JPH03275130A - Method and apparatus for agitation of liquid in liquid vessel - Google Patents
Method and apparatus for agitation of liquid in liquid vesselInfo
- Publication number
- JPH03275130A JPH03275130A JP2073360A JP7336090A JPH03275130A JP H03275130 A JPH03275130 A JP H03275130A JP 2073360 A JP2073360 A JP 2073360A JP 7336090 A JP7336090 A JP 7336090A JP H03275130 A JPH03275130 A JP H03275130A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- stirring
- plating
- liquid tank
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- Mixers With Rotating Receptacles And Mixers With Vibration Mechanisms (AREA)
- Chemically Coating (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、液槽における液体の撹拌方法および装置に関
するものである。本発明は特にめっき槽、洗浄槽(たと
えばめっき用洗浄槽)、表面処理槽(たとえば電着塗装
の処理槽)等における処理液や洗浄液の撹拌方法および
装置に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method and apparatus for stirring a liquid in a liquid tank. The present invention particularly relates to a method and apparatus for stirring a processing liquid or a cleaning liquid in a plating tank, a cleaning tank (for example, a cleaning tank for plating), a surface treatment tank (for example, a treatment tank for electrodeposition coating), and the like.
従来の技術
よく知られているようにめっき、表面処理、洗浄等の操
作の場合には、被処理物と処理液または洗浄液等の液体
とを具合よく接触させなlればならず、そのために従来
はエアレーション手段が用いられていた。また、被処理
物を液中で揺動させることも公知である。BACKGROUND OF THE INVENTION As is well known in the art, in operations such as plating, surface treatment, cleaning, etc., it is necessary to bring the object to be treated into proper contact with a liquid such as a processing liquid or a cleaning liquid. Conventionally, aeration means have been used. It is also known to oscillate the object to be treated in the liquid.
め、つきには電解めっきと無電解めっきの両者があるが
、いずれの場合においても、被処理物を薬液とよく接触
させて均質な皮膜を生成させることが非常に重要である
。現在では、ボルト、ナツト等の複雑な形状の物品の場
合には該物品を揺動装置で揺動させて皮膜の均質化を図
っているが、なお10−20%程度の不良品の発生は避
けられないといわれている。また、電子部品であるプリ
ント基板の銅めっきやハードディスクの無電解ニッケル
めっきを行う場合には極めて高度の品質が要求され、従
来は、ピンホール、ノヂュールおよびめっき層の不均一
等により20%程度の不良品がでることは致し方ないと
されていた。さらに、めっき槽中のハードディスク等の
配置間隔が狭く、たとえば20mm程度であるので、従
来慣用の塩ビパイプによるエアレーションを行えば気泡
によりハードディスクどうしが糊付は状態になり易くな
る心配があった。上記ピンホールの原因は、めっきによ
りガスが発生して表面に付着するためである。There are both electrolytic plating and electroless plating methods, but in either case, it is very important to bring the object to be treated into good contact with the chemical solution to form a homogeneous film. Currently, in the case of products with complex shapes such as bolts and nuts, the product is rocked using a rocking device to make the coating homogeneous, but the occurrence of about 10-20% of defective products is still low. It is said to be unavoidable. Furthermore, extremely high quality is required when performing copper plating for printed circuit boards, which are electronic components, and electroless nickel plating for hard disk drives. It was believed that it was unavoidable that defective products would be produced. Furthermore, since the spacing between the hard disks and the like in the plating bath is narrow, for example, about 20 mm, there is a concern that if aeration is performed using a conventional PVC pipe, the hard disks may easily become glued together due to air bubbles. The cause of the pinholes is that gas is generated during plating and adheres to the surface.
発明が解決しようとする課題
本発明者はめっき、表面処理、洗浄等の処理において不
良品の発生を皆無にし、処理時間を短縮し、かつ薬品等
の使用量の節減を図ることを目標として検耐を加え、す
なわち、これらの操作における液槽中の薬液または洗浄
液(以下では゛処理液°”と総称する)の撹拌の重要性
に着目し、種々の研究を行った結果、液槽中の処理液を
、後で述べられる特定の条件下に適度に振動撹拌させる
ことGこよって前記の目標が実質的に達成できることを
見出した。Problems to be Solved by the Invention The present inventor has conducted an inspection with the aim of completely eliminating the occurrence of defective products in processes such as plating, surface treatment, and cleaning, shortening processing time, and reducing the amount of chemicals used. Focusing on the importance of stirring the chemical solution or cleaning solution (hereinafter collectively referred to as "processing solution") in the liquid bath during these operations, we conducted various studies and found that the It has been found that the above objective can be substantially achieved by subjecting the treatment liquid to appropriate vibrational stirring under specific conditions described later.
発明の構成
本発明は、実質的に静止状態の液槽の中の液体を撹拌す
るにあたり、液槽を実質的に振動させることなく該液体
を振動撹拌すること特徴とする液槽中の液体の撹拌方法
に関するものである。Components of the Invention The present invention provides a method for stirring a liquid in a liquid tank in a substantially stationary state by vibrating the liquid without substantially vibrating the liquid tank. This relates to a stirring method.
本発明はまた、実質的に静止状態の液槽と、該液槽中に
配(6)実質的に静止状態の液槽と、該振動撹拌手段を
駆動させるノ・め耀転動手段とを備え、液槽を実質的に
振動させることなく液槽中の液体を振動撹拌するように
構成したことを特徴とする液槽中の液体の撹拌装置にも
関する。The present invention also provides a substantially stationary liquid tank, a substantially stationary liquid tank (6) disposed in the liquid tank, and a groove rolling means for driving the vibration stirring means. The present invention also relates to an apparatus for stirring a liquid in a liquid tank, characterized in that the apparatus is configured to vibrate and stir the liquid in the liquid tank without substantially vibrating the liquid tank.
好ましい実施態様の記述
本発明の好ましい実施態様について添付図面参照下に詳
細に説明する。DESCRIPTION OF PREFERRED EMBODIMENTS Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings.
第1図は、本発明の撹拌装置を備えた銅めっき装置の平
面図、第2図はその断面図、第3図は側面図である。該
銅めっき装置は、基台(2)上に静置されためっき槽す
なわち液槽(1)を備え、液槽の底部(他の場所でもよ
い)に振動板(8)が連結棒たとえば吊アーム(7)に
よって大体水平に懸架される。吊アーム(7)の上端部
は、液槽(1)の近傍に配(6)実質的モータ(11)
に接続される。振動モータ(11)は台(10)上に固
定され、振動速度はインバータ(13)で調節される。FIG. 1 is a plan view of a copper plating apparatus equipped with a stirring device of the present invention, FIG. 2 is a sectional view thereof, and FIG. 3 is a side view thereof. The copper plating apparatus includes a plating tank, that is, a liquid tank (1), which is placed stationary on a base (2), and a diaphragm (8) is connected to a connecting rod, for example, a hanging plate, at the bottom of the liquid tank (another place may be used). It is suspended approximately horizontally by arms (7). The upper end of the suspension arm (7) is arranged near the liquid tank (1) (6) and is equipped with a substantial motor (11).
connected to. A vibration motor (11) is fixed on a table (10), and the vibration speed is adjusted by an inverter (13).
振動モータ(11)が作動すると、その振動が吊アーム
(7)を介して振動板(8)に伝達され、振動板(8)
が振動し、その振動によって液槽(1)中の液体が振動
撹拌される。When the vibration motor (11) operates, the vibration is transmitted to the diaphragm (8) via the hanging arm (7), and the diaphragm (8)
vibrates, and the vibration stirs the liquid in the liquid tank (1).
この撹拌方法によれば液体のみが振動撹拌され、液槽(
1)は振動しない。According to this stirring method, only the liquid is vibrated and stirred, and the liquid tank (
1) does not vibrate.
上記のごとく、液槽(1)を振動させずにその中の液体
のみを振動撹拌するのが本発明の必須条件である。振動
板上にフラスコ等を載置して振動させる技術、すなわち
液槽とその中の液体とを共に振動させる技術は公知であ
るが、これは本発明とは全く別に技術である。As mentioned above, it is an essential condition of the present invention that only the liquid in the liquid tank (1) is vibrated and stirred without vibrating the liquid tank (1). The technique of placing a flask or the like on a diaphragm and vibrating it, that is, the technique of vibrating both the liquid tank and the liquid therein, is known, but this is a technique completely different from the present invention.
振動板(8)は任意の寸法および形状を有するものであ
ってよく、たとえば四角形、多角形、円形、菱形等であ
ってよ(、振動板の片面または両面は、平行縞模様の凹
凸とその他波形等の形状に形成してもよい。The diaphragm (8) may have any size and shape, for example square, polygonal, circular, diamond-shaped, etc. (one or both sides of the diaphragm may have parallel striped irregularities and other It may be formed into a wave shape or the like.
振動板(8)の 振動数は個々の場合において適宜決定
できるが、一般に200ないし600シtm、好ましく
は300ないし500vtmである(vtm・・・振動
数7分)。振動幅は、たとえば8ないし20mm、好ま
しくは10ないし15n+n+である。The frequency of the diaphragm (8) can be determined as appropriate in each case, but it is generally 200 to 600 vtm, preferably 300 to 500 vtm (vtm: frequency of 7 minutes). The vibration width is, for example, 8 to 20 mm, preferably 10 to 15n+n+.
第1図の液槽(1)中のメツキ液すなわち液体の中に被
処理物(被めっき体)を懸架し、めっき用電極(12)
に通電し、前記の振動を行いながら常法に従ってめっき
操作を行う。めっき自体は周知であるので、その詳細な
説明は省略する。The object to be processed (object to be plated) is suspended in the plating solution, that is, the liquid in the liquid tank (1) shown in Figure 1, and the plating electrode (12)
Electricity is applied to the plate, and the plating operation is carried out according to a conventional method while performing the above-mentioned vibration. Since plating itself is well known, detailed explanation thereof will be omitted.
本発明の撹拌方法を利用して第1図のめっき装置を用い
た場合には高速めっきが可能であり、操作効率が著しく
向上することが見出された。たとえば、従来の技術によ
って膜厚25嵩クロンのめっき操作を行った場合には、
温度25°Cにおいて電流密度2.5A/dm2、所要
時間55分であったが、本発明の場合には同温度におい
て電流密度3ないし5A/dm2、所要時間は30ない
し35分に短縮され、めっき層の品質は非常に良好であ
る。It has been found that when the plating apparatus shown in FIG. 1 is used using the stirring method of the present invention, high-speed plating is possible and the operating efficiency is significantly improved. For example, when a plating operation with a film thickness of 25 bulk meters is performed using conventional technology,
At a temperature of 25°C, the current density was 2.5 A/dm2 and the required time was 55 minutes, but in the case of the present invention, the current density was 3 to 5 A/dm2 and the required time was shortened to 30 to 35 minutes at the same temperature. The quality of the plating layer is very good.
前記のめっき操作の場合に、振動操作と共に、被処理物
の揺動操作を行うのが好ましく、さらにまた、特願平1
−204578号明細書(出願日平或1年8月9日)に
記載の特定の形状の多孔質散気筒を使用してエアレーシ
ョンを行うのが一般にこのましく、これによって、めっ
きの所要時間がさらに短縮できる。In the case of the above-mentioned plating operation, it is preferable to perform a rocking operation of the object to be treated in addition to a vibration operation.
It is generally preferable to carry out aeration using a porous aeration cylinder having a specific shape as described in Specification No. 204578 (filing date: August 9, 1999), and thereby the time required for plating can be reduced. It can be further shortened.
前記の多孔質散気筒の一例を第4図に示す。第4図に記
載の散気筒(16)は円筒形であって、アランダム質の
砥粒を骨材とした高温焼成セラミック体である。上記散
気筒(16)は散気筒架台(15)上に支持されている
。散気筒(工6)の片方の末端部に表蓋(31)を取り
付け、他方の末端部にN蓋(33)を取り付ける。裏蓋
(33)には、空気および/またはめっき液供給用導管
(35)を取り付ける。表蓋(31)および裏蓋(33
)はシャフト(37)に固定する。散気筒(16)の4
種の具体例A、B、CおよびDの寸法および物理的特性
を第1表に示す。散気筒(16)は、従来の塩ビパイプ
の場合と同様な使用方法に従って使用できる。An example of the porous aeration cylinder described above is shown in FIG. The aeration pipe (16) shown in FIG. 4 has a cylindrical shape and is a high-temperature fired ceramic body made of alundum abrasive grains as an aggregate. The aeration cylinder (16) is supported on an aeration cylinder pedestal (15). Attach the front cover (31) to one end of the aeration pipe (work 6), and attach the N cover (33) to the other end. An air and/or plating solution supply conduit (35) is attached to the back cover (33). Front cover (31) and back cover (33)
) is fixed to the shaft (37). 4 of the diffuser cylinder (16)
The dimensions and physical properties of species A, B, C and D are shown in Table 1. The aeration pipe (16) can be used in the same manner as for conventional PVC pipes.
図面において符号(3)は振動撹拌装置架台、(4)は
スプリング座、(5)はラバースプリング、(6)は振
動撹拌ベース、(9)は吊棒、(14)は配線、(17
)は振動撹拌装置モータ台、(18)は被処理物の揺動
装置モータ、(19)は駆動デノスク、(20)は駆動
ピン、(21)は揺動フレーム、(22)は揺動フレー
ム架台、(23)は揺動フレーム支えコロ、(24)は
ワーク受部分である。揺動装置モータ(18)、揺動フ
レーム(21)、揺動フレーム架台(22)、揺動フレ
ーム支えコロ(23)、ワーク受部分(24)等からな
る揺動機構は被処理物 (例えば実施例における被めっ
き物)を揺動させるためのものである。In the drawings, reference number (3) is the vibration stirring device mount, (4) is the spring seat, (5) is the rubber spring, (6) is the vibration stirring base, (9) is the hanging rod, (14) is the wiring, and (17) is the vibration stirring base.
) is the vibration stirring device motor stand, (18) is the swing device motor for the processed object, (19) is the drive denosk, (20) is the drive pin, (21) is the swing frame, (22) is the swing frame The frame, (23) is a swinging frame supporting roller, and (24) is a workpiece receiving part. A rocking mechanism consisting of a rocking device motor (18), a rocking frame (21), a rocking frame stand (22), a rocking frame support roller (23), a workpiece receiving part (24), etc. This is for swinging the object to be plated in the examples.
この揺動機構により被メツキ物を揺動させるとともに前
記振動板(8)による液層(1)内の液の振動撹拌をお
こなってもよい。The object to be plated may be oscillated by this oscillation mechanism, and the liquid in the liquid layer (1) may be vibrated and stirred by the diaphragm (8).
次に、洗浄操作の一例として、めっき後の物品の洗浄操
作について説明する。めっき後の物品には酸、塩基また
は塩類等の電導性物質が残留しているから、これを除去
するために洗浄しなければならない。めっき工場では、
経験に基づき、めっ0
き処理の後に1槽から4槽くらいの水洗槽を設置して被
処理物すなわち被めっき体の水洗を行っていた。水洗効
率を良くするために被処理物を揺動させたり、あるいは
シャワーによる水洗が行われた。しかしながら従来は、
充分な水洗のためにかなりの時間を要した。Next, as an example of the cleaning operation, a cleaning operation for articles after plating will be described. After plating, electrically conductive substances such as acids, bases, or salts remain on the article and must be cleaned to remove them. At the plating factory,
Based on experience, after the plating process, one to four washing tanks were installed to wash the object to be processed, that is, the object to be plated. In order to improve the washing efficiency, the objects to be processed were shaken or washed with water using a shower. However, conventionally,
It took a considerable amount of time to wash thoroughly.
この洗浄を本発明に従って洗浄液の振動撹拌装置の付い
た洗浄槽で行うと洗浄時間がかなり短縮され、洗浄液の
使用量も節減できることが見出された。洗浄によって除
去される物質が電導性物質である場合には、特願平1−
262951号(出願日平成1年10月11日)の方法
に従って洗浄液の電導度を測定することによって洗浄の
終了時を簡単に知ることができる。洗浄槽内の液の振動
撹拌操作は、前記のめっき処理の場合の振動撹拌操作の
ときと同様な方法で実施できる。振動撹拌操作は、他の
洗浄促進操作(たとえば前述のごとき被処理物の揺動お
よび散気筒を用いるエアレーション等)と併せて行うと
、より良好な結果が得られることが多い。It has been found that if this cleaning is carried out in accordance with the present invention in a cleaning tank equipped with a vibration agitation device for the cleaning liquid, the cleaning time can be considerably shortened and the amount of cleaning liquid used can also be reduced. If the substance to be removed by cleaning is an electrically conductive substance, Japanese Patent Application No. 1-
By measuring the conductivity of the cleaning liquid according to the method disclosed in No. 262951 (filed on October 11, 1999), it is possible to easily know when cleaning has ended. The vibration stirring operation of the liquid in the cleaning tank can be carried out in the same manner as the vibration stirring operation in the case of the plating process described above. Better results are often obtained when the vibration agitation operation is performed in conjunction with other cleaning promotion operations (for example, the above-mentioned shaking of the object to be treated and aeration using an aeration cylinder).
物品の電着塗装のごとき表面処理操作の場合にも、本発
明に従って処理液を振動撹拌することによって、既述の
めっきの場合と同様に非常に良い結果が得られる。In the case of surface treatment operations such as electrodeposition coating of articles, very good results are obtained by vibratory stirring of the treatment liquid according to the invention, as in the case of the plating described above.
発明の効果
前記の説明および後記の実施例の記載から明らかなよう
乙こ、本発明によれば、めっき操作、め−っき体の洗浄
操作、表面処理操作等の種々の操作において液槽中の液
体を前記条件下に振動撹拌することによって、操作時間
が予想外に大きく短縮でき、たとえば高速めっきが容易
に実施でき、めっき不良品、洗浄不良品、加工不良品が
著しく減少し、被処理物相互の糊伺は現象等の面倒な事
態は全く起こらないという顕著な効果が得られる。かよ
うに本発明は大なる実用的効果を奏するものである。Effects of the Invention As is clear from the foregoing description and the description of the examples below, according to the present invention, in various operations such as plating operations, cleaning operations for plated bodies, surface treatment operations, etc. By vibrating and stirring the liquid under the above conditions, the operation time can be unexpectedly greatly shortened, for example, high-speed plating can be easily carried out, and the number of defective plated products, defective cleaning products, and defective processing products is significantly reduced, and the number of products to be processed is reduced. When things are glued to each other, a remarkable effect can be obtained in that troublesome phenomena such as phenomena do not occur at all. As described above, the present invention has great practical effects.
(実施例)
次に、本発明の実施例を示す
例 1
スルーホール基板(穴あき基板)であるプリン1
2
ト回路基板(寸法A−1判:610X800mm)の銅
めっき操作を、第1図ないし第7図に記載の振動撹拌装
置の付いた液槽で行った。液槽の寸法は600mmX1
000mmX1000mmであり、液槽内の振動板は長
方形の板でその寸法ば400mmX 850mmX 1
5mmであった。めっき液は常法に従って調製し、その
組成ば次の通りである。(Example) Next, Example 1 shows an example of the present invention. Figure 1 shows the copper plating operation of a printed circuit board (size A-1 size: 610 x 800 mm) which is a through-hole board (board with holes). The experiments were carried out in a liquid tank equipped with a vibration stirring device as shown in FIG. The dimensions of the liquid tank are 600mm x 1
000mm x 1000mm, and the diaphragm inside the liquid tank is a rectangular plate with dimensions of 400mm x 850mm x 1.
It was 5 mm. The plating solution was prepared according to a conventional method, and its composition is as follows.
硫酸銅 100 g/n硫酸
190 g#2
光沢剤 適 量
塩素イオン 50mj2/I!。Copper sulfate 100 g/n sulfuric acid
190 g#2 Brightener Appropriate amount of chlorine ion 50mj2/I! .
めっき温度ば25°C8電流密度ば5A/dm2、であ
り、振動板の振動数は400vtm、振動幅は約10m
mであった。通電時間30分の後に厚み25呉クロンの
めっき層が形成された。The plating temperature is 25°C, the current density is 5A/dm2, the vibration plate frequency is 400vtm, and the vibration width is approximately 10m.
It was m. After 30 minutes of current application, a plating layer with a thickness of 25 mm was formed.
別に、比較実験として、振動撹拌操作を行わずに従来の
方法に従って前記のめっき操作を行った。Separately, as a comparative experiment, the above plating operation was performed according to the conventional method without performing the vibration stirring operation.
この場合には、厚み25ミクロンのめっき層を形成させ
るのに55分を要し、電流密度ば2.5A/dm2てあ
った。In this case, it took 55 minutes to form a plating layer with a thickness of 25 microns, and the current density was 2.5 A/dm<2>.
得られためっき層の厚みを試料の各部分について測定し
た。第8図は、比較実験におレノるスルーホール基板の
片面のめっき層の厚み(1クロン)のデータである。The thickness of the resulting plating layer was measured for each part of the sample. FIG. 8 shows data on the thickness (1 chrome) of the plating layer on one side of the through-hole substrate used in the comparative experiment.
第9図は、本発明に従って振動操作を行いながらめっき
操作を行ったときのスルーホール基板の片面のめっき層
の厚みのデータである。FIG. 9 shows data on the thickness of the plating layer on one side of the through-hole substrate when the plating operation was performed while performing the vibration operation according to the present invention.
第8図と第9図とのスルーホール試料のデータの比較か
ら明らかなように、比較実験の試料(第8図)では各部
分で厚みが不均質であり、また、やけの発生も認められ
た。さらに、ホール内のめっきが不均質で導通性が悪く
、めっき不良品の割合は約20%に達した。これに対し
本発明に係る試料(第9図)ではめっき層の厚みは実質
的に均質であり、やけはなく、ホールにおりる導通性も
良く、品質が非常に良好であって、めっき不良品は皆無
であった。As is clear from the comparison of the data of the through-hole sample in Figures 8 and 9, the sample from the comparative experiment (Figure 8) had non-uniform thickness in each part, and the occurrence of burns was also observed. Ta. Furthermore, the plating inside the holes was non-uniform and had poor conductivity, and the percentage of defective plating products reached approximately 20%. On the other hand, in the sample according to the present invention (Fig. 9), the thickness of the plating layer is substantially uniform, there is no discoloration, the conductivity through the holes is good, and the quality is very good, with no plating defects. There were no good products.
さらに別の実験を行った。この実験では、第1図ないし
第7図に記載の振動撹拌装置付きのめっき層に、第4図
に記載の散気筒0ωを取り付はエア3
4
レーションを行った。散気筒06)は、アランダムから
なる円筒形で、長さは500mm、内径は50mmであ
り、その気孔率は約35%、気孔径は約55≧クロン、
空気抵抗は約400kg、かさ比重は約2.4、空気透
過量は約120012.7mであった。めっき所要時間
はさらに短縮され、25ないし30分で25ξクロンの
厚みのめっき層が生成した。めっき層の品質は非常に良
好であった。Yet another experiment was conducted. In this experiment, the aeration cylinder 0ω shown in FIG. 4 was attached to the plating layer equipped with the vibration stirring device shown in FIGS. 1 to 7, and air 3 4 ration was performed. The diffuser pipe 06) is cylindrical and made of alundum, has a length of 500 mm, an inner diameter of 50 mm, a porosity of about 35%, a pore diameter of about 55≧Kron,
Air resistance was approximately 400 kg, bulk specific gravity was approximately 2.4, and air permeation amount was approximately 120012.7 m. The time required for plating was further reduced, and a plating layer with a thickness of 25ξcm was produced in 25 to 30 minutes. The quality of the plating layer was very good.
例2
3.5インチハードディスク(厚み1.1mm)の無電
解ニッケルめっき操作を、第1図ないし第7図に記載の
めっき槽と同様な振動撹拌装置付めっき槽で行った。た
だし本例では電極は勿論使用せず、常法に従って加熱用
の蒸気コイルおよび循環めっき液吐出管を設け、かつ、
例1記載の散気筒を使用した。Example 2 Electroless nickel plating of a 3.5-inch hard disk (thickness: 1.1 mm) was carried out in a plating bath equipped with a vibrating stirrer similar to the plating baths shown in FIGS. 1 to 7. However, in this example, electrodes are of course not used, and a heating steam coil and circulating plating solution discharge pipe are provided according to the usual method, and
The aeration cylinder described in Example 1 was used.
めっき槽の中央部に常法に従ってハードディスク枠を設
け、モータ駆動によって該枠をその軸の周りに回転でき
るようにして、前記被めっき体を揺動した。A hard disk frame was provided in the center of the plating tank according to a conventional method, and the frame was rotated around its axis by a motor to swing the object to be plated.
めっき槽に硫酸ニッケル5−6g#、次亜りん酸ナトリ
ウム150 g#2および適量のくえん酸ナトリウムを
含有する溶液を入れ、約90°Cに加熱した。A solution containing 5-6 g of nickel sulfate #2, 150 g of sodium hypophosphite #2, and an appropriate amount of sodium citrate was placed in a plating tank and heated to about 90°C.
めっきすべきハードディスクを前記の揺動枠の中に入れ
、常法に従って水洗、酸洗、脱脂、活性化処理等の予備
処理を行った後に、前記のめっき液Gこ入れ、めっき液
を振動させながらめっきを行った。めっき時間は45分
であった。非常に良好な、厚み15ミクロンのめっき槽
が形成された。The hard disk to be plated is placed in the above-mentioned rocking frame, and after performing preliminary treatments such as water washing, pickling, degreasing, and activation treatment according to conventional methods, the above-mentioned plating solution G is added and the plating solution is vibrated. Plating was performed while Plating time was 45 minutes. A very good plating bath with a thickness of 15 microns was formed.
めっき層の厚みは実質的に一様であり、ふくれやピンホ
ール等の欠陥部は皆無であった。The thickness of the plating layer was substantially uniform, and there were no defects such as blisters or pinholes.
比較実験として、振動撹拌操作を行わずに前記めっき操
作を繰り返した。この比較実験の場合にも散気筒による
エアレーションによってかなり良いめっき層が形成され
たが、めっき所要時間が、前記の本発明に従って振動撹
拌操作を行った場合に比して多少長く、約1時間であっ
た。As a comparative experiment, the plating operation was repeated without performing the vibration stirring operation. In the case of this comparative experiment, a fairly good plating layer was also formed by aeration using the aeration cylinder, but the time required for plating was a little longer, about 1 hour, than when the vibration stirring operation was performed according to the present invention. there were.
別の比較実験として、振動操作および散気筒の使用を省
略して、従来の技術によってめっき操作5
6
を行った。めっき時間はさらに長くなり、1時間30分
を要し、しかもめっき不良品の数が約20%に達した。As another comparative experiment, plating operation 56 was performed by conventional techniques, omitting the vibration operation and the use of an aeration tube. The plating time became even longer, requiring 1 hour and 30 minutes, and the number of defective products reached approximately 20%.
例3
3.5インチのハードディスク(厚み1.1 mm)の
無電解ニッケルめっき工程における水洗操作を、第1図
ないし第7図に記載の槽に類似の形態の振動装置付きの
洗浄槽において行った。Example 3 The water washing operation in the electroless nickel plating process of a 3.5-inch hard disk (thickness 1.1 mm) was performed in a washing tank equipped with a vibration device similar to the tanks shown in Figures 1 to 7. Ta.
めっき後のハードディスクの所定数を枠に入れて揺動さ
せ、水洗した。水洗の度合は、洗液の電気伝導度の測定
値に基づいて判定した。本発明に従って振動撹拌操作を
行いながら水洗した場合には、従来の方法に従って水洗
した場合に比して所要時間がはるかに短く、かつ洗浄水
の所要量も非常に少なくなることが確認された。なお、
振動撹拌装置と共に、前記の散気筒を用いるエアレーシ
ョンを行えば、洗浄効率はさらに向上する。A predetermined number of hard disks after plating were placed in a frame, shaken, and washed with water. The degree of water washing was determined based on the measured value of the electrical conductivity of the washing liquid. It has been confirmed that when washing with water while performing a vibratory stirring operation according to the present invention, the time required is much shorter than when washing with water according to the conventional method, and the amount of washing water required is also very small. In addition,
If aeration is performed using the above-mentioned aeration pipe together with the vibration stirring device, the cleaning efficiency will be further improved.
第1図は本発明に係る振動装置を備えた液槽の平面図、
第2図は第1図中の線X−Xに沿った部分の断面図、第
3図は第1図の液槽の側面図、第4図は、エアレーショ
ン用散気筒の一例の縦断面図、第5図は液槽のみの平面
図、第6図は第5図y−yの縦断面図、第7図は第5図
の右側面図、第8図2第9図は、実施例1に記載のプリ
ン;・基板試料のめっき層の厚みの測定結果を示す図表
である。
1・・めっき槽である液槽; 2・・液槽の基台;3・
・振動装置の架台; 4・・スプリング座; 5・・ラ
バースプリング; 6・・振動機; 7・・吊りアーム
; 8・・振動板; 9・・吊棒; 10・・振動モー
タ台; 11・・振動モーフ; 12・・電極;13・
・インバータ; 30・・エアレーション用散気筒;
31・・表蓋; 33・・裏蓋; 35・空気および/
またはメツキ液供給用導管; 37・・シャフト。
(以 上)
7
8
符開平
3
Z7513υ(°t)
第8図
第9図FIG. 1 is a plan view of a liquid tank equipped with a vibration device according to the present invention;
Fig. 2 is a cross-sectional view of a portion taken along the line X-X in Fig. 1, Fig. 3 is a side view of the liquid tank in Fig. 1, and Fig. 4 is a longitudinal cross-sectional view of an example of an aeration cylinder. , FIG. 5 is a plan view of only the liquid tank, FIG. 6 is a longitudinal sectional view taken along line y-y in FIG. 5, FIG. 7 is a right side view of FIG. 5, and FIG. 1. It is a chart showing the measurement results of the thickness of the plating layer of the substrate sample. 1. Liquid tank which is a plating tank; 2. Base of the liquid tank; 3.
- Vibration device mount; 4. Spring seat; 5. Rubber spring; 6. Vibrator; 7. Hanging arm; 8. Vibration plate; 9. Hanging rod; 10. Vibration motor stand; 11・・Vibration morph; 12・・Electrode; 13・
・Inverter; 30... Aeration cylinder;
31. Front cover; 33. Back cover; 35. Air and/or
or plating liquid supply conduit; 37...shaft. (more than that) 7 8 sign spread 3 Z7513υ (°t) Fig. 8 Fig. 9
Claims (8)
あたり、液槽を実質的に振動させることなく該液体を振
動撹拌することを特徴とする液槽中の液体の撹拌方法。(1) A method for stirring a liquid in a liquid tank, characterized in that when stirring the liquid in a liquid tank in a substantially stationary state, the liquid is vibrated and stirred without substantially vibrating the liquid tank.
る請求項1に記載の液槽中の液体の撹拌方法。(2) The method for stirring a liquid in a liquid tank according to claim 1, wherein the liquid tank is a plating tank, a cleaning tank, or a surface treatment tank.
0mmであり、振動数が200ないし600vtmであ
る請求項1に記載の液槽中の液体の撹拌方法。(3) The vibration width of the diaphragm placed in the liquid tank is 8 to 2
2. The method of stirring a liquid in a liquid tank according to claim 1, wherein the vibration frequency is 200 to 600 vtm.
00ないし500vtmである請求項1または2または
3に記載の液槽中の液体の撹拌方法。(4) The vibration width is 10 to 15 mm and the vibration frequency is 3.
4. The method for stirring a liquid in a liquid tank according to claim 1, wherein the stirring rate is 00 to 500 vtm.
揺動操作を併用する請求項1又は2、又は3、又は4に
記載の液槽中の液体の撹拌方法。(5) The method for stirring a liquid in a liquid tank according to claim 1, 2, 3, or 4, which uses aeration using a diffuser cylinder or a shaking operation of the object to be treated.
た振動による撹拌手段と、該振動撹拌手段の駆動手段と
を備え、液槽を実質的に振動させることなく液槽中の液
体を振動撹拌するように構成したことを特徴とする、液
槽中の液体の撹拌装置。(6) The liquid tank is equipped with a liquid tank in a substantially stationary state, a stirring means by vibration disposed in the liquid tank, and a driving means for the vibration stirring means, and the liquid tank can be used without substantially vibrating the liquid tank. 1. A stirring device for a liquid in a liquid tank, characterized in that the device is configured to vibrationally stir the liquid therein.
おり、駆動手段からの駆動力が該連結棒を介して振動手
段に伝達されて振動手段が振動し液体が撹拌されるよう
に構成した請求項6に記載の液槽中の液体の撹拌装置。(7) The vibrating means is connected to the driving means by a connecting rod, and the driving force from the driving means is transmitted to the vibrating means via the connecting rod, so that the vibrating means vibrates and the liquid is stirred. The device for stirring a liquid in a liquid tank according to claim 6.
物の揺動手段をさらに備えた請求項6または7に記載の
液槽中の液体の撹拌装置。(8) The device for stirring a liquid in a liquid tank according to claim 6 or 7, further comprising an aeration means using a diffuser cylinder or a means for shaking the object to be treated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2073360A JPH0671544B2 (en) | 1990-03-26 | 1990-03-26 | Method and apparatus for stirring liquid in liquid tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2073360A JPH0671544B2 (en) | 1990-03-26 | 1990-03-26 | Method and apparatus for stirring liquid in liquid tank |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03275130A true JPH03275130A (en) | 1991-12-05 |
| JPH0671544B2 JPH0671544B2 (en) | 1994-09-14 |
Family
ID=13515929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2073360A Expired - Lifetime JPH0671544B2 (en) | 1990-03-26 | 1990-03-26 | Method and apparatus for stirring liquid in liquid tank |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0671544B2 (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06220697A (en) * | 1992-12-28 | 1994-08-09 | Nippon Techno Kk | Plating method |
| JPH06287799A (en) * | 1993-04-01 | 1994-10-11 | Nippon Techno Kk | Electrodepositing device |
| JPH06304461A (en) * | 1993-04-20 | 1994-11-01 | Nippon Techno Kk | Stirring apparatus |
| EP0779377A1 (en) * | 1995-12-12 | 1997-06-18 | Nippon Paint Co., Ltd. | Pretreatment method for coating on metal molded article |
| EP0801149A1 (en) * | 1996-04-10 | 1997-10-15 | Nippon Paint Co., Ltd. | Method for Zinc phosphating molded metal articles |
| US5730856A (en) * | 1995-07-25 | 1998-03-24 | Nihon Techno Kabushiki Kaisha | Method for treating waste liquid with electrolytic oxidation and apparatus for carrying out the same |
| EP0915182A1 (en) * | 1997-10-21 | 1999-05-12 | Nihon Techno Kabushiki Kaisha | Plating method |
| US6322689B1 (en) | 1999-04-02 | 2001-11-27 | Japan Techno Co., Ltd. | Anodizing method and apparatus for performing the same |
| KR100339976B1 (en) * | 1995-05-10 | 2002-12-05 | 닛본 페인트 가부시끼가이샤 | Alkaline degreasing method using alkaline degreasing solution |
| US7338586B2 (en) | 2001-06-25 | 2008-03-04 | Japan Techno Co., Ltd. | Vibratingly stirring apparatus, and device and method for processing using the stirring apparatus |
| US7459071B2 (en) | 2001-05-02 | 2008-12-02 | Japan Techno Co., Ltd. | Hydrogen-oxygen gas generator and method of generating hydrogen-oxygen gas using the generator |
| WO2010023997A1 (en) | 2008-09-01 | 2010-03-04 | 日本テクノ株式会社 | Liquid material comprising hydrogen and oxygen, regasified gas comprising hydrogen and oxygen produced from the liquid material, process and apparatus for producing the liquid material and regasified gas, and fuel that does not evolve carbon dioxide and comprises the liquid material and regasified gas |
| US7964104B2 (en) | 2003-05-02 | 2011-06-21 | Japan Techno Co., Ltd. | Active antiseptic water or active water-based fluid, and production method and apparatus for the same |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023079632A1 (en) * | 2021-11-04 | 2023-05-11 | 株式会社荏原製作所 | Plating device and substrate-cleaning method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS493156U (en) * | 1972-04-08 | 1974-01-11 | ||
| JPS52158719U (en) * | 1976-05-27 | 1977-12-02 |
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1990
- 1990-03-26 JP JP2073360A patent/JPH0671544B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS493156U (en) * | 1972-04-08 | 1974-01-11 | ||
| JPS52158719U (en) * | 1976-05-27 | 1977-12-02 |
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06220697A (en) * | 1992-12-28 | 1994-08-09 | Nippon Techno Kk | Plating method |
| JPH06287799A (en) * | 1993-04-01 | 1994-10-11 | Nippon Techno Kk | Electrodepositing device |
| JPH06304461A (en) * | 1993-04-20 | 1994-11-01 | Nippon Techno Kk | Stirring apparatus |
| KR100339976B1 (en) * | 1995-05-10 | 2002-12-05 | 닛본 페인트 가부시끼가이샤 | Alkaline degreasing method using alkaline degreasing solution |
| US5730856A (en) * | 1995-07-25 | 1998-03-24 | Nihon Techno Kabushiki Kaisha | Method for treating waste liquid with electrolytic oxidation and apparatus for carrying out the same |
| EP0779377A1 (en) * | 1995-12-12 | 1997-06-18 | Nippon Paint Co., Ltd. | Pretreatment method for coating on metal molded article |
| US5780122A (en) * | 1995-12-12 | 1998-07-14 | Nippon Paint Co., Ltd. | Pretreatment method for coating on molded metal article |
| EP0801149A1 (en) * | 1996-04-10 | 1997-10-15 | Nippon Paint Co., Ltd. | Method for Zinc phosphating molded metal articles |
| US5863357A (en) * | 1996-04-10 | 1999-01-26 | Nippon Paint Co., Ltd. | Method for zinc phosphating molded metal articles |
| EP0915182A1 (en) * | 1997-10-21 | 1999-05-12 | Nihon Techno Kabushiki Kaisha | Plating method |
| US6261435B1 (en) | 1997-10-21 | 2001-07-17 | Nihon Techno Kabushiki Kaisha | Plating method |
| US6322689B1 (en) | 1999-04-02 | 2001-11-27 | Japan Techno Co., Ltd. | Anodizing method and apparatus for performing the same |
| US7459071B2 (en) | 2001-05-02 | 2008-12-02 | Japan Techno Co., Ltd. | Hydrogen-oxygen gas generator and method of generating hydrogen-oxygen gas using the generator |
| US7338586B2 (en) | 2001-06-25 | 2008-03-04 | Japan Techno Co., Ltd. | Vibratingly stirring apparatus, and device and method for processing using the stirring apparatus |
| US7678246B2 (en) | 2001-06-25 | 2010-03-16 | Japan Techno Co., Ltd. | Vibratingly stirring apparatus, and device and method for processing using the stirring apparatus |
| US7964104B2 (en) | 2003-05-02 | 2011-06-21 | Japan Techno Co., Ltd. | Active antiseptic water or active water-based fluid, and production method and apparatus for the same |
| WO2010023997A1 (en) | 2008-09-01 | 2010-03-04 | 日本テクノ株式会社 | Liquid material comprising hydrogen and oxygen, regasified gas comprising hydrogen and oxygen produced from the liquid material, process and apparatus for producing the liquid material and regasified gas, and fuel that does not evolve carbon dioxide and comprises the liquid material and regasified gas |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0671544B2 (en) | 1994-09-14 |
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