JPH0970821A - Wire type cutting equipment - Google Patents

Abstract

(57) [Abstract] (Correction) [Problem] A mechanism for supplying a new wire and a mechanism for keeping the tension constant are simple, inexpensive and excellent in maintainability, and even for continuous operation for a long time. Provided is a wire-type processing / cutting device in which fluctuations in wire tension are small and wire breakage is unlikely to occur. SOLUTION: The means for collecting the wire 1 has a torque motor engaged with a take-up reel 13 for collecting the wire, and the means for applying tension to the wire comprises a pulley engaged with the wire. A wire-type working / cutting device having springs 28, 29, 30 provided at the upper ends of guide shafts 31, 32 for raising and lowering while guiding the weights 26, 27.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire-type working / cutting apparatus for grinding brittle materials such as ceramics, semiconductor materials, piezoelectric crystals and magnetic materials by relatively moving a wire and a work (workpiece). .

[0002]

2. Description of the Related Art For processing and cutting brittle materials such as silicon ingots for semiconductors, crystal of crystal for crystal unit, magnets, etc.
There is a demand for low processing loss, low processing deterioration, high processing surface accuracy, and high-speed processing cutting. As one of the processing / cutting methods, there is a wire-type processing / cutting apparatus for supplying a processing liquid in which abrasive grains are dispersed in water or oil to perform processing and cutting while slidingly contacting a wire with a work. It was developed in France in the 1960s and became widespread with the demand for high precision electronic components.

Since the wire saw has the advantages of (1) polishing, it has a small amount of work-affected layer and chipping on the processed surface. (2) The thickness accuracy and taper of the processed part are several μm, and the processing accuracy is high. (3) The processing efficiency is high because it can be processed with dozens or hundreds of wires at a time, and the disadvantages are (4) the working liquid is dirty because the machining fluid is scattered, and the working environment is not good. (6) The running cost of the working fluid, wire, etc. is relatively high compared to the grinding process.

FIG. 2 shows the basic construction of a conventional wire-type working / cutting device. A new wire of the wire 1 emerges from the wire supply reel 2, passes through the guide pulleys 3, 4 and 6 and is wound around the grooved guide roller 7 and the grooved processing rollers 8 and 9.
After that, it is collected on the take-up reel 13 via the guide pulleys 10, 11, and 12. Wire 1 is a guide pulley 3,4
The seesaw mechanism 5 and 11 and 12 can reciprocate, and move relative to the work 14. The work 14 is lifted by the work lifting mechanism 15, the wire 1 is brought into sliding contact with the work 14 between the grooved processing rollers 8 and 9, and the working liquid 17 jetted from the working liquid supply unit 16 is supplied to perform abrasive grain processing. It The work raising / lowering mechanism 15 is raised according to the processing speed, and the raising speed is set so that a new portion of the work 14 is always in sliding contact with the wire 1. Since simply reciprocating the wire 1 causes abrasion due to abrasive grain processing, a certain amount of new wire is supplied and at the same time the worn wire is recovered. In order to process the abrasive grains uniformly, it is necessary to always supply an appropriate amount of the processing liquid 17 near the processed portion.

A factor that greatly affects the processing accuracy is the undulation that occurs on the processed surface. It is known that this waviness is (1) smaller as the wire tension is larger (2) smaller as the wire diameter is larger (3) smaller as the wire twist is smaller (4) smaller as the distance between the processing rollers is smaller, etc. Has been. However, increasing the wire diameter increases the processing loss. Moreover, wire tension, various reel diameters, various roller diameters, etc. are inevitably large, and the device becomes large.

Since many of the above-mentioned work materials are expensive, processing loss (a portion which becomes fine powder due to processing and cannot be used)
It is possible to improve the productivity by using the material effectively as much as possible. For that purpose, a thin wire is used, but it is important to stabilize the tension of the wire as the wire is thinner, and if the tension fluctuates, it may cause a disconnection. FIG. 3 shows the relationship between the traveling speed of the wire and the time and the relationship between the tension of the wire and the time. If the wire tension is not constant, overshoot occurs as shown in FIG. 3 and causes wire breakage. Various inventions have been made to solve these problems.

As a method for supplying a new wire to a wire, Japanese Patent Publication No.
No. 88204 discloses an electric slip clutch for turning on / off the supply of wires by an electric signal.

Further, if the tension of the wire is not stable, it causes waviness on the machined surface. Therefore, as a method of stably generating the tension of the wire, there is disclosed in Japanese Patent Laid-Open No. 4-75862.
JP-A No. 2000-242242 discloses a mechanism for absorbing tension fluctuations caused by an elastic member. Japanese Examined Patent Publication No. 4-29512 discloses a method of winding wires around a set of capstans, controlling the number of revolutions of the wires, and generating tension by the difference between the two. Further, Japanese Examined Patent Publication No. 4-4096 describes that a wire is wound around a fixed roller and a movable roller, and the movable roller is moved in synchronism with the reciprocating motion of the wire, thereby relaxing and relaxing the wire. There is.

As a method for stably supplying the working fluid 17,
Japanese Patent Laid-Open No. 6-126733 discloses a conventional method for supplying a working liquid from above a wire, and FIG. 2 discloses a method for supplying a working liquid from the side of a work. Further, Japanese Patent Laid-Open No. 3-208555 discloses a method in which a working fluid is jetted from below the wire and supplied. Further, in Japanese Patent Laid-Open No. 6-39095, it is more effective to apply the working liquid from both sides of the work rather than directly to the upper side of the work, and it is more effective to supply the working liquid from both sides of the work with an inverted T-shaped slit nozzle. It is described that the liquid is drawn into the wire to increase the amount of adhesion to the wire. Further, Japanese Patent Application Laid-Open No. 61-121871 discloses a method of immersing the work and the lower part of the grooved processing roller in the working liquid in order to always supply the working liquid sufficiently.

A method for driving the roller is disclosed in Japanese Patent Laid-Open No. 61-
FIG. 1 of 182759 discloses a method of driving a plurality of rollers with one motor. A toothed belt is illustrated for driving, and gears, chains, etc. are illustrated as means for surely transmitting a rotational force without slip on lines 6 to 10 in the left column of page 2.

[0011]

In Japanese Patent Publication No. 6-88204 disclosed as a method for supplying a new wire for a wire, two position detection sensors are provided at a position corresponding to the length of the new wire supplied. Since these signals are transmitted to the wire supply motor, when the inside of the device is contaminated with the working fluid, the detection sensitivity becomes dull and it may not operate normally.
Further, there is a problem in the life of the position detection sensor due to dirt.

In Japanese Patent Application Laid-Open No. 4-75862, which is disclosed as a method for keeping the wire tension constant, an elastic body which absorbs the fluctuation of the tension is engaged with the guide reel. To cope with this, if the elastic constant is increased, small fluctuations cannot be dealt with, and conversely, if the elastic constant is decreased to cope with small fluctuations in tension, the elastic body always vibrates, and the tension becomes unstable.

Further, the method of providing a capstan described in Japanese Patent Publication No. 4-29512 has a problem that the apparatus becomes large and expensive because the number of parts is increased and precise control of the rotation speed is required. Furthermore, Japanese Patent Publication No. 4-4096
Regarding the method of providing the movable roller and the fixed roller described in No. 3, there is a problem that the number of rollers increases, the device becomes large and expensive, and when the wire is broken, it takes time to wind the wire.

As a method for stably supplying the working liquid 17, the conventional method for supplying the working liquid from above the wire, which is described in Japanese Patent Laid-Open No. 6-126733, is difficult to sufficiently supply the working liquid to the working portion of the workpiece. There is a problem. Further, in the method of supplying the machining liquid from the side of the work, the machining liquid supply section becomes large, and especially in the case of a large work, the machining liquid supply section occupies a large space accordingly, so that the apparatus becomes large, and further the wire is used. On the other hand, since the working liquid is supplied from above, there is a problem that the working liquid is not sufficiently supplied because the amount of the working liquid droops downward.

In the method of supplying from both sides of the work with the inverted T-shaped slit nozzle described in Japanese Patent Publication No. 6-39095,
In order to sufficiently attach the working fluid to the wire, it is effective to increase the portion where the wire is immersed in the working fluid, that is, the width of the T-shape is widened, and as a result, the distance between the grooved working rollers is increased. There is a problem in that the wire becomes longer and the tension of the wire is likely to be uneven, and undulations are likely to occur on the processed surface. There is also a problem that the device becomes large in size as in JP-A-6-126733. Further, in the method of dipping the work and the lower part of the grooved processing roller in the processing liquid of JP-A-61-121871, the tank for the processing liquid is enlarged by a circulation device or the like in order to uniformly disperse the abrasive grains, and the processing liquid is also required. There is a problem that a large amount is required. There is also a problem in that a stretchable partition is required to separate the mechanism for raising and lowering the work from the machining liquid, which complicates the apparatus and reduces maintainability.

As a roller driving method, Japanese Patent Laid-Open No. 61-18
No. 2759 exemplifies tooth belts, gears, chains, and other means for reliably transmitting rotational force without slipping, but when in operation, each part gradually wears and wear powder and abrasive particles adhere. As a result, sudden fluctuations in rotational force may occur when they adhere to the joint. In that case, there is a problem that the tension of the wire is changed and eventually the wire is broken. In particular, when continuously operating for a long period of time, wire breakage is a major problem because it reduces the operating rate.

In view of these problems, an object of the present invention is to provide a wire-type working / cutting device which can stably supply a new wire with a simple structure and has a constant wire tension. Further, it is an object of the present invention to provide a wire-type working / cutting device which is capable of stably supplying a working liquid to the vicinity of a working portion and having no waviness on the working surface and capable of highly accurate working and cutting. It is an object of the present invention to provide a wire-type processing / cutting device in which wire breakage is unlikely to occur even after continuous operation for a long time.
Another object of the present invention is to provide a wire-type working / cutting device which has a simpler structure and a smaller number of parts as compared with the conventional one, and is consequently inexpensive and excellent in maintainability.

[0018]

Means for supplying a wire, means for applying tension to the wire, means for winding the wire around a working roller and a guide roller to form parallel wire rows, the working roller and the guide roller In a wire-type working / cutting device consisting of a means for rotating the blade forward and backward, a means for raising and lowering a work, a means for supplying a working liquid containing abrasive grains, and a means for collecting a wire, at least a means for collecting the wire collects the wire. A spring provided at the upper end of a guide shaft having a torque motor engaged with a take-up reel, and means for applying tension to the wire, which moves up and down while guiding a weight provided with a pulley engaged with the wire. It is characterized by having.

In the above invention, the means for supplying the wire includes a torque motor engaged with a supply reel for supplying the wire. Further, in the means for supplying the wire, the motor engaged with the supply reel for supplying the wire is intermittently rotated in synchronization with an inversion signal for rotating the processing roller and the guide roller in the forward and reverse directions. .

A means for supplying a wire, a means for applying a tension to the wire, a means for winding the wire around a working roller and a guide roller to form a parallel wire row, and a means for rotating the working roller and the guide roller in forward and reverse directions. In a wire-type machining / cutting device comprising a means for raising and lowering a work, a means for supplying a machining liquid containing abrasive grains, and a means for collecting a wire, a pump for supplying the machining liquid to the means for supplying the machining liquid; A space for retaining the working liquid is provided between the roller and a receiving part of the working liquid extending below the working roller.

A means for supplying a wire, a means for applying a tension to the wire, a means for winding the wire around a working roller and a guide roller to form a parallel wire row, and a means for rotating the working roller and the guide roller in forward and reverse directions. In a wire-type machining / cutting device comprising a means for raising and lowering a work, a means for supplying a machining liquid containing abrasive grains, and a means for collecting a wire, the means for rotating the machining roller and the guide roller forward and backward is the machining roller. And a flat belt or a V-belt for engaging the guide roller with the same drive motor. Further, in the above three inventions, the grooved roller is made of resin.

[0022]

The invention of claim 1 will be described with reference to FIG. FIG. 5 shows only the portion of the wire-type working / cutting device of the present invention related to the new wire supply. The weight 26 for keeping the tension constant rises, and the spring 28 contracts by the displacement X by the load. When the weight 26 does not rise and the spring 28 does not contract, the wire 1 is always pulled by the torque T from the take-up reel side and is constant.
Changes little by little depending on the winding radius R of the take-up reel 13. However, when the weight 26 rises and the spring 28 contracts by the displacement X by the load, the restoring force of the spring 28 −K
The tension F of the wire 1 is reduced by the amount of X, and the new wire is supplied by being pulled toward the take-up reel 13 by that amount. The range is defined by the displacement X of the spring length represented by 0 <X ≦ (T / R−F) / K.

The invention of claim 4 will be described with reference to FIG. FIG. 4 (a) shows an example of the present invention, and FIG. 4 (b) shows a conventional example in which a working fluid is sprayed from above. When spraying the working fluid from above, it is not efficient because the working fluid only adheres to the wire in the form of droplets and does not adhere uniformly, and it often drops below the amount of adhesion. . In particular, the wire reciprocates, and the droplet-like working fluid is more likely to drop. On the other hand, in the example of the present invention, the wire is soaked in the working fluid in many portions, and moreover, even when the wire reciprocates, since the working fluid reservoir extends in the horizontal direction, the wire can be stably supplied. Furthermore, if the wire diameter becomes smaller,
Since the width of the machining groove that is cut off by machining is narrowed, it is difficult for the machining liquid to penetrate deep into the machining groove due to the viscosity and surface tension of the machining liquid. On the other hand, the method of supplying the working liquid from the side surface of the work can be sufficiently supplied without being affected by the depth of the working groove.

According to the invention of claim 5, a flat belt, V
The driving method having no teeth such as a belt has a mitigating action against a slight fluctuation of the rotational force, and consequently has a function of mitigating a fluctuation of the wire tension. On the other hand, in the toothed drive method, the mitigating action against the fluctuation of the rotational force is hindered by the teeth, which is small. Further, with respect to the wear of the drive portion, the toothed drive method tends to increase the fluctuation of the rotational force as the wear progresses.
With a driving method such as a V-belt having no teeth, even if the driving method is worn, the rotational force is unlikely to fluctuate, and thus the wire tension is unlikely to fluctuate.

In the invention of claim 4, as shown in FIG. 3, the tension of the wire 1 causes an overshoot of the tension at the time of speed reversal when the grooved guide roller and the grooved processing roller are rotated in the forward and reverse directions. This occurs because the inertia of the weights 26, 27 and other pulleys delays the movement of the wire 1. If the grooved guide roller and grooved processing roller are made of metal, they will hardly absorb the tension overshoot, but if the grooved guide roller and grooved processing roller are made of resin, the groove surface The elasticity of the wire 1 has the effect of absorbing the tension of the wire 1 little by little. The entire groove will have the effect of absorbing tension overshoot. Furthermore,
In the case of the resin-made grooved guide roller and the grooved processing roller, the wire 1 is less likely to be worn or scratched, and thus has a good property as a roller that rotates in the forward and reverse directions.
As a result, wire breakage is less likely to occur.

[0026]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows a schematic structure of a wire type processing and cutting apparatus of the present invention. From the supply reel 2 around which the new wire of the wire 1 is wound, through the guide reel 18, the guide reel 24 provided on the weight 26, the guide reels 19 and 20,
The grooved guide rollers 7a and 7b and the grooved processing rollers 8 and 9 are wound along the multiple grooves. Furthermore, the guide reels 21 and 2
2, it is wound on the take-up reel 13 via the guide reel 25 and the guide reel 23 provided on the weight 27.

The wire 1 is in sliding contact with the work 14 between the grooved working rollers 8 and 9 and repeats the reciprocating motion of a certain distance.
The machining fluid 17 supplied thereto from the machining fluid supply parts 16a and 16b travels through a machining fluid receiver having a slit-shaped machining fluid guide on the upper side thereof, and comes into contact with the grooved machining rollers 8 and 9 to the wire 1. And the working liquid 17 is supplied from the horizontal direction. Regarding the abrasive grains in the working fluid, the shape thereof is indefinite, and if the grain size is larger than the wire diameter, the horizontal component of the working resistance, which is ineffective for working, locally increases, and the above waviness easily occurs. Therefore, the average particle size of the abrasive grains is 1 / the wire diameter.
About 20 to 1/4 is desirable. If the concentration of abrasive grains in the working fluid is too low, the working efficiency will be poor, and if the concentration of abrasive grains is too high, the fluidity of the working fluid will be poor and the working fluid cannot be supplied sufficiently. As the liquid in the working liquid, a mechanical oil such as a grinding oil is often used because it can prevent rust and obtain an appropriate viscosity.

The work 14 is moved by the work lifting mechanism 15.
It rises at a constant speed according to the processing speed. In particular,
By rotating the ball screw, the table for supporting the work 14 can be raised or lowered at a constant speed. If there is a discrepancy between this speed and the actual processing speed (especially when the ascending / descending speed is faster than the actual processing speed), the wire 1 bends upward and stable processing cannot be performed. In that case, it is necessary to slow down the ascending / descending speed of the work to match the actual processing speed. However, there are cases where the supply of the processing liquid 17 is not successful or the tension of the wire 1 is proper, so it is desirable to determine the processing speed after adjusting other conditions. There is also a method in which the work ascending / descending speed is not constant but increases with a constant load, and in this case, the contact force between the work 14 and the wire 1 is constant. In the case of a work (for example, a cube or the like) whose contact length at this contact portion does not change as the machining progresses, the contact pressure becomes constant and stable.

The function of absorbing the relaxation and tension of the wire due to the reciprocating motion of the wire 1 and keeping the wire tension constant,
It is performed by moving the weights 26 and 27 up and down along the elevating shafts 30 and 31. The movement of the wire 1 due to the reciprocating motion is absorbed by the weights 26 and 27 moving up and down in the opposite directions in synchronization like a seesaw. Further, since the weights 26 and 27 are provided on both sides, the wire 1 is provided between the grooved processing rollers 8 and 9.
A certain amount of tension is generated in. The reciprocating movement of the wire 1 and the lifting and lowering of the weights 26, 27 are performed by the grooved guide rollers 7a, 7
b and the grooved processing rollers 8 and 9 are synchronized with a flat belt or the like, and are normally and reversely rotated by a motor. The distance of the reciprocating motion is limited by the lifting range of the weights 26 and 27, and
It is advisable to subtract the length of the spring 28 from the lengths of 1 and 32 and lengthen it by the displacement X. Further, in order to make the tension of the wire 1 more constant, it is necessary that the weights 26 and 27 can be smoothly moved up and down with respect to the lifting shafts 31 and 32. Spring 29,
Reference numeral 30 is for safety not to collide when the weight comes down, and is not related to new line supply but for safety.

There are two methods for supplying the wire 1, and the first method is to use a torque motor as a motor for driving the supply reel and supply the wire 1 by a torque difference from the torque motor on the recovery side. The second method is grooved processing rollers 8 and 9
And the grooved guide rollers 7a and 7b are synchronized with an inversion signal for forward and reverse rotation, and the motor engaged with the supply reel 2 is intermittently rotated and supplied. In either case, the torque motor engaged with the take-up reel 13 pulls it toward the recovery side with a constant tension.

Next, a method of supplying the working liquid 17 will be described. FIG. 4A shows a portion for supplying the working fluid of the present invention. The machining liquid receiver needs to have a length closer to the work 14 than the grooved machining rollers 8 and 9 so that the machining liquid 17 is sufficiently supplied to the wire 1. In addition, the gap between the machining liquid receiver and the grooved machining rollers 8 and 9 is set in consideration of the viscosity of the machining liquid 17 so that the liquid does not drip and does not come into contact with the grooved machining rollers 8 and 9. If this machining liquid receiver is installed at an angle, the liquid drops from the lower side, so it is necessary to have a receiver at both ends. Further, if the viscosity of the working fluid 17 is too high, the working fluid is not sufficiently supplied to the working portion. On the contrary, if the working fluid 17 is too low in viscosity, the excess working fluid drips and the inside of the machine is easily soiled. Further, if the machining liquid receiver is arranged outside the grooved machining rollers 8 and 9, the distance from the work 14 to the grooved machining rollers 8 and 9 can be shortened, so that the machining liquid 17 can be sufficiently supplied. .

Next, a method of driving the grooved working rollers 8 and 9 and the grooved guide rollers 7a and 7b will be described. FIG. 6 shows an example of a driving method using a flat belt. The grooved processing rollers 8 and 9 and the grooved guide rollers 7a and 7b are coaxially arranged with pulleys for winding a flat belt, a V-belt or the like, and the rotary drive source motor 33 first moves the grooved guide rollers 7a and 7b. The rotational force is transmitted and further transmitted to the grooved processing rollers 8 and 9. The rotational force from the motor 33 may be individually transmitted to each roller by a belt.
The same applies to the case of the V-belt, and both can be used.

Finally, the structures of the grooved working roller and the grooved guide roller will be described. FIG. 7A shows an example of a sectional structure of the grooved processing roller and the grooved guide roller, and FIG. 7B shows an enlarged view of the surface thereof. Each roller has a resin sleeve 36 for forming a groove on the shaft 35.
Are press-fitted concentrically and are fixed by a presser plate 40. A V-shaped groove is formed on the surface as shown in FIG. The wire 1 in the groove is wound, and the processing pitch is determined. The shaft 35 is made of quenched carbon steel, chromoly steel, stainless steel, etc., and the resin sleeve 36 is made of polyamide resin, polyethylene resin, polystyrene resin, vinyl chloride resin, methacryl resin, polyether sulfone resin, polyethylene terephthalate resin, polybutylene. Terephthalate resin, polycarbonate resin, polyarylate resin, polypropylene resin, polyacetal resin, polyphenylene oxide resin, tetrafluoroethylene resin, epoxy resin, polyetherketone resin, polyetherimide, polyimide resin and various liquid crystal polymer resins can be used. From the viewpoint of wear of the bearing of each roller, the load of the bearing is smaller when the weight of the roller is as light as possible, and therefore, it is desirable that the specific gravity is small when selecting the resin. For the shaft 35, the hollow shaft also reduces the load on the bearing for the same reason. A protective plate 3 for protecting the bearing 38 from the working liquid is provided at the end of the resin sleeve.
7. A pulley 39, a bearing 38, etc. for transmitting a rotational force to the flat belt are arranged on the shaft 35. In the case of a V-belt, the pulley 39 is a V-shaped receiver, but the same arrangement is possible.

As an actual processing example, quartz crystal and PrF
The conditions when the eB rare earth magnet is cut and variations in processing dimensions will be described.

(1) Processing conditions: grooved processing roller φ40 m
m nylon 66, grooved guide roller φ40 mm nylon 66, wire diameter φ0.16 mm, wire feed speed 130 m / min, machining speed 5 mm / hour, weight weight 3 kg / piece, machining fluid is abrasive grain ( GC1000): Grinding oil = 1: 1 (2) Workpiece example: (A) Quartz crystal, (B) PrFe
The B-type rare earth magnets and the processing dimensions were set to 2.80 mm, and the conditions were the same.

(3) Processing dimensional variation result: (A) Quartz crystal, average value = 2.805 mm, standard deviation = 0.01
2 mm, N = 36, (B) PrFeB-based rare earth magnet,
Mean value = 2.806 mm, standard deviation = 0.028 mm,
N = 36 pieces The PrFeB system rare earth magnet has a slightly tenacious property, so the standard deviation of the processing dimension is large, but the standard deviation of 0.012 for the crystal of quartz, which is a typical brittle material.
The variation is as small as mm, and the processing accuracy is excellent. In addition, the loss (width of the processed groove) caused by the processing is about 0.2 mm, which is about the wire diameter of 0.16 mm plus twice the average abrasive grain size of about 0.02 mm.
It can be seen that the processing loss is also small. By making the grooved roller made of nylon, it became easy to groove the roller itself, and the wire was never broken during the processing time.

[0037]

As described above, according to the present invention, the means for supplying a new wire is a simple mechanism in which only a spring is added to the lifting mechanism of the weight for keeping the tension constant, which is inexpensive and easy to maintain. An excellent wire-type processing and cutting device can be provided. In addition, since there are many parts where the wire and machining fluid are in contact with each other, and the machining fluid reservoir extends in the horizontal direction even when the wire reciprocates, the machining fluid can be supplied stably, and machining accuracy and machining efficiency are improved. It is possible to provide a high wire type cutting machine. Further, if the amount of the working fluid supplied is proper, the working fluid that drops down is small, and the inside of the device is clean and clean. Further, as a secondary effect, the temperature of the grooved processing roller can be stably maintained by keeping the temperature of the processing liquid constant, so that the dimension of the wire row is stable and the variation of the processing dimension is reduced. Furthermore, even during continuous operation for a long period of time, the drive belt and the resin sleeves of each roller that winds the wire alleviate wire tension fluctuations due to the effect of mitigating fluctuations in the wire tension, resulting in a high operating rate of the wire type. A processing cutting device can be provided.

[Brief description of drawings]

FIG. 1 is a diagram showing a schematic structure of a wire type processing and cutting apparatus of the present invention.

FIG. 2 is a diagram showing a schematic structure of a conventional wire-type working / cutting device.

FIG. 3 is a diagram showing changes over time of a wire traveling speed and a wire tension.

FIG. 4 (a) is a view showing a portion for supplying the working fluid of the present invention. (B) The figure which shows the part which supplies the conventional processing liquid.

FIG. 5 is a view showing a mechanism for supplying a new wire of the present invention.

FIG. 6 is a view showing a schematic structure of a portion that drives a grooved processing roller and a grooved guide roller of the present invention.

FIG. 7 (a) is a view showing a schematic structure of a grooved processing roller and a grooved guide roller of the present invention. (B) A partial enlarged view of the surfaces of the grooved processing roller and the grooved guide roller of the present invention.

[Explanation of symbols]

 1 wire 2 supply reel 3, 4, 6, 10, 11, 12 guide pulley 5 seesaw mechanism 7a, 7b grooved guide roller 8, 9 grooved processing roller 13 take-up reel 14 work 15 work lifting mechanism 16, 16a, 16b Machining liquid supply unit 17 Machining liquid 18 to 23, 24, 25 Guide pulley 26, 27 Weight 28, 29, 30 Spring 31, 32 Lifting shaft 33 Motor 34 Flat belt 35 Shaft 36 Resin sleeve 37 Protective plate 38 Bearing 39 Pulley 40 Presser foot Board

Claims (6)

[Claims] 1. A means for supplying a wire, a means for applying a tension to the wire, a means for winding the wire around a processing roller and a guide roller to form a parallel wire row, and a forward and reverse rotation of the processing roller and the guide roller. In a wire-type working / cutting device comprising: a means for moving a workpiece, a means for raising and lowering a work, a means for supplying a working liquid containing abrasive grains, and a means for collecting a wire, at least a means for collecting the wire collects the wire. A torque motor engaged with the wire, and a means for applying a tension to the wire includes a spring provided at an upper end of a guide shaft for moving up and down while guiding a weight having a pulley engaged with the wire. A characteristic wire-type processing and cutting device. 2. The wire type cutting machine according to claim 1, wherein the means for supplying the wire includes a torque motor engaged with a supply reel for supplying the wire. 3. In the means for supplying the wire,
2. The wire type working / cutting apparatus according to claim 1, wherein a motor engaged with a supply reel for supplying the wire is intermittently rotated in synchronization with an inversion signal for rotating the processing roller and the guide roller in a forward and reverse direction. . 4. A means for supplying a wire, a means for applying tension to the wire, a means for winding the wire around a processing roller and a guide roller to form a parallel wire row, and a forward and reverse rotation of the processing roller and the guide roller. In the wire-type machining and cutting apparatus, which comprises a means for moving the workpiece, a means for raising and lowering the work, a means for supplying a machining fluid containing abrasive grains, and a means for collecting the wire, a pump for supplying the machining fluid to the machining fluid supply means. A wire-type working / cutting device comprising: a space for retaining the working liquid between the working roller and a receptacle for the working liquid extending below the working roller. 5. A means for supplying a wire, a means for applying tension to the wire, a means for winding the wire around a processing roller and a guide roller to form a parallel wire row, and a forward and reverse rotation of the processing roller and the guide roller. In the wire-type machining / cutting device comprising means for moving the work, means for raising and lowering the work, means for supplying a machining liquid containing abrasive grains, and means for collecting the wire, the means for rotating the machining roller and the guide roller in the forward and reverse directions is A wire-type working / cutting device comprising a flat belt or a V-belt for engaging the working roller and the guide roller with the same drive motor. 6. The wire type working and cutting apparatus according to claim 1, wherein the grooved roller is made of resin.