JPH0262421A - Pneumatic circuit for static-pressure gas bearing - Google Patents

Abstract

PURPOSE:To realize a miniaturized and simplified device for a static-pressure gas bearing equipped with a gas separating film type dehumidifier by providing a pipe which connects the exhaust port of the static-pressure gas bearing to a purge air supply port of the dehumidifier. CONSTITUTION:Gas compressed by a compressor 1 is passed through filters 3, 4 via a pipe 2 and led into a gas separating film type dehumidifier 5, and compressed gas which is dehumidified and dried is passed through a pipe 6, depressurized to a proper pressure by a regulator 13 and led into a static- pressure gas bearing 14. Then part of dry gas ejected from bearing faces 14a, 14b is led from a exhaust port 14d via a pipe 15 into a purge air supply port 10 of the dehumidifier 5 and emitted from an exhaust port 11 to the atmosphere after the compressed gas is dehumidified. It is thus possible to eliminate the uselessness of the compressed gas, to intend less expenses, to realize lower capacity of compressing sources because of less gross amount of gas consumption and to miniaturize a device.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a pneumatic circuit for a hydrostatic gas bearing, and more particularly to a pneumatic circuit for a hydrostatic gas bearing having a dehumidifier using a gas separation membrane. be.

[Prior Art] Hydrostatic gas bearings require supply of dry pressurized gas to prevent condensation of gas ejected between the shaft and the bearing. For this reason, a dehumidifier is provided along the pneumatic circuit from the compression source (compressor) to the static pressure gas bearing to dehumidify and dry the compressed gas. As such a dehumidifier, a dehumidifier using a gas separation membrane is known (Japanese Unexamined Patent Publication No. 62-42
(See Publication No. 723). This gas separation membrane type dehumidifier has a gas content of Hl! In this method, dry verge air is supplied to the permeation side of the water vapor to reduce the partial pressure of the water vapor that has passed through it, thereby dehumidifying it.

The pneumatic circuit of a conventional hydrostatic gas bearing is shown in FIG. A dust filter 3 for removing dust in the compressed gas and an oil filter 4 for removing oil are provided on a pneumatic pipe 2 connecting the compressor 1 and a gas separation membrane type dehumidifier 5. A pneumatic pipe 6 is provided on the outlet side of the dehumidifier 5 and connected to a distributor 7. One distribution outlet of this distributor is connected to a purge air supply port 10 of the dehumidifier 5 via a purge gas pipe 8. A throttle valve 9 is provided on the pipe 8. 11 is a purge air outlet. The other distribution outlet of the distributor tube is connected to a hydrostatic gas bearing 14 via a pneumatic pipe 12 . Piping 1
A regulator 13 is provided on 2. 14a, 14
b is a bearing surface, 14c is a thrust clearance, and 14d is an exhaust port.

The gas compressed by the compressor 1 is introduced through a pipe 2, filters 3 and 4, and a gaseous MIIi type dehumidifier 5. The compressed gas dehumidified and dried by the dehumidifier 5 is distributed to
A part of the dry gas passes through piping 8 and is adjusted to an appropriate flow rate by a throttle valve 9, is introduced into the verge air supply port 10 of the dehumidifier 5, and is discharged to the atmosphere from the discharge port 11. be done. On the other hand, the dry gas that has passed through the pipe 12 is reduced to an appropriate pressure by the regulator 13 and introduced into the static pressure gas bearing 14. Static pressure gas bearing 1
The gas flowing out from the bearing surfaces 14a and 14b of No. 4 is discharged to the atmosphere from the thrust gap 14c and the exhaust port 14d.

[Problems to be Solved by the Invention] However, in the prior art described above, in addition to the amount of air consumed by the static pressure gas bearing, the amount of barge air supplied to the dehumidifier was wasted. In addition, since the combined air volume for the static pressure gas bearing and the purge air is required, the capacity of the compressor must be increased, which increases the size of the equipment.In addition, a distributor is required to introduce the appropriate amount of purge air. The equipment was complicated because it required a throttle valve for adjusting the flow rate, etc.

The present invention has been made in view of the drawbacks of the prior art described above, and provides a gas component 11i1 that enables miniaturization and simplification of the device.
The purpose is to provide a pneumatic circuit for a hydrostatic gas bearing equipped with a membrane force type dehumidifier.

[Means for Solving the Problems] In order to achieve the above object, in the present invention, piping is provided that connects the exhaust port of the static pressure gas bearing and the Percyian supply port of the dehumidifier.

[Operation] Dry air discharged from the exhaust port of the static pressure gas bearing is introduced into the verge air supply port of the dehumidifier to perform a dehumidifying and drying action.

[Embodiment] FIG. 1 shows an embodiment of a pneumatic circuit for a hydrostatic gas bearing according to the present invention. Compressor 1 and gas separation membrane type dehumidifier (
A dust filter 3 for removing dust and moisture from the compressed gas and an oil filter 4 for removing oil are provided on the pneumatic pipe 2 connecting the compressed gas to the dehumidifying membrane 5. A pneumatic pipe 6 is provided on the outlet side of the dehumidifier 5 and connected to a static pressure gas bearing 14 . A pressure regulating regulator 13 is provided on the pipe 6. 14a and 14b are bearing surfaces of the hydrostatic gas bearing;
c is a thrust gap, and 14d is an exhaust port. The exhaust port 14d of the static pressure gas bearing 14 is connected to the barge air supply port 10 of the dehumidifier 5 via a pipe 15. 11 is a purge air outlet.

The gas compressed by the compressor 1 is introduced into a gas separation membrane type dehumidifier 5 via a pipe 2 and filters 3 and 4. The compressed gas that has been removed and dried by the dehumidifier 5 passes through a pipe 6, is reduced to an appropriate pressure by a regulator 13, and is introduced into a static pressure gas bearing 14. Bearing surfaces 14a, 14b
A portion of the dry gas spouted out (approximately 50% of the amount of bearing
%) is introduced from the exhaust port 14d through the pipe 15 to the verge air supply port 10 of the dehumidifier 5, dehumidifies the compressed gas in the dehumidifier 5, and then discharges it to the atmosphere from the discharge port 11.

Although the above embodiment shows a case where a static pressure gas bearing is used alone, the present invention is applicable to a case where a static pressure gas bearing is incorporated into equipment such as a processing machine or a measuring instrument, and a case where a plurality of static pressure gas bearings are used in combination. It is also applicable when used in

[Effects of the Invention] As explained above, in the present invention, piping is provided to connect the exhaust port of the static pressure gas bearing and the dehumidifier purge air supply port, and the dry air discharged from the exhaust port of the static pressure gas bearing is is introduced into the dehumidifier's barge air supply port to perform the dehumidifying and drying effect, which (1) eliminates waste of dried compressed gas and reduces costs, and (2) reduces total gas consumption. Therefore, it is possible to reduce the capacity of the compression source and downsize the device, and (3) there is no need for a distributor or flow rate adjustment valve for distributing barge air, resulting in a simpler structure.

[Brief explanation of the drawing]

FIG. 1 is a block diagram of a pneumatic circuit of a hydrostatic gas bearing according to the present invention, and FIG. 2 is a block diagram of a pneumatic circuit of a conventional hydrostatic gas bearing. 1; Compressor, 2.6, 15. Piping, 5; dehumidifier,
10; purge air supply port; 14; static pressure gas bearing.

Claims (2)

[Claims] (1) A compressor, a static pressure gas bearing into which compressed gas from the compressor is introduced, a gas separation membrane type dehumidifier installed on a compressed gas pipe connecting the compressor and the static pressure gas bearing, and A pneumatic circuit for a static pressure gas bearing, comprising a purge gas pipe connecting an exhaust port of the pressure gas bearing and a purge gas supply port of a dehumidifier. (2) A dust removal filter and an oil removal filter are provided on the compressed gas piping connecting the compressor and the dehumidifier, and a pressure adjustment regulator is provided on the compressed gas piping connecting the dehumidifier and the static pressure gas bearing. A pneumatic circuit for a hydrostatic gas bearing according to claim 1, characterized in that: