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JPH09276691A - Freon decomposition method by high frequency plasma - Google Patents

Freon decomposition method by high frequency plasma

Info

Publication number
JPH09276691A
JPH09276691A JP8094471A JP9447196A JPH09276691A JP H09276691 A JPH09276691 A JP H09276691A JP 8094471 A JP8094471 A JP 8094471A JP 9447196 A JP9447196 A JP 9447196A JP H09276691 A JPH09276691 A JP H09276691A
Authority
JP
Japan
Prior art keywords
frequency plasma
freon
high frequency
air
decomposition reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8094471A
Other languages
Japanese (ja)
Other versions
JP3965216B2 (en
Inventor
Ryuichi Abe
隆一 阿部
Atsushi Kobayashi
淳志 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CLEAN JAPAN CENTER
Nippon Steel Corp
Original Assignee
CLEAN JAPAN CENTER
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CLEAN JAPAN CENTER, Nippon Steel Corp filed Critical CLEAN JAPAN CENTER
Priority to JP09447196A priority Critical patent/JP3965216B2/en
Publication of JPH09276691A publication Critical patent/JPH09276691A/en
Application granted granted Critical
Publication of JP3965216B2 publication Critical patent/JP3965216B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894Processes carried out in the presence of a plasma

Landscapes

  • Fire-Extinguishing Compositions (AREA)
  • Treating Waste Gases (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

(57)【要約】 【課題】 高周波プラズマ分解反応炉によりフロンを加
水分解させる高周波プラズマによるフロン分解法におい
て、有害物質であるCOあるいはH2を発生させないで
フロンを分解する高周波プラズマによるフロン分解方法
を提供するものである。 【解決手段】 高周波プラズマ分解反応炉によりフロン
を加水分解させる高周波プラズマによるフロン分解法に
おいて、高周波プラズマ分解反応炉へ空気を吹き込んで
フロンを加水分解させるとともにH2及びCOを燃焼さ
せて無害化する。
(57) Abstract: In a CFC decomposition method using a high frequency plasma in which CFCs are hydrolyzed by a high frequency plasma decomposition reactor, a CFC decomposition method using a high frequency plasma that decomposes CFCs without generating CO or H 2 which is a harmful substance. Is provided. In a freon decomposition method using high-frequency plasma in which freon is hydrolyzed by a high-frequency plasma decomposition reaction furnace, air is blown into the high-frequency plasma decomposition reaction furnace to hydrolyze the freon and burn H 2 and CO to render them harmless. .

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、家庭用冷蔵庫、業
務用冷蔵庫、自動車等から回収されたフロンを高周波プ
ラズマ分解反応炉で加水分解する高周波プラズマによる
フロン分解方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for decomposing CFCs by high-frequency plasma in which CFCs recovered from household refrigerators, commercial refrigerators, automobiles, etc. are hydrolyzed in a high-frequency plasma decomposition reactor.

【0002】[0002]

【従来の技術】有機化合物中にフッ素、塩素などを含む
フロンガス、トリクロロエチレン等のハロゲン化合物を
効率よく分解する方法として、高周波プラズマを用いて
フロンを加水分解して無害化する高周波プラズマによる
フロン分解方法が知られている(特開平3−90172
号公報参照)。
2. Description of the Related Art As a method for efficiently decomposing CFCs containing fluorine, chlorine, etc. in organic compounds and halogen compounds such as trichlorethylene, a method for decomposing CFCs by high-frequency plasma by hydrolyzing CFCs with high-frequency plasma to make them harmless. Is known (Japanese Patent Laid-Open No. 3-90172).
Reference).

【0003】前記方法は、高周波プラズマ中に有機ハロ
ゲン化合物とともに水を導入することを基本としてお
り、プラズマ中に有機ハロゲン化合物と水とを効率よく
プラズマ中に拡散させて導入するため、アルゴンガス中
に有機ハロゲン化合物を含ませて水に導入してバブリン
グして有機ハロゲン化合物を蒸気とし、水蒸気と混合し
てプラズマ内に導入し、高周波プラズマの高熱により加
水分解するものである。フロン及び代替フロンの加水分
解の基本反応は、例えば、 フロン(CFC113)の場合 C23Cl3+4H2O=2CO2+3HF+3HCl+
2 代替フロン(HCFC22)の場合 CHClF2+2H2O→CO2+HCl+2HF+H2 で表される。
The above-mentioned method is basically based on introducing water together with the organic halogen compound into the high frequency plasma. Since the organic halogen compound and water are efficiently diffused and introduced into the plasma, they are introduced into the argon gas. Is introduced into water by bubbling it into water, mixed with water vapor and introduced into plasma, and hydrolyzed by high heat of high frequency plasma. CFC and basic reactions of hydrolysis of the CFC substitutes, for example, Freon case of (CFC113) C 2 F 3 Cl 3 + 4H 2 O = 2CO 2 + 3HF + 3HCl +
In the case of H 2 alternative CFC (HCFC22), it is represented by CHClF 2 + 2H 2 O → CO 2 + HCl + 2HF + H 2 .

【0004】[0004]

【発明が解決しようとする課題】しかしながら、フロン
及び代替フロン(以下「フロン」という。)に水蒸気の
みを加えて高周波プラズマで分解させた場合、分解反応
により発生したH2とCO2とが水性ガス化反応 H2+CO2←→CO+H2O により、有害物質であるCOあるいはH2が発生する。
However, when only steam is added to CFCs and alternative CFCs (hereinafter referred to as “CFCs”) and decomposed by high frequency plasma, H 2 and CO 2 generated by the decomposition reaction are aqueous. Due to the gasification reaction H 2 + CO 2 ← → CO + H 2 O, harmful substances CO or H 2 are generated.

【0005】そこで、本発明は、高周波プラズマ分解反
応炉によりフロンを加水分解させる高周波プラズマによ
るフロン分解法において、有害物質であるCOあるいは
2を発生させないでフロンを分解する高周波プラズマ
によるフロン分解方法を提供するものである。
Therefore, the present invention is a method for decomposing CFCs by a high-frequency plasma in which CFCs are hydrolyzed in a reactor for decomposing CFCs by a high-frequency plasma, which decomposes CFCs without generating CO or H 2 which is a harmful substance. Is provided.

【0006】[0006]

【課題を解決するための手段】本発明は、高周波プラズ
マ分解反応炉によりフロンを加水分解させる高周波プラ
ズマによるフロン分解法において、高周波プラズマ分解
反応炉へ空気を吹き込んでフロンを加水分解させるとと
もに、H2及びCOを燃焼させて無害化する。
According to the present invention, in a freon decomposition method using high frequency plasma in which freon is hydrolyzed by a high frequency plasma decomposition reaction furnace, air is blown into the high frequency plasma decomposition reaction furnace to hydrolyze the freon and Burns 2 and CO to make them harmless.

【0007】高周波プラズマ分解反応炉へ空気を吹き込
むと、次式により高周波プラズマ分解反応炉内に発生し
たCO及びH2と吹き込んだ空気中のO2とが次の反応式
によって燃焼し、無害化される。
When air is blown into the high-frequency plasma decomposition reaction furnace, CO and H 2 generated in the high-frequency plasma decomposition reaction furnace and O 2 in the blown air are burned according to the following reaction formula to be harmless. To be done.

【0008】CO+H2+1/2O2→CO2+H2O 高周波プラズマ分解反応炉へ吹き込む空気は、プラズマ
本体へ吹き込む方法、もしくは高周波プラズマの下部分
に当たる高周波プラズマ分解反応炉肩口より高周波プラ
ズマ分解反応炉内の炉壁に沿う旋回流にして吹き込むこ
とにより、空気の混合性をより高めることができる。
CO + H 2 + 1 / 2O 2 → CO 2 + H 2 O The air blown into the high frequency plasma decomposition reaction furnace is blown into the plasma main body, or the high frequency plasma decomposition reaction furnace from the shoulder of the high frequency plasma decomposition reaction furnace, which corresponds to the lower part of the high frequency plasma, is used. The mixing property of air can be further enhanced by blowing it into a swirling flow along the inner furnace wall.

【0009】[0009]

【発明の実施の形態】図1は、本発明による高周波プラ
ズマによるフロン分解法のフロー図である。フロンは、
回収フロンボンベをフロン蒸発器中の温水で温めてガス
状のフロンにして供給し、ヒーター1で約145°Cに
加熱する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a flow chart of a CFC decomposition method using high frequency plasma according to the present invention. Freon is
The recovered Freon cylinder is heated with warm water in a Freon evaporator to form gaseous Freon and supplied, and is heated to about 145 ° C by the heater 1.

【0010】加熱したフロンは、ヒーター2で約145
°Cに加熱された水蒸気と混合し、フロンと水蒸気との
混合ガスは混合ガスヒーター3で160〜180°Cに
加熱し、高周波プラズマ分解反応炉4へ供給する。
Heated CFC is about 145 with heater 2.
The mixed gas of chlorofluorocarbon and steam is heated to 160 to 180 ° C by the mixed gas heater 3 and mixed with the steam heated to ° C, and is supplied to the high-frequency plasma decomposition reaction furnace 4.

【0011】分解反応により発生したH2とCOとを燃
焼させて無害化するための空気は、常温で高周波プラズ
マ分解反応炉4の肩口より供給する。空気の一部はプラ
ズマを安定させるためにフロンと水蒸気の混合ガスに加
える。
Air for burning the H 2 and CO generated by the decomposition reaction to render them harmless is supplied from the shoulder of the high frequency plasma decomposition reaction furnace 4 at room temperature. A part of the air is added to the mixed gas of Freon and water vapor to stabilize the plasma.

【0012】フロン、水蒸気及び空気の各流量は、流量
調節計FICにより流量調整弁を制御して所定流量に調
節する。
The flow rates of CFCs, steam and air are adjusted to predetermined flow rates by controlling the flow rate adjusting valve with a flow rate controller FIC.

【0013】高周波プラズマ分解反応炉4は高アルミナ
等の耐火物からなり、炉の頭部にはアルゴンガスで起動
するプラズマトーチ5を有し、炉内圧力は200Tor
r〜400Torrに保つ。
The high frequency plasma decomposition reactor 4 is made of a refractory material such as high alumina, has a plasma torch 5 activated by argon gas at the head of the furnace, and has a furnace pressure of 200 Torr.
Keep r to 400 Torr.

【0014】高周波プラズマ分解反応炉4の下部には、
炉内で発生した排ガスを冷却する冷却缶6が設けられ、
高周波プラズマ分解反応炉4と冷却缶6の間のスロート
7において冷却缶循環液により分解ガスを冷却し、HC
l及びHFを吸収する。
At the bottom of the high frequency plasma decomposition reactor 4,
A cooling can 6 is provided for cooling the exhaust gas generated in the furnace,
In the throat 7 between the high frequency plasma decomposition reactor 4 and the cooling can 6, the decomposition gas is cooled by the cooling can circulating liquid,
absorbs 1 and HF.

【0015】冷却缶を出た排ガスは排ガス処理設備へ、
また、冷却缶循環液は排水処理設備へ送られる。
Exhaust gas from the cooling can is sent to an exhaust gas treatment facility,
The circulating fluid in the cooling can is sent to the wastewater treatment facility.

【0016】図2は空気を旋回流で吹き込むための高周
波プラズマ分解反応炉の炉壁の横断面図で、空気は高周
波プラズマ分解反応炉4の炉壁に設けられた吹込み口8
から炉壁に沿って旋回流となって吹き込まれる。
FIG. 2 is a cross-sectional view of the furnace wall of the high-frequency plasma decomposition reaction furnace for blowing air in a swirl flow. Air is blown into the furnace wall of the high-frequency plasma decomposition reaction furnace 4 through a blowing port 8
It is blown into a swirling flow along the furnace wall.

【0017】[0017]

【実施例】処理条件は次のとおりである。[Example] The processing conditions are as follows.

【0018】 HCFC22処理量・・・36〜50Kg/h H2O/フロンモル比・・・2.2〜3.5 空気挿入量・・・・・・・・518Nl/分 炉内圧力・・・・・・・・・200〜400Torr 前記条件で、H2及びCOを燃焼させるため、挿入空気
の空気比(HCFC22が加水分解される時に発生する
2及びCOの燃焼に必要な理論空気量と実際に挿入す
る空気量との比)を1.0、1.2、1.4に変化させ
た場合の空気挿入比とCO発生量の変化は、図3に示す
とおりで、高周波プラズマ分解反応炉に直接挿入する空
気量が多くなるほどCO発生量が小さくなることが分か
る。
HCFC22 throughput ... 36-50 Kg / h H 2 O / CFC mole ratio ... 2.2-3.5 Air insertion rate ... 518 Nl / min Furnace pressure ... ...... in 200~400Torr the conditions for combusting H 2 and CO, and the theoretical amount of air required for combustion of the H 2 and CO that occurs when the air ratio of the insertion air (HCFC22 is hydrolyzed The change of the air insertion ratio and the amount of CO generated when the ratio of the actually inserted air amount) was changed to 1.0, 1.2, 1.4 is as shown in FIG. It can be seen that the CO generation amount decreases as the amount of air directly inserted into the furnace increases.

【0019】[0019]

【発明の効果】フロンを加水分解する高周波プラズマ分
解反応炉に空気を挿入することによりCO及びH2を燃
焼させて有害なCO及びH2の発生を抑えることができ
る。
EFFECTS OF THE INVENTION By inserting air into a high-frequency plasma decomposition reactor for hydrolyzing CFCs, CO and H 2 can be burned and harmful CO and H 2 can be suppressed.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による高周波プラズマによるフロン分解
法のフロー図である。
FIG. 1 is a flow chart of a CFC decomposition method using high-frequency plasma according to the present invention.

【図2】空気を旋回流で吹き込むための高周波プラズマ
分解反応炉の炉壁の横断面図である。
FIG. 2 is a cross-sectional view of a furnace wall of a high-frequency plasma decomposition reaction furnace for blowing air in a swirling flow.

【図3】空気挿入比とCO発生量の変化を示すグラフで
ある。
FIG. 3 is a graph showing changes in air insertion ratio and CO generation amount.

【符号の説明】[Explanation of symbols]

1 ヒーター 2 ヒーター 3 混合ガスヒーター 4 高周波プラズマ分解反応炉 5 プラズマトーチ 6 冷却缶 7 スロート 8 吹込み口 1 Heater 2 Heater 3 Mixed gas heater 4 High frequency plasma decomposition reactor 5 Plasma torch 6 Cooling can 7 Throat 8 Blowing port

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 高周波プラズマ分解反応炉によりフロン
を加水分解させる高周波プラズマによるフロン分解法に
おいて、高周波プラズマ分解反応炉へ空気を吹き込んで
フロンを加水分解させるとともにH2及びCO2を燃焼さ
せて無害化することを特徴とする高周波プラズマによる
フロン分解方法。
1. In a freon decomposition method using high-frequency plasma in which freon is hydrolyzed by a high-frequency plasma decomposition reaction furnace, air is blown into the high-frequency plasma decomposition reaction furnace to hydrolyze the freon and burn H 2 and CO 2 to cause no harm. A method for decomposing CFCs by high-frequency plasma, which is characterized by
【請求項2】 空気を高周波プラズマ分解反応炉内の炉
壁に沿う旋回流にして高周波プラズマ分解反応炉へ吹き
込むことを特徴とする請求項1記載の高周波プラズマに
よるフロン分解方法。
2. The method for decomposing CFCs by high-frequency plasma according to claim 1, wherein air is blown into the high-frequency plasma decomposition reaction furnace in a swirling flow along the furnace wall in the high-frequency plasma decomposition reaction furnace.
JP09447196A 1996-04-16 1996-04-16 CFC decomposition method using high frequency plasma Expired - Fee Related JP3965216B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP09447196A JP3965216B2 (en) 1996-04-16 1996-04-16 CFC decomposition method using high frequency plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP09447196A JP3965216B2 (en) 1996-04-16 1996-04-16 CFC decomposition method using high frequency plasma

Publications (2)

Publication Number Publication Date
JPH09276691A true JPH09276691A (en) 1997-10-28
JP3965216B2 JP3965216B2 (en) 2007-08-29

Family

ID=14111205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP09447196A Expired - Fee Related JP3965216B2 (en) 1996-04-16 1996-04-16 CFC decomposition method using high frequency plasma

Country Status (1)

Country Link
JP (1) JP3965216B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100348586B1 (en) * 1999-02-25 2002-08-13 송병무 Method and apparatus for treatment of hazardous and toxic gases
KR100385157B1 (en) * 2000-10-10 2003-05-22 (주)케이.씨.텍 Method Of Treating perfluoro Compound Gas and Apparatus For Treating The Same
US6815573B2 (en) 1999-06-07 2004-11-09 Nkk Corporation Method of decomposing halogenated hydrocarbon gas
JP2009543995A (en) * 2006-07-14 2009-12-10 セラマテック・インク Oxidation apparatus and method using sliding electric arc
JP2011230037A (en) * 2010-04-26 2011-11-17 Taiyo Nippon Sanso Corp Method of recovering remaining gas
US8350190B2 (en) 2007-02-23 2013-01-08 Ceramatec, Inc. Ceramic electrode for gliding electric arc
JP2017113752A (en) * 2011-03-18 2017-06-29 パイロジェネシス・カナダ・インコーポレーテッド Steam plasma arc hydrolysis of ozone depleting substance
CN114288961A (en) * 2021-12-08 2022-04-08 核工业西南物理研究院 Device and method for reducing fluoride by thermal plasma

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100348586B1 (en) * 1999-02-25 2002-08-13 송병무 Method and apparatus for treatment of hazardous and toxic gases
US6815573B2 (en) 1999-06-07 2004-11-09 Nkk Corporation Method of decomposing halogenated hydrocarbon gas
KR100385157B1 (en) * 2000-10-10 2003-05-22 (주)케이.씨.텍 Method Of Treating perfluoro Compound Gas and Apparatus For Treating The Same
US8618436B2 (en) 2006-07-14 2013-12-31 Ceramatec, Inc. Apparatus and method of oxidation utilizing a gliding electric arc
JP2009543995A (en) * 2006-07-14 2009-12-10 セラマテック・インク Oxidation apparatus and method using sliding electric arc
US8742285B2 (en) 2006-07-14 2014-06-03 Ceramatec, Inc. Method of oxidation utilizing a gliding electric arc
US8350190B2 (en) 2007-02-23 2013-01-08 Ceramatec, Inc. Ceramic electrode for gliding electric arc
JP2011230037A (en) * 2010-04-26 2011-11-17 Taiyo Nippon Sanso Corp Method of recovering remaining gas
JP2017113752A (en) * 2011-03-18 2017-06-29 パイロジェネシス・カナダ・インコーポレーテッド Steam plasma arc hydrolysis of ozone depleting substance
JP2019188397A (en) * 2011-03-18 2019-10-31 パイロジェネシス・カナダ・インコーポレーテッド Vapor plasma arc hydrolysis of ozone destruction substance
US10551062B2 (en) 2011-03-18 2020-02-04 Pyrogenesis Canada Inc. Apparatus for steam plasma arc hydrolysis of ozone depleting substances
JP2022002845A (en) * 2011-03-18 2022-01-11 パイロジェネシス・カナダ・インコーポレーテッド Steam plasma arc hydrolysis of ozone depleting substance
CN114288961A (en) * 2021-12-08 2022-04-08 核工业西南物理研究院 Device and method for reducing fluoride by thermal plasma

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