JPH09281459A - Probe card for liquid crystal display body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible to finely adjust a position of a contact terminal even when positional deviation and secular change in an attaching hole occur in respective terminal contact mechanisms by providing a first support body supporting a printed circuit board, a second support body connected to the first support body and an X, Y directions adjustment mechanism moving the first support body in the X, Y directions for the second support body and adjusting the position on a support body. SOLUTION: The first support body 18 supporting the printed circuit board 13, the second support body 19 connected to the first support body 18 and the X, Y direction adjustment mechanism 21 moving the first support body 18 in the X, Y directions with respect to the second support body 19 and adjusting the X, Y directional position of the first support body 18 are provided on the support body 15 supporting the printed circuit board 13 having bump contact terminals 12. Thus, even when the attaching hole of the terminal contact mechanism 11 is slightly deviated or the terminal contact mechanism 11 is undergone secular change, the bump contact terminal 12 is made to be aligned with an electrode of an LCD substrate by fine adjusting the position of the bump contact terminal 12 in the state of attaching respective terminal contact mechanisms 11 to an attaching body 17.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe card (hereinafter simply referred to as "terminal contact mechanism") for a liquid crystal display (hereinafter referred to as "LCD").

[0002]

2. Description of the Related Art A conventional LCD probe card of this type is, for example, as shown in FIG. 5, a drain electrode formed on a lateral side edge of an LCD substrate 2 mounted on a mounting table 1 of an inspection apparatus. A plurality of terminal contact mechanisms 3A arranged corresponding to (not shown) and a plurality of terminal contacts arranged corresponding to a gate electrode (not shown) formed on the lateral side edge of the LCD substrate 2. And the mechanism 3B, and the terminal contact mechanism 3A, 3B is brought into contact with the drain electrode and the gate electrode, and the LCD substrate 2
Is configured to perform an electrical test of. Both of the terminal contact mechanisms 3A and 3B have the same structure. Therefore,
Hereinafter, the terminals 3A and 3B will be described as the terminal contact mechanism 3 without making a distinction as necessary.

The terminal contact mechanism 3 is one of a large number of drain electrodes or gate electrodes arranged on the peripheral portion of the LCD substrate 2 (see FIG. 5), as shown in FIGS. 6 (a) and 6 (b), for example. A plurality of bump contact terminals 4 corresponding to the parts,
A film-like flexible printed wiring board (hereinafter referred to as "printed wiring board") 6 having printed wirings 5 connected to these bump contact terminals 4 and a support block for supporting this printed wiring board 6. 7 and this support block 7 are provided with a mounting body 8 arranged and mounted along the respective electrodes by bolts 8A so that each bump contact terminal 4 electrically contacts the drain electrode or the gate electrode. ing. Further, the printed wiring 5 is connected to the tester side (not shown), and serves as a transmission path for conducting electrical signals between the bump contact terminal 4 and the tester side. In addition, since each bump contact terminal 4 has to contact the electrode of the LCD substrate 2 accurately, each bump contact terminal 4 needs to contact each terminal contact mechanism 3 when the terminal contact mechanism 3 is mounted on the mounting body 8. The bump contact terminals 4 are attached to the mounting body 8 so that the X and Y directions of the terminal contact mechanisms 3 are exactly aligned with each other so that the bump contact terminals 4 come into accurate contact with the electrodes of the LCD substrate 2.

Further, the tip of the printed wiring board 6 is
As shown in FIGS. 6A and 6B, the free end is formed by slightly projecting from the tip of the support block 7. The printed wiring board 6 is fixed to the base of the support block 7 with an adhesive or the like. A columnar elastic body 9 such as rubber is interposed between the vicinity of the tip of the printed wiring board 6 and the support block 7, and when the overdriven bump contact terminals 4 are pressed against the electrodes, the printed wiring board 6 is pressed. Elasticity is given to the free end (bump contact terminal 4).

Therefore, when the mounting table 1 is raised during the electrical inspection of the LCD substrate 2, the drain electrode and the gate electrode of the LCD substrate 2 come into contact with the bump contact terminals 4 of the terminal contact mechanisms 3A and 3B, and further, When the mounting table 1 is overdriven by a predetermined size, each electrode contacts the bump contact terminal 4 with a predetermined pressure against the elastic force of the elastic body 8. As a result, the tip of the bump contact terminal 4 is electrically connected to each electrode, and a predetermined electrical inspection can be performed.

[0006]

However, in the case of the conventional LCD probe card, as shown in FIG. 6A, each terminal contact mechanism 3 is fixed in the mounting hole that is pre-positioned in the mounting body 8. Therefore, the mounting holes of each contactor mechanism 3 must be machined with high accuracy by matching the X and Y directions of the mounting holes with each other, which requires much time for machining the mounting holes. There is a problem that it takes much time to assemble the probe card. Further, if the mounting holes are slightly displaced, there is a problem in that the positions of the contact terminals of the terminal contact mechanisms 3 cannot be adjusted after the mounting. Further, in the case of the conventional probe card, when the terminal contact mechanisms 3 change over time due to the use of the probe card, the bump contact terminals 4 of the terminal contact mechanisms 3 are connected to each other.
However, there is a problem that the position cannot be corrected.

The present invention has been made in order to solve the above problems, and even if the mounting holes of each terminal contact mechanism are slightly displaced or the terminal contact mechanism has changed over time, each terminal contact mechanism. It is an object of the present invention to provide a probe card for a liquid crystal display body in which the position of the contact terminal in the X, Y, Z and θ directions can be finely adjusted from above in a state where the is attached to the mounting body.

[0008]

A probe card for a liquid crystal display body according to claim 1 of the present invention has a plurality of contact terminals corresponding to a part of a large number of electrodes arranged on a peripheral portion of a liquid crystal display body substrate. A printed wiring board having printed wirings connected to these contact terminals, a support for supporting the printed wiring board, and an attachment to which a plurality of the supports are attached. In a probe card for a liquid crystal display, which electrically contacts each electrode to electrically inspect the liquid crystal display substrate, the support includes a first support that supports the printed wiring board, and a first support. A second support connected to the body and a first with respect to the second support
It is characterized by having an X, Y-direction adjusting mechanism for moving the support in the X, Y directions to adjust the position of the first support in the X, Y directions.

According to a second aspect of the present invention, in the probe card for a liquid crystal display according to the first aspect of the present invention, the X and Y direction adjusting mechanism includes X, Y in the concave portion of the second support. The block body is connected to the first support in a state of being movable in the Y direction, and the X direction adjusting mechanism is
The X taper block sandwiched between the block body and the side surface of the concave portion of the second support body while being engaged with the taper surface formed in the Y direction of the block body, and the X taper block is moved up and down to support the first support. An X-direction adjusting member that adjusts the amount of movement of the body in the X-direction via the block body, and a first elastically support the block body that moves via the X-direction adjusting member.
The Y direction adjusting mechanism includes an elastic member, and the Y direction adjusting mechanism is sandwiched between the block body and the side surface of the concave portion of the second support body while being engaged with the tapered surface formed in the X direction of the block body. The taper block and the Y taper block are moved up and down, and the Y direction adjusting member that adjusts the amount of movement of the first support in the Y direction through the block body and the block body that moves through the Y direction adjusting member are elastic. And a second elastic member that supports the same.

A probe card for a liquid crystal display according to claim 3 of the present invention is the probe card according to claim 1 or 2, wherein the center of the base of the first support and the center of the base of the second support are the same. Is connected by a pin, and a θ direction adjusting member for adjusting the position of each contact by rotating the first support body in the θ direction in the horizontal direction about the pin from the mounting body to the support body. It is characterized in that it is provided over.

A probe card for a liquid crystal display according to a fourth aspect of the present invention is the probe card according to any one of the first to third aspects, wherein the printed wiring board is provided with a leaf spring interposed therebetween. A height adjusting member that supports the lower surface of the first support body and vertically moves the tip end portion of the leaf spring to adjust the height of each of the contact terminals is provided from the mounting body to the support body. It is a feature.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on the embodiments shown in FIGS. The probe card 10 of this embodiment has the same structure as the conventional probe card except that the structure of the terminal contact mechanism 11 is different. Therefore,
In this embodiment, the terminal contact mechanism 11 will be described with reference to FIGS. This terminal contact mechanism 11 is shown in FIG.
As shown in FIG. 6, a plurality of bump contact terminals 12 corresponding to a part of electrodes (not shown) of the LCD substrate, and a printed wiring connected to these bump contact terminals 12 (see FIG. 6B of the related art). A strip-shaped flexible printed wiring board 13 having a rectangular shape and a rectangular support 15 that supports the printed wiring board 13 via a leaf spring 14.
It is configured to be attached to the attachment body 17 via 6 (see FIG. 4). The support body 15, the mounting body 17, and the leaf spring 14 are all made of metal such as stainless steel.

As shown in FIG. 1, the supporting member 15 has a first supporting member 18 for supporting the printed wiring board 13 on its lower surface via a leaf spring 14, and a second supporting member 18 connected to the first supporting member 18.
The support 19 and the X and Y direction adjusting mechanisms 20 and 21 for adjusting the X and Y position of the first support by moving the first support 18 in the X and Y directions with respect to the second support. When the support body 15 is fixed to the mounting body 17, the position of the first support body 18 in the X and Y directions can be adjusted via the X and Y direction adjusting mechanisms 20 and 21.

The first support 18 is formed as a rectangular block body as shown in FIGS. 1 and 2, for example.
The second support body 19 is composed of a rectangular frame body 19A and a lid 19B that closes the opening of the frame body 19A from above. A substantially rectangular block body 22 is connected to and integrated with the upper surface of the first support 18 via two bolts 23. That is, as shown in FIG. 1, two screw holes 18A are formed on the upper surface of the first support 18, and the block body 22 has two stepped through holes 22A corresponding to the screw holes 18A. Are formed. Bolt 23
Is screwed into the bolt hole 18A of the first support 18 while being loosely fitted in the stepped through hole 22A of the block body 22.

As shown in FIGS. 2 to 4, the X-direction adjusting mechanism 20 includes an elongated X-taper block 20A which engages with a Y-taper surface 22B formed in the Y-direction of the block body 22, and an X-taper block 20A. The X taper block 20A is moved in the vertical direction to move the X of the first support 18 through the block body 22.
A first elastic member (for example, a coil spring) 20C that elastically supports the X-direction adjusting member (for example, a screw member) 20B that adjusts the amount of movement in the direction, and the block body 22 that moves by moving the X-direction adjusting member 20B up and down. And have. Then, one end of the first coil spring 20C is fitted into a recess formed in the side surface of the block body 22, and the other end is supported by a fixing screw 20E screwed into a screw hole 20D on the opposite side surface of the frame body 19A. . The Y-direction inner surface of the X taper block 20A is formed as a taper surface that engages with the Y taper surface 22B, and the Y-direction outer surface is a vertical surface that engages with the inner surface of the frame body 19A of the second support body 19. It is formed as a surface. Therefore, the X taper block 20A is elastically sandwiched by the block body 22 and the frame body 19A.

The Y-direction adjusting mechanism 21 is shown in FIGS.
As shown in FIG. 3, a slender Y taper block 21A that engages with the X taper surface 22C formed in the X direction of the block body 22, and the Y taper block 21A is moved in the vertical direction to move the block body 22. Through the first support 1
A second Y-direction adjusting member (for example, a screw member) 21B that adjusts the amount of movement of the Y-direction 8 in the Y-direction, and a second block that elastically supports the block body 22 that moves by elevating the Y-direction adjusting member 21B
It has an elastic member (for example, a coil spring) 21C. Then, one end of the second coil spring 21C is fitted into the recess formed in the side surface of the block body 22, and the other end is supported by the fixing screw 21E screwed into the screw hole 21D of the opposite side surface of the frame body 19A. . The inner surface of the Y taper block 21A in the X direction is the X taper surface 22.
It is formed as a tapered surface that engages with C, and the outer side surface in the X direction is formed as a vertical surface that engages with the inner surface of the frame body 19A of the second support body 19. Therefore, the X taper block 20
A is elastically sandwiched by the block body 22 and the frame body 19A.

Further, as shown in FIG. 2, the first support 18 and the frame 19A are joined by a pin 24 at the center of the base end portion (right side in the figure) to fix the terminal contact mechanism 11 to the mounting body 17. When the bump contact terminals 12 and the electrodes of the LCD substrate are aligned at the same time, the first support member 18 may contact the pins 2 as described later.
It is configured such that it can be rotated in the forward and reverse directions in the θ direction in the horizontal plane with respect to 4 as a center.

The printed wiring board 13 and the first support 1
As shown in FIG. 1, a leaf spring 14 is interposed between the eight. The printed wiring board 13 is adhered and fixed to the portion from the middle of the leaf spring 14 in the longitudinal direction to the base end portion with an adhesive (not shown), and the tip end portion of the leaf spring 14 is made of rubber or the like. An elastic member (not shown) is coated with a thickness of about 0.3 mm. This elastic member is elastically deformed when the bump contact terminals 12 are pressed against the electrodes to absorb the variation (about 5 μm) in the height direction of the bump contact terminals 12 of all the terminal contact mechanisms 11 mounted on the mounting body 17. I am doing it. Further, the leaf spring 14 is welded to the base of the support 15 at the base by laser beam welding or electron beam welding, and the leaf spring 14 is fixed to the support 15 at this weld.

Further, as shown in FIG. 2 and FIG.
A pair of through holes are formed on the left and right near the tip (lower side in the figure), and a through hole 15A and a screw hole 15B corresponding to the through holes of the mounting body 17 are formed on the left and right near the tip of the support body 15.
Are formed. Then, each through hole 15A, screw hole 1
A height adjusting screw 25 is attached to 5B. As shown in FIG. 2, the height adjusting screw 25 has a sharp lower end protruding downward from the support body 15 and presses against the leaf spring 14 to impart elasticity to the leaf spring 14. Further, a ball (not shown) is embedded in the lower end of the height adjusting screw 25 to form a pen tip of a ballpoint pen.
When adjusting the elasticity of the leaf spring 14 with 5, the height adjustment screw 25
The lower end of the sheet slides smoothly on the leaf spring 14 so that dust is not generated.

Further, as shown in FIG. 2, the first support member 18 is fixed to the support member 15 in the θ direction with respect to the second support member 19 centering on the pin 24 near the tip of the height adjusting screw 25. A θ-direction adjusting mechanism 26 is provided which adjusts the position of the bump contact terminal 12 by rotating in the reverse direction. The θ direction adjusting mechanism 26 includes through screw holes 26A and 26B formed at the centers of the tip ends of the lid 19B and the block body 22, taper screws 26C attached to these screw holes 26A and 26B, and lower ends of the taper screws 26C. A round hole 26 formed in the upper surface of the second support 18 so that the taper portion formed in the portion is fitted.
Have D and. Therefore, as shown in FIG. 4, when the terminal contact mechanism 11 is fixed to the mounting body 17, the insertion depth of the taper screw 26C is adjusted to utilize the tapered surface to center the first support body 18 around the pin 24. The position of the first support 18 is adjusted in the θ direction by swinging to the left and right.
In addition, as shown in FIG. 4, an inverted triangular pyramid-shaped hole 26E is formed on the upper surface of the first support 18, and a round hole 26F is formed on the lower surface of the block body 22. The 1 support 18 and the block 22 are connected by, for example, a piano wire 26G, and are preloaded in the θ direction.

The second support 19 is connected by bolts (not shown) through bolt holes 27A and 27B formed at the four corners of the frame 19A and the lid 19B. Further, the mounting body 17 and the support body 15 are the second support body 18
After adjusting the position, the bolts 28 (not shown) of the mounting body 17 and the bolts 28 that are loosely fitted in the bolt holes 28A on the left and right sides of the second support 19 are screwed into the screw holes 28C of the first support 18. The attachment body 17 and the terminal contact mechanism 11 are finally integrated with each other.

Next, the operation will be described. When the terminal contact mechanism 11 is mounted on the mounting body 17, for example, the first
The printed wiring board 13 and the leaf spring 1 are provided on the lower surface of the support 18.
4 is attached. Then, the pin 2 is inserted into the hole of the first support 18.
4 is attached, the holes of the block body 22 are aligned with the pins 24, the block body 22 is placed on the first support body 18, and the bolt 23
Then, both 18 and 22 are provisionally assembled.

Next, the second support 1 is placed on the first support 18.
The frame body 19A of 9 is placed, and the Y and X taper blocks 20A and 21A of the X and Y adjusting mechanisms 20 and 21 are mounted between the frame body 19A and the block body 22. After mounting the first and second coil springs 20C and 21C in this state, the fixing screw 20
E and 21E are screwed into the respective screw holes 20D and 21D, and the coil springs 20C and 21C are connected to the block body 2 respectively.
2 and the fixing screws 20E and 21E. As a result, the second support 19 becomes movable in the X, Y, and θ directions in the frame body 19A via the block body 22, and
The first support 18 is integrated with the frame 19A of the second support 19. Next, the bolts are attached to the bolt holes 27A and 17B, the lid 19B is attached to the frame body 19A, and the temporary assembly of the terminal contact mechanism 11 is completed.

After that, the temporarily assembled terminal contact mechanism 11 is attached and fixed to the attachment body 17. To do this, from the mounting body 17 to the screw holes 16A and 16B of the second support body 19, the bolt 16
Through the bolt hole 28 of the second support 19
The bolt 28 is loosely fitted to A and 28B and the first support 1
It is screwed into the screw hole 28C of No. 8. At this time, since the bolt 28 is loosely fitted in the bolt holes 28A and 28B of the second support body 19, the first support body 18 is X with respect to the second support body 19,
It is ready to move in the Y and θ directions.

Then, all the second supports 18 are moved to X, Y,
And in the θ direction to align the bump contact terminal 12 with the electrode 12A of the LCD substrate 12. To do so, first, from the mounting hole of the mounting body 17 to the screw hole 15 of the supporting body 15.
A pair of height adjusting screws 25 are attached to A and 15B, and the elastic force of the leaf spring 14 is adjusted to a predetermined size by using each height adjusting screw 25 to adjust the height of the bump contact terminal 12 to a substantially constant height. Adjust to After that, the taper screw 2 of the θ direction adjusting mechanism 26
6C is taken in and out through a hole (not shown) of the mounting body 17, the tip of the support body 15 is swung to the left and right, and the direction of the bump electrode 12 is L.
Match the direction of the electrodes on the CD substrate.

Finally, the first support 18 is moved in the X and Y directions so that the bump electrodes 12 are aligned with the electrodes on the LCD substrate. For that purpose, the X-direction adjusting member 2 of the X-direction adjusting mechanism 20 is used.
The X taper block 20A is moved up and down via 0B to move the block body 22 in the X direction. Block body 22 is X
Find a point where the bump contact terminal 12 coincides with the electrode of the LCD substrate while moving in the direction X, and when they coincide, X
The lifting operation of the direction adjusting member 20B is stopped. Subsequently, the Y taper block 21A is moved up and down through the Y direction adjusting member 21B of the Y direction adjusting mechanism 21 to move the block body 22 in the Y direction, and the point where the bump contact terminal 12 matches the electrode of the LCD substrate is found. When the two coincide with each other, the lifting operation of the X-direction adjusting member 21B is stopped. By these series of operations, the bump contact terminals 12 and the electrodes of the LCD substrate are completely aligned.

By the above operation, the bump contact terminal 12 and the LC
When the electrodes of the D substrate are completely aligned with each other, the bolts 23 are operated to tighten the first support 18 and the block 22 so that there is no rattling. Then, the first support 18 is fastened to the second support 19 and the mounting body 17 with the bolt 28, and the mounting of the terminal contact mechanism 11 is completed.
These series of operations are performed for all the terminal contact mechanisms 11.

As described above, according to this embodiment,
A support 15 that supports the printed wiring board 13 having the bump contact terminals 12 includes a first support 18 that supports the printed wiring board 13, a second support 19 that is connected to the first support 18, and a second support 19. Since the first supporting body 18 is moved in the X and Y directions with respect to the supporting body 19 and the X and Y direction adjusting mechanisms 20 and 21 for adjusting the position of the first supporting body 18 in the X and Y directions are provided, terminal contact is achieved. Even if the mounting holes of the mechanism 11 are slightly displaced or the terminal contact mechanism 11 is aged, the position of the bump contact terminal 12 is finely adjusted with each terminal contact mechanism 11 attached to the mounting body 17. The bump contact terminals 12 can be aligned with the electrodes of the LCD substrate.

Further, according to this embodiment, the first support 1
The base center of 8 and the base center of the second support 19 are connected by a pin, and the first support 18 is centered around the pin 24.
Bump contact terminal 1 by rotating the
The θ direction adjusting member 26C for adjusting the position of 2 is attached to the mounting body 17
Since the bump contact terminal 1 is provided from the
Even if 2 is slightly displaced in the θ direction with respect to the LCD substrate, the displacement can be eliminated by the θ direction adjusting member 26C.

Further, according to the present embodiment, the printed wiring board 13 is supported by the lower surface of the first support 18 via the leaf spring 14, and the tip end portion of the leaf spring 14 is moved up and down to move the bump contact terminal 12. Since the height adjusting screw 25 for adjusting the height of the bump contact terminal 12 is provided from the mounting body 17 to the supporting body 15, the elasticity of the leaf spring 14 can be easily adjusted only by adjusting the height of the bump contact terminal 12 with the height adjusting screw 25. Moreover, the adjustment can be performed in a short time, and thus the labor of the operator can be reduced.

The present invention is not limited to the above embodiment, and such an invention is included in the present invention without departing from the gist of the present invention.

[0032]

According to the present invention, as described above,
According to the invention as set forth in claim 3, even if the mounting holes of the terminal contact mechanisms are slightly displaced or the terminal contact mechanisms are aged, the terminal contact mechanisms are still attached to the mounting body. It is possible to provide a probe card for a liquid crystal display body in which the positions of the contact terminals in the X, Y, Z and θ directions can be finely adjusted from above.

According to the invention of claim 4 of the present invention, in the invention of any one of claims 1 to 3, the height of the contact terminals can be aligned at a desired position. A probe card for a liquid crystal display can be provided.

[Brief description of drawings]

FIG. 1 is a sectional view showing a longitudinal section of a terminal contact mechanism of an embodiment of an LCD probe card of the present invention.

FIG. 2 is an exploded perspective view of the terminal contact mechanism shown in FIG.

FIG. 3 is a plan view showing a part of the terminal contact mechanism shown in FIG.

FIG. 4 is a front view of the terminal contact mechanism shown in FIG.

FIG. 5 is a plan view showing a conventional LCD probe card.

6 (a) is a side view showing a part of the LCD probe card shown in FIG. 5 by breaking it, and FIG. 6 (b) is a plan view from below of the terminal contact mechanism shown in FIG. 6 (a).

[Explanation of symbols]

 Reference Signs List 11 terminal contact mechanism 12 bump contact terminal 13 printed wiring board 14 leaf spring 15 support 17 mounting body 18 first support 19 second support 20 X direction adjusting mechanism 20A X taper block 20B X direction adjusting member 20C first elastic member 21 Y direction adjustment mechanism 21A Y taper block 21B Y direction adjustment member 21C 2nd elastic member 22 Block body 22B Y taper surface 22C X taper surface 24 pin 25 Height adjustment screw (height adjustment member) 26 θ direction adjustment mechanism 26C Tapered screw (Θ direction adjustment member)

Claims (4)

[Claims] 1. A printed wiring board having a plurality of contact terminals corresponding to a part of a large number of electrodes arranged on a peripheral portion of a liquid crystal display substrate, a printed wiring board connected to the contact terminals, and a printed wiring board. A support for supporting the wiring board,
A liquid crystal display probe card for electrically inspecting the liquid crystal display substrate by electrically contacting each of the contact terminals with each of the electrodes. The support includes a first support for supporting the printed wiring board and a second support connected to the first support.
A support body and an X, Y direction adjustment mechanism for moving the first support body in the X and Y directions with respect to the second support body to adjust the X and Y direction positions of the first support body. Liquid crystal display probe card. 2. The X- and Y-direction adjusting mechanism has a block body connected to the first support body so as to be movable in the X and Y directions within the concave portion of the second support body, and The X-direction adjusting mechanism includes an X-taper block sandwiched between the block body and the side surface of the recessed portion of the second support body while being engaged with the taper surface formed in the Y-direction of the block body, and an X-taper block. An X-direction adjusting member that moves up and down to adjust the amount of movement of the first support in the X direction through the block body, and a first elastic member that elastically supports the block body that moves through the X-direction adjusting member. And the Y-direction adjusting mechanism has
The Y taper block sandwiched between the block body and the side surface of the recessed portion of the second support body while being engaged with the taper surface formed in the X direction of the block body, and the Y taper block is moved up and down to support the first support. A Y-direction adjusting member that adjusts the amount of movement of the body in the Y-direction via the block body, and a second member that elastically supports the block body that moves via the Y-direction adjusting member.
The probe card for a liquid crystal display according to claim 1, further comprising an elastic member. 3. The center of the base of the first support and the center of the base of the second support are connected by a pin, and the first support is horizontally rotated in the θ direction in the forward and reverse directions about the pin. The probe card for a liquid crystal display substrate according to claim 1 or 2, wherein a θ-direction adjusting member for adjusting the position of each contact is provided from the attachment body to the support body. 4. A height adjusting member for supporting the printed wiring board on the lower surface of the first support through a leaf spring, and vertically moving the tip end portion of the leaf spring to adjust the height of each contact terminal. The probe card for a liquid crystal display according to any one of claims 1 to 3, wherein the probe card is provided from the mounting body to the support body.