There is. However, the stator substrate 10 and the mover substrate 20 formed as described above are positioned and then joined.

Now, assuming that the insulating layer 22 as an electret in the movable piece 21 permanently holds a positive charge, the desired control terminal 3y is connected to the positive electrode of the power source and a positive voltage is applied to the stator electrode 11. When the voltage is applied and the desired control terminal 3x is connected to the negative electrode of the power source or grounded, an attractive force acts between the stator electrode 11 and the movable piece 21 to move the movable piece 21.
Are attracted to the stator electrode 11. As a result, the movable contact 6 comes into contact with both the fixed contacts 5x, 5y, and the fixed contacts 5x, 5y
5y is short-circuited, and the corresponding signal lines 16x and 16y are electrically connected. After the suction, the insulating layer 22 provided on the movable piece 21
The movable piece 21 is held in a state of being attracted to the stator substrate 10 by the electric charges of. That is, the contact pressure is regulated by the amount of electricity applied to the insulating layer 22, and by providing a relatively large amount of electricity, it is possible to maintain the contact closed state against vibration and shock.

On the other hand, in order to separate the movable piece 21 in a state of being attracted by the stator electrode 11 from the stator electrode 11, the polarity of the control terminal 3y is set to the negative polarity and the control terminal 3x is set to the reverse polarity of the power supply connection. Connect to positive or ground. In this connection, a repulsive force is generated between the insulating layer 22 and the movable piece 21, and the sum of the repulsive force and the restoring force of the movable piece 21 acts between the stator electrode 11 and the movable piece 21. If the applied voltage is set to be larger than the force, the movable piece 21 is separated from the stator electrode 11. In this way, when the movable piece 21 is attracted to the stator electrode 11, both fixed contacts 5
The x and 5y are electrically connected via the movable contact 6, and after being once attracted, the electrically connected state between the fixed contacts 5x and 5y can be maintained without energizing and the latching operation is performed. Here, the driving force required to open and close the contacts is Coulomb force, and only a voltage is applied, so that almost no electric power is consumed. In the above example, the positive charge is applied to the surface of the insulating layer 22 facing the movable piece 21, but it goes without saying that it may be negative charge.

The restoring force of the movable piece 21, the Coulomb force acting on the movable piece 21, and the movable piece 2 with respect to the stator electrode 11.
The relationship with the distance of 1 is shown in FIG. A in FIG. 12,
B, c, and d are the restoring force of the movable piece 21, the attraction force by the electret when the applied voltage between the stator electrode 11 and the movable piece 21 is 0 V, and the positive voltage is applied to the movable piece 21, respectively. And the Coulomb force (repulsive force) when a negative voltage is applied to the movable piece 21. Further, the restoring force and the repulsive force act in the opposite direction to the suction force, but they are shown in the same direction in FIG.

However, as described above, when a voltage is applied so that the movable piece 21 becomes a positive electrode, the Coulomb force becomes larger than the restoring force of the movable piece 21, and the movable piece 21 tilts toward the stator electrode 11. It will be. In the state where the movable piece 21 is attracted to the stator electrode 11, even if the application of the voltage is stopped, the attraction force (b) by the electret becomes larger than the restoring force (a) of the movable piece 21, so that the attraction state is maintained. Is done. When a voltage is applied so that the movable piece 21 becomes a negative electrode, the movable piece 21 is separated from the stator electrode 11 by the Coulomb force as described above.

When the matrix relay having the above-mentioned structure is used, the voltage applied to each of the control terminals 3x and 3y may be half of the voltage required to drive the movable piece 21. For example, the drive voltage of the movable piece 21 is V
If it is _0, the negative side - (1/2) V _0, the positive side by applying a voltage of (1/2) V _0, the stator electrode 1
A voltage V ₀ can be applied between 1 and the movable piece 21.

In the above structure, since the mover substrate 20 is formed of a silicon wafer, it is possible to form a drive circuit such as a discharge circuit or a booster circuit, and such a drive circuit should be provided. In this case, the electrostatic relay 2 can be controlled without separately providing a drive circuit.
It goes without saying that such a drive circuit may be provided on the stator substrate 10.

(Second Embodiment) In the first embodiment, the movable piece 2
Bonding wire 23 for connection between 1 and control line 12x '
However, in this embodiment, as shown in FIG.
The joining layer 26 is formed on the mover substrate 20 without providing the insulating layer 25, and the joining layer 26 is electrically connected to the joining pattern 13. Therefore, the movable piece 21 and the control line 12x ′ can be electrically connected without using the bonding wire 23, which facilitates the manufacturing work and
The connection reliability is also improved. Other configurations and operations are the same as those of the first embodiment.

(Embodiment 3) In this embodiment, as shown in FIGS. 14 and 15, a bonding pattern 13 is formed so as to completely surround the stator electrodes 11 of one set of four electrostatic relays 2. (Fig. 14 shows the stator electrode 1 of one electrostatic relay 2
1 is surrounded by a bonding pattern 13). Here, the movable piece 21 and the bonding pattern 13 are connected via the bonding layer 26 as in the second embodiment. If this configuration is adopted, the area of the electrical connection portion with the mover substrate 20 can be increased and the junction resistance can be reduced, and the junction pattern is not limited to the stator electrode 11 but the fixed contact 5x,
Since it also surrounds 5y, a high effect as an electromagnetic shield can be obtained by grounding the bonding pattern 13. Other configurations are similar to those of the second embodiment.

(Fourth Embodiment) This embodiment is the third embodiment.
16 and 17, a part of the stator electrode 11 (the base side of the movable piece 21) is formed thick, and the fixed contacts 5x and 5y and the movable contact 6 are The thick portion 11a is formed on the stator electrode 11 within a range that does not affect the opening and closing of
Is provided and the stator electrode 11 is formed in a stepwise manner, so that the attractive force between the stator electrode 11 and the movable piece 21 is increased. The thick portion 11a has fixed contacts 5x, 5
It is formed at the same time as y is formed. Other configurations are similar to those of the third embodiment.

[0032]

According to the invention of claim 1, a plurality of stator electrodes are arranged in a matrix on the front and back surfaces, and fixed contacts are arranged adjacent to each stator electrode on the one surface. A plurality of electrostatic relays are formed by joining a substrate and a mover substrate that is provided with a movable piece that faces each of the stator electrodes and has a movable contact that can be separated from and attached to the fixed contact, in a laminated form. In the stator substrate, a control line to which a voltage required for separating and contacting the stator electrode and the movable piece is applied and a signal line connected to a contact portion composed of a fixed contact and a movable contact are layered on an insulating substrate and wired. Since the stator board is formed of a multilayer wiring board, and control electrodes and signal lines are provided in multiple layers on the stator board in addition to the stator electrodes and fixed contacts, Necessary It has the advantage that the base plate is improved productivity no longer required. In addition, since the base plate is not required since the mover substrate is simply joined to the stator substrate, there is an advantage that the matrix relay can be manufactured with high precision simply by controlling the position of the mover substrate. Further, there is an effect that the manufacturing cost can be reduced because the base plate which is conventionally required becomes unnecessary.

According to a second aspect of the present invention, a joining pattern made of a conductive material is formed on a joining portion of the stator substrate with the moving element substrate, and the moving pattern is mechanically joined to the joining pattern on the moving element substrate. Since the joining layer of the material is formed and the movable piece is electrically connected to the control line through the joining pattern and the joining layer, if the mover substrate is joined to the stator substrate, a voltage is applied to the movable piece. Since it is electrically connected to the control line for applying voltage, the manufacturing work is significantly easier than when connecting using a bonding wire, productivity is improved, and a comparison is made when a bonding wire is used. As a result, the contact reliability is improved.

In the invention of claim 3, the joining pattern is formed on the one surface of the stator substrate on which the stator electrode and the fixed contact are formed, and the joining pattern includes at least one stator electrode and the fixed contact. Since it is formed so as to surround it, the stator electrode and the fixed contact adjacent to the stator electrode are surrounded by the bonding pattern of the conductive material. The pattern functions as an electromagnetic shield, and has an advantage that noise resistance performance is improved.

In the invention of claim 4, the movable piece is coupled to the mover substrate such that one end where the movable contact is formed is a free end and the other end is a fixed end, and the stator electrode is on the fixed end side of the movable piece. Since the distance from the free end of the movable piece is made smaller than the distance from the free end of the movable piece, the movable contact and the fixed contact provided on the free end side of the movable piece are opened. While maintaining the pole distance, there is an advantage that a large suction force acting between the movable piece and the stator electrode can be obtained and a highly sensitive operation can be expected.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing a first embodiment.

2A and 2B show essential parts of Embodiment 1, where FIG. 2A is a plan view of a mover substrate, FIG. 2B is a plan view of a stator substrate, and FIG.

FIG. 3 is a plan view showing a first layer substrate of the stator substrate according to the first embodiment.

FIG. 4 is a plan view showing a second layer substrate of the stator substrate in the first embodiment.

FIG. 5 is a plan view showing a third layer substrate of the stator substrate in the first embodiment.

FIG. 6 is a plan view showing a fourth layer substrate of the stator substrate in the first embodiment.

FIG. 7 is a plan view showing a fifth layer substrate of the stator substrate according to the first embodiment.

FIG. 8 is a bottom view showing a fifth layer substrate of the stator substrate in the first embodiment.

FIG. 9 is a plan view of a stator substrate according to the first embodiment.

FIG. 10 is a bottom view of the stator substrate according to the first embodiment.

FIG. 11 is a plan view showing a mover substrate according to the first embodiment.

FIG. 12 is an operation explanatory diagram of the first embodiment.

13A and 13B show essential parts of Embodiment 2, where FIG. 13A is a plan view of a mover substrate, FIG. 13B is a plan view of a stator substrate, and FIG.

FIG. 14 is an exploded perspective view showing a third embodiment.

15A and 15B show essential parts of Embodiment 3, where FIG. 15A is a plan view of a mover substrate, FIG. 15B is a plan view of a stator substrate, and FIG. 15C is an exploded sectional view.

FIG. 16 is an exploded perspective view showing a fourth embodiment.

17A and 17B show essential parts of Embodiment 4, where FIG. 17A is a plan view of a mover substrate, FIG. 17B is a plan view of a stator substrate, and FIG.

FIG. 18 is an exploded perspective view showing a conventional example.

[Explanation of symbols]

 2 electrostatic relay 5x, 5y fixed contact 6 movable contact 10 stator substrate 11 stator electrode 11a thick part 12x, 12y control line 13 bonding pattern 16x, 16y signal line 20 mover substrate 21 movable piece 26 bonding layer

Claims (4)

[Claims] 1. An electrostatic matrix relay in which a plurality of electrostatic relays which are driven by voltage application to open and close a contact portion are arranged in a matrix, wherein a plurality of stator electrodes are arranged in a matrix on one surface of the front and back. A stator substrate in which fixed contacts are arranged adjacent to each of the stator electrodes and arranged on the above-mentioned one surface, and a movable piece having a movable contact facing each of the stator electrodes and capable of contacting with and separating from the fixed contact. A plurality of electrostatic relays are formed by joining the provided mover substrate in a laminated form, and the stator substrate is a control line to which a voltage required for separating and contacting the stator electrode and the movable piece is applied. An electrostatic matrix relay comprising a multi-layer wiring board in which a signal line connected to a contact portion composed of a fixed contact and a movable contact is multi-layered and wired on an insulating substrate. 2. A joining pattern made of a conductive material is formed at a joining portion of the stator substrate with the mover substrate, and a joining layer of a conductive material mechanically joined to the joining pattern is formed on the mover substrate. The electrostatic matrix relay according to claim 1, wherein the movable piece is formed and is electrically connected to a control line through a bonding pattern and a bonding layer. 3. The joining pattern is formed on the one surface of the stator substrate on which the stator electrode and the fixed contact are formed, and the joining pattern is at least one stator electrode and a fixing member adjacent to the stator electrode. The electrostatic matrix relay according to claim 1, wherein the electrostatic matrix relay is formed so as to surround the contact. 4. The movable piece is coupled to the mover substrate such that one end where the movable contact is formed is a free end and the other end is a fixed end, and the stator electrode is a distance from the end of the movable piece on the fixed end side. 2. The electrostatic matrix relay according to claim 1, wherein the electrostatic matrix relay is formed in a stepped shape that is smaller than the distance from the free end side end of the movable piece.