JPH03149663A - Graphic processing method - Google Patents

Abstract

PURPOSE:To shorten a graphic processing time by moving the respective end points of a pair of segments connected to each other to a grid close to the outside of a pattern so that the segment pair is moved to the outside of the pattern. CONSTITUTION:The CPU 1 of a graphic processor consists of a system control part 2, a data input part 3 for inputting graphic data to be processed, a graphic processing part 4, and a plotted data output processing part 5 and forms a photomask graphic, a direct plotting graphic or the like. When a control command 6 for instructing graphic conversion processing is inputted, the system control part 2 starts a prescribed graphic processing program and inputs graphic data 7 to the input part 3. The control part 2 executes graphic processing by the graphic processing part 4 while using a working direct access device 8, outputs the processing process to a processing list 9 and outputs output data 10 such as a photomask graphic, a direct plotting graphic, etc., to a magnetic tape or the like. In this case, the end points of outline segments are moved to the grid close to the outside of the pattern so that the outline segments are moved to the outside of the pattern. Consequently, the processing time can be shortened.

Description

[Detailed Description of the Invention] [Summary] This invention relates to a graphic processing method, more specifically, to a graphic processing method for generating a photomask graphic, a directly drawn graphic, etc. based on graphic data of a pattern, for example, when referring to a pattern. There is no difference in level between the connected parts of figures that have been subjected to figure processing, and even when figure processing is performed on a pattern consisting only of diagonal line segments with an inclination of ±1,
The purpose of this method is to provide a graphic processing method that can move the vertices of a pattern so that angles other than diagonal angles do not occur, and perform graphic processing for creating drawn figures based on the graphic data of the pattern. In this case, a scanning line is moved parallel to the pattern in one direction, and the end points of the outline line segment of the pattern that intersects the scanning line at right angles or obliquely are set as line segment data, and the same at each movement position of the scanning line is used. Among the outline segments whose endpoints are on the scanning line, find two connected outline segments, and move each endpoint of the pair of line segments so that the pair of line segments is moved outside the pattern. The object is moved to the nearest grid outside the pattern among the grids arranged at minimum intervals to create a drawn figure. Furthermore, when performing graphic processing for creating drawn figures based on graphic data of a pattern, a scanning line is moved parallel to the pattern in one direction, and an outline of the pattern that intersects the scanning line at right angles or obliquely is generated. Using the end points of the line segment as line segment data, at each moving position of the scanning line, two external line segments in a connected state are found among the external line segments whose end points are on the same scanning line, and the line segment pair is In order to be moved inside the pattern, each end point of the line segment pair is moved onto the nearest grid inside the pattern among the grids arranged at minimum intervals for creating a drawn figure. [Industrial Field of Application] The present invention relates to a graphic processing method, and more particularly, to a graphic processing method for generating photomask figures, directly drawn figures, etc. based on pattern graphic data. With the recent increase in the scale and density of LSIs, the processing time required for graphics continues to increase, leading to an increase in the cost of LSI development. That is, when laying out a pattern, a predetermined number of patterns or a predetermined function is defined as a basic cell, and when laying out the same pattern as a basic cell, hierarchical graphic data defined by the reference information of the basic cell and its arrangement position information is used. The graphic data is compressed by using . However, at the stage of graphic processing, a development process is performed to actually place the same pattern as the basic cell based on the reference information and placement position information of the basic cell, and then graphic processing for each pattern is performed, so the graphic As the number increases, so does the processing time, leading to increased costs. In this way, the number of LSI figures before and after deployment is
Since the number is about 0 to 100 times, in devices such as semiconductor memory that refer to a large number of basic cells of the same figure, first perform graphic processing on the hierarchical figure (basic cell), and then refer to the processed hierarchical figure. By doing so, graphic processing can be significantly sped up compared to the case where graphic processing is performed after expansion processing. Also, a pattern can have line segments with arbitrary angles, but when processing with a computer, it is more effective to limit the angle of the line segments to be processed, so diagonal line segments with a slope of ±1 It is common for a system to be configured to only handle Furthermore, computers used for graphic processing can handle a large amount of information in order to reduce errors that occur in various graphic processes, but the computers used for photomasks and exposure equipment that directly expose wafers do not. Since it is only used to create drawing figures, the amount of information that it can handle is smaller than the number of bits that can be handled by the computer used for graphic processing. Therefore,
Numeric value LSB (Lea) in the exposure equipment computer
st Significant Bit: The content of the smallest bit (ie, the value of l) is the minimum necessary value, and is larger than the value of the computer used for graphic processing. In other words, if the numerical value LSB of the computer used for graphic processing is set to (lO01 μm), the numerical value LSB handled by the computer used for the exposure device is set to 0.01 μm or 0.1 μm. For this reason, when performing graphic processing or hierarchical graphic processing to create photomask figures or direct drawing figures, it is essential to convert the numerical LSB of the figure processing computer. Conventionally, when performing graphic processing or hierarchical graphic processing to create photomask figures or direct drawing figures, the numerical LSH conversion process of the figure processing computer focuses on the vertices of the pattern to be processed and performs exposure. Of the grids defined by the values expressed by the numerical LSB of the device computer,
This is performed by converting the pattern so that the apex is moved onto the grid where the distance from the apex is the minimum. That is, in the wiring pattern AO shown by the solid line in FIG.
The apex a1 is connected to the right grid Gal, the apex a2 is connected to the right grid Ga2, and the apex a3 is connected to the right diagonally front grid G.
a3, apex a4 is in front of grid Ga4, apex a5 is
is converted to the front grid Ga5, the apex a6 is moved to the diagonally forward right grid Ga6, and the pattern AO is graphically processed into the figure BO shown by the two-dot chain line. In addition, in the pattern C consisting of only line segments with an inclination of ±1 shown by the solid line in FIG. 14, the vertex cl is connected to the upper grid Gel, the vertex c2 is connected to the right grid Gc2, and the vertex c3 is connected to the right grid Gc3. , the vertex c4 is the upper grid Gc4
, the vertex c5 is converted to move to the right grid Gc5, the vertex c6 to the right grid Qc6, and the pattern C is processed into a figure consisting of the line segment 11-/6 shown by the two-dot chain line. be done. In this figure, grid Gc4. Line segment 14 connecting Gc5 and grid G
c6. The slope of the line segment 16 connecting Gcl is no longer ±1. [Problems to be Solved by the Invention] However, in the pattern AI that is referred to by rotating the pattern AO in FIG. (overlapping apex a4 of AO) is converted to grid Ga8, apex a3 to grid Ga9, apex a4 to grid Ga11, a5 to grid Gall, a6 to grid Ga12, and the pattern A1 will be graphically processed into a graphic Bl indicated by a two-dot chain line. For this reason, a step is created between the figures BO and B1, and the line width at the connecting portion becomes narrower. This is a fatal flaw in miniaturized semiconductor devices, where current concentrates in the narrowed line width area, creating areas with high current density, which significantly reduces the durability of these areas. becomes. Moreover, in the figure shown in FIG. 14, the grid Gc4°Gc5
Line segment 14 and grid Gc6. Since the slope of line segment 16 connecting Gcl is no longer ±1, line segment 14 is +1
If you move vertex C4 to grid Gc7 or vertex C5 to grid Gc8 to return to the diagonal line segment of line segment 13,
Or 15 is no longer a diagonal line segment with a slope of -1. Also, line segment I
When vertex c6 is moved to grid Gc9 or vertex cl is moved to grid GclO in order to return line segment 16 to a diagonal line segment with a slope of +1, the slope of line segment 15 or iFl is no longer a diagonal line segment with a slope of -l. Therefore, it is no longer possible to return the figure to a figure with only the diagonal line of ±1. As a result, if the computer for the exposure apparatus can only handle diagonal line segments with an inclination of ±1, there is a problem that normal processing cannot be performed. The present invention has been made to solve the above-mentioned problems, and its purpose is, for example, when referring to a pattern, to avoid creating a level difference in the connecting part between figures that have been subjected to figure processing, and to To provide a graphic processing method capable of moving the vertices of a pattern so that no angle other than the diagonal line segments of ±l occurs even when graphically processing a pattern composed only of diagonal line segments with an inclination of 1. It is in. [Means for Solving the Problems] In order to achieve the above object, a first invention provides a method for moving a scanning line parallel to a pattern in one direction, and moving the scanning line at right angles or obliquely to the pattern. Using the end points of the outline line segment as line segment data, at each movement position of the scanning line, two outline segments in a connected state are found among the outline segments whose end points are on the same scanning line, and the line segment is Each end point of the line segment pair is moved to the nearest grid outside the pattern among the grids arranged at minimum intervals for creating a drawn figure so that the pair is moved outside the pattern. did. Further, in a second invention, a scanning line is moved parallel to the pattern in one direction, and end points of the outline line segment of the pattern that intersect the scanning line at right angles or obliquely are set as line segment data, and the scanning line of the scanning line is Among the outline line segments whose end points are on the same scanning line at each movement position, two connected outline line segments are found, and the line segments are moved so that the pair of line segments is moved inside the pattern. Each end point of the pair is moved to the nearest grid inside the pattern among the grids arranged at minimum intervals for drawing figure creation. [Operation] In the first invention, in order to move the outline line segment to the outside of the pattern, the end point of the outline line segment is moved to the nearest grid outside the pattern. If you move the end points of hierarchical shape data defined by position information, even if you rotate the basic cell and refer to it, the line segments will still be moving in the same direction (towards the outside of the shape), so you will not be able to create a step at the connecting part. It will never occur. Also, ±1
When performing graphical processing on a pattern consisting only of diagonal line segments with a slope of Since the pattern is moving towards the outside, the slopes of all the diagonal lines are ±, the same as before the movement.
It is held at 1. Further, in the second invention, in order to move the outline line segment into the inside of the pattern, the end point of the outline line segment is moved to the nearest grid inside the pattern, so for example, the reference information of the basic cell and its arrangement If you move the end points of hierarchical shape data defined by position information, even if you rotate the basic cell and refer to it, the line segments will still be moving in the same direction (towards the outside of the shape), so you will not be able to create a step at the connecting part. It will never occur. In addition, when performing graphical processing on a pattern consisting only of diagonal line segments with a slope of ±1, when the end points of each line segment in a connected pair of line segments have all been moved onto the nearest grid within the pattern, Since each line segment moves inward of the pattern, the slopes of all oblique line segments are maintained at ±1 as before movement. [Example] Hereinafter, an example that embodies the present invention will be described with reference to FIGS. 1-12. FIG. 1 shows a schematic electrical configuration of a graphic processing device for implementing the present invention. The CPU 1 of the graphic processing device includes a system control section 2, a graphic data input section 3, a graphic processing section 4,
Consists of a drawing data output processing section 5, which outputs photomask figures,
Create direct drawing figures, etc. That is, when the system control section 2 receives the control command 6 instructing the graphic conversion process, it starts a predetermined graphic processing program and reads the graphic data into the graphic data input section 3 to be processed. and,
The system control unit 2 uses the work direct access device 8 to execute graphic processing in the graphic processing unit 4, outputs the processing progress to the processing list 9, and outputs output data IO such as photomask figures and directly drawn figures to a magnetic tape. output to etc. FIG. 2 is a flowchart showing details of the graphic processing program executed by the graphic processing section 4. As shown in FIG. First, in step 11, the graphic data input to the processed graphic data input section 3 is segmented into lines. That is, for example, in the pattern F shown in FIG. 4, a horizontal or diagonal outline line segment is taken out, and as shown in FIG. The line segment data is stored in the internal storage area Ml as a graphic line segment format. Therefore, the line segment LL-L3. which is parallel to the X-axis is stored in the internal storage area Ml. L5. Only the line segment data of L6 and diagonal line segment L4 are manually input. Next, in step 12, each line segment data stored in the internal storage area Ml in step 11 is classified in ascending order using the left end point X coordinate as a main key and the left end point Y coordinate as a sub key. That is, in pattern F in FIG.
- It will be classified in the order of L6. Next, in step 13, the internal storage area M of the graphic processing section 4 is
2 is divided into nodes 20 each having a storage section 20a and a pointer 20b in the graphic line segment format shown in FIG. 3, as shown in FIG. 5, and all the nodes 20 are connected by the pointer 20b. Then, the porter 20b of the last connected node 20 and the root pointer 21 indicating the beginning of the connection are set to SenLinel, which is a value for recognizing the end of the connection,
The internal storage area M2 is defined as a work concatenation area (work list) with all areas free. Next, in step 14, the scanning line passing through the end points of each line segment L1 to L6 of the pattern F is defined as a sweep line as shown by the broken line in FIG. The sweep line is initialized by setting the coordinate value, that is, the X coordinate value of the left end point of the line segment Ll. In the following step 15, a sweep line is set using the smaller of the X coordinate value on the work list that is larger than the sweep line and the X coordinate value of the left end point of the first line segment in the internal storage area Ml as the sweep line value. do. Next, in step 16, line segments that are in contact with the sweep line are imported into the work list M2 in order of line segments with smaller Y coordinate values. Figure 6 shows the state of the work list when the sweep line arrives at the position SL in Figure 4, and the line segment L
Line segment data of l and L2 are sequentially captured. Below, when the sweep line sequentially reaches positions 82 to S6, line segment L3
Line segment data of ~L6 is imported. In step 17, the line segment data in the work list M2 is sequentially traced from the bottom to find the connected state of graphic line segments. That is, for example, line segment L6 and line segment L5 are not actually connected, but line segment L6
Since the X coordinate value of the right end point of the line segment L5 matches the X coordinate value of the right end point of the line segment L5, it is determined that the line segment L5 is in a connected state. Then, in step 18, the numerical value LS of the graphic processing section 4 is
Since B is set to a smaller value than the numerical value LSB of the exposure device, the numerical value LSB described later for each end point on the sweep line of the connected line segment found in step 17.
Performs the conversion process. Then, the process proceeds to step 19, and it is determined whether or not line segment data remains in the internal storage area Ml or the work list M2. If it remains, the process returns to step 15, and the line segment data in the internal storage area Ml is determined. Data and work list M2
Repeat steps 15 to 18 until there is no line segment data within
repeat. On the other hand, if no line segments remain, the process ends. Next, the end point movement in the numerical LSB conversion process in step 18 will be explained based on FIGS. 7 to 10. - In Figures 7 to 1O, white circles (O) and black circles (.) are grids with minimum spacing for creating drawing figures expressed in numerical LSB of the exposure device, and thick lines with arrows are selected lines. represents minutes. Then, since the pattern is on the left side when viewed from the thick line with an arrow, when the end point is within the area surrounded by the solid line and broken line connecting the grids, the end point is moved to the grid of black circles so that the pattern is enlarged. Note that if an end point is on a solid line connecting the grids, it is included in the target, and if an end point is on a broken line connecting the grids, it is not included in the target. As shown in FIGS. 7(a) to (h), when line segments α and β with an inclination of ±1 are selected so as to intersect at one point, the end point αl of the line segment α is on the grid Gl. , end point β of line segment β
l is moved to grid G2. As shown in FIGS. 8(a) to (h), when a line segment α with an inclination of ±1 and a horizontal or vertical line segment β intersect at one point, the end point αl
(=βl) is moved to the grid G3 outside the pattern (on the right side in the line segment direction). However, the vertical line segment is not actually registered in the work list M2, but indicates that there are line segments above and below the line segment with an inclination of ±1. The upper and lower line segments may be in any direction. Furthermore, Figures 9(a) to (h) are line segments that do not correspond to Figures 7 and 8, and show the movement of the end point αl in the line segment α with an inclination of ±1, and the end point αl is outside the pattern (line (right side in the minute direction) to grid G4. Also, Figures 10 (a) to (h) show horizontal line segment α and vertical line segment β.
shows the movement of the end point when they intersect at one point, and the end point α1
(=βl) is moved to grid G5 outside the pattern (on the right side in the line segment direction). In this case as well, as in FIG. 8, the vertical line segment is not actually registered in the work list M2, but indicates that there are line segments above and below the line segment with an inclination of ±1. Only. Therefore, for example, if the end point movement shown in FIGS. 7 to 10 is performed on the pattern AO shown by the solid line in FIG. 11,
Vertex al is moved to grid Ga13 in FIG. 10(g), and vertex a2 is moved to grid Ga in FIG. 10(h).
Moved to 14. Also, the apex a3 is moved to the grid Ga15 in FIG. 11(e), and the apex a4 is moved to the grid Ga15 in FIG. 10(e).
h), it is moved to grid Ga16. Further, vertex a5 is moved to grid Ga17 as shown in FIG. 11(b), and vertex a6 is moved to grid Ga1 as shown in FIG. 11(a).
8, and the original pattern AO is enlarged to the figure BO shown by the two-dot chain line. In addition, in pattern AI, which is referred to by rotating pattern AO by 90 degrees in FIG.
(overlapping apex a4 of pattern AO) is grid Ga16
, apex a3 is connected to grid Ga19, apex a4 is connected to grid Ga20, apex a5 is connected to grid Ga21, and apex a
6 is converted to be moved to the grid Ga22, and the pattern AI is graphically processed into a graphic Bl shown by a two-dot chain line. For this reason, the figures BO and Bl are connected without creating a step in the connecting portion, and a predetermined line width is ensured. Therefore, when a predetermined number of patterns or a predetermined function is defined as a basic cell, and the same pattern as the basic cell is laid out, hierarchical graphic processing is performed using hierarchical graphic data defined by reference information of the basic cell and its placement position information. In the past, when employing the same pattern, due to the occurrence of steps, it was unavoidable to perform the unfolding process to actually arrange the same pattern and then perform the figure processing after unfolding, but in this embodiment, the end points are Since the movement is performed, there is no difference in level between the connected portions, so that graphic processing can be performed in hierarchical graphic units, and the graphic processing time can be dramatically shortened. Moreover, when the end point movement shown in FIGS. 7 to 10 above is performed on pattern C consisting of only line segments with an inclination of ±1 shown by the solid line in FIG. Gcll and Gc12, and the vertex C2 is moved to Fig. 7 (C
) from grid Gc13. Moved to GcI4. or,
Vertex c3 is moved to grid Gc15 from FIG. 9(d), and vertex c4 is moved to grid Gc16. from FIG. 7(h). G
El? will be moved to Furthermore, the vertex c5 is located on the grid G c from FIG. 9(d).
18, and the vertex C6 is moved to grid Gc19.18 from FIG. 7(a). Gc20, and pattern C is graphically processed into a shape consisting only of horizontal and vertical line segments and diagonal line segments with an inclination of ±1. Therefore, if the exposure equipment computer can only handle diagonal line segments with a slope of ±1, conventionally, line segments with a slope other than ±1 would occur and the figure would have to be changed to process them. Problems can be eliminated and the throughput of LSI development can be improved. In this example, each end point of the line segment pair in the connected state is moved to the nearest grid outside the pattern so that the line segment pair in the connected state is moved to the outside of the pattern. Even if each end point of a certain line segment pair is moved to the nearest grid inside the pattern so that the line segment pair is moved inside the pattern, almost the same operation and effect as in this embodiment can be obtained. Can be done. [Effects of the Invention] As detailed above, according to the present invention, for example, a predetermined number of patterns or a predetermined function is defined as a basic cell,
When laying out the same pattern as the basic cell, when employing hierarchical figure processing that uses hierarchical figure data defined by the reference information of the basic cell and its placement position information, there may be a step in the connection between the figures that have been subjected to figure processing. The vertices of the pattern are moved in such a way that no angles outside the diagonal line portion of ±1 occur even when processing a pattern consisting only of diagonal line segments with an inclination of ±1. This has the excellent effect of dramatically shortening the graphic processing time and improving the throughput of LSI development.

[Brief explanation of the drawing]

1-12 are diagrams showing embodiments of the graphic processing method of the present invention, FIG. 1 is a schematic diagram showing the electrical configuration of a graphic processing device, and FIG. 2 is a diagram showing a graphic processing program. Flowchart, Figure 3 is a diagram showing figure line segment data, Figure 4 is a diagram explaining how to classify line segments, Figure 5 is a diagram showing the structure of the work list after initial setting, Figure 6 is a diagram showing the work list・A diagram showing the structure of the list after line segments are registered. Figures 7 (a) to (h) are diagrams showing examples of end point movement when line segments with a slope of ±1 intersect at one point. Figures (a) to (h) are diagrams showing examples of end point movement when connecting a line segment with an inclination of ±1 to a horizontal and vertical line segment, Figures 9 (a) to (h)
(h) is a diagram showing an example of moving the end point of a line segment with a slope of ±l. Figures 10 (a) to (h) are diagrams showing an example of moving the end point of a horizontal line segment. Figure 11 is a hierarchical figure. FIG. 12 is an explanatory diagram of the operation in the case of processing diagonal line segments with a slope of ±1. Figures 13 and 14 are diagrams for explaining problems in the conventional graphic processing method. FIG. 6 is a diagram illustrating a problem when processing diagonal line segments with a slope of ±1. In the figure, 1 is the CPU 1, 2 is the system control unit, 3 is the graphic data input unit to be processed, 4 is the graphic processing unit, 5 is the drawing data output processing unit, 6 is the control command, 7 is the graphic data, and 8 is the direct access for work. 9 is a processing list, N is a flowchart showing 6 graphic processing programs (start
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Claims (1)

[Claims] 1. When performing graphic processing for creating a drawn figure based on graphic data of a pattern, a scanning line is moved parallel to the pattern in one direction,
The end points of the outline line segments of the pattern that intersect at right angles or obliquely with the scanning line are taken as line segment data, and among the outline line segments whose end points are on the same scanning line at each movement position of the scanning line, the connected state Two outline line segments are determined, and each end point of the line segment pair is moved to the outside of the pattern by selecting the end point of the line segment pair from among the grids arranged at minimum intervals to create a drawing figure. A figure processing method characterized by moving the figure to the nearest grid outside the pattern. 2. When performing graphic processing for creating a drawn figure based on the graphic data of the pattern, moving a scanning line parallel to the pattern in one direction,
The end points of the outline line segments of the pattern that intersect at right angles or obliquely with the scanning line are taken as line segment data, and among the outline line segments whose end points are on the same scanning line at each movement position of the scanning line, the connected state Two outline line segments are determined, and each end point of the line segment pair is moved to the inside of the pattern by selecting the end point of the line segment pair from among the grids arranged at the minimum interval to create a drawing figure. A figure processing method characterized by moving the figure onto the nearest grid inside the pattern.