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JPH11197583A - Solvent treating hermetic device - Google Patents

Solvent treating hermetic device

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Publication number
JPH11197583A
JPH11197583A JP1788098A JP1788098A JPH11197583A JP H11197583 A JPH11197583 A JP H11197583A JP 1788098 A JP1788098 A JP 1788098A JP 1788098 A JP1788098 A JP 1788098A JP H11197583 A JPH11197583 A JP H11197583A
Authority
JP
Japan
Prior art keywords
processed
processing
tank
gas
closed container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1788098A
Other languages
Japanese (ja)
Other versions
JP4001993B2 (en
JPH11197583A5 (en
Inventor
Keiji Nakaya
圭治 中矢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP01788098A priority Critical patent/JP4001993B2/en
Publication of JPH11197583A publication Critical patent/JPH11197583A/en
Publication of JPH11197583A5 publication Critical patent/JPH11197583A5/ja
Application granted granted Critical
Publication of JP4001993B2 publication Critical patent/JP4001993B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To lessen solvent loss and to embody treatment which enables the protection of the ozone strate, etc., by providing the bottom of hermetic vessel with plural treating vessels communicating with inside of the hermetic vessel 1 through an opening, pulling the materials to be treated in the respective treating vessels from the treating vessels by rotatable and vertically freely movable hangers and subjecting these materials to the treatment one after another. SOLUTION: A gas holder 4 which sucks the gas in the hermetic vessel 1 and redischarges the gas is installed to the hermetic vessel 1 and the radially extending plural hangers 7 are mounted on the inside end of a rotatable and vertically freely movable drive shaft 6 in the hermetic vessel 1. The materials 7 to be treated are hung at the front ends of the respective hangers 7 and the drive shaft 6 is pulled up, by which the materials 7 to be treated are pulled up from the treating vessels 3 through the apertures disposed at shielding plates 2. At least one of inlet/outlet vessel 13 among the treating vessels 3 is provided with a shutter 11 capable of hermetically closing the apertures and the outside walls of the treating vessels 3 are provided with hermetically closable shutters 12 for putting in and out of the materials to be treated.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、溶剤を用いた処理装置
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing apparatus using a solvent.

【0002】[0002]

【従来の技術】溶剤を用いた処理装置としては、作業の
能率上、被処理物の出し入れのために解放状態の開口部
を持った処理装置が一般的である。被処理物の形状は小
さかったり複雑であったりするために篭等の中に纒めて
入れ、処理操作をするのが通常であるが、被処理物を処
理装置に出し入れする際に、溶剤の処理装置からの漏れ
や被処理物との同伴による溶剤の損失や作業環境の悪化
等を避けることは困難である。
2. Description of the Related Art As a processing apparatus using a solvent, a processing apparatus having an opening in an open state for taking in and out an object to be processed is generally used in terms of work efficiency. Since the shape of the object to be processed is small or complicated, it is usual to put it in a basket or the like and perform the processing operation. It is difficult to avoid the loss of the solvent and the deterioration of the working environment due to the leakage from the processing apparatus or the entrainment with the object to be processed.

【0003】このようなことから溶剤の漏れが避けられない
ため、溶剤の毒性や可燃性の問題から、用いる事のでき
る溶剤の種類が限定され、最近では塩素化炭化水素や塩
素化弗素化炭化水素が用いられている。しかしながらこ
れらの溶剤は地球のオゾン層破壊や、温暖化の原因とな
ると言われ、その使用制限が計られており、損失の減少
や他の溶剤への転換が要求されている。
[0003] Because of this, leakage of the solvent is inevitable, and the types of solvents that can be used are limited due to the toxicity and flammability of the solvent. Recently, chlorinated hydrocarbons and chlorinated fluorinated carbon Hydrogen is used. However, these solvents are said to cause ozone depletion on the earth and cause global warming, and their use has been restricted, and reduction in loss and conversion to other solvents are required.

【0004】これに対し、一つの処理槽内に被処理物を設置
し、密閉状態にて、溶剤処理、溶剤除去後、被処理物を
取り出す処理装置も提案されているが稼働効率が悪く、
また、複数の同装置を使用することは経済的でない上に
煩雑である。また、そのほかに、被処理物の処理装置へ
の出し入れ口に二重の扉を設けるとか、処理装置の漏れ
部分に覆いをして漏れてくる溶剤を集めて溶剤回収装置
にて回収する等の提案や試みがなされている。
[0004] On the other hand, there has been proposed a processing apparatus in which an object to be processed is installed in one processing tank, and the object to be processed is removed in a sealed state after solvent treatment and solvent removal, but the operation efficiency is poor.
Further, using a plurality of the same devices is not economical and complicated. In addition, double doors may be provided at the entrance of the processing object into and out of the processing equipment, or the leaked part of the processing equipment may be covered to collect the leaking solvent and collected by the solvent recovery equipment. Suggestions and attempts have been made.

【0005】しかしながら、いずれも溶剤の損失防止が不十
分であったり操作の煩雑さや、経済性、大きな床面積が
必要である等の欠点がある。本発明者は、かような欠点
を解決するものとして、密閉された処理装置内で被処理
物を処理し、被処理物が密閉された該処理装置への出入
りの際に外部から空気を持ち込んだり、内部のガスを持
ち出したりしない装置として特願平9-14471により提案
した。
[0005] However, all of these methods have disadvantages such as insufficient prevention of solvent loss, complicated operation, economy, and a large floor area. In order to solve such a drawback, the present inventor processes an object to be processed in a sealed processing apparatus, and brings in air from the outside when the object to be processed enters and exits the sealed processing apparatus. It was proposed by Japanese Patent Application No. 9-14471 as a device that does not take out the gas inside.

【0006】これにより問題のほとんどは解決されたが、こ
れをを実施する場合、密閉系内部において被処理物を移
動させる必要がある。しかしながら処理剤ガスにて充満
した内部でリミットスイッチ等の電機部品や潤滑油を伴
った微細なベアリング等を用いる被処理物の駆動装置を
設けることは故障の原因となり好ましくなく、また、被
処理物出入器の出入口が兼用の場合には被処理物の移動
が複雑となり故障の原因となる。
[0006] Although most of the problems have been solved by this, when implementing this, it is necessary to move an object to be processed in a closed system. However, it is not preferable to provide a device for driving a workpiece using an electronic part such as a limit switch or a fine bearing with lubricating oil inside the interior filled with the processing agent gas, which causes a failure and is not preferable. When the entrance and exit of the entrance / exit are also used, the movement of the object to be processed becomes complicated and causes a failure.

【0007】又、被処理物移動許容処理時間は、各処理槽処
理時間内に行う必要があり、場合によっては障害とな
る。又特願平9-14471にあるように入り口用と出口用が
別個の出入器の場合には、ガス排出操作が倍増し処理剤
損失の面から好ましくない等の欠点がある。
[0007] Further, the processing time for the movement of the object to be processed must be performed within the processing time of each processing tank, which may be an obstacle in some cases. Further, in the case of a separate access unit for the entrance and the exit as disclosed in Japanese Patent Application No. 9-14471, there is a drawback that the gas discharge operation is doubled, which is not preferable in terms of loss of the processing agent.

【0008】[0008]

【発明が解決しようとする課題】本発明は前述の欠点を
解決する為になされたものであり、密閉容器内のガスを
吸引したりそのガスを再吐出するガスホルダーを有する
密閉容器内に、一端が密閉容器の外に貫通して密閉状態
を維持しつつ、回転と上下運動をし得る駆動軸と、密閉
容器外に貫通した該駆動軸の一端に接続された駆動装置
と、密閉容器内の該軸から放射状に伸びた複数の被処理
物の吊下具を設け、その先端部にそれぞれ被処理物を吊
し得るようにし、前記駆動軸を引き上げた状態で吊るさ
れた被処理物の下底より下の部分の密閉容器内に遮蔽板
を設け、該遮蔽板に開口部を設け、被処理物が入る複数
個の処理槽と開口部とを連結し、少なくとも一つの処理
槽には、開口部に密閉可能なシャッターを設けると共
に、該処理槽の密閉容器外壁に密閉可能な被処理物の出
入り用のシャッターを設けたことを特徴とする溶剤処理
密閉装置を提供するにある。。
SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned drawbacks, and is provided in a closed container having a gas holder for sucking gas in the closed container or re-discharging the gas. A drive shaft that can rotate and move up and down while maintaining a sealed state while one end penetrates outside the closed container, a drive device connected to one end of the drive shaft that penetrates outside the closed container, and A plurality of hanging objects for the object to be processed radially extending from the shaft are provided, so that the object to be processed can be hung at the distal end thereof, and the object to be processed which is hung with the drive shaft pulled up. A shielding plate is provided in a closed container of a portion below the lower bottom, an opening is provided in the shielding plate, and a plurality of processing tanks and an opening where an object to be processed enters are connected, and at least one processing tank has , A shutter that can be hermetically closed is provided in the opening, and the processing tank is hermetically sealed. To provide a solvent treatment sealing apparatus characterized in that a shutter for entry and exit of sealable object to be processed vessel outer wall. .

【0009】以下本発明を図面に基づいて具体的に説明す
る。これはあくまでも実施態様例であり、他の具体的方
法も採用可能である。図1に置いて1は密閉容器であ
り、円筒状部と円板上の遮蔽板2を有し、後述する被処
理物が入り得る5個の開口部を有し、これと連通した角
筒状密閉容器からなる処理槽3が、5個取り付けられ、
一体となって密閉容器1を形成している。5個の処理槽
の内1個は、前記開口部の部分に密閉可能で開閉し得る
シャッター11を有し側面には密閉可能な被処理物の出
入口12が設けられている。
Hereinafter, the present invention will be described in detail with reference to the drawings. This is only an example of the embodiment, and other specific methods can be adopted. In FIG. 1, reference numeral 1 denotes an airtight container, which has a cylindrical portion and a shielding plate 2 on a disk, and has five openings through which an object to be described later can enter, and a rectangular tube communicating with the opening. Treatment tanks 3 each of which is formed in a shape of a closed container,
The closed container 1 is integrally formed. One of the five processing tanks has a shutter 11 that can be closed and opened and closed at the opening portion, and a sealable entrance / exit 12 for an object to be processed is provided on a side surface.

【0010】密閉容器1はその保有ガス量に応じて実質的に
圧力変化が起こらないように容量を変化させ、密閉容器
1からガスを外部に放出したり、外部から空気を入れた
りしないようにガスホルダー4が連結されている。円筒
状天井の中心部にはシール部5を介して駆動軸6が貫通
しており密閉容器1内で駆動軸6から5本の被処理物の
吊下具7が取り付けられている。駆動軸6は密閉容器外
部の駆動軸操作機8によって回転及び上下に動くように
なされている。
[0010] The capacity of the closed vessel 1 is changed so that the pressure does not substantially change in accordance with the amount of gas retained therein, so that gas is not discharged from the closed vessel 1 to the outside or air is introduced from the outside. The gas holder 4 is connected. A drive shaft 6 penetrates through a central portion of the cylindrical ceiling through a seal portion 5, and five hanging members 7 for the objects to be processed are attached from the drive shaft 6 in the closed container 1. The drive shaft 6 is rotated and moved up and down by a drive shaft operating device 8 outside the sealed container.

【0011】被処理物の吊下具7の先端にはそれぞれ被処理
物が入れられた被処理物入れ9が吊るされ、駆動軸を6
を下げることによって5個の処理槽3の内部に設けられ
たそれぞれの被処理物設置台10上に設置されるように
なされている。被処理物の吊下具7は被処理物入れ9を
引っ掛ける方法としては駆動軸6の上下、及び回転移動
のみで行うことが出来るように設計されている。
[0011] At the tip of the hanging member 7 for the object to be processed, objects to be processed 9 containing the objects to be processed are hung.
By lowering the height of the processing tank 3, the processing tank 3 is installed on each of the workpiece mounting tables 10 provided inside the five processing tanks 3. The hanging tool 7 for the object to be processed is designed so that the object to be processed 9 can be hooked by only moving the drive shaft 6 up and down and rotating.

【0012】例えば、図2に示すように被処理物の吊下具7
の先端部をL字状にし被処理物入れ9を被処理物設置台
10に設置して、駆動軸6を下方に下ろして回転させ、
被処理物入れ9の吊り下げ部の下にL字状部を移動さ
せ、次いで駆動軸6を引き上げることにより達成され
る。逆に、被処理物設置台10に被処理物入れ9を設置
する場合は上述の逆の操作で実施し得る
[0012] For example, as shown in FIG.
The tip of the L-shape is set to an L-shape, the processing container 9 is set on the processing table 10, and the drive shaft 6 is lowered and rotated.
This is achieved by moving the L-shaped part under the hanging part of the workpiece holder 9 and then pulling up the drive shaft 6. Conversely, when the object container 9 is installed on the object mounting table 10, the above operation can be performed in the reverse order.

【0013】尚、図面において、被処理物の吊下具7は棒状
であるが、これに限らず、例えば円板状でもよく、その
表面は平でも凸凹があっても差し支えない。又、密閉容
器も必ずしも円筒状でなく、角筒状でも多角筒状でも差
し支えない。更に、被処理物の入れ具の形状も適宜の形
状でよく、その際これが入り得るならば角筒状密閉容器
の処理槽の形状も適宜な形でよい。
In the drawings, the hanging member 7 for the object to be processed is in the shape of a bar. However, the present invention is not limited to this. For example, it may be in the shape of a disk, and its surface may be flat or uneven. Further, the closed container is not necessarily cylindrical, and may be rectangular or polygonal. Furthermore, the shape of the container for the object to be processed may be an appropriate shape. At this time, if the shape can be accommodated, the shape of the processing tank of the rectangular cylindrical closed container may be an appropriate shape.

【0014】次に本発明による装置を用いた操作例について
図1及び図3を用いて説明する。各処理槽3は円周上に
等間隔に5個の処理槽が配置され、それぞれ被処理物入
れ9が各処理槽設置台10に置かれ処理される。処理槽
には、例えば塩素化弗化炭化水素や塩素化炭化水素のよ
うな溶剤が入れられるが、その内の一つの槽はその上部
と側部にそれぞれ前記したシャッターが設けられ、溶剤
は入れられておらず、ここから被処理物を出し入れする
(以下、出入槽と称す)。出入槽11にはシャッター1
2が閉まり、新しい被処理物の入った被処理物入れ9が
処理槽内の被処理物設置台10上に設置されている。
Next, an operation example using the apparatus according to the present invention will be described with reference to FIGS. In each of the processing tanks 3, five processing tanks are arranged at equal intervals on the circumference, and the processing container 9 is placed on each processing tank installation table 10 for processing. The processing tank is filled with a solvent such as chlorinated fluorinated hydrocarbon or chlorinated hydrocarbon, and one of the tanks is provided with the above-mentioned shutters on the upper part and the side part, respectively. The object to be processed is taken in and out from here (hereinafter, referred to as an in / out tank). Shutter 1 in entrance / exit tank 11
2 is closed, and a processing container 9 containing a new processing object is placed on the processing object setting table 10 in the processing tank.

【0015】駆動軸には円周上に配置された処理槽の被処理
物を吊るし上げたり処理槽に設置したりするに適当な位
置になるよう被処理物が取り付けられている。
An object to be processed is mounted on the drive shaft so that the object to be processed is placed at an appropriate position for lifting the object to be processed in the processing tank arranged on the circumference or installing the object in the processing tank.

【0016】先ず密閉容器1に新しい被処理物入れ9を装入
する際に同伴して入った出入槽13内の空気を真空ポン
プ(図示せず)を用いて吸引し外部に排出する。次いで
密閉容器1内にガスホルダー4に預けられているガス
(後述の出入槽から被処理物を取り出す際に預けられた
ガス)を出入槽13に導入し密閉容器の内圧と均圧とす
る。次いでシャター11を開けて駆動軸6を下げ、それ
ぞれの被処理物の吊下具7の先端部に出入槽を含めたそ
れぞれの被処理物入れ9を引っ掛け駆動軸6を引き上げ
る。
First, when a new container 9 to be treated is charged into the closed container 1, the air in the inlet / outlet tank 13 that accompanies the container 9 is sucked using a vacuum pump (not shown) and discharged to the outside. Next, a gas deposited in the gas holder 4 (a gas deposited when an object to be processed is taken out of an inlet / outlet tank, which will be described later) is introduced into the inlet / outlet tank 13 in the closed container 1 to make the internal pressure and the uniform pressure of the closed container. Next, the shutter 11 is opened, the drive shaft 6 is lowered, and the respective workpiece holders 9 including the entrance / exit tank are hooked to the tip of the hanging tool 7 for each workpiece, and the drive shaft 6 is raised.

【0017】次いで駆動軸6を処理槽3の一区画分回転移動
し、駆動軸6を下げ被処理物入れ9をそれぞれの処理槽
3の設置台10上に設置する。この結果、新しく入れた
被処理物入れ9が第一処理槽に入り、第一槽から第二槽
に、第二槽から第三槽に、第三槽から第四槽に、第四槽
から第五槽に、第五槽から出入槽に移動する。第二番か
ら第五番処理槽に設置された被処理物入れに収納された
被処理物はそれぞれの処理槽で引き続いて処理される。
出入槽13では処理が終了した被処理物の入った被処理
物入れが第五番処理槽から移動し設置台上に設置され
る。このように出入槽のシャッターを一度開ける度に、
新しい被処理物が密閉容器内に装入されると共に密閉容
器から処理完了の被処理物が出入槽に取り出される利点
がある。この被処理物を溶剤ガスの同伴無しに取り出す
ために操作を行う。
Next, the drive shaft 6 is rotated by one section of the processing tank 3, the drive shaft 6 is lowered, and the objects to be processed 9 are set on the mounting table 10 of each processing tank 3. As a result, the newly placed object container 9 enters the first treatment tank, the first tank to the second tank, the second tank to the third tank, the third tank to the fourth tank, and the fourth tank to the fourth tank. Move to the fifth tank and from the fifth tank to the access tank. The objects to be processed stored in the objects to be processed set in the second to fifth processing tanks are successively processed in the respective processing tanks.
In the loading / unloading tank 13, the processing container into which the processed object is placed moves from the fifth processing tank and is set on the installation table. Every time you open the shutter of the entrance and exit tank like this,
There is an advantage that a new object to be processed is loaded into the closed container and the processed object to be processed is taken out of the closed container into and out of the closed container. An operation is performed to remove the object without entrainment of the solvent gas.

【0018】先ず、シャッター11を閉め、次いで出入槽1
3内のガスを真空ポンプ(図示せず)にて吸引し密閉容
器1に導入する。真空ポンプにて密閉容器1に導入され
たガスはガスホルダー4に預けられる。このガスは前述
の被処理物を密閉容器1に装入する際に出入槽13に導
入されたガスに相当するガスである。次いで出入槽13
内に空気を導入し出入槽13内を大気圧にしたのちシャ
ッター12を開け出入槽13から溶剤処理が終了した被
処理物が入った被処理物入れ9を取り出す。次いで新し
い未処理の被処理物の入った被処理物入れ9を出入槽1
3に設置しシャッター12を閉め最初に戻る。
First, the shutter 11 is closed, and then the access tank 1
The gas in 3 is sucked by a vacuum pump (not shown) and introduced into closed container 1. The gas introduced into the closed container 1 by the vacuum pump is deposited in the gas holder 4. This gas is a gas corresponding to the gas introduced into the inlet / outlet tank 13 when the object to be processed is charged into the closed container 1. Next, access tank 13
After the air is introduced into the inside and the inside of the inlet / outlet tank 13 is brought to the atmospheric pressure, the shutter 12 is opened, and the article to be treated 9 containing the article to be treated after the solvent treatment is taken out from the in / out vessel 13. Next, the processing object container 9 containing a new unprocessed object is placed in the access tank 1.
3 and close the shutter 12 to return to the beginning.

【0019】つぎに処理能力を2倍にするための方法につい
て図4に従って説明する。出入槽が2系列(9A,9
B)あり、被処理物の出し入れは交互に行はれる。A系
列出入槽に入れられた被処理物はA系列二番、三番、四
番、五番出入槽と上述と同様順序で処理される。密閉系
への空気侵入の防止、密閉系ガスの系外流出防止、駆動
軸の操作等は上述と同様である。またB系列の操作も同
様である。二番処理槽〜五番処理槽は処理条件が同じ場
合にはA系列、B系列を共通な1槽とすることは簡便と
なり好ましい。駆動軸による被処理物の移動はA系列、
B系列交互に行われ、処理槽での処理時間が同じ条件で
2倍の被処理物が処理される。ここでは2系列に付いて
説明したが3系列以上でも可能である。
Next, a method for doubling the processing capacity will be described with reference to FIG. There are two entry / exit tanks (9A, 9
B) Yes, the object to be processed is put in and out alternately. The objects to be processed placed in the A-series entry / exit tanks are processed in the same order as the A-series second, third, fourth, and fifth entry / exit tanks as described above. Prevention of air intrusion into the closed system, prevention of outflow of the closed system gas out of the system, operation of the drive shaft, and the like are the same as described above. The same applies to the operation of the B series. When the processing conditions are the same, the second processing tank to the fifth processing tank preferably use the A series and the B series as one common tank because it is simple and preferable. The movement of the workpiece by the drive shaft is A series,
The B-series is performed alternately, and the object to be processed is doubled under the same processing time in the processing tank. Here, the description has been made with respect to two series, but three or more series can be used.

【0020】[0020]

【発明の効果】本発明による溶剤処理密閉装置を用いる
と、溶剤損失が少なく、装置故障の少ない溶剤処理装置
が普及でき、オゾン層の保護、地球温暖化、環境汚染の
防止、労働条件の改善等に貢献できる。
According to the present invention, the use of the solvent treatment sealing device according to the present invention can spread a solvent treatment device having a small solvent loss and a small device failure, protecting the ozone layer, preventing global warming, preventing environmental pollution, and improving working conditions. Etc. can be contributed.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施態様を説明する説明図。FIG. 1 is an explanatory diagram illustrating one embodiment of the present invention.

【図2】本発明の一実施態様を説明する被処理物入れと
被処理物吊下具先端部の説明図。
FIG. 2 is an explanatory view of a processing object container and a processing object suspending tool tip portion illustrating an embodiment of the present invention.

【図3】本発明の一例による処理槽が一系列の場合の処
理槽配置。
FIG. 3 shows a processing tank arrangement in a case where the processing tanks according to an example of the present invention are arranged in one line.

【図4】本発明の一例による処理槽が二系列の場合の処
理槽配置。
FIG. 4 shows a processing tank arrangement in a case where the processing tanks according to an example of the present invention are of two lines.

【符号の説明】[Explanation of symbols]

1は密閉容器2は円板状の遮蔽板3は処理槽4はガスホ
ルダー5はシール部6は駆動軸7は被処理物の吊下具8
は駆動軸操作機9は被処理物入れ9AはA系列の被処理
物入れ9BはB系列の被処理物入れ10は被処理物設置
台11はシャッター12はシャッター13は出入槽
1 is a closed container 2 is a disk-shaped shielding plate 3 is a processing tank 4 is a gas holder 5 is a seal part 6 is a drive shaft 7 is a hanging tool 8 for a workpiece.
Is a drive shaft operating machine 9 is an object holder 9A is an A-series object holder 9B is a B-series object holder 10 is an object mounting table 11, a shutter 12, a shutter 13 is an access tank.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】密閉容器内のガスを吸引したりそのガスを
再吐出するガスホルダーを有する密閉容器内に、一端が
密閉容器の外に貫通して密閉状態を維持しつつ、回転と
上下運動をし得る駆動軸と、密閉容器外に貫通した該駆
動軸の一端に接続された駆動装置と、密閉容器内の該軸
から放射状に伸びた複数の被処理物の吊下具を設け、そ
の先端部にそれぞれ被処理物を吊し得るようにし、前記
駆動軸を引き上げた状態で吊るされた被処理物の下底よ
り下の部分の密閉容器内に遮蔽板を設け、該遮蔽板に開
口部を設け、被処理物が入る複数個の処理槽と開口部と
を連結し、少なくとも一つの処理槽には、開口部に密閉
可能なシャッターを設けると共に、該処理槽の密閉容器
外壁に密閉可能な被処理物の出入り用のシャッターを設
けたことを特徴とする溶剤処理密閉装置。
1. A closed container having a gas holder for sucking a gas in the closed container or re-discharging the gas, one end of which penetrates the outside of the closed container while maintaining a sealed state while rotating and moving up and down. A drive shaft, a drive device connected to one end of the drive shaft that penetrates outside the closed container, and a plurality of objects to be hanged radially extending from the shaft in the closed container. An object to be processed can be hung at each of the distal ends, and a shield plate is provided in a closed container at a portion below a lower bottom of the object to be hung with the drive shaft being pulled up, and an opening is provided in the shield plate. A plurality of processing tanks into which an object to be processed enters and an opening, and at least one of the processing tanks is provided with a shutter that can be sealed at the opening, and the processing tank is sealed with an outer wall of a closed container of the processing tank. It is equipped with a shutter for entering and exiting the object to be processed. That solvent treatment sealers.
JP01788098A 1998-01-14 1998-01-14 Solvent treatment sealing device Expired - Lifetime JP4001993B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP01788098A JP4001993B2 (en) 1998-01-14 1998-01-14 Solvent treatment sealing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP01788098A JP4001993B2 (en) 1998-01-14 1998-01-14 Solvent treatment sealing device

Publications (3)

Publication Number Publication Date
JPH11197583A true JPH11197583A (en) 1999-07-27
JPH11197583A5 JPH11197583A5 (en) 2005-08-18
JP4001993B2 JP4001993B2 (en) 2007-10-31

Family

ID=11956020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP01788098A Expired - Lifetime JP4001993B2 (en) 1998-01-14 1998-01-14 Solvent treatment sealing device

Country Status (1)

Country Link
JP (1) JP4001993B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006297199A (en) * 2005-04-15 2006-11-02 Keiji Nakaya Sealed treatment apparatus
US8304345B2 (en) 2008-06-10 2012-11-06 Soitec Germanium layer polishing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006297199A (en) * 2005-04-15 2006-11-02 Keiji Nakaya Sealed treatment apparatus
US8304345B2 (en) 2008-06-10 2012-11-06 Soitec Germanium layer polishing

Also Published As

Publication number Publication date
JP4001993B2 (en) 2007-10-31

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