JPH0222599A - Radiation image enlargement observation device - Google Patents

Abstract

PURPOSE:To obtain a sharp optical image with excellent reproducibility by providing a visual field stop means which is open in front of a photoelectric converting means and has a light shield member that is movable and adjustable in the direction of the optical axis. CONSTITUTION:The visual field stop means 20 which is provided in front of the photoelectric surface 11 (photoelectric converting means) where a radiation enlarged image of a sample 2 is formed is provided with the light shield plate 22 where an opening 21 is formed and the position of the light shield plate 22 in the direction of the optical axis is adjusted through the operation of a linear guide-in terminal 23 to stop and adjust radiation incident on the photoelectric surface 11. When the position of the light shield plate 22 is adjusted, radiation which is scattered in a radiation image enlargement part 5 and not used for image formation is cut off, so only radiation for the image formation is incident on the photoelectric surface 11 and the visual field is adjusted properly, so the generation of scattered electrodes is prevented. Consequently, photoelectrons which are emitted from the photoelectric surface 11 are only electrons corresponding to a specific visual field of the enlarged image of the sample 2, so that the sharp optical image is obtained on a fluorescent surface 13.

Description

Detailed Description of the Invention [Field of Industrial Application] The present invention relates to an apparatus for magnifying observation of a sample using radiation such as ultraviolet rays and Regarding equipment.

[Conventional technology]

A conventional radiation image magnification observation device is shown in FIG.

This consists of a radiation source 1 that emits radiation in a predetermined wavelength range, a sample setting member 3 to which a sample 2 is attached at a sample setting position, and a radiation image into which radiation passing through the sample setting position is incident with an entrance window 4 opened. It is equipped with an enlarged part 5.

The radiation source 1 is, for example, synchrotron radiation light (SOR light).
This SOR light has a wavelength distribution ranging from visible light to X-rays, and it is necessary to selectively transmit only radiation in specific wavelength ranges such as ultraviolet rays and X-rays. In some cases, an appropriate optical filter (not shown) or the like is provided at the output end of the radiation source 1. Radiation (for example, X-rays) emitted from this radiation source 1 is irradiated onto a sample 2 provided at a sample setting position, and when the radiation passes through the sample 2, a radiation image is formed and enters the radiation image enlarging section 5.

The radiation image enlarging unit 5 is constructed by disposing an oblique incidence reflecting mirror 7, a stopper 8, and a film 9 in order on the optical path of radiation in a case 6 maintained in a vacuum state. The radiation incident on the radiation image enlarging section 5 is reflected by the oblique incidence reflecting mirror 7, thereby magnifying the radiation image regardless of the wavelength region of the radiation.

After unnecessary radiation is cut off by a stopper 8, an enlarged radiation image is formed on a film 9.

According to such an observation device, it is possible to take out the film 9 exposed to radiation from the case 6 and observe an enlarged image of the sample 2. However, in this device, an enlarged image of the sample is observed through the film 9, and the enlarged image of the sample cannot be directly viewed with the naked eye, making observation inconvenient.

Therefore, the applicant developed and previously proposed a radiation image magnification observation device that enables direct observation of the magnified image of a sample (Japanese Patent Application No. 62-27.4863; unpublished). FIG. 5 shows this observation device, which has a structure in which an electronic image enlarging section 10 is attached to a radiation image enlarging section 5. A photocathode 11 is provided at the radiation imaging position in the radiation image enlarging section 5, and a microchannel plate 12 and a fluorescent surface 13 are provided within the electronic image enlarging section 10. Coils 14 and 15 are wound around the outside of the coil. In such a configuration, an enlarged radiation image is formed on the photocathode 11, and photoelectrons corresponding to this are emitted from the photocathode 11 to the electron image enlarging section 10. This electron image is coil 14.1
5, the magnified electron image is multiplied by a microchannel plate 12, and then focused on a fluorescent surface 13 to form an optical image. Therefore, the optical image on the fluorescent surface 13 can be directly observed through a monitor such as a CRT.

[Problem to be solved by the invention]

However, the observation device shown in FIG. 5 has the disadvantage that a clear optical image cannot be obtained. This is because if the field of view of the radiation image on the photocathode 11 is too large, this will generate photoelectrons outside the field of view from the photocathode 11, thereby causing scattered electrons as shown in FIG. In addition, not only an enlarged radiation image is formed on the photocathode 11, but also a radiation image enlargement section 5
Scattered radiation that is reflected inside enters the space, and this may cause the emission of unwanted photoelectrons. In order to eliminate the influence of such unnecessary photoelectrons, it is conceivable to provide a field stop as shown by the dotted line in FIG. However, the size of the field of view varies depending on the sample to be observed, and therefore it is not possible to use a diaphragm with a constant aperture. Also,
If the aperture aperture is made variable using conventional technology (such as camera aperture technology), the structure tends to become complicated.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a radiation image magnification observation device that can obtain clear optical images with good reproducibility and that can easily adjust the field stop.

[Means to solve the problem]

The radiation image magnification observation device according to the present invention includes: a radiation source that emits radiation toward a sample setting position; a radiation image magnifying section that magnifies a radiation image formed by passing through the sample setting position; In a radiation image magnifying observation device comprising a photoelectric conversion means disposed at a radiation image forming position to form an electronic image, an aperture P is formed on the optical axis of the radiation in front of the photoelectric conversion means, and at least the optical axis The present invention is characterized in that a field diaphragm means having a light shielding member whose movement can be adjusted in a direction is provided.

Preferably, the field stop means can be adjusted from outside the device, which improves operability. Further, the light shielding member may be operable in a direction perpendicular to the optical axis.

[Effect]

According to the above configuration, by adjusting the position in the optical axis direction of the light shielding member having an aperture on the optical axis, generation of scattered electrons is prevented and scattered radiation is blocked, and the photocathode receives desired radiation from the sample. Only the expanded field of view radiation is incident.

〔Example〕

Hereinafter, the present invention will be explained in detail with reference to the accompanying drawings.

FIG. 1 shows a radiation image magnification observation apparatus according to an embodiment of the present invention, in which the same elements as in the conventional example are given the same reference numerals. That is, this device includes a radiation source 1 that emits radiation such as ultraviolet rays and X-rays, a sample setting member 3 to which a sample 2 is attached at a sample setting position, an oblique incidence reflector 7, and a stopper 8. It has a radiation image magnifying section 5, a photocathode 11 as a photoelectric conversion means provided at the imaging position of the radiation image magnifying section 5, a microchannel plate 12, and a fluorescent surface 13, and is connected to the radiation image magnifying section. and an electronic image enlarging section 10. Further, coils 14 and 15 are wound around the outside of the electronic image enlarging section 10. In such a configuration, radiation emitted from the radiation source 1 passes through the sample 2, and an enlarged image thereof is formed on the photocathode 11 of the radiation image enlarging section 5, whereby photoelectrons (e) emitted from the photocathode 11 are
) is magnified by the electronic image magnifying section 10 and formed into an image on the fluorescent surface 13. The optical image of this fluorescent surface 13 is captured into an image pickup tube 18 via a relay lens 17 and displayed on a monitor or the like.

In addition to such a configuration, in this embodiment, a field stop means 2 is provided.
0 is set. The field stop means 20 is provided so as to be located in front of the photocathode 11 on which the radiation magnified image of the sample 2 is formed. This field stop means 20 is a light shielding plate 2 having an aperture 21 formed at a position through which radiation passes (a position on the optical axis).
2, and the position of the light shielding plate 22 in the optical axis direction is: A
Therefore, it is possible to adjust the aperture of the radiation incident on the photocathode 11. The position of the light shielding plate 22 is adjusted by operating the linear introduction terminal 23. By adjusting the position of the light shielding plate 22, radiation that is scattered within the radiation image enlarging section 5 and does not contribute to image formation is blocked, so that only radiation for image formation is incident on the photocathode 11. Also,
Since the field of view is appropriately adjusted, the generation of scattered electrons as shown in FIG. 6 is also prevented. Therefore, only the photoelectrons (e'') emitted from the photocathode 11 correspond to a predetermined field of view in the enlarged image of the sample 2, making it impossible to form a clear optical image on the fluorescent surface 13. can.

The circumstances under which such a clear image can be obtained as described above will be explained with reference to FIGS. 2 and 3.

FIG. 2 shows the positional relationship between the beam of radiation and the light shielding plate 22. A light shielding plate 22 is located just before the photocathode 11 ((
At position A), the radiation that has passed through position S-3 on the sample surface forms an image at position 1-3 on the imaging plane. On the other hand, when the light shielding plate 22 moves away from the photocathode 11 and comes to the position (B) in the figure, a part of the radiation that passed through the position S-3 on the sample surface does not reach the image plane. , light shielding plate 22
is blocked by In this case, only the radiation up to the position I-2 on the sample surface is imaged on the imaging plane. Furthermore, when the light shielding plate 22 moves away from the photocathode 11 to the position (C) in the same figure, the sample surface! Part of the radiation from -2 to 1-3 is blocked by the light shielding plate 22, and the radiation from -2 to 1-1 reaches the imaging plane. In this way, by moving the light shielding plate 22 in the optical axis direction, the field of view of the radiation can be adjusted, so that the generation of scattered electrons as shown in FIG. 6 can be arbitrarily controlled. Moreover, since the light shielding plate 22 also has the function of preventing scattered radiation from entering the photocathode 11, a clearer radiation image of the sample can be obtained.

Here, what is particularly important in the present invention is that the aperture adjustment of the field of view as described above can be achieved by a simple operation of moving the light shielding plate 22 in the optical axis direction, and that the adjustment can be made extremely delicately. That's true. In addition, the light shielding plate 2
2 may be configured so that its position can be adjusted in a direction perpendicular to the optical axis using a manipulator or the like. In this way, not only the width of the field of view can be adjusted, but also the position of the field of view on the photocathode 11 can be adjusted.

The applicant conducted the following experiment (simulation) in order to confirm the usefulness of the present invention.

First, when the opening of the light-shielding plate 22 is set to 2 mm in diameter and the light-shielding plate 22 is positioned just in front of the photocathode 11,
The intensity distribution of X-rays on the imaging plane was investigated when the light shielding plate 22 was positioned in front of the m11 and 150 dragons. Note that point light sources were placed on the sample surface at intervals of 10 μm. The results are shown in Figure 3. As shown in the figure, by moving the light shielding plate 22 in large increments of 50 mm and 150 wm, the amount of X-rays around the visual field is reduced, and therefore the visual field is slightly limited. .

〔Effect of the invention〕

As described above in detail, in the present invention, by adjusting the position in the optical axis direction of the light shielding member having an opening on the optical axis, generation of scattered electrons is prevented and scattered radiation is blocked, and the photocathode is In this case, only the expanded radiation of the desired field of view from the sample is incident. Therefore, it is possible to provide a radiation image magnifying observation device that can obtain clear optical images with good reproducibility and can easily adjust the field stop.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing a radiation image magnifying observation device according to an embodiment of the present invention, FIG. 2 is a block diagram showing the positional relationship between a light shielding plate and a light beam, and FIG. 3 is a block diagram showing a field diaphragm according to the present invention. Figure 4 is a diagram showing the effect, Figure 4 is a configuration diagram showing a conventional device, Figure 5 is a configuration diagram showing an improved magnifying observation device according to a prior application, and Figure 6 explains why a light shielding plate is necessary. This is a diagram. DESCRIPTION OF SYMBOLS 1... Radiation source, 2... Sample, 3... Sample setting member, 5... Radiation image enlarging part, 11... Photocathode (photoelectric conversion means), 20... Field stop means, 21... Opening, 22... Light shielding plate, 23... Straight introduction terminal.

Claims (1)

[Claims] 1. A radiation source that emits radiation toward a sample setting position; a radiation image enlarging unit that enlarges a radiation image formed by passing through the sample setting position; and an enlarged radiation image. A radiation image magnifying observation device comprising: a photoelectric conversion means disposed at an imaging position to form an electronic image; 1. A radiographic image magnification observation apparatus, comprising: a field stop means having a light shielding member that can be moved in a direction. 2. The radiation image magnification observation apparatus according to claim 1, wherein the field stop means allows movement adjustment of the light shielding member to be performed by remote control. 3. The radiation image magnification observation apparatus according to claim 1, wherein the light shielding member is movable and adjustable in the optical axis direction and a direction perpendicular thereto.