JPH09253427A - Filtration method - Google Patents
Filtration methodInfo
- Publication number
- JPH09253427A JPH09253427A JP8069781A JP6978196A JPH09253427A JP H09253427 A JPH09253427 A JP H09253427A JP 8069781 A JP8069781 A JP 8069781A JP 6978196 A JP6978196 A JP 6978196A JP H09253427 A JPH09253427 A JP H09253427A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- tank
- foreign matter
- tanks
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Filtration Of Liquid (AREA)
Abstract
(57)【要約】
【課題】複数のタンク内の同一液種の濾過を設備費、運
転費に関して合理的に行う。
【解決手段】複数のタンク1、2に対して1台の濾過装
置としてポンプ3、フィルタ4及び自動弁5、6、7、
8を設置し、各タンク1、2にそれぞれ異物濃度計9、
10の異物濃度測定値の高い方の自動弁を開放し、ポン
プ3を起動しフィルタ4に通液する。異物濃度計9、1
0により、タンク1、タンク2内液ともに目標濃度以下
になればポンプ3を停止する。
(57) [Abstract] [PROBLEMS] To perform filtration of the same liquid type in a plurality of tanks rationally in terms of equipment cost and operation cost. SOLUTION: A pump 3, a filter 4, and automatic valves 5, 6, 7, as one filtering device for a plurality of tanks 1, 2,
8 is installed, and a foreign matter concentration meter 9 is provided in each of the tanks 1 and 2,
The automatic valve 10 having the higher foreign matter concentration measurement value is opened, the pump 3 is started, and the liquid is passed through the filter 4. Foreign substance concentration meter 9, 1
When 0, the pump 3 is stopped when both the liquid in the tank 1 and the liquid in the tank 2 become the target concentrations or less.
Description
【0001】[0001]
【発明の属する技術分野】本発明は濾過方法に関する。
さらに詳しくは、同一液種のタンクを2基以上有する系
統における、各々のタンクの内液中の異物濃度を1台の
濾過器で目標清浄度以下に保つ技術に関する。TECHNICAL FIELD The present invention relates to a filtration method.
More specifically, the present invention relates to a technique in a system having two or more tanks of the same liquid type, in which the concentration of foreign matter in the internal liquid of each tank is kept below a target cleanliness level with a single filter.
【0002】[0002]
【従来の技術】一般に、複数のタンク内の液を濾過する
場合、それが同一液種であっても、1タンクにつき1つ
の濾過装置を設置して連続的に濾過するのが一般的であ
る。2. Description of the Related Art Generally, when a liquid in a plurality of tanks is filtered, even if the liquids are of the same liquid type, it is common to install one filtering device for each tank for continuous filtration. .
【0003】[0003]
【発明が解決しようとする課題】前記のような濾過方法
では、濾過装置に関する設備が多大なものとなり、連続
運転を行うため、電力等の運転費用もかかるという問題
があった。本発明の目的は前記問題点を解決した濾過方
法を提供することである。The filtration method as described above has a problem in that the equipment related to the filtration device becomes large and continuous operation is performed, so that operating costs such as electric power are also required. An object of the present invention is to provide a filtration method that solves the above problems.
【0004】[0004]
【課題を解決するための手段】本発明は前記問題点を解
決するために、同一液種のタンクを2基以上有する系統
における、各々のタンク内の液中の除去すべき異物濃度
を測定し、1台の濾過装置で異物濃度の高いタンク内液
を優先的に濾過し、かつ、いずれのタンク内液も目標濃
度以下になれば、濾過を停止するようにしたものであ
る。In order to solve the above-mentioned problems, the present invention measures the concentration of foreign matter in the liquid in each tank in a system having two or more tanks of the same liquid type. One filtration device preferentially filters the tank liquid having a high foreign matter concentration, and stops the filtration when any of the tank liquids has a target concentration or less.
【0005】本発明によれば、同一液種タンクを2基以
上有する系統における、各々のタンク内液の除去すべき
異物濃度を測定しながら、1台の濾過装置で異物濃度の
高いタンク内液を優先的に濾過するようにし、タンク内
液の異物濃度が目標値以下になった時には濾過装置を停
止するようにしたから、濾過装置の設備費、運転費を低
減させることができる。According to the present invention, in a system having two or more tanks of the same liquid type, the concentration of the foreign matter to be removed from each tank liquid is measured, and the tank liquid containing the high foreign matter concentration can be measured by one filtering device. Is preferentially filtered, and the filtration device is stopped when the foreign matter concentration of the liquid in the tank becomes equal to or less than the target value. Therefore, the equipment cost and the operation cost of the filtration device can be reduced.
【0006】[0006]
【発明の実施の形態】図1は本発明の実施例を示す系統
図である。タンク1及びタンク2内の液を1台の濾過装
置で濾過する。濾過装置としてポンプ3、フィルタ4及
び自動弁5、6、7、8が設置されている。各タンク
1、2にそれぞれ設置されている異物濃度計9、10
は、タンク内液の異物濃度を連続的に測定する。そして
異物濃度の高い方の自動弁を開放し、ポンプ3を起動し
フィルタ4に通液する。例えばタンク1の異物濃度の方
が高い場合、自動弁5と自動弁6が開とし、自動弁7と
自動弁8は閉とする。1 is a system diagram showing an embodiment of the present invention. The liquid in the tank 1 and the tank 2 is filtered by a single filtering device. A pump 3, a filter 4, and automatic valves 5, 6, 7, and 8 are installed as a filtering device. Foreign matter concentration meters 9 and 10 installed in the tanks 1 and 2, respectively
Continuously measures the concentration of foreign matter in the liquid in the tank. Then, the automatic valve with the higher concentration of foreign matter is opened, the pump 3 is started, and the liquid is passed through the filter 4. For example, when the foreign matter concentration in the tank 1 is higher, the automatic valves 5 and 6 are opened, and the automatic valves 7 and 8 are closed.
【0007】このようにして起動されたポンプ3は、タ
ンク1内の液を濾過し続けるが、異物濃度計9によりタ
ンク1内の液の異物濃度が目標濃度に達した時には、自
動弁5と自動弁6を閉じ、ポンプ3を停止する。タンク
2についても同様である。このようにタンク1とタンク
2の液の濾過を異物濃度計9、10の情報によって行
い、異物濃度計9、10の計測値が、タンク1、タンク
2内の液ともに目標異物濃度以下になればポンプ3を停
止する。The pump 3 thus started continues to filter the liquid in the tank 1, but when the foreign substance concentration of the liquid in the tank 1 reaches the target concentration by the foreign substance concentration meter 9, the automatic valve 5 is activated. The automatic valve 6 is closed and the pump 3 is stopped. The same applies to the tank 2. In this way, the liquids in the tank 1 and the tank 2 are filtered by the information of the foreign matter concentration meters 9 and 10, and the measured values of the foreign matter concentration meters 9 and 10 should be below the target foreign matter concentration for both the liquids in the tanks 1 and 2. For example, stop pump 3.
【0008】このような方法で濾過を行った時のタンク
1とタンク2の異物濃度推移を図2に示す。図2は、タ
ンク1内の液の異物濃度推移を曲線11で、タンク2内
の液の異物濃度推移を曲線12で示している。タンク1
内の液中の異物濃度が高い状態で、矢印21で示す時点
に、タンク1内の液の濾過を開始し、目標値以下となっ
た時点でタンク2内の液中の異物濃度が目標値より高い
ので、矢印22の時点で濾過装置はタンク1内の液の濾
過を中止し、タンク2内の液中の異物除去の濾過を開始
した。矢印23の時点で、タンク1、2の双方のタンク
内の液中の異物濃度が目標値より低いので、濾過装置の
運転を停止した。矢印24の時点で再びタンク1内の液
の濾過を開始し、矢印25の時点でタンク2内の液の濾
過を開始した。両方のタンク内の液中の異物濃度が目標
値より低い間は運転を停止した。FIG. 2 shows the transition of the foreign matter concentration in the tank 1 and the tank 2 when the filtration is performed by such a method. FIG. 2 shows a transition of the foreign matter concentration of the liquid in the tank 1 by a curve 11 and a transition of the foreign matter concentration of the liquid in the tank 2 by a curve 12. Tank 1
When the concentration of foreign matter in the liquid inside the tank 2 is high, the filtration of the liquid in the tank 1 is started at the time indicated by the arrow 21, and when the concentration becomes less than the target value, the concentration of the foreign matter in the liquid inside the tank 2 becomes the target value. Since it is higher, the filtering device stopped the filtration of the liquid in the tank 1 at the time of the arrow 22, and started the filtration for removing the foreign matters in the liquid in the tank 2. At the time of arrow 23, the concentration of foreign matter in the liquid in both tanks 1 and 2 was lower than the target value, so the operation of the filtration device was stopped. Filtration of the liquid in the tank 1 was started again at the time of arrow 24, and filtration of the liquid in the tank 2 was started at the time of arrow 25. The operation was stopped while the foreign matter concentration in the liquid in both tanks was lower than the target value.
【0009】なお、本実施例では、タンクが2基の場合
を示したが、3基以上のタンクに適用してもよいことは
明らかである。また、いずれの場合も、フィルタの容量
を適正に選定する必要があることは言うまでもない。In this embodiment, the case where the number of tanks is two is shown, but it is obvious that the invention may be applied to the case of three or more tanks. In any case, it goes without saying that it is necessary to properly select the capacity of the filter.
【0010】[0010]
【発明の効果】本発明は2基以上のタンク内液を1台の
濾過装置で濾過するようにしたから、濾過装置にかかる
設備費を削減することができた。またいずれのタンクも
異物濃度が目標値に達すれば、濾過装置を停止するよう
にしたので、濾過装置の運転費も削減することができ
た。According to the present invention, since the liquid in the tank of two or more tanks is filtered by one filtering device, the equipment cost for the filtering device can be reduced. Further, in any of the tanks, when the foreign matter concentration reaches the target value, the filtering device is stopped, so that the operating cost of the filtering device can be reduced.
【図1】本発明の実施例を示す系統図である。FIG. 1 is a system diagram showing an embodiment of the present invention.
【図2】実施例のタンク内液異物濃度推移を示すグラフ
である。FIG. 2 is a graph showing changes in the concentration of liquid foreign matter in the tank of the example.
1、2 タンク 3 ポンプ 4 フィルタ 5、6、7、8
自動弁 9、10 異物濃度計1, 2 Tanks 3 Pumps 4 Filters 5, 6, 7, 8
Automatic valve 9,10 Foreign matter concentration meter
Claims (1)
における、各々のタンクの内液中の除去すべき異物濃度
を測定し、1台の濾過装置で異物濃度の高いタンク内液
を優先的に濾過し、タンク内液の異物濃度が目標値以下
になれば濾過を停止することを特徴とする濾過方法。1. In a system having two or more tanks of the same liquid type, the concentration of foreign matter to be removed in the liquid inside each tank is measured, and the tank liquid with a high foreign matter concentration is prioritized by one filtering device. Filtration is performed, and the filtration is stopped when the concentration of foreign matter in the liquid in the tank falls below a target value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8069781A JPH09253427A (en) | 1996-03-26 | 1996-03-26 | Filtration method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8069781A JPH09253427A (en) | 1996-03-26 | 1996-03-26 | Filtration method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09253427A true JPH09253427A (en) | 1997-09-30 |
Family
ID=13412660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8069781A Withdrawn JPH09253427A (en) | 1996-03-26 | 1996-03-26 | Filtration method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09253427A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005128086A (en) * | 2003-10-21 | 2005-05-19 | Olympus Corp | Scanning type microscope system |
| JP2023057370A (en) * | 2021-10-11 | 2023-04-21 | 東京エレクトロン株式会社 | Filter performance evaluation device, filter wetting device, and filter performance evaluation method |
-
1996
- 1996-03-26 JP JP8069781A patent/JPH09253427A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005128086A (en) * | 2003-10-21 | 2005-05-19 | Olympus Corp | Scanning type microscope system |
| JP2023057370A (en) * | 2021-10-11 | 2023-04-21 | 東京エレクトロン株式会社 | Filter performance evaluation device, filter wetting device, and filter performance evaluation method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20030603 |