JPH02204203A - Cassette storing rack - Google Patents

Abstract

PURPOSE:To prevent dust from being blown up in the air by installing a panel plate in a storage rack for wafer cassettes in such a manner that it is vertical to a wall surface of the storing rack vertical to a direction of air flow, and at the same time it is flush with the surface of an access port. CONSTITUTION:A panel plate 6 is installed in such a manner that it is vertical to a wall surface 1 of a cassette storing rack which is vertical to a direction 5 of air flow, and at the same time it is flush with an access port for cassettes containing wafers. Then, the top edge of the panel plate 6 is joined to another edge of the wall surface 1 with an inclined plate 8. This configuration causes air to flow both to an access port side and to its opposite side. As a result, the access port side is always subjected to air flowing down in one direction only, thereby preventing dust from being blown up.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a cassette storage shelf for storing and storing cassettes containing a large number of wafers.

[Conventional technology]

Conventionally, this type of cassette storage shelf has been placed between other semiconductor manufacturing equipment as part of semiconductor manufacturing equipment, for example, to temporarily store cassettes containing a large number of processed wafers. There is.

FIG. 4 is a perspective view of a conventional cassette storage shelf, and FIG. 5 is a sectional view along line BB of FIG. 4. This cassette storage shelf is provided in multiple stages, with a plurality of storage chambers 7 having entrances and exits in one direction arranged in a horizontal direction in which cassettes (not shown) containing a large number of wafers are stored.

Normally, in order to prevent dust from entering through the entrance/exit 2 and adhering to the surface of the wafers inside the cassette, clean air is blown perpendicularly to the wall 1, which is the upper wall of the cassette storage shelf, in the air flow direction 5. It's running on.

[Problem to be solved by the invention]

However, with the conventional cassette storage shelf mentioned above, the direction of air flow changes at the corner of the wall of the cassette storage shelf that is exposed to air, blowing up dust, entering through the doorway, and causing dust to adhere to the wafers inside the cassette. There was a problem.

An object of the present invention is to provide a cassette storage shelf that can keep the wafer surface clean without blowing up dust.

[Means to solve the problem]

The cassette storage shelf of the present invention is perpendicular to the direction of air flow in a cassette storage shelf provided in multiple stages with a plurality of storage chambers having entrances and exits in one direction in which cassettes containing a large number of wafers are stored. The cassette storage shelf is provided with a screen plate that stands perpendicular to the wall surface of the cassette storage shelf, and one surface of which is the same surface as the surface of the doorway.

[Example of real square group]

Next, the present invention will be explained with reference to the drawings.

FIG. 1 is a perspective view of a cassette storage shelf showing one embodiment of the present invention, FIG. 2 is a sectional view taken along line AA in FIG. 1, and FIG. 3 is a sectional view of a cassette storage shelf showing another embodiment of the present invention. It is. This cassette storage shelf, as shown in Figures 1 and 2,
A screen plate 6 stands perpendicularly to the wall surface 1 of the cassette storage shelf, which is a surface perpendicular to the air flow direction 5, and one surface of which is the same surface as the surface of the entrance 2 of the cassette 4 in which the wafers 4 are stored. It is provided. Further, there is an inclined plate 8 which connects the tip of the screen plate 6 to one end thereof, and connects the other end to one end of the wall surface.

By providing such a screen plate 6 and inclined plate 8,
The direction of air flow is divided into two parts: the side of the entrance/exit 2 and the side opposite to the entrance/exit 2. The direction of air flow on this doorway 2 side is
It always blows down in one direction, so it never blows up trash.

Further, as shown in FIG. 3, for example, the function can be sufficiently performed by using only the screen plate 6 without the inclined plate 8 shown in FIGS. 1 and 2.

〔Effect of the invention〕

As explained above, the present invention has a screen plate having a surface on the same plane as the cassette entrance/exit.By providing a screen plate, that is, a rectifying plate, on the wall surface perpendicular to the air flow direction of the cassette storage shelf, air can be By dividing the flow into two and creating a constant laminar flow of air on the cassette entrance/exit side, this cassette storage shelf maintains a clean surface without blowing up dust or adhering to the wafer surface. This has the effect of providing.

[Brief explanation of the drawing]

Fig. 1 is a perspective view of a cassette storage shelf showing one embodiment of the present invention, Fig. 2 is an AA#R side view of Fig. 1, and Fig. 3 is a perspective view of a cassette storage shelf showing another embodiment of the invention. 4 is a perspective view of a conventional cassette storage shelf, and FIG. 5 is a sectional view taken along line BB in FIG. 4. 1...Wall surface, 2...Entrance/exit, 3...Cassette, 4
... Wafer, 5... Air flow direction, 6... Screen plate, 7... Storage chamber, 8... Inclined plate. ＼ Formula % Formula % Sales drawing flat drawing

Claims (1)

[Claims] In a cassette storage shelf in which a plurality of storage chambers having entrances and exits in one direction are arranged in multiple stages to store cassettes containing a large number of wafers, the cassette storage shelf is arranged in a plane perpendicular to the direction of air flow. A cassette storage shelf characterized by being provided with a screen board that stands perpendicular to a wall surface and one surface of which is the same surface as the surface of the doorway.