JPH01288384A - air shower device - Google Patents

Abstract

(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an air shower device installed at the entrance of a clean room, and particularly to an air shower device suitable for improving the usage environment in a shower room.

[Conventional technology]

The conventional device, as described in Japanese Patent Publication No. 61-529, has a structure in which the air in the clean room is sucked in through the suction port at the bottom of the nose of the shower room, purified by the main filter, and then a part of the air is supplied back to the clean room. It had become.

[Problem to be solved by the invention]

Although the above-mentioned conventional technology takes into consideration the cleaning of the air shower room, it does not take into account the temperature rise inside the shower room due to the heat generated by the air curtain fan. In addition, in order to maintain the shower room at an appropriate temperature, as shown in Figure 6, an air conditioning unit 9 is installed in the air shower device to maintain a constant temperature in the shower room, or a suction lower is simply installed to maintain a clean room temperature. Inhale the air conditioned air inside and enter the air shower room.

A method of circulation was used. However, the above method requires an air conditioning system, which makes the equipment expensive.
Further, in the method described below, since the air shower room is under positive pressure, there is a problem that the dust scattered during the operation of the air jet flows into the clean room. SUMMARY OF THE INVENTION An object of the present invention is to maintain the temperature inside an air shower room using a simple method without scattering dust inside the air shower into a clean room.

[Means to solve the problem]

The above objects provide a shower room equipped with an air shower supply means to which an air shower of clean air is supplied; an air curtain forming means for forming a substantially laminar air flow in the shower room; In an air shower device, the forming means includes a reflux section for refluxing air in the shower chamber, wherein the reflux section is provided with outside air intake means, and the outside air intake means is provided with means for preventing pressure increase in the shower chamber. The above object is also achieved by providing a shower room equipped with an air shower supply means to which an air shower of clean air is supplied, and an air curtain forming means for forming a substantially laminar air flow in the shower room. an air shower device configured to be disposed at an entrance/exit of a temperature-controlled space, the air shower device comprising: a reflux section for refluxing air in the shower room from the shower room to the air curtain forming means; This is achieved by providing a communication means for communicating the inside and outside of the temperature-controlled space, and a heat exchange means provided in the communication means. “[Operation] The air shower supply means supplies an air shower of clean air to the shower room.

The air curtain forming means forms a substantially laminar airflow within the shower room. The recirculation section recirculates the air in the shower room from the shower room to the air curtain forming means. The outside air intake means allows air outside the air shower device to flow into the reflux section. The pressure increase prevention means stops the outside air intake of the outside air intake means during the air shower operation. This prevents the temperature inside the shower room from rising during air curtain operation, and also prevents the pressure inside the shower room from increasing during air jet operation, thereby preventing dust from flowing out of the shower room.

Further, the communication means allows the air in the temperature-controlled space to flow out of the space through the reflux section. The heat exchange means exchanges heat between the air in the communication means and the air in the reflux section, and
Air in the communication means is prevented from flowing into the reflux section.

This makes it possible to prevent a temperature rise in the shower chamber during air curtain operation and an increase in pressure within the shower chamber during air jet operation.

〔Example〕

Embodiments of the present invention will be explained below with reference to FIGS. 1 to 5.
A first embodiment of the present invention will be explained with reference to FIGS. 1 to 4.
In this embodiment, an outside air intake lower as an outside air intake means is provided on the side of the main body, and the outside air intake from the outside air intake lower can be opened and closed by the action of the opening/closing fitting 6 as a means for preventing pressure increase. This is what I did. The opening/closing fitting 6 and the outside air intake lower are provided in a recirculation section extending from the suction port to the suction port of the air curtain fan 1. The opening/closing fitting 6 operates so as to be opened when only the air curtain fan 1 is operating, and closed when the air jet fan 2 is operating.

In this type of air shower device, since the operating time of the air jet is shorter than the operating time of the air curtain, temperature rise can be prevented even with this type of operation. An example of the opening/closing device of the opening/closing fitting 6 is shown in FIG. 2. In this embodiment, the opening/closing device 8 is a bellows that expands and contracts with air pressure. Figure 2 (a
) shows the operating state of only the air curtain fan 1, but since the opening/closing device 8 is in the contracted state, the opening/closing fitting 6 is in the open state, allowing outside air to be taken in.

Further, FIG. 2(b) shows the air jet operation, and due to the action of the air jet fan 2, the opening/closing device 8 is extended and presses the opening/closing fitting 6, so that it is in the closed state.

Prevent the intake of outside air. The opening/closing fitting 6 is configured so as not to prevent the air sucked in from the suction port 10 provided below the shower room from flowing back toward the suction port of the air curtain fan 1. According to this embodiment, when the air jet is in operation, the inside of the shower room is
Since there is no positive pressure, dust is prevented from flowing back into the clean room and scattering. When the air jet is not in operation, outside air from the clean room can be circulated into the shower room, making it possible to suppress temperature rises. Further, as the opening/closing device for the opening/closing fitting 6 of the outside air intake port, a solenoid 14 provided to operate in conjunction with the operation of the air jet fan 2 as shown in FIG. 3 may be used.

An electric damper 16 that operates in conjunction with the operation of the air jet fan 2 as shown in FIG. 4 may also be used.

A second embodiment of the present invention will be explained with reference to FIG.

In this embodiment, a duct 11 equipped with a heat exchange path is provided in the air shower device, and a clean room 13 which is a temperature-controlled space and a work area 12 outside the clean room 13 are provided.
This is an example of a configuration in which the constant temperature air in the clean room 13 is flowed out through the duct 11 to perform heat exchange due to the pressure difference, thereby suppressing the temperature rise in the air shower. In this embodiment, the duct 11 as a communication means is connected to the air suction port 1 at the bottom of the shower room 5.
It is provided so as to penetrate through the recirculation part from o to the suction port of the air curtain fan 1.

The duct 11 is provided with a heat exchange means 11a such as a radiation fan, which exchanges heat between the circulating air passing through the reflux section and the conditioned air in the clean room 13 passing through the duct 11. The heat generation is from duct 1
A clean route that passes through 1.

It is discharged into the work area 13 along with the exhaust from the shower room 13, thereby preventing a rise in temperature within the shower room 5.

Furthermore, in this embodiment, the conditioned air in the clean room 13 only passes through the duct 11 and does not flow into the airflow circulating through the reflux section, so it is possible to prevent the pressure inside the shower room 5 from increasing. Even when the air jet fan 2 is operating, the dust generated in the shower room 5 can be prevented from flowing back into the clean room and being scattered. In this embodiment, even when the air jet fan 2 is operating, the air supplied as an air curtain is can be made close to the temperature inside the clean room 13.

〔Effect of the invention〕

According to the present invention, it is possible to prevent the dust generated during air jet operation from backflowing into the clean room, and to maintain the temperature inside the air shower room at a temperature close to the temperature inside the clean room. Air shower equipment can be obtained.

[Brief explanation of the drawing]

FIG. 1 is a longitudinal cross-sectional view of an air shower device according to a first embodiment of the present invention, and FIGS. 2 (a) and (b) are longitudinal cross-sectional views of main parts showing the open and closed states of the opening/closing fitting of this embodiment, respectively. Surface diagram. FIGS. 3(a) and 3(b) are longitudinal cross-sectional views of main parts showing the open state and closed state, respectively, when the switching device is a solenoid in this embodiment. Fig. 4 is a longitudinal sectional view when the opening/closing device is an electric damper in this embodiment, and Fig. 5(a) and Cb') are a plan view and a part of the air shower device in the second embodiment of the present invention, respectively. FIG. 6 is a sectional view of a conventional air shower device. DESCRIPTION OF SYMBOLS 1... Air curtain fan, 2... Air jet fan, 3... HEPA fan, 4... Air jet air outlet, 5... Shower room, 6... Opening/closing fitting, 7...・Outside air intake 0.8...Switching device, 9...
・Air conditioner 22, 10...Electric damper, 11...
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Claims (1)

[Scope of Claims] 1. A shower room equipped with an air shower supply means to which an air shower of clean air is supplied, an air curtain forming means for forming a substantially laminar airflow in the shower room, and the shower room. and a recirculation section that recirculates the air in the shower chamber to the air curtain forming means, the recirculation section comprising outside air intake means, and the outside air intake means increases the pressure inside the shower chamber. An air shower device comprising a prevention means. 2. A shower room equipped with an air shower supply means to which an air shower of clean air is supplied; an air curtain forming means for forming a substantially laminar air flow in the shower room; and an air curtain forming means from the shower room. and a reflux part that refluxes the air in the shower room, and is configured to be disposed at an entrance of a temperature-controlled space. A communication means for communicating between the inside and outside,
An air shower device comprising: heat exchange means provided in the communication means.