JPH0356825Y2 - - Google Patents
Info
- Publication number
- JPH0356825Y2 JPH0356825Y2 JP8147984U JP8147984U JPH0356825Y2 JP H0356825 Y2 JPH0356825 Y2 JP H0356825Y2 JP 8147984 U JP8147984 U JP 8147984U JP 8147984 U JP8147984 U JP 8147984U JP H0356825 Y2 JPH0356825 Y2 JP H0356825Y2
- Authority
- JP
- Japan
- Prior art keywords
- bellows
- membrane
- fixed support
- clean room
- membrane body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Ventilation (AREA)
- Cleaning In General (AREA)
- Prevention Of Fouling (AREA)
Description
【考案の詳細な説明】
[産業上の利用分野]
本考案は、工業生産用又は研究実験設備として
クリーンな環境を必要とする場合に使用される、
伸縮式ジヤバラハウスを用いたクリーンルームに
関するものである。[Detailed description of the invention] [Industrial application field] The invention is used in cases where a clean environment is required for industrial production or research experiment equipment.
This relates to a clean room using a retractable Jiyabara house.
[従来の技術]
従来のクリーンルームは第9図に示すように、
床面に固定され4方を囲む側壁に天井を載置して
作業室aを形成し、該作業室aの一方の側壁にリ
ターンダクトbをプレフイルターcを介して接続
し、リターンダクトbからの排気に外気取入口ダ
クトdからの外気を混合し、空調機eによりサプ
ライダクトfからメインフイルターgを介して前
記作業室a内に供給するようにしている。図中
h,iはプレフイルター、jは一部排気口、kは
ミキシングチヤンバー、lは調圧ダンパーを示
す。[Conventional technology] As shown in Figure 9, a conventional clean room
A work room a is formed by placing a ceiling on side walls that are fixed to the floor and surround on four sides, and a return duct b is connected to one side wall of the work room a via a prefilter c, and from the return duct b Exhaust air from the outside air intake duct d is mixed with the outside air from the outside air intake duct d, and the mixture is supplied into the work chamber a from the supply duct f through the main filter g by the air conditioner e. In the figure, h and i are prefilters, j is a partial exhaust port, k is a mixing chamber, and l is a pressure regulating damper.
このように、従来のクリーンルームは堅牢な構
造と高い密閉性が必要とされることから、建設費
が高コストになるばかりでなく、以下のようにな
種々の問題点が存在していた。 As described above, conventional clean rooms require a robust structure and high airtightness, which not only results in high construction costs, but also poses various problems as described below.
固定式で天井が低く、しかも出入口が小さく
て搬出入に手がかかることから、特に天井クレ
ーンやホークリフト等の運搬用具でないと搬出
入できない大形機材への利用は難しい。 It is a fixed type with a low ceiling, and the entrance is small, making it difficult to carry in and out, making it particularly difficult to use for large equipment that can only be carried in and out using transportation equipment such as an overhead crane or hawk lift.
壁、天井及び床等構成材の合せ部mは密閉性
を必要とすることから、シールを確実にせねば
ならない。 Since the joining parts m of constituent materials such as walls, ceilings, and floors require airtightness, the sealing must be ensured.
構成材の多くは発塵性でありこれを防止する
ため特殊材料の選定あるいは塗装が必要とな
る。 Many of the constituent materials generate dust, and to prevent this, special materials must be selected or coatings must be applied.
声が通りにくく、採光性も不良である。 It is difficult to hear voices and the lighting is poor.
内圧調整用の調圧ダンパーlが必要となる。 A pressure regulating damper l is required to regulate the internal pressure.
室内の気流がスムーズでないため滞留部分
nが発生し、クリーン度の分布が悪い。 Since the airflow in the room is not smooth, a stagnation area n occurs, and the distribution of cleanliness is poor.
四隅のデツドスペースoには比較的粒子の大
きな塵埃が堆積する。 Relatively large particles of dust accumulate in the dead spaces o at the four corners.
[考案が解決しようとする問題点]
本考案は、上述の従来のクリーンルームが有す
る問題点を解決し、機材の搬出入を容易にし、ク
リーン度を均一に維持でき、更に低コストで建設
できるようにしようとするものである。[Problems to be solved by the invention] This invention solves the problems of the conventional clean room mentioned above, makes it easy to carry equipment in and out, maintains a uniform level of cleanliness, and enables construction at low cost. This is what we are trying to do.
[問題点を解決するための手段]
本考案は、平行に敷設したレール上に、門型の
支柱を前記レールに上面及び両側面から当接する
複数のローラにより跨がつて移動し得るよう複数
載置し、該複数の支柱の外側に各支柱を一体に覆
うよう屈曲可能な膜体を配設し、該膜体の両下端
部外側に床面まで届くスカート状の膜体フラツパ
ーを設けて伸縮可能なジヤバラを形成し、該ジヤ
バラの両端側に固定支枠を夫々設け該各固定支枠
と開閉可能なジヤバラとにより密閉空間を形成し
得るようにし、前記両固定支枠にダクトを夫々接
続し、該各ダクトを空調機に連結して前記密閉空
間内の空気をフイルターを通して循環し得るよう
構成したことを特徴とするクリーンルームにかか
るものである。[Means for Solving the Problems] The present invention includes a structure in which a plurality of gate-shaped supports are mounted on parallel rails so that they can be moved across the rails by a plurality of rollers that contact the rails from the top and both sides. A bendable membrane body is arranged on the outside of the plurality of pillars so as to integrally cover each pillar, and a skirt-like membrane flapper that reaches the floor is provided on the outside of both lower ends of the membrane body so that it can be expanded and contracted. a bellows that can be opened and closed, fixed support frames are provided at both ends of the bellows so that an airtight space can be formed by each fixed support frame and a bellows that can be opened and closed, and ducts are connected to both fixed support frames. The clean room is characterized in that each of the ducts is connected to an air conditioner so that air in the closed space can be circulated through a filter.
[作用]
レール上を移動して伸縮するジヤバラは、片側
又は両側に開くようにしてあるため広い開口部が
得られる。[Function] The bellows, which expands and contracts by moving on the rail, is designed to open on one side or both sides, so a wide opening can be obtained.
又、ジヤバラは一体の膜体により形成されてい
るので極めて密閉性がよく、スカート状の膜体フ
ラツパーにより内圧調整、堆積塵埃の排出が可能
になるためクリーン度が均一になる。 In addition, since the bellows is formed of an integral membrane, it has extremely good sealing performance, and the skirt-like membrane flapper makes it possible to adjust the internal pressure and discharge accumulated dust, resulting in uniform cleanliness.
[実施例]
以下、図面に基づいて本考案の実施例を説明す
る。[Example] Hereinafter, an example of the present invention will be described based on the drawings.
第1図乃至第5図は本考案の一実施例を示すも
ので、所定の間隔で立設した一対の固定支枠1,
2間の床面3に、該固定支枠1,2の幅と同じ幅
になるよう一対のレール4を平行に敷設し、該レ
ール4上に門型の支柱5をローラ6,7,8によ
り跨つて移動し得るよう複数載置してある。該ロ
ーラ6,7,8とレール4との関係は、中央のロ
ーラ6がレール4上面を転動し、左右のローラ
7,8にてレール4の両側からサポートするよう
にして内圧の変動による脱輪を防止してある。 1 to 5 show an embodiment of the present invention, in which a pair of fixed support frames 1, erected at a predetermined interval,
A pair of rails 4 are laid in parallel on the floor 3 between the two spaces so that they have the same width as the fixed support frames 1 and 2, and a gate-shaped support 5 is placed on the rails 4 with rollers 6, 7, 8. A plurality of them are placed so that they can be moved astride each other. The relationship between the rollers 6, 7, 8 and the rail 4 is such that the center roller 6 rolls on the upper surface of the rail 4, and the left and right rollers 7, 8 support the rail 4 from both sides, due to fluctuations in internal pressure. Prevents wheels from coming off.
前記複数の支柱5の外側に可撓性の膜体9を、
各支柱5の間隔が略等しくなるよう一体に配設
し、該膜体9の両下端部外側に床面3まで届く長
さのスカート状の膜体フラツパー10をシーム加
工により一体的に設けて伸縮可能なジヤバラ11
を形成してある。該ジヤバラ11は両端部を夫夫
両側の固定支枠1,2に密着固定し、該ジヤバラ
11の中間部に接続離間可能な開閉用支枠12,
13を設け、前記固定支枠1,2と開閉可能なジ
ヤバラ11とにより密閉空間を形成し得るように
してある。 A flexible membrane body 9 is provided on the outside of the plurality of pillars 5,
The pillars 5 are arranged integrally so that the intervals are approximately equal, and skirt-like membrane flappers 10 having a length that reaches the floor surface 3 are integrally provided on the outside of both lower ends of the membrane body 9 by seaming. Expandable bellows 11
has been formed. Both ends of the bellows 11 are tightly fixed to the fixed support frames 1 and 2 on both sides of the husband and husband, and an opening/closing support frame 12 is connected to the middle part of the bellows 11 and can be separated.
13 is provided so that a sealed space can be formed by the fixed support frames 1 and 2 and the bellows 11 which can be opened and closed.
前記一方の固定支枠1の略中央部にリターング
リル14を設け、該リターングリル14にリター
ンダクト15を接続し、該リターンダクト15の
他側をミキシングチヤンバー16に接続すると共
に該ミキシングチヤンバー16にプレフイルター
17を備えた外気取入口ダクト18を接続する。 A return grill 14 is provided approximately at the center of the one fixed support frame 1, a return duct 15 is connected to the return grill 14, and the other side of the return duct 15 is connected to a mixing chamber 16. An outside air intake duct 18 equipped with a prefilter 17 is connected to 16.
該ミキシングチヤンバー16に空調機19を連
結し、該空調機19に接続したサプライダクト2
0によりプレフイルター21及びメインフイルタ
ー22を順次介して前記他方の固定支枠2側から
前記ジヤバラ11内に清浄空気を送給し得るよう
にしてある。 An air conditioner 19 is connected to the mixing chamber 16, and a supply duct 2 connected to the air conditioner 19.
0 allows clean air to be fed into the bellows 11 from the other fixed support frame 2 side through the pre-filter 21 and the main filter 22 in sequence.
以上のように構成したので、ジヤバラ11は膜
体9が可撓性であるため中央部の開閉用支枠1
2,13を離間することにより両開きするため、
天井及び側壁を広い間口で開くことができ大形機
材の搬出入が容易にできる。 With the above configuration, the bellows 11 has a flexible membrane body 9, so the opening/closing support frame 1 in the center
Because it opens on both sides by separating 2 and 13,
The ceiling and side walls can be opened with wide openings, allowing for easy loading and unloading of large equipment.
ジヤバラ11の膜体9は可撓性であり且つ各支
柱5がローラ6,7,8によりレール4上を滑ら
かに移動できるので人力により容易に開閉するこ
とができる。 The membrane body 9 of the bellows 11 is flexible and each support column 5 can be smoothly moved on the rail 4 by the rollers 6, 7, 8, so that it can be easily opened and closed by hand.
該ジヤバラ11を閉じて空調機19を運転する
と、クリーンルーム23内の空気はリターングリ
ル14から排出され、リターンダクト15を経て
ミキシングチヤンバー16に入り、該ミキシング
チヤンバー16において外気取入口ダクト18か
らプレフイルター17を通過した外気が取り入れ
られて混合され、サプライダクト20からプレフ
イルター21及びメインフイルター22を順次通
過してクリーンルーム23内に入り、該クリーン
ルーム23内を流れて、リターングリル14から
排出されて循環する。 When the bellows 11 is closed and the air conditioner 19 is operated, the air in the clean room 23 is discharged from the return grill 14, enters the mixing chamber 16 via the return duct 15, and is discharged from the outside air intake duct 18 in the mixing chamber 16. The outside air that has passed through the pre-filter 17 is taken in and mixed, passes through the pre-filter 21 and main filter 22 sequentially from the supply duct 20, enters the clean room 23, flows through the clean room 23, and is discharged from the return grill 14. and circulate.
以上のサイクルを繰り返すことにより、フイル
ター17,21,22で塵埃が除去され暫時塵埃
濃度が低下し、清浄となる。 By repeating the above cycle, dust is removed by the filters 17, 21, and 22, and the dust concentration temporarily decreases, resulting in cleanliness.
ここで、空調機19からクリーンルーム23内
に送入される清浄空気の一部は、第6図ロに示す
ように膜体9下部のスカート状の膜体フラツパー
10から全周に亘つて室外に放出され、該放出の
際、床面3に堆積した比較的大きな粒子の塵埃が
一緒にはきだされる。更に、室内の空気圧が高ま
ると第6図ハに示すように床面3と膜体フラツパ
ー10との〓間が拡大して圧力が逃され、内圧は
一定に保持される。又、室内の空気圧が低下し、
室内側が負圧に移行しようとすると、第6図イに
示すように前記膜体フラツパー10が床面3に接
して室内への外気の流入は防止される。 Here, a part of the clean air sent into the clean room 23 from the air conditioner 19 is released from the skirt-like membrane flapper 10 at the bottom of the membrane 9 all around the room, as shown in FIG. 6B. During the discharge, relatively large particles of dust deposited on the floor surface 3 are also ejected. Furthermore, when the air pressure in the room increases, the space between the floor surface 3 and the membrane flapper 10 expands as shown in FIG. In addition, indoor air pressure decreases,
When the indoor pressure is about to shift to negative pressure, the membrane flapper 10 comes into contact with the floor surface 3, as shown in FIG. 6A, and prevents outside air from flowing into the room.
更に又、室内の圧力が低下すると前述のように
膜体フラツパー10が床面に接するばかりでな
く、第7図イに示すように膜体9が外気に押さ
れ、第7図ロに示す定常時と比較して内側に変形
し、内圧が一定に維持される。 Furthermore, when the pressure in the room decreases, not only does the membrane flapper 10 come into contact with the floor surface as described above, but the membrane body 9 is pushed by the outside air as shown in FIG. It deforms inward compared to normal, and the internal pressure is maintained constant.
第8図は本考案の他の実施例であり、前記実施
例と略同様の構成において、ジヤバラ11を両開
きでなく、片開きにした例である。 FIG. 8 shows another embodiment of the present invention, in which the bellows 11 is not opened on both sides but on one side in a configuration substantially similar to that of the previous embodiment.
本実施例の場合にも、前記実施例と同様にクリ
ーンルームが得られ、特に開口幅を大きくとるこ
とができる。 In the case of this embodiment as well, a clean room can be obtained as in the previous embodiment, and in particular, the opening width can be made large.
なお、本考案のクリーンルームは上述の実施例
のみに限定されるものではなく本考案の要旨を逸
脱しない範囲内において種々変更を加え得ること
は勿論である。 It should be noted that the clean room of the present invention is not limited to the above-described embodiments, and it goes without saying that various changes may be made without departing from the gist of the present invention.
[考案の効果]
以上述べたように本考案のクリーンルームによ
れば、下記の如き種々の優れた効果を奏し得る。[Effects of the Invention] As described above, the clean room of the present invention can produce various excellent effects as described below.
() 天井、側壁部に大きな開口が得られ、天
井クレーン等による大形機材の搬出入が容易に
できる。() Large openings are provided in the ceiling and side walls, making it easy to transport large equipment using overhead cranes, etc.
() 開閉が人力により容易にできる。() Can be easily opened and closed manually.
() 天井、側壁及びスカートを膜体構造と
し、シーム加工で一体化したことから気密性が
高い。() The ceiling, side walls, and skirt have a membrane structure and are integrated with seams, making them highly airtight.
() 膜体下部に設けた独特のスカート構造に
より、内圧が変化するとスカートが持ち上がり
排出量を変化させて内圧を一定に保つ。又排出
時に床面に堆積した比較的大きな粒子の塵埃を
一緒にはきだすことができる。() Due to the unique skirt structure installed at the bottom of the membrane body, when the internal pressure changes, the skirt lifts up, changing the amount of discharge and keeping the internal pressure constant. Additionally, relatively large particles of dust accumulated on the floor surface can be removed together with the discharge.
() 膜体及び下部スカートは調圧ダンパーの
役目を果しており、送風停止時あるいはドアー
の開放時に室内圧が負側に移行しようとする
と、これらが縮んで吸収し、内圧を一定に保ち
外気の侵入を防止する。() The membrane body and lower skirt play the role of a pressure regulating damper, and when the indoor pressure tries to shift to the negative side when the ventilation is stopped or the door is opened, they contract and absorb it, keeping the internal pressure constant and absorbing the outside air. Prevent intrusion.
() 膜体下部のスカートのフラツパー効果に
よりクリーン度分布が均一になる。従つて、大
規模なクリーンルームの提供が可能となる。() The flapper effect of the skirt at the bottom of the membrane body makes the cleanliness distribution uniform. Therefore, it is possible to provide a large-scale clean room.
() 組合せ面がないため、シーリング作業が
不要であり、軽量で簡易なプレハブ工法により
短工期かつ廉価に完成できる。() Since there are no mating surfaces, there is no need for sealing work, and the lightweight and simple prefabricated construction method can be completed in a short period of time and at low cost.
() 移設が容易である。() Easy to relocate.
() 側壁部の膜体に透明なものを採用すれ
ば、万一室内に事故が発生した時でも外部から
視認できる。又、明るく開放的な雰囲気下で作
業することができる。() If a transparent membrane is used for the side wall, even if an accident occurs inside the room, it will be visible from the outside. Also, you can work in a bright and open atmosphere.
第1図は本考案のクリーンルームの全体説明
図、第2図は第1図の平面図、第3図は第2図の
−方向矢視図、第4図は第3図の部詳細
図、第5図は第2図の−方向矢視図、第6図
イ,ロ,ハは第4図における膜体フラツパーの停
止時、定常時及び内圧上昇時の各状態を夫々示す
説明図、第7図イ,ロは第4図における膜体の停
止時及び定常時の状態を夫々示す説明図、第8図
は本考案のクリーンルームの他の実施例の概略説
明図、第9図は従来のクリーンルームの説明図を
示す。
1,2は固定支枠、3は床面、4はレール、5
は支柱、6,7,8はローラ、9は膜体、10は
膜体フラツパー、14はリターングリル、15は
リターンダクト、16はミキシングチヤンバー、
20はサプライダクト、22はメインフイルタ
ー、23はクリーンルームを示す。
Fig. 1 is an overall explanatory diagram of the clean room of the present invention, Fig. 2 is a plan view of Fig. 1, Fig. 3 is a view taken in the - direction arrow of Fig. 2, Fig. 4 is a detailed view of the part of Fig. 3, FIG. 5 is a view taken in the - direction of FIG. 2, and FIGS. Figures 7A and 7B are explanatory views showing the stopped and steady state of the membrane body in Figure 4, respectively. Figure 8 is a schematic explanatory view of another embodiment of the clean room of the present invention. Figure 9 is a diagram of the conventional clean room. An explanatory diagram of a clean room is shown. 1 and 2 are fixed support frames, 3 is the floor surface, 4 is the rail, 5
are pillars, 6, 7, and 8 are rollers, 9 is a membrane body, 10 is a membrane flapper, 14 is a return grill, 15 is a return duct, 16 is a mixing chamber,
20 is a supply duct, 22 is a main filter, and 23 is a clean room.
Claims (1)
ラにより跨がつて移動し得るよう複数載置し、該
複数の支柱の外側に各支柱を一体に覆うよう屈曲
可能な膜体を配設し、該膜体の両下端部外側に床
面まで届くスカート状の膜体フラツパーを設けて
伸縮可能なジヤバラを形成し、該ジヤバラの両側
端に固定支枠を夫々設け該各固定支枠と開閉可能
なジヤバラとにより密閉空間を形成し得るように
し、前記両固定支枠にダクトを夫々接続し、該各
ダクトを空調機に連結して前記密閉空間内の空気
をフイルターを通して循環し得るよう構成したこ
とを特徴とするクリーンルーム。 A plurality of gate-shaped pillars are placed on parallel rails so that they can be moved across them by rollers, and a bendable membrane body is arranged on the outside of the plurality of pillars so as to integrally cover each pillar. , a skirt-like membrane flapper extending to the floor is provided on the outer side of both lower ends of the membrane body to form an expandable bellows, and a fixed support frame is provided at each side end of the bellows, and the mechanism can be opened and closed with each fixed support frame. A sealed space can be formed with possible bellows, ducts are connected to both fixed support frames, and each duct is connected to an air conditioner so that air in the sealed space can be circulated through a filter. A clean room characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8147984U JPS60193291U (en) | 1984-06-01 | 1984-06-01 | clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8147984U JPS60193291U (en) | 1984-06-01 | 1984-06-01 | clean room |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60193291U JPS60193291U (en) | 1985-12-23 |
| JPH0356825Y2 true JPH0356825Y2 (en) | 1991-12-24 |
Family
ID=30628297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8147984U Granted JPS60193291U (en) | 1984-06-01 | 1984-06-01 | clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60193291U (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01148382A (en) * | 1987-12-02 | 1989-06-09 | Hanwa:Kk | Equipment for preventing scattering and diffusion of fine powder of insulating material |
-
1984
- 1984-06-01 JP JP8147984U patent/JPS60193291U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60193291U (en) | 1985-12-23 |
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