JPH11176715A - Processing status display device and processing status display system - Google Patents

Abstract

(57) [Summary] To display a substrate processing status of a semiconductor manufacturing apparatus. SOLUTION: A control device (not shown) for controlling the operation of the device is conventionally built in a semiconductor manufacturing device, and the control device grasps a processing state of a substrate. Therefore, the processing state of the substrate is acquired by the control device, and the newly provided 3
Means for turning on the indicators 12a, 12b, and 12c in accordance with the processing state of the substrate. By this means, the display 12a is turned on after the substrate processing, and the display 1 is turned on during the substrate processing.
2b is turned on, and the display 12c is turned on before the substrate processing.
Thereby, the substrate processing state of the semiconductor manufacturing apparatus is clearly indicated to the operator.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a manufacturing apparatus for processing a substrate, and more particularly to a processing state display device and a processing state display system for displaying a processing state of a semiconductor manufacturing apparatus.

[0002]

2. Description of the Related Art Conventionally, as a cassette to be set in a semiconductor manufacturing apparatus, first, a cassette for storing a substrate before processing and a cassette for storing a processed substrate are required. In such a semiconductor manufacturing apparatus, after processing of a substrate is completed, it is necessary to replace the cassette in which the substrate before processing is newly stored. In many cases, a buffer for preparing a cassette in which is stored is prepared.
When this buffer is used, a plurality of cassettes storing substrates before processing exist in one semiconductor manufacturing apparatus. Therefore, in such a case, the operator cannot know at a glance the processing status of each cassette unless there is an apparatus for clearly indicating the processing status of the semiconductor manufacturing apparatus.

A conventional semiconductor manufacturing apparatus is equipped with a pilot lamp which is turned on at the end of processing. However, only the blinking information of the pilot lamp allows the operator to know at a glance the processing status of each cassette. Could not be provided. Originally, the pilot lamp mentioned above,
It is installed for the purpose of operating status and maintenance of the apparatus, and is not used for judging the processing status of the cassette.

In a semiconductor manufacturing apparatus requiring separate cassettes before and after the above-described substrate processing, an empty cassette is generated after a substrate is taken out of a cassette storing wafers before processing. There is a waste in transporting the empty cassette. Therefore, by storing the substrate before processing and the substrate after processing in the same cassette,
In the case of the above-mentioned waste avoiding apparatus, the operator cannot predict the processing status and determine an appropriate timing for preparing a new cassette only with the pilot lamp which is turned on at the end of the processing as described above. For this reason,
When an operator cannot grasp the processing status of the semiconductor manufacturing apparatus, waiting time is likely to occur, and efficient work cannot be performed.

[0005] The operation panel of the semiconductor manufacturing apparatus is
There are devices that show the processing status of the cassette, but the operation is necessary to obtain the desired information, and the display area of the display is small, so the operator cannot recognize it at a glance. Was not something to improve.

Conventionally, as shown in FIG. 10, the above-described semiconductor manufacturing apparatuses 1a to 1c exchange information on the state of the apparatuses with a host computer 3 via a network line 2. In addition, the indicator lights 4a to 4c are connected to the control device 11 built in each of the semiconductor manufacturing apparatuses 1a to 1c.
Controlled by a to 11c, they were lit and flashed to display the status of the apparatus to the operator.

In order to unify lighting methods such as lighting and blinking of the indicator lights 4a to 4c, the control device 1
It was necessary to create specifications and issue instructions to the manufacturers of the semiconductor manufacturing apparatuses 1a to 1c incorporating the semiconductor devices 1a to 11c.

Further, when the display contents of the indicator lamps 4a to 4c of the existing semiconductor manufacturing apparatuses 1a to 1c are changed, the control apparatuses 11a to 11c are built in the semiconductor manufacturing apparatuses 1a to 1c. The equipment 1a to 1c had to be remodeled, for which the production line had to be stopped.

There is also a system in which the indicator lights 4a to 4c attached to the semiconductor manufacturing apparatuses 1a to 1c are directly connected to the host computer 3. However, in such a configuration, a change in the production process may occur. When the semiconductor manufacturing apparatuses 1a to 1c are added or moved, the indicator lights 4a to 4c
For example, the wiring connecting the host computer 3 to the host computer 3 must be changed, which requires a great deal of labor and cost.

In the above-described conventional system, a work instruction is issued by a work instruction terminal 5 connected to a host computer 3 via a network line 2 as shown in FIG. In such a system, when an operator issues a work instruction, the semiconductor manufacturing apparatuses 1a to 1a determine whether the operator can issue a work instruction.
c, move to the work instruction terminal 5,
Here, after confirming the contents of the instruction, the work instruction terminal 5 issues a work instruction. Alternatively, the operator goes to the work instruction terminal 5 and firstly the semiconductor manufacturing apparatuses 1a to 1
The work instruction is issued from the work instruction terminal 5 after confirming the work instruction for all of the semiconductor manufacturing apparatuses 1a to 1c having the work instruction. Therefore, it takes time to issue a work instruction, and a great deal of labor and cost are required.

[0011]

As described above, the conventional semiconductor manufacturing apparatuses 1a to 1c are not equipped with an apparatus for displaying the substrate processing status of the apparatus to the operator, so that the operator needs a cassette for storing a plurality of substrates. It is difficult to grasp the processing status of each cassette when there is
There was a problem that work efficiency was poor.

Also, when a substrate before processing and a substrate after processing are stored in the same cassette, it is not possible to know an appropriate timing for preparing a new cassette, and there is a problem that the working efficiency is poor. .

Further, the above-described semiconductor manufacturing apparatuses 1a to 1c
Since the indicator lights 4a to 4c attached to are turned on and blinked by the control devices 11a to 11c built in the semiconductor manufacturing apparatuses 1a to 1c, when the production process fluctuates or when the semiconductor manufacturing apparatuses 1a to 1c With the addition or movement of 1c, the wiring connecting the indicator lamps 4a to 4c and the host computer 3 must be changed, which requires a great deal of labor and cost. There was a problem that the production line had to be stopped even if the display contents were simply changed.

The indicators indicating the operating states of the semiconductor manufacturing apparatuses 1a to 1c are indicated by indicator lamps 4a to 4c arranged close to the apparatuses.
4c, when the operator issues a work instruction from the work instruction terminal 5, the semiconductor manufacturing apparatuses 1a to 1c
It is necessary to go to the indicator lights 4a to 4c on the side and check the operation state of the semiconductor manufacturing apparatuses 1a to 1c before determining whether a work instruction can be issued. Since it is necessary to frequently move between the instruction terminal 5 and the semiconductor manufacturing apparatuses 1a to 1c, there is a problem that it takes time, labor and cost to issue a work instruction.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional problems, and a first object of the present invention is to display a substrate processing status of a semiconductor manufacturing apparatus to improve work efficiency. A second object of the present invention is to provide a processing status display device, in which a display content and a display method of various information such as a device status and a lot status of a semiconductor manufacturing device can be easily changed only by changing settings of a host computer or a program. A third object of the present invention is to provide a processing state display system capable of displaying a processing state without frequently moving between a semiconductor manufacturing apparatus and a work instruction terminal.
An object of the present invention is to provide a processing state display system capable of issuing a work instruction from a work instruction terminal.

[0016]

According to a first aspect of the present invention, there is provided a manufacturing apparatus for processing a substrate, means for obtaining a processing status of the substrate of the manufacturing apparatus,
There is provided a display means for displaying the processing status of the substrate obtained by this means before, during, and after the substrate processing.

According to the first aspect of the invention, the substrate processing state of the manufacturing apparatus, that is, before the substrate processing, during the substrate processing, and after the substrate processing is displayed separately. Thereby, the operator can clearly know the substrate processing state.

According to a second aspect of the present invention, there is provided a manufacturing apparatus for processing a substrate, an indicator light for displaying information relating to the manufacturing apparatus, and a control device connected to the manufacturing apparatus via a line. A host computer that manages the state of the apparatus online, and a host computer that is connected to the host computer via a line, and analyzes the information obtained by the host computer from the control apparatus and related to the manufacturing apparatus obtained through the line; An indicator light system controller that inputs and creates a display command based on the analysis result;
A drive unit is connected to the indicator light system controller via a line, and outputs a display to the indicator light based on a display command created by the indicator light system controller.

According to the second aspect, the host computer analyzes the apparatus information of the manufacturing apparatus online,
Based on the analysis result, the indicator light system controller changes the display state of the indicator light online via the drive unit. By changing the setting of the host computer or the indicator light control program for unifying the display format, changing the display contents, changing the production process, etc., the lighting method and the contents of the indicator lights can be changed according to the above. Change correspondingly.

A feature of the third invention is that a manufacturing apparatus for processing a substrate, an indicator light for displaying information related to the manufacturing apparatus or for displaying a work instruction, and a line connecting the control apparatus of the manufacturing apparatus to a line. A host computer that is connected through the line and manages the state of the manufacturing apparatus online, and an indicator light system controller that is connected to the host computer through a line and creates a display command based on information from the host computer. A drive unit connected to the indicator light system controller via a line, and outputting a display based on a display command created by the indicator light system controller to the indicator light, and connected to the host computer via a line. The host computer receives the information managed by the host computer and presents it to the operator. A work instruction terminal that issues a work instruction in accordance with the operation of the operator to the host computer, and outputs a display corresponding to the work instruction to the indicator light via the host computer, the indicator light system controller and the drive unit. That you have.

According to the third aspect, the work instruction terminal receives the apparatus information, lot information, and lot reservation information of the manufacturing apparatus from the host computer which manages the state of the manufacturing apparatus online, and displays the information to the operator. . For this reason, when issuing an operation instruction relating to a certain manufacturing apparatus, the operator checks the information relating to this manufacturing apparatus at a terminal, determines whether or not the operation instruction can be issued on the spot, and based on the determination result. Issue a work instruction from the work instruction terminal.

[0022]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic front view showing a first embodiment of the processing state display device of the present invention. On the front surface of the semiconductor manufacturing apparatus 1, there is a cassette insertion port for inserting a cassette 14 for accommodating substrates into the apparatus, and displays 12a and 12 made of LEDs or the like are provided on the front surface of the cassette insertion port.
b, 12c are installed. The processing state display device is composed of these displays 12a, 12b, 12c and a control device (not shown) built in the semiconductor manufacturing apparatus 1. The displays 12a, 12b, 12c are turned on to perform the respective substrate processing. Thereafter, during substrate processing and before substrate processing are displayed.

Here, since the control device controls the operation of the semiconductor manufacturing apparatus 1, it naturally understands the processing status of the substrate. Therefore, software means for acquiring the processing status of the substrate and lighting one of the indicators 12a, 12b, and 12c in accordance with the processing status is provided in the control device.

In this embodiment, a semiconductor wafer is described as an example of a substrate, but the present invention is not limited to this, and the present invention can be applied to an exposure mask substrate, a liquid crystal substrate, and the like.

Next, the operation of this embodiment will be described. Since the control device built in the semiconductor manufacturing apparatus 1 knows the processing status of the substrate stored in the cassette 11, the display 12c is turned on before processing the substrate, so that the operator can process the substrate. Indicates that it is before. Further, the control device turns on the display 12b during the processing of the substrate to indicate to the operator that the processing of the substrate is in progress. Is displayed.

According to the present embodiment, the indicators 12a, 1
By displaying the processing status of the substrates by 2b and 12c, the operator can properly grasp the processing status of each cassette when there are a plurality of cassettes for accommodating the substrates, etc. Even in the case where the processed substrates are stored in the same cassette, waiting time can be reduced by preparing a new cassette at an appropriate timing, and the working efficiency can be significantly improved.

As a result, the processing capacity in one semiconductor manufacturing apparatus within the same period is improved, and the running cost can be reduced. Since processing is performed at intervals predicted in advance, unclear factors are reduced, and the reliability of semiconductor manufacturing can be improved. Since the processing status of the substrate is clearly shown, the behavior of the apparatus can be grasped by the operator, and the safety of work can be improved.

FIG. 2 is a schematic front view showing an embodiment of the processing state display device of the present invention. The indicators 12a, 12b, and 12c of the processing status display device of the present example are installed on the front of the load port. A control device (not shown) built in the semiconductor manufacturing apparatus 1 displays the processing status of the number of unprocessed substrates for each cassette in these indicators 12a, 12b, and so as to correspond to each cassette in the load port. 12c.

FIG. 3 is a schematic front view showing another embodiment of the processing state display device of the present invention. The indicators 12 a, 12 b, and 12 c of the processing status display device of the present example are installed on the front of the pod 8. A control device (not shown) built in the semiconductor manufacturing apparatus displays the processing status of the number of unprocessed substrates in the pod 8 on these indicators 12a, 12b, and 12c.
In this example, the display 12a, 1
2b and 12c can be easily visually observed.

FIG. 4 is a schematic front view showing a processing state display device according to a second embodiment of the present invention. In this example, in addition to the displays 12a, 12b, and 12c, a display 13 composed of an LCD or the like is installed on the front surface of the cassette insertion port of the semiconductor manufacturing apparatus 1, but other configurations are the same as those shown in FIG. This is the same as the first embodiment.

In the present embodiment, a detecting means (not shown) for detecting the number of substrates contained in the cassette 14 and a detecting means (not shown) for detecting the number of processed substrates are provided inside the semiconductor manufacturing apparatus 1. Is provided in the semiconductor manufacturing apparatus 1 or its peripheral portion, and the detection information of these detecting means is provided to a control device (not shown) in the apparatus 1. Thus, the control device calculates the number of substrates before processing, and displays an end notice on the separately installed display device 13.

Further, by providing means for interpreting processing conditions and transport conditions and time measuring means for detecting processing start time and processing elapsed time inside the semiconductor manufacturing apparatus 1, the control apparatus can calculate the end time. Thus, the predicted end time of the substrate processing may be displayed on the display device 13.

According to this embodiment, the operator can know the end timing of the substrate processing more accurately than in the previous embodiment, so that the working efficiency can be further improved.

FIG. 5 is a block diagram showing a first embodiment of the processing status display system according to the present invention. However, the same parts as those in the conventional example are described using the same reference numerals. Controllers 11a to 11a built in semiconductor manufacturing apparatuses 1a to 1c
Reference numeral 11c is connected to the host computer 3 via the network line 2. The host computer 3 is connected to the display system controller 6 via the network line 2.
, And the display system controller 6 connects the drive unit 7 via the network line 2. The drive unit 7 connects the indicator lights 4a to 4c and blinks these indicator lights 4a to 4c.

Here, the display color of each of the indicator lights 4a to 4c is A
The color A is turned on when an abnormality occurs, and the color B blinks when the lot is completed.

Next, the operation of this embodiment will be described. For example, assume that a failure has occurred in the semiconductor manufacturing apparatus 1a. The control device 11a of the semiconductor manufacturing apparatus 1a notifies the host computer 3 via the network line 2 that an abnormality has occurred in the apparatus. The host computer 3 analyzes and determines the state of the device based on the content reported from the control device 11a,
The analysis result is sent to the display system controller 6 through the network line 2 in order to change the display state of.

Upon receiving the analysis result from the host computer 3, the display system controller 6 transmits a display command based on the analysis result to the drive unit 7. The drive unit 7 illuminates the designated indicator lamp 4a with the color A to indicate a state in which an abnormality has occurred in the semiconductor manufacturing apparatus 1a.

FIG. 6 is a flowchart showing the operation procedure of the above system. First, in step 601,
The control device of the semiconductor manufacturing apparatus in which the failure has occurred reports to the host computer 3 via the network line 2 that the apparatus has failed. The host computer 3 executes step 60
At 2, the failure is analyzed and the result is sent to the display system controller 6. In step 603, the display system controller 6 determines, based on the input failure analysis result, which color of the display lamp of which device is to be turned on or blinked with reference to the internal data.
A display command to turn on the indicator lamp of the failed semiconductor manufacturing apparatus in A color is sent to the drive unit 7. In step 605, the drive unit 7 turns on the indicator lamp of the failed semiconductor manufacturing apparatus in A color according to the received display command.

Next, for example, it is assumed that the lot of the semiconductor manufacturing apparatus 1b has been completed. The controller 11b of the apparatus notifies the host computer 3 via the network line 2 that the lot has been completed. The host computer 3 analyzes the status of the device based on the content reported from the control device 11b, and displays the analysis result through the network line 2 to change the status of the indicator lamp. Send to controller 6.

Upon receiving the analysis result from the host computer 3, the display system controller 6 creates a display command based on the analysis result, and transmits the created display command to the drive unit 7. In accordance with the received display command, the drive unit 7 displays the indicator 4b of the semiconductor manufacturing apparatus 1b.
Blinks in B color to indicate that the apparatus has finished the lot.

According to this embodiment, the indicator light system controller 6 controls the operation system by using the ROM.
It operates by receiving the indicator light system software from the host computer 3 as a file. Therefore, since data for turning on the indicator lamps 4a to 4d is managed by the host computer 3,
The specification and change of the indicator lamps 4a to 4c accompanying the unification and change of the lighting method can be dealt with only by changing the data held in the host computer 3, so that a great deal of labor is not required unlike the related art. , Easily and inexpensively. Further, when the display content is changed, it is possible to cope with the change of the setting of the host computer 3 without stopping the production line.

Further, since the display state of the indicator lamps 4a to 4c is controlled by the host computer 3 which manages the whole of the semiconductor manufacturing apparatuses 1a to 1c, the display can be performed in consideration of the state of the whole manufacturing apparatus. . Further, since the operation system of the indicator light system control controller 6 is stored in a low-cost ROM, it is not necessary to install a hard disk, the controller 6 can be made inexpensive, and the failure rate can be reduced. it can. Further, the drive unit 7 is connected by one network line 2 from the display system controller 6 and can be installed in a place close to the semiconductor manufacturing apparatuses 1a to 1c. The wiring (a plurality of wirings) between 4a to 4c can be shortened, and the system can be constructed at low cost by reducing wiring.

FIG. 7 is a block diagram showing a processing state display system according to a second embodiment of the present invention. However, the same parts as those in the conventional example are described using the same reference numerals. Controllers 11a to 11a built in semiconductor manufacturing apparatuses 1a to 1c
Reference numeral 11c is connected to the host computer 3 and the display system controller 6 via the network line 2. The host computer 3 is connected to the work instruction terminal 5 via the network line 2. The host computer 3 is connected to the display system controller 6 via the network line 2, and the display system controller 6 is connected to the drive unit 7 via the network line 2. The drive unit 7 connects the indicator lights 4a to 4c, and turns on, turns off, and blinks these indicator lights.

Here, the display color of each of the indicator lights 4a to 4c is A
4 colors from D to D. If an abnormality occurs, light A color. If lot processing is possible, light C color. If lot processing is possible and there is a work instruction, flash C color. And
When the lot processing is being performed, the B color is turned on, and when the lot processing is completed, the B color is flickered.

Next, the operation of this embodiment will be described. For example, it is assumed that the semiconductor manufacturing apparatus 1a is an apparatus capable of processing a plurality of lots, and has processed only one lot. Control device 11 of this semiconductor manufacturing apparatus 1a
“a” notifies the host computer 3 of the current number of processed lots and the number of substrates through the network line 2. The host computer 3 determines that the semiconductor manufacturing apparatus 1a is still processing only one lot, based on the content reported from the control device 11a, and changes the display state of the indicator lamp 4a to make a determination. To the display system controller 6 via the network line 2 and also to the work instruction terminal 5 via the network line 2.

The display system controller 6 having received the judgment result from the host computer 3 checks the lighting / flashing state of the indicator lamp 4a of the designated semiconductor manufacturing apparatus 1a and determines whether or not the next lot can be processed. Judge,
If processing is possible, a lot processing possible display command is transmitted to the drive unit 7. The drive unit 7 turns off the B color and blinks the C color for the designated indicator light 4a, so that the next lot can be processed for the device.
The fact that there is a work instruction is displayed to the worker. FIG. 8 is a flowchart showing an outline of the operation procedure of the above-described system. First, in step 801, the control device of the semiconductor manufacturing apparatus whose lot has been completed reports the lot completion of this apparatus to the host computer 3 via the network line 2. In response, the host computer 3 determines in step 802 whether there is a next lot in the semiconductor manufacturing apparatus and sends the result to the display system controller 6. The display system controller 6 determines in step 803 based on the input determination result.
It is determined by referring to the internal data which indicator light of which device is to be lit or blinked with reference to the internal data. Send to 7. In step 805, the drive unit 7 blinks the indicator light of the semiconductor manufacturing apparatus whose lot has been completed in C color according to the received display command.

Next, for example, it is assumed that the lot of the semiconductor manufacturing apparatus 1b has been completed. Control device 1 of semiconductor manufacturing device 1b
1b informs the host computer 3 that the lot has been completed. The host computer 3 determines that the semiconductor manufacturing apparatus 1b has finished the lot processing based on the content reported from the control device 11b, and displays the determination result through the network line 2 to change the state of the indicator 4b. Notifying the system controller 6
It is also transmitted to the work instruction terminal 5 through the network line 2.

On the basis of the contents transmitted from the host computer 3, the display system controller 6 controls the display lamp 4a for transmitting the end of the lot processing of the semiconductor manufacturing apparatus 1b designated by the host computer 3 to the operator. The display command is transmitted to the drive unit 7. The drive unit 7
By blinking the B color on the designated indicator light 4a, it is displayed to the operator that the semiconductor manufacturing apparatus 1b has finished processing the lot.

The host computer 3 always informs the display system controller 6 of the future lot reservation status for each of the semiconductor manufacturing apparatuses 1a to 1c. The control devices 11a to 11c of the respective semiconductor manufacturing apparatuses 1a to 1c include the current semiconductor manufacturing apparatuses 1a to 1c.
Although the operating status of c is transmitted to the host computer 3, the same contents are also transmitted to the display system controller 6.

The display system controller 6 has previously received the lot reservation status from the host computer 3. Therefore, for example, when the semiconductor manufacturing apparatus 1c finishes processing a lot soon (three or less remaining substrates), instead of waiting for an instruction from the host computer 3, the display system controller 6 operates the apparatus 1c. The status and the reservation status of the lot for the apparatus 1c are determined, and a display command for directly instructing the next lot processing instruction to the operator is transmitted to the drive unit 7. The drive unit 7 blinks the indicated indicator lamp 4c in the C color to inform the operator to the semiconductor manufacturing apparatus 1c that the next lot processing is possible.

FIG. 9 is a flowchart showing the outline of the operation procedure of the above-mentioned system. First, step 901
, The control devices 11a to 1c of the semiconductor manufacturing devices 1a to 1c
1c reports the lot status of each device to the host computer 3 and the indicator light system controller 6 via the network line 2.

In step 902, the indicator light system controller 6 sets the indicator light of which device to what color based on the information obtained from the controllers 11a to 11c of the semiconductor manufacturing apparatuses 1a to 1c and the information obtained from the host computer 3. Step 903 determines whether or not to blink with reference to the internal data.
Then, a display command for blinking the indicator lamp of the semiconductor manufacturing apparatus in C color is sent to the drive unit 7. In step 904, the drive unit 7 blinks the indicator lamp of the semiconductor manufacturing apparatus for which the lot has been completed in C to indicate that there is a next lot processing instruction in accordance with the received display command.

On the other hand, the work instruction terminal 5 displays information such as device information and lot information sent from the host computer 3 through the network line 2 and presents it to the operator. Thereby, the operator can use the semiconductor manufacturing apparatus 1
It is possible to determine whether or not a work instruction can be issued without going to a to 1c, and to issue a work instruction from the work instruction terminal 5 to the host computer 3 at an appropriate timing. Upon receiving the work instruction, the host computer 3 analyzes the work instruction and displays the analysis result on the display system controller 6.
Send to The display system controller 6 creates a display command based on the analysis result and sends it to the drive unit 7.
The drive unit 7 sends the work instruction to the operator by performing display on the instructed display in accordance with the display instruction.

According to the present embodiment, since the host computer 3 controls and manages the device information, lot information, work instruction information, etc., the work instruction terminal 5 may receive these information from the host computer 3. it can. Thereby, the operator can confirm these information on the work instruction terminal 5, and therefore, in order to confirm the state of the semiconductor manufacturing apparatuses 1a to 1c, the semiconductor manufacturing apparatuses 1a to 1c
There is no need to frequently move to the c-side indicator lights 4a to 4c, and a work instruction can be quickly and easily issued from the work instruction terminal 5 to the worker, thereby improving work efficiency.

The work instruction terminal 5 is a semiconductor manufacturing device 1a.
To obtain various information from the host computer 3 which manages all of the semiconductor control devices 1a to 1c.
It is possible to issue a work instruction considering the state of c. Further, since the display system controller 6 is notified of the lot reservation status from the host computer 3, it is possible to promptly issue a display instruction to the operator.

[0056]

As described above in detail, according to the processing state display apparatus of the first invention, the processing efficiency of the substrate can be displayed by displaying the substrate processing state of the semiconductor manufacturing apparatus.

According to the processing status display system of the second invention, since the host computer manages the display control of the indicator lamps for displaying the status of the semiconductor manufacturing apparatus, only the setting of the host computer or the change of the program is performed. Thus, it is possible to easily change the display method and display contents of the indicator lamp.

According to the processing status display system of the third invention, the work instruction terminal presents the information of the host computer which supervises and manages the semiconductor manufacturing equipment to the operator, so that the operator can communicate between the semiconductor manufacturing equipment and the working terminal. A work instruction can be issued quickly and easily from the work instruction terminal without frequently moving the.

[Brief description of the drawings]

FIG. 1 is a schematic front view showing a first embodiment of a processing state display device according to the present invention.

FIG. 2 is a schematic front view showing a first embodiment of the processing state display device of the present invention.

FIG. 3 is a schematic front view showing a second embodiment of the processing state display device of the present invention.

FIG. 4 is a schematic front view showing a processing state display device according to a second embodiment of the present invention.

FIG. 5 is a block diagram showing a first embodiment of the processing status display system of the present invention.

FIG. 6 is a flowchart showing an operation procedure of the system shown in FIG. 5;

FIG. 7 is a block diagram showing a processing state display system according to a second embodiment of the present invention.

FIG. 8 is a flowchart showing an operation procedure of the system shown in FIG. 7;

FIG. 9 is a flowchart illustrating another operation procedure of the system illustrated in FIG. 7;

FIG. 10 is a block diagram showing a configuration example of a conventional processing state display system.

FIG. 11 is a block diagram showing another configuration example of a conventional processing state display system.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1, 1a-1c Semiconductor manufacturing apparatus 2 Network line 3 Host computer 4a-4c Indicator 5 Work instruction terminal 6 Indicator system controller 7 Drive unit 8 Pods 12a-12c, 13 Indicator 14 Cassette 14

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Mihoko Matsuda 25-1, Ekimae Honcho, Kawasaki-ku, Kawasaki, Kanagawa Prefecture Inside of Toshiba Microelectronics Co., Ltd. (72) Inventor Hitoshi Shimono 25-1, Ekimae Honcho, Kawasaki-ku, Kawasaki-shi, Kanagawa Toshiba Inside Microelectronics Co., Ltd. (72) Koji Kitajima 1 Komugi Toshiba-cho, Saiwai-ku, Kawasaki-shi, Kanagawa Prefecture Inside the Toshiba Tamagawa Plant (72) Inventor Takaaki Yamamoto 72 Horikawa-cho, Saiwai-ku, Kawasaki-shi, Kanagawa Stock Company Toshiba Kawasaki Office

Claims (3)

[Claims] 1. A manufacturing apparatus for performing processing on a substrate, means for acquiring a processing state of the substrate of the manufacturing apparatus, and a processing state of the substrate obtained by the means, before the substrate processing, during the substrate processing, during the substrate processing, And a display means for displaying the information separately later. 2. A manufacturing apparatus for performing processing on a substrate, an indicator light for displaying information related to the manufacturing apparatus, and a control device connected to the manufacturing apparatus via a line to change the state of the manufacturing apparatus online. A host computer to be managed, connected to the host computer via a line, and the host computer inputs a result of analyzing information related to the manufacturing apparatus obtained from the control device via the line, and the analysis result An indicator light system controller that creates a display command based on the indicator light system controller connected to the indicator light system controller via a line, and a display based on the display command created by the indicator light system controller is displayed on the indicator light. And a driving unit for outputting the processing status. 3. A manufacturing apparatus for processing a substrate, an indicator light for displaying information related to the manufacturing apparatus or displaying a work instruction, and connected to a control device of the manufacturing apparatus via a line, A host computer that manages the state of the manufacturing apparatus online, an indicator light system controller that is connected to the host computer via a line, and that creates a display command based on information from the host computer; A drive unit that is connected to the controller via a line and outputs a display based on the display command generated by the indicator light system controller to the indicator light; and a drive unit connected to the host computer via a line to manage the host computer. To the operator, present it to the operator, and A work instruction terminal that issues a work instruction to the host computer, and issues a display corresponding to the work instruction to an indicator light via the host computer, the indicator light system controller, and the drive unit. A processing status display system characterized by the following.