JPH11295241A - Surface defect inspection apparatus and method - Google Patents

Abstract

(57) [Summary] [PROBLEMS] To surely detect a pattern-shaped scab defect having no remarkable unevenness without being affected by surface unevenness. A surface flaw inspection apparatus according to the present invention includes a light source for illuminating a predetermined range of a surface to be inspected having unevenness with illumination light linearly polarized in a direction parallel to an incident surface with respect to the surface to be inspected. The light receiving angle from the surface to be inspected is set to the Brewster angle of the substance causing unevenness, the first light receiving means 27 for receiving the specular reflection light of the illumination light, and the light receiving angle from the surface to be inspected is the light receiving angle. The sum of the angle and the angle of incidence of the illumination light from the light source on the surface to be inspected is 2 of the Brewster angle of the substance causing unevenness.
A second light receiving unit 28 that is set to a value that is twice as large and receives light other than the regular reflection light of the illumination light, and the regular reflection light and the light other than the regular reflection light received by the first and second light reception units. And a judgment processing unit 31 for judging the presence or absence of a surface flaw on the surface to be inspected based on.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface flaw inspection apparatus and a surface flaw inspection method for irradiating a surface to be inspected such as a thin steel sheet surface with light to optically detect surface flaws on the surface to be inspected.

[0002]

2. Description of the Related Art Surface flaw inspection for optically detecting surface flaws present on a surface to be inspected by irradiating light to a surface to be inspected such as a thin steel sheet surface and analyzing reflected light from the surface to be inspected. Conventionally, various methods have been proposed and implemented.

For example, light is incident on the surface of a subject,
Japanese Patent Application Laid-Open No. 58-204353 proposes a surface flaw detection method for a metal object in which specular reflected light and diffuse reflected light from the surface of an object are detected by a camera. In this surface flaw detection method, light is incident on the surface of the subject at an angle of 35 ° to 75 °, and reflected light from the surface of the subject is reflected at an angle within 20 ° from the specular reflection direction and the incident direction or the specular reflection direction. Light is received by two cameras installed in different directions. Then, the light reception signals of the two cameras are compared, and, for example, the logical sum of the two is obtained. Then, only when two cameras simultaneously detect abnormal values, the abnormal values are regarded as flaws, thereby realizing a surface flaw detection method that is not affected by noise.

A method for inspecting a flaw on the surface of an object by receiving backscattered light from the object is disclosed in Japanese Patent Laid-Open No. 60-228943.
No. 1993. In this flaw inspection method,
Light is incident on the stainless steel plate at a large angle of incidence, and reflected light returning to the incident side, that is, backscattered light is detected, thereby detecting a barbed flaw on the surface of the stainless steel plate.

Further, Japanese Patent Application Laid-Open No. 8-17867 proposes a flat steel hot flaw detector which detects a plurality of backscattered reflected lights. This flat steel hot flaw detector detects a scratch on a hot-rolled flat steel. In this flaw detection device, the angle of the flaw slope of the flaw is 10 to 40 °, and a plurality of cameras are arranged in the backward diffuse reflection direction so as to cover all the specularly reflected light from the flaw slope in this range. Have been.

A surface measuring apparatus utilizing polarized light has been proposed in Japanese Patent Application Laid-Open Nos. 57-166533 and 9-166552. In the measuring device proposed in Japanese Patent Application Laid-Open No. 57-166533, polarized light in a direction of 45 ° is incident on a measuring object and reflected light is received by a polarizing camera. In a polarizing camera, the reflected light is split into three using a beam splitter inside the camera, and the reflected light is received through polarizing filters having different azimuth angles. Then, a technique is disclosed in which three signals from a polarization camera are displayed on a monitor by signal processing similar to that of a color TV system, and a polarization state is visualized. This technology uses the technology of ellipsometry,
The light source is desirably parallel light, for example, laser light is used.

Further, in the surface inspection apparatus proposed in Japanese Patent Application Laid-Open No. Hei 9-165552, similarly to the technology described in Japanese Patent Application Laid-Open No. 57-166533, the surface of the steel sheet is inspected for defects using ellipsometry. I have.

Japanese Patent Application Laid-Open No. 53-23678 proposes a surface inspection apparatus for measuring the color of a printed surface or a painted surface without being affected by the varnish applied to the surface. In this surface inspection apparatus, the incident light on the object is p-polarized light having an electric field parallel to the incident surface, and the incident angle of the incident light on the object is set as the Brewster angle of the object.

When the incident angle is set to the Brewster angle, the reflected light does not include a polarized light component (p-polarized light) parallel to the incident surface. Therefore, when the incident light is p-polarized light, the reflected light becomes zero. Therefore, by setting the incident angle to the Brewster angle of the varnish, the glossy reflection on the surface of the varnish applied to the object to be measured is eliminated, and the difference in color between the painted surface and the printed surface under the varnish is reduced. Inspection is possible.

[0010]

However, each of the measuring techniques proposed in each of the above-mentioned publications detects a flaw having remarkable unevenness or detects a flaw having a foreign substance such as an oxide film. Therefore, it is difficult to reliably capture all flaws with respect to pattern-shaped scab defects and the like having no noticeable unevenness.

For example, the flaw detection method disclosed in Japanese Patent Application Laid-Open No. 58-204353 has two cameras that receive specularly reflected light and scattered reflected light. The purpose is to detect the detection signals of the two cameras. This is to remove the influence of noise due to OR. Therefore, flaws having remarkable unevenness, that is, flaws having cracks, digging, and curling up on the surface are applicable because both cameras can detect the flaw signal. However, in the case of a flaw such as a pattern-shaped scab defect having no noticeable unevenness such that only one of the cameras can capture the flaw signal, it is not possible to detect all the flaws.

The surface condition inspection method disclosed in Japanese Patent Application Laid-Open No. Sho 60-228943 is intended for a raised bark defect that has become apparent on a stainless steel plate having a small surface roughness. Therefore, it is not possible to apply a flaw having no raised portion that has not been exposed or a flaw-free part to a steel plate having a rough surface that reflects light returning to the incident side.

The flat steel hot flaw detector disclosed in Japanese Patent Application Laid-Open No. 8-17867 is intended for scratches and does not have remarkable unevenness because it is based on capturing specularly reflected light on the flaw slope. In the case of a flaw such as a patterned scab, there are some which cannot be caught by the backscattered reflected light, and there has been a problem that a detection leak occurs.

Further, the measuring device of Japanese Patent Application Laid-Open No. 57-166533 and the surface inspection device of Japanese Patent Application Laid-Open No. 9-166552 use ellipsometry technology. And "uneven physical property values" can be detected. However, even if the flaw originally has a property value different from that of the base material portion, such as a surface-treated steel sheet, for an object covered with a material having the same property value from above, However, there is a problem that the effectiveness is reduced.

In each of the prior arts described above, a thin film adheres to the surface and the unevenness is regarded as a pattern-shaped scab defect for an inspection object in which the presence or absence of the thin film is observed as unevenness. There was a problem that it was detected by mistake.

When the presence of unevenness on the surface is not significant in appearance and the degree of unevenness is small, the unevenness itself is harmless because the presence of unevenness does not affect the performance of the steel sheet at all. However, the surface flaw inspection apparatus is erroneously recognized as the above-mentioned pattern-shaped scab defect, and is overdetected.

In particular, when the surface coating is incomplete and minute irregularities are generated over the entire surface to be inspected, the number of irregularities generated is very large. There is a problem that the processing capability cannot follow the unevenness detection speed.

The surface inspection apparatus disclosed in Japanese Patent Application Laid-Open No. 53-23678 is intended for an apparatus having a film adhered to its surface, but receives reflected light only in one direction of the regular reflection direction. Therefore, when this surface inspection apparatus is used to detect a defect having no noticeable unevenness such as a patterned barbed defect on a steel plate and having almost no difference in color, all the defects are captured. It is not possible.

For a surface inspection apparatus to be incorporated in a product quality inspection line, it is an absolute condition that no flaws are missed from the viewpoint of quality assurance of a manufactured product. However, a surface flaw inspection apparatus for inspecting even a surface-treated steel sheet or the like has not been put to practical use.

The present invention has been made in view of such circumstances, and by setting the incident angle of illumination light and the reception angle of reflected light using the Brewster angle, the reflection from the surface to be inspected is set. It can accurately detect the specular reflection component and the specular diffuse reflection component contained in light, and removes pattern-shaped barge defects that do not have noticeable irregularities such as surface cracks, gouges, and curls on the surface to be inspected. It is an object of the present invention to provide a surface flaw inspection apparatus and a surface flaw inspection method which can be reliably detected, can exhibit high defect detection accuracy, and can be sufficiently incorporated into a product quality inspection line, in distinction from surface irregularities which cannot be said to be unclear. Aim.

[0021]

According to a first aspect of the present invention, there is provided a surface flaw inspection apparatus, wherein a predetermined range of a surface to be inspected having an uneven surface is set in a direction parallel to an incident surface with respect to the surface to be inspected. A light source that illuminates with linearly polarized illumination light, a light receiving angle from the surface to be inspected is set to the Brewster angle of the unevenness factor substance, and a first light receiving unit that receives regular reflection light of the illumination light; The light receiving angle from the surface to be inspected is set to a value such that the sum of the light receiving angle and the incident angle of the illumination light from the light source to the surface to be inspected is twice the Brewster angle of the substance causing unevenness. A second light receiving means for receiving light other than the regular reflection light; and a presence / absence of a surface flaw on the surface to be inspected based on the regular reflection light received by the first and second light receiving means and the light other than the regular reflection light. A judgment processing unit for judging.

In the surface defect inspection apparatus according to the second aspect, a predetermined range of the surface to be inspected having an uneven surface is illuminated with illumination light linearly polarized in a direction parallel to the incident surface with respect to the surface to be inspected. The light source, the light receiving angle from the surface to be inspected is set to the Brewster angle of the substance causing the unevenness, the first light receiving means for receiving the specular reflection light of the illumination light, and the light receiving angle from the surface to be inspected, The sum of the light receiving angle and the angle of incidence of the illumination light from the light source on the surface to be inspected is set to a value that is twice the Brewster angle of the substance causing unevenness, and receives light other than the specular reflection light of the illumination light. The second light receiving means and the light receiving angle from the surface to be inspected are set to a value different from the light receiving angle of the second light receiving means, and the sum of the light receiving angle and the incident angle of the illumination light from the light source to the surface to be inspected. Is set to a value that is twice the Brewster's angle of the material causing the unevenness. A third light receiving means for receiving light other than the specular reflected light of the illumination light, and a light reflected by the first, second, and third light receiving means and a plurality of lights other than the specular reflected light. A judgment processing unit for judging the presence or absence of surface flaws on the surface to be inspected.

According to a third aspect of the present invention, the light source in the surface flaw inspection apparatus of the invention is formed of a linear diffused light source.
Further, in the surface defect inspection method according to the fourth aspect, a predetermined range of the surface to be inspected having unevenness on the surface is illuminated with illumination light linearly polarized in a direction parallel to the incident surface with respect to the surface to be inspected, and the factor From the light receiving direction set at the Brewster angle of the substance, a value that receives specular reflection light of the illumination light and the sum with the incident angle of the illumination light to the surface to be inspected is twice the Brewster angle of the substance causing unevenness From the receiving angle direction set in
Light other than the regular reflection light of the illumination light is received, and the presence or absence of a surface flaw on the surface to be inspected is determined based on the received regular reflection light and the light other than the regular reflection light.

Next, the principle of operation of the above-described surface flaw inspection apparatus and surface flaw inspection method of the present invention will be described with reference to the drawings. First, the form of optical reflection on the steel sheet surface to be inspected by the surface flaw inspection apparatus of the present invention will be described in relation to the microscopic unevenness on the steel sheet surface.

For example, when the inspection object is an alloyed galvanized steel sheet, as shown in FIG. 8A, the cold rolled steel sheet as the base passes through an alloying furnace after being hot-dip galvanized. During this time, the iron element of the base steel sheet 1 diffuses into the zinc of the plating layer 2 and usually forms columnar crystals 3 of the alloy as shown in FIG. The plated steel sheet 4 is then temper rolled on rolls 5a and 5b. Then, as shown in FIG. 8D, particularly protruding portions of the columnar crystal 3 are flattened by the rolls 5a and 5b, and the other portions maintain the original shape of the columnar crystal 3.

Then, the rolls 5a, 5b of the temper rolling are
The portion flattened by is referred to as a temper portion 6, and the remaining portion of the temper rolls 5 a and 5 b which does not contact the original uneven shape is referred to as a non-tempered portion 7.

FIG. 9 is a schematic cross-sectional view modeling what kind of optical reflection occurs on the surface of the steel plate 4 having the tempered portion 6 and the non-tempered portion 7. This steel plate 4
The surface (the surface to be inspected) is composed of countless minute surface elements 13 oriented in various directions when viewed microscopically.

The incident light 8 incident on the temper portion 6 crushed by the temper rolling rolls 5a and 5b is reflected specularly in the regular reflection direction of the steel plate 4 by each of the micro-surface elements 13 of the temper portion 6 so as to have a mirror surface. It becomes reflected light 9. On the other hand, the rolls 5a, 5
The incident light 8 incident on the non-tempered part 7 which leaves the structure of the columnar crystal 3 where the b does not come into contact with the non-tempered part 7 is mirror-reflected by one microplane element 13 on each surface of the columnar crystal 3 when viewed microscopically. However, the direction of reflection is specular diffuse reflection light 10 which does not necessarily match the direction of regular reflection of the steel plate 4.

Therefore, the angular distribution of each reflected light of the tempered portion 6 and the non-tempered portion 7 on the surface of the steel plate 4 is as shown in FIGS. 10 (a) and 10 (b) when viewed macroscopically. That is, a sharp specular reflection occurs in the regular reflection direction of the steel plate 4 in the tempered portion 6, and reflected light having a spread corresponding to the angular distribution of the micro-plane element 13 on the surface of the columnar crystal 3 is generated in the non-tempered portion 7. Become. As described above, the reflected light from the tempered portion 6 is referred to as specular reflected light 9, and the reflected light from the non-tempered portion 7 is referred to as specular diffused reflected light 10.

In fact, since the tempered portion 6 and the non-tempered portion 7 are mixed macroscopically, the angular distribution of the reflected light observed by an optical measuring instrument such as a camera is shown in FIG.
As shown in (1), the angular distribution of the specular reflected light 9 and the specular diffuse reflected light 10 is obtained by adding the angular distributions of the tempered portion 6 and the non-tempered portion 7 in accordance with the respective area ratios.

As described above, the tempered portion 6 and the non-tempered portion 7 have been described using an alloyed galvanized steel plate as an example. However, the present invention is generally applicable to other steel plates in which a flat portion is formed by temper rolling. Next, a description will be given of the optical reflection characteristic of a defect called a pattern-shaped scab defect having no noticeable unevenness to be detected in the present invention.

As shown in FIG. 11, the barge defects (barge portions 11) found in the galvannealed steel sheet are the same as those in the cold-rolled steel sheet before plating. Then, the plating layer 2 is placed thereon, and further, alloying of barge defects due to diffusion of the iron element of the base steel sheet 1 progresses.

In general, the barbed portion 11 has a difference in plating thickness or a degree of alloying, for example, as compared with the base material 12 indicating a normal portion of the steel plate 4. As a result, for example, when the plating thickness of the barbed portion 11 is large and is convex with respect to the base material 12, the area of the tempered portion 6 becomes larger than that of the non-tempered portion 7 by applying the temper rolling. Conversely, hege part 1
In the case where the plating thickness of 1 is thinner than that of the base material 12 and is concave, the non-tempered portion 7 occupies most of the barb portion 11 because the rolls 5a and 5b of the temper rolling do not abut. When the alloy of the barbed portion 11 is shallow, the angular distribution of the microscopic surface element 13 is strong in the normal direction of the steel sheet, and the diffusivity is small.

Next, the scab 11 and the base material 12
A description will be given of how the pattern-like scab defect looks due to the difference in the surface properties. Hege part 1 based on the model described above
1 and the base material 12 are generally classified into the following three types.

(A) The area ratio of the tempered portion 6 in the barbed portion 11 and the angular distribution of the micro-surface elements 13 in the non-tempered portion 7 are determined by the area ratio of the tempered portion 6 in the base material portion 12 and the non-tempered portion 7.
Is different from the angular distribution of the minute surface element 13 of FIG.

(B) Although the area ratio of the tempered portion 6 in the barbed portion 11 is different from the area ratio of the tempered portion 6 in the base material portion 12, the angular distribution of the minute surface element 13 of the non-tempered portion 7 in the barbed portion 11 is Is not different from the angular distribution of the micro-plane element 13 of the non-tempered part 7 in the base material part 12.

(C) The angular distribution of the micro-surface elements 13 of the non-tempered portion 7 in the barbed portion 11 is different from the angular distribution of the micro-surface elements 13 of the non-tempered portion 7 in the base material portion 12.
Is the same as the area ratio of the tempered portion 6 in the base material portion 12.

That is, FIG. 12 (a) shows the specular reflection component and the specular diffuse reflection between the barge portion angle distribution 11a corresponding to the barge portion 11 and the base material portion angle distribution 12a corresponding to the base material portion 12. FIG. 1 shows a case where there is a difference between both components.
2B shows a case where there is a difference only in the specular reflection component, and FIG. 12C shows a case where there is a difference only in the specular diffuse reflection component.

When there is a difference in the area ratio of the tempered portion 6 between the barge angle distribution 11a and the base metal angle distribution 12a, the difference is as shown in FIGS. 12 (a) and 12 (b). Observed from the specular direction. More specifically, the area ratio of the tempered portion 6 of the barbed portion 11 is reduced when the reflected light of the barbed portion 11 is measured from the specular reflection direction and when the reflected light of the base material portion 12 is measured. When the area ratio of the tempering portion 6 is larger than that of the base portion 12, the barbed portion 11 looks relatively brighter than the base material portion 12. Conversely, when the tempered portion 6 of the barb portion 11 is smaller than the base material portion 12, the barge portion 11 is observed relatively darker than the base material portion 12.

Severe part angle distribution 11a and base material part angle distribution 1
FIG. 1 shows the case where there is no difference in the area ratio of
As shown in FIG. 2 (c), the presence of the scab 11 cannot be observed only by observing the difference in the received light intensity from the specular reflection direction. However, the diffusivity (angular distribution) of the specular diffuse reflection component
When there is a difference, the defect is observed from a diffusion direction other than the regular reflection direction as shown in FIG.

For example, when the diffusivity (angular distribution) of the specular diffuse reflection component of the barb portion 11 is small, the barb portion 11 is generally observed brightly from a diffusion direction relatively close to the specular reflection direction, and is observed from the specular reflection direction. The brightness decreases as you move away,
It becomes unobservable at a certain angle. As the distance from the specular reflection direction further increases, the barbed portion 11 is observed darker.

In order to detect each barbed portion 11 as shown in FIGS. 12 (a), 12 (b) and 12 (c) from the base material portion 12 for reliable detection, it corresponds to the tempered portion 6 of the reflected light. If only the light intensity of the specular reflection component is detected, the scab 11 shown in FIG. 12C cannot be detected separately from the base material 12.

In order to detect such a pattern-shaped scab defect without detecting it, it is necessary to independently obtain a light amount corresponding to specular reflection and a light amount corresponding to specular diffuse reflection.
Here, a process of generating surface unevenness will be described. For example, the steel plate 4 to be electroplated passes through a strongly acidic plating bath, passes through a strong alkali neutralization bath through wetting, and is washed with hot water, thereby completing the electroplating process. In this plating process, if there is a residual plating solution or neutralizing solution due to poor drawing of the squeezing roll to leave no plating solution or neutralizing solution on the steel sheet, unevenness in washing at the time of hot water washing, such traces are formed. It is observed as unevenness on the surface of the product. In addition, even if the steel plate 4 that is not electroplated passes through the above-described cleaning bath, the above-described unevenness occurs.

The material of the base material of the steel sheet is not limited to one type, but there are many types. The surface unevenness is caused by various films such as a residual film of the chemical solution, a film formed by the reaction between the base material and the chemical solution, and an oxide film of the base material. Has occurred due to The shape of the surface unevenness is also various such as a band shape, a line shape, and a polka dot shape. It is necessary that the presence of these various types of unevenness is not detected by a photodetector that detects a pattern-shaped scab defect.

Therefore, in the present invention, the light source is p-polarized light containing only a polarized light component parallel to the incident surface, and is radiated from the light source to the surface to be inspected, and the specular reflection light reflected from the surface to be inspected is reflected. Light is received at a Brewster angle of a film, for example, which is a substance that causes surface unevenness of the surface to be inspected.

Next, the optical reflection characteristics when a thin film is present on the steel sheet surface will be described. FIG. 13A shows what optical reflection occurs on the surface of the steel plate 4 when the tempered portion 6 and the non-tempered portion 7 are formed when the transparent film 14 is present on the surface of the steel plate 4. FIG. 3 is a schematic cross-sectional view in which is modeled.

For example, consider a case where a thin film 14 is formed on the surface of an alloyed galvanized steel sheet. The thickness of the film 14 is 10
13 nm, which is sufficiently thin compared to the uneven shape.
As shown in (a), both the tempered portion 6 flattened by the temper rolling rolls 5a and 5b and the non-tempered portion 7 where the temper rolling rolls 5a and 5b do not abut and the crystal structure remains. It is considered that the film 14 was formed uniformly.

Therefore, when the steel plate 4 is observed from the regular reflection direction, the tempered portion 6 is observed, and when the steel plate 4 is observed from other directions, the non-tempered portion 7 happens to be the minute surface element 13 whose regular reflection direction coincides with the observation direction. As shown in the enlarged view of FIG. 13B, multiple reflection occurs at the air / film 14 interface and the film 14 / steel plate 4 interface.

Next, the polarization characteristic of multiple reflection by the film 14 will be described. FIGS. 14A and 14B show the dependence of the reflectance r of the reflected light in the regular reflection direction on the incident angle φ when the incident light 8 is incident on the steel plate 4. However, the steel sheet 4 was measured using an alloyed galvanized steel sheet. As shown in FIG. 14B, when the incident light 8 is s-polarized light, the reflectance r
Has a monotonically increasing relationship with respect to the incident angle φ.
Comparing the case without the film 14 and the case where the film 14 with a thickness of 10 nm is formed, the reflectance r as a whole increases without the film 14.

On the other hand, as shown in FIG. 14A, when the incident light 8 is p-polarized light, when the film 14 is not provided, the incident angle φ = 0 to the incident angle φ = near 75 °. In the angle range described above, it decreases with an increase. When the incident angle φ exceeds 75 °, the reflectance r sharply increases.

In the case where the film 14 is provided, in the angle range from the incident angle φ = 0 to the vicinity of the incident angle φ = 75 °, the reflectance r does not depend much on the incident angle φ and maintains a substantially constant value. I do. When the incident angle φ exceeds 75 °, the reflectance r increases. Then, the reflectance characteristic without the film 14 and the reflectance characteristic with the film 14 intersect at an incident angle φ of about 50 ° to 60 °.

That is, as shown in FIG. 13A, when the film 14 is formed on the steel plate 4 and multiple reflection occurs as shown in FIG. 13B, the incident angle φ is small (in the normal direction). When the incident angle φ is large, the reflectance r is higher in the presence of the film than in the absence of the film. Then, the incident angle φ = 50 ° to 6
At 0 °, the reflectance r between the case with the film 14 and the case without the film 14 is the same. Therefore, if the incident angle φ is set to this angle, the surface unevenness due to the presence of the film 14 cannot be observed, and the light intensity of the specularly reflected light can be measured without being affected by the film 14.

The fact that this angle matches the Brewster angle of the film 14 is shown as follows. The reflectance at the incidence of p-polarized light is represented by the following Fresnel reflection formula. r _01P = (n ₁ cos φ _{0 −cos} φ ₁ ) / (n ₁ cos φ ₀ + cos φ ₁ ) r _12P = (n ₂ cos φ ₁ −n ₁ cos φ ₂ ) / (n ₂ cos φ ₁ + n ₁ cos φ ₂ ) (1) Here, r _01P and r _12P are Fresnel reflection coefficients at an air / film interface and a film / steel interface, respectively, n ₁ and n ₂ are fluorine refractive indexes of the film 14 and the steel plate 4, and φ ₀ is an incident angle. It is.
Φ ₁ and φ ₂ are angles satisfying the following Snell's refraction equation.

Sinφ ₀ = n ₁ sinφ ₁ = n ₂ sinφ ₂ (2) Here, assuming that the film 14 is a transparent film, the incident angle φ ₀ is the Brewster angle with respect to this film 14 as described above. , The following relationship is known.

Sin φ ₁ = cos φ ₀ (3) Accordingly, the following equation is derived. sinφ ₀ = cosφ ₁ (4) Expression (5) is obtained from Expressions (2), (3), and (4).

Cosφ ₁ = n ₁ cosφ ₀ (5) When the expression (5) is substituted into the expression (1), the following relationship is established. r _01P = 0 (6) r _12P = (n ₂ cos φ _{0 −cos} φ ₂ ) / (n ₂ cos φ ₀ + cos φ ₂ ) (7) That is, the equation (6) employs p-polarized light as the incident light 8. However, when the incident angle is set to the Brewster angle, there is a known property that there is no reflection at the air / film 14 interface.

Equation (7) represents the Fresnel reflection coefficient of the reflection at the air / steel plate 4 interface when the film 14 does not exist. That is, when the p-polarized light is adopted as the incident light 8 and the incident angle is set to the Brewster angle, the film 14 /
This indicates that the reflection at the interface of the steel plate 4 coincides with the reflection at the air / steel plate 4 interface when the film 14 is not provided. From these two relations, it can be said that the total reflection also matches when there is no film 14.

Therefore, regardless of the complex refractive index of the steel plate 4 located below the film 14, p-polarized light is adopted for the incident light 8,
It can be understood that if the incident angle is set to the Brewster angle, the presence or absence of the film 4 cannot be determined at all.

The prior art disclosed in Japanese Patent Application Laid-Open No. 53-23678 focuses only on eliminating strong reflected light on the surface of the film 14 represented by the formula (6). We do not use or need the relationships represented by the formulas.

Next, a description will be given of a method of the present invention in which the specular reflection component and the specular diffusion reflection component of the light reflected from the surface to be inspected are captured based on the above findings and the surface unevenness is not detected. First, p-polarized light is incident on the steel plate 4 as the surface to be inspected, and reflected light is observed from the specular reflection direction of the steel plate 4 by the first light receiving means. At this time, by making the incident angle of the incident light 8 and the light receiving angle of the first light receiving means coincide with the Brewster angle of the film 14, which is a substance causing the surface unevenness, the reflected light is reflected on the mirror surface without detecting the unevenness. Will capture the components.

Next, in the second light receiving means, the incident light 8
The sum of the incident angle with respect to the surface to be inspected and the light receiving angle of the second light receiving means is almost equal to twice the Brewster angle of the film 14 which is a substance causing surface unevenness. In this second light receiving means, the incident light and the light receiving angle (emission angle) are not made to coincide with each other, so that the light incident on the second light receiving means is incident light 8
Instead of specularly reflected light,
The specular diffuse reflection component will be captured. At this time, microscopically, specular reflection occurs at each of the inclined small surface elements 13 of the non-tempered portion 7 where specular diffuse reflection occurs, and the incident angle and the light receiving angle (emission angle) are brewed. Since the angle substantially coincides with the star angle, no unevenness is detected here.

Although the case where the incident light 8 is p-polarized light has been described, the incident light 8 is non-polarized light,
In the case where the light receiving means receives only the p-polarized component of the reflected light using, for example, an analyzer, a detection optical system which does not detect unevenness can be constructed similarly.

In order to surely catch the specular diffuse reflection component without undetecting it, observation from only one direction of diffusion is not sufficient. Observation from at least two directions of diffusion with different light receiving angles is desirable. Because, FIG. 12 (a)
This is because, as shown in (c), there is at most one undetectable angle in the diffusion direction, and if the observation direction coincides with this undetectable angle, no detection is performed.

Therefore, in claim 2 of the present invention, in addition to the second light receiving means, a third light receiving means having a different light receiving angle with respect to the second light receiving means is provided. In addition, by using a linear diffused light source as a light source, even if a linear array camera or other scanning type photodetector is used for each light receiving means, the mirror surface is always required from the regular reflection direction of the steel plate 4 regardless of the angle of view. A reflection component and a specular diffuse reflection component can be received.

By constructing the optical system in this way,
Two signals or 3 respectively corresponding to the specular reflection component and the specular diffuse reflection component without being affected by the presence or absence of the film 14.
It is possible to obtain two signals, and it is possible to detect a pattern-shaped scab defect having no noticeable unevenness without causing undetection.

[0066]

Embodiments of the present invention will be described below with reference to the drawings. (First Embodiment) FIG. 1A is a side view of a surface flaw inspection apparatus employing a surface flaw inspection method according to a first embodiment of the present invention, and FIG. It is a top view.

The surface flaw inspection apparatus according to the first embodiment is installed in a quality inspection line of an alloyed galvanized steel sheet in an iron making plant. A linear diffused light source 22 is arranged in the width direction of the strip-shaped steel plate 21 at a position above the transfer path of the steel plate 21 in the transfer state in the arrow direction in the drawing. This linear diffusion light source 2
2 is to emit uniform light in the width direction by projecting light from a metal halide light source into the inside from both ends of the transparent light guide bar, which is partially coated with a diffuse reflection paint.

The incident light 23 emitted from each position of the linear diffused light source 22 to the steel plate 21 as the irradiation light passes through the cylindrical lens 24 and the polarizing plate 25 over the entire width of the running steel plate 21 and runs. A predetermined area of a rectangular shape having a predetermined length in the direction is uniformly irradiated.

The azimuth (polarization angle) α of the polarizing plate 25 is set in a direction parallel to the plane of incidence of the incident light 23 on the steel plate 21. That is, the incident light 23 emitted from the linear diffusion light source 22 to the steel plate 21 is in a p-polarized state.

The surface of the steel plate 21 has surface irregularities such as a reaction product film and an oxide film in the electroplating process. The Brewster angle of the film that is the cause of the unevenness is measured in advance.

The reflected light 26a, 26 reflected by the steel plate 21
b enters the first and second light receiving cameras 27 and 28, for example, configured by linear array cameras whose light receiving angles are set to γ ₁ and γ ₂ , respectively.

The light receiving angle γ ₁ of the first light receiving camera 27 is set to 60 °, which is the Brewster angle of the varnish forming the film. Then, the incident angle θ ₁ of the incident light 23 with respect to the reflected light 26a incident on the _first light receiving camera 27 at the light receiving angle γ ₁ is also 60 °, which is the Brewster angle of the film. That is, the incident angle θ ₁ of the incident light 23 from the linear diffused light source 22 and the reflected light 26 incident on the first light receiving camera 27
equal acceptance angle gamma ₁ a, so as together to match the Brewster angle of the film, the position of the first light receiving camera 27 is set. Accordingly, the first light receiving camera 27 receives the specular reflection component of the regular reflection light of the incident light 23 radiated to the steel plate 21 from the linear diffusion light source 22.

On the other hand, the light receiving angle γ _{2 of the second} light receiving camera 28
Is the incident angle θ of this light receiving angle γ ₂ and the incident light 23 of the reflected light 26 b incident on the second light receiving camera 28 with respect to the steel plate 21.
_The angle (γ ₂ + θ ₂ ) obtained by adding ₂ is set to 120 °, which is twice the Brewster angle of the film, which is 60 °. That is, the second light receiving camera 2 is set so that the relation between the incident angle θ ₂ and the light receiving angle γ ₂ has the above-described relation.
8 positions are set.

The light receiving angle γ _{2 of the second} light receiving camera 28
Is set to a value different from the light receiving angle γ _{1 of} the first light receiving camera 27. Specifically, the light receiving angle gamma ₂ is set to 80 °, the incident angle theta ₂ is set to 40 °.

Therefore, the second light-receiving camera 28 receives diffuse reflection light other than the specular reflection light of the incident light 23 irradiated on the steel plate 21 from the linear diffusion light source 22, that is, the specular diffuse reflection component.

Here, as each of the light receiving cameras 27 and 28,
A two-dimensional CCD camera can be used instead of a linear array camera. Furthermore, it is also possible to use a scanning photodetector in which a single photodetector is combined with a galvanometer mirror or a polygon mirror.

Further, a fluorescent lamp can be used as the linear diffusion light source 22. Further, a fiber light source in which the output ends of the bundle fiber are aligned in a straight line can be used. The light emitted from each fiber is the N / A of the fiber.
This is because the fiber light source having a sufficient divergence angle corresponds to a linear diffusion light source.

Each pixel of one line in the width direction of the steel plate 21 of the specular reflection component in the reflected light 26a in the regular reflection direction and the specular diffuse reflection component in the reflected light 26b in the diffuse reflection direction received by each of the light receiving cameras 27 and 28. Each light intensity is converted into light intensity signals a and b, respectively, and transmitted to a signal processing unit 31 as a determination processing unit.

FIG. 2 is a block diagram showing a schematic configuration of the signal processing section 31. A first light receiving camera 27 that receives a specular reflection component in the reflected light 26a in the regular reflection direction reflected by the steel plate 21, and a second light receiving camera that receives the specular diffuse reflection component in the reflected light 26b in the diffuse reflection direction reflected by the steel plate 21. The light intensity signals a and b output from the light receiving camera 28 are input to average value thinning units 32a and 32b, respectively.

Each of the average value thinning sections 32 a and 32 b is provided for each of the light receiving cameras 27 and 28 in each scan cycle.
The respective light intensity signals a and b input from 7, 28 are averaged,
When the steel plate 21 moves a distance corresponding to the longitudinal resolution in the signal processing, a signal for one line is output.

By performing such a thinning process,
Even if the conveying speed of the steel plate 21 changes, the resolution of one line in the moving direction of the steel plate in the signal processing can be kept constant. In addition, since the light intensity signals a and b for each scanning cycle are averaged, when the resolution of one line in the moving direction of the steel plate in the signal processing is sufficiently larger than the visual field size of the light receiving cameras 27 and 28 in the moving direction of the steel plate. Also, since an average value obtained by measuring the interval can be used, oversight can be eliminated.

Each of the light intensity signals a and b subjected to signal processing in each of the average value thinning sections 32a and 32b is converted into the following preprocessing sections 33a and 33b.
33b. Each pre-processing unit 33a, 33b
Correct the luminance fluctuation of the line signal. In addition, each of the pre-processing units 33a and 33b also detects the edge positions on both sides of the steel plate 21, and performs a process of preventing a sudden change in the light intensity signals a and b at the edge from being erroneously recognized as a flaw. Each pre-processing unit 3
The light intensity signals a and b subjected to signal processing in 3a and 33b are input to the following binarization processing units 34a and 34b.

Each of the binarization processing sections 34a and 34b compares the data of each pixel contained in each of the light intensity signals a and b with a predetermined threshold value, extracts flaw candidate points, and It is sent to the feature amount calculation units 35a and 35b.

The feature extraction units 35a and 35b determine a series of flaw candidate points as one flaw candidate area, and for example, position feature such as start address and end address, and density feature such as peak value. Calculate the amount etc.

The specular flaw judging section 36 and the specular diffuse flaw judging section 37 determine the type of the flaw based on the characteristic amounts calculated by the characteristic amount extracting sections 35a and 35b corresponding to the respective light receiving cameras 27 and 28. Determine the degree.

The final flaw type and degree of the steel sheet 21 to be inspected are determined by the flaw determining section 38 based on the determination results and the characteristic amounts of the specular flaw determining section 36 and the specular diffuse flaw determining section 37. Is determined.

[0087]

FIG. 3 shows the results of measuring the surface flaws of an alloyed galvanized steel sheet using the surface flaw inspection apparatus of the first embodiment shown in FIG. Each of the measured flaws is the temper part 6 shown in FIG.
The area ratio of the non-tempered portion 7 is larger than that of the base material portion 12 at the barb portion 11 and the diffusivity of the non-tempered portion 7 is larger than that of the base material portion 12 at the barge portion 11. Although the area ratio of the non-tempered portion 7 is not changed while the area ratio of the barbed portion 11 is larger than that of the base material portion 12, and the area ratio of the tempered portion 6 shown in FIG. There are no significant differences between the portions 12, but there are a total of three types of flaws including flaws having a difference in diffusivity.

The surface of the galvanized steel sheet as the surface to be inspected has surface irregularities such as a reaction product film and an oxide film in the electroplating process. Then, when a flaw of the type shown in FIG. 12A is generated at the center in the width direction of the steel plate 21 and the above-described surface unevenness occurs near the end in the width direction, the first light receiving mirror reflection component is used. The change of the light intensity signals a and b for one width of the steel material 21 obtained by scanning the light receiving camera 27 of the above and the second light receiving camera 28 for receiving the specular diffuse reflection component by one line in the width direction of the steel plate 21 is shown. FIG.
(A) and (b).

As shown in the drawing, a peak waveform 40 in the positive direction (bright direction) corresponding to the flaw (the scab 11) is generated in the light intensity signal a of the first light receiving camera 27. Further, a peak waveform 40 corresponding to the flaw (the scab 11) is generated in the light intensity signal b of the second light receiving camera 28.

FIG. 12 shows a central portion of the steel plate 21 in the width direction.
(B) When a flaw of the type shown is generated, the first light receiving camera 27 for receiving the specular reflection component and the second light receiving camera 28 for receiving the specular diffuse reflection component scan one line in the width direction of the steel plate 21. FIGS. 3C and 3D show changes in the light intensity signals a and b for one width of the steel material 21 obtained as described above.

As shown, a peak waveform 40 in the positive direction (bright direction) corresponding to the flaw (severed portion 11) is generated in the light intensity signal a of the first light receiving camera 27. However, a peak waveform corresponding to the flaw (the scab 11) does not occur in the light intensity signal b of the second light receiving camera 28.

Further, FIG. 1 is attached to the center of the steel plate 21 in the width direction.
When a flaw of the type shown in FIG. 2 (c) occurs and surface unevenness occurs near the end, a first light receiving camera 27 for receiving a specular reflection component and a second light receiving camera 28 for receiving a specular diffuse reflection component are provided. FIGS. 3E and 3F show changes in the light intensity signals a and b for one width of the steel material 21 obtained by scanning one line in the width direction of the steel plate 21.

As shown in the figure, the light intensity signal a of the first light receiving camera 27 does not have a peak waveform in the positive direction (bright direction) corresponding to the flaw (the scab 11). However, a peak waveform 40 corresponding to the flaw (severed portion 11) is generated in the light intensity signal b of the second light receiving camera 28.

As described above, even if any of the typical three types of pattern-shaped barge defects shown in FIGS. 12 (a), (b) and (c) occurs, It is possible to reliably detect a scab defect. Furthermore, FIG.
As shown in (f), the types of the three types of pattern-like barbed defects can also be determined.

Then, as shown in FIGS. 3A to 3F, only the pattern-shaped scab defect is detected, and the waveform caused by the surface unevenness is not detected. In order to confirm the excellent detection function of the device of the first embodiment, the inventors et al.
(B) The flaws and surface unevenness shown in (c) were measured by a conventional surface flaw inspection device.

In this conventional device, the steel plate 21
From the linear light source arranged in the width direction of the
Specularly reflected light is received by a first light receiving camera disposed in the regular reflection direction of non-polarized incident light incident at 0 °. Therefore, the light receiving angle of the first camera is the same as the light receiving angle of the first camera 27 of the embodiment device. On the other hand, for example, when the direction of the normal
Specular diffuse reflected light is received by a second light-receiving camera disposed in the direction of 0 °.

FIGS. 4A, 4B, 4C, and 4D show the measurement results.
(E) and (f). As shown in FIG.
It is possible to detect a pattern-like scab defect of the type shown in FIG. However, as shown in FIG.
In addition to the positive peak waveform 40 corresponding to 1), a waveform 41 due to surface unevenness is generated. In general, only by observing the waveform, it is not possible to distinguish the peak waveform 40 corresponding to the flaw (severed portion 11) from the waveform 41 due to the surface unevenness. There is a concern that the peak waveform 40 corresponding to 11) is erroneously recognized.

Further, as shown in FIGS. 4 (e) and 4 (f), it is not possible to detect a pattern-shaped scab defect of the type shown in FIG. 12 (c). In this case, not only the pattern-shaped barge defect cannot be detected, but also a waveform 41 due to surface unevenness is generated.

In this case, although the pattern-shaped scab defect actually exists as shown in FIG. 12C, the pattern-shaped scab defect cannot be detected, and the surface unevenness which is unnecessary to be detected is detected. Inconvenience occurs.

As described above, in the surface flaw inspection apparatus of the first embodiment, a pattern-shaped scab defect, which could not be detected by the conventional apparatus, is removed while eliminating the presence of surface unevenness.
As a result, it is possible to reliably detect the pattern-shaped barbed flaw having no remarkable unevenness without fail and with high accuracy.

(Second Embodiment) FIG. 5 is a top view of a surface flaw inspection apparatus according to a second embodiment of the present invention. The first shown in FIG.
The same parts as those of the surface flaw inspection apparatus of the embodiment are denoted by the same reference numerals. Therefore, the detailed description of the overlapping part will be omitted.

In the surface flaw inspection device of the second embodiment, in addition to the first and second light receiving cameras 27 and 28 in the surface flaw inspection device of the first embodiment, a third light receiving camera 2 is provided.
9 are provided.

The light receiving angle γ _{3 of the third} light receiving camera 29
Is the incident angle θ of this incident angle γ ₃ and the incident light 23 of the reflected light 26 c incident on the third light receiving camera 29 with respect to the steel plate 21.
_The angle (γ ₃ + θ ₃ ) obtained by adding ₃ is set to 120 °, which is twice the Brewster angle of the film, which is 60 °. That is, the third light receiving camera 2 is set so that the relation between the incident angle θ ₃ and the light receiving angle γ ₃ has the above-described relation.
Nine positions are set.

The light receiving angle γ _{3 of the third} light receiving camera 29
Is the light receiving angle γ of the first and second light receiving cameras 27 and 28
₁ and γ ₂ are set to different values. Specifically, the light receiving angle γ ₃ of the third light receiving camera 29 is set to 70 °,
The incident angle θ ₃ is set to 50 °.

Therefore, the third light receiving camera 29 is a diffused reflected light other than the specularly reflected light of the incident light 23 applied to the steel plate 21 from the linear diffused light source 22, that is, the second light receiving camera 28
And receives a specular diffuse reflection component in a direction different from the direction.

First, second and third light receiving cameras 27 and 2
The light intensity signals a, b, and c output from 8, 29 are input to the signal processing unit 31a. FIG. 6 is a block diagram illustrating a schematic configuration of the signal processing unit 31a. This signal processing unit 31a
Is obtained by adding a signal processing system for the light intensity signal c output from the third light receiving camera 29 to the signal processing unit 31 of the first embodiment shown in FIG. Since it is almost the same as the signal processing unit 31 of the first embodiment, the description is omitted.

[0107]

EXAMPLE FIG. 7 shows the results of measuring the surface flaws of an alloyed galvanized steel sheet using the surface flaw inspection apparatus of the second embodiment shown in FIG. The measurement conditions are the same as in the case of the surface flaw inspection device of the first embodiment.

FIG. 12 (b) shows the central portion of the steel plate 21 in the width direction.
In the case where a flaw of the type shown in FIG. 1 occurs and surface unevenness occurs near the end, a first light receiving camera 27 for receiving a specular reflection component, a second light receiving camera 28 for receiving a specular diffuse reflection component, and Changes in light intensity signals a, b, and c for one width of the steel material 21 obtained by scanning the third light receiving camera 29 that receives specular diffuse reflection components from different directions by one line in the width direction of the steel plate 21. Are shown in FIGS. 7A, 7B and 7C.

Further, FIG. 1 shows a central portion of the steel plate 21 in the width direction.
When a flaw of the type shown in FIG. 2 (c) occurs and surface unevenness occurs near the end, the first, second, and third light receiving cameras 27, 28, and 29 are moved one line in the width direction of the steel plate 21. Light intensity signal a for one width of the steel material 21 obtained by minute scanning,
Changes in b and c are shown in FIGS. 7 (d), (e) and (f).

As described above, even if any of the typical patterned barge defects shown in FIGS. 12 (b) and 12 (c) occurs, the patterned barge defect is reliably detected. Can be detected. Further, as shown in FIGS. 7A to 7F, only the pattern-shaped scab defect is detected, and the waveform due to the surface unevenness is not detected.

In the second embodiment, since the specular diffuse reflection component is received from a plurality of light receiving directions,
As shown in FIG. 7F, the first and second light receiving cameras 2
Flaws that could not be detected can be detected in 7, 28, and non-detection can be reliably prevented.

[0112]

As described above, in the surface flaw inspection apparatus and the surface flaw inspection method of the present invention, the incident angle of the illumination light and the reception angle of the reflected light are set by using the Brewster angle. In the reflected light received by each light receiving means,
This prevents a factor caused by unevenness on the surface to be inspected from entering.

Therefore, the specular reflection component and the specular diffuse reflection component contained in the reflected light from the surface to be inspected can be accurately detected, and the surface of the surface to be inspected has remarkable irregularities such as cracks, gouges, and curling. Pattern-like balding defects without
It can be reliably detected in distinction from surface irregularities that cannot be regarded as defects, can exhibit high defect detection accuracy, and can be sufficiently incorporated into a product quality inspection line.

[Brief description of the drawings]

FIG. 1 is a side view and a top view showing a schematic configuration of a surface flaw inspection apparatus according to a first embodiment of the present invention.

FIG. 2 is a block diagram showing a schematic configuration of a signal processing unit of the surface flaw inspection apparatus.

FIG. 3 is a waveform diagram of a light intensity signal measured by the surface flaw inspection apparatus.

FIG. 4 is a waveform diagram of a light intensity signal measured by a conventional surface flaw inspection device.

FIG. 5 is a top view showing a schematic configuration of a surface flaw inspection apparatus according to a second embodiment of the present invention.

FIG. 6 is a block diagram showing a schematic configuration of a signal processing unit of the surface flaw inspection apparatus.

FIG. 7 is a waveform diagram of a light intensity signal measured by the surface flaw inspection apparatus.

FIG. 8 is a view showing a manufacturing method and a detailed cross-sectional structure of a galvanized steel sheet to be inspected by the surface defect inspection apparatus.

FIG. 9 is a schematic cross-sectional view showing a relationship between incident light and reflected light at a tempered portion and a non-tempered portion of a steel plate to be inspected.

FIG. 10 is an angle distribution diagram of reflected light between the tempered portion and the non-tempered portion.

FIG. 11 is a diagram for explaining a generation process of a stub part existing in a steel plate.

FIG. 12 is a diagram showing a relationship between a specular reflection component and a specular diffuse reflection component in a stub, and a specular reflection component and a specular diffuse reflection component in a base material portion.

FIG. 13 is a schematic cross-sectional view showing a relationship between incident light and reflected light in a tempered portion and a non-tempered portion of a steel plate to be inspected when a film is present on the surface.

FIG. 14 is a diagram illustrating a relationship between an incident angle of incident light on a surface to be inspected and a reflectance;

[Explanation of symbols]

 4, 21: Steel plate 6: Tempered part 7: Non-tempered part 8: Incident light 9: Specular reflection light 10: Specular diffuse reflection light 11: Heaving part 12: Base member 13: Small plane element 22: Linear diffusion light source 23 ... incident light 25 ... polarizing plates 26a, 26b, 26c ... reflected light 27 ... first light receiving camera 28 ... second light receiving camera 29 ... third light receiving camera 31, 31a ... signal processing unit 40 ... peak waveform 41 ... waveform

Continued on the front page (72) Inventor Yuji Matoba 1-2-1, Marunouchi, Chiyoda-ku, Tokyo Nihon Kokan Co., Ltd. (72) Masakazu Inomata 1-2-1, Marunouchi, Chiyoda-ku, Tokyo Sun Inside the Kokan Co., Ltd. (72) Shoji Yoshikawa, 1-2-1, Marunouchi, Chiyoda-ku, Tokyo, Japan Inside Nihon Kokan Co., Ltd. (72) Tsutomu Kawamura 1-2-1, Marunouchi, Chiyoda-ku, Tokyo, Japan Inside Steel Tube Co., Ltd. (72) Inventor Hiroyuki Sugiura 1-2-1, Marunouchi, Chiyoda-ku, Tokyo Japan Steel Tube Co., Ltd.

Claims (4)

[Claims] 1. A light source for illuminating a predetermined range of a surface to be inspected having an uneven surface with illumination light linearly polarized in a direction parallel to an incident surface with respect to the surface to be inspected, and a light receiving angle from the surface to be inspected is A first light receiving unit that is set to the Brewster angle of the substance causing the unevenness and receives the specularly reflected light of the illumination light; and a light receiving angle from the surface to be inspected, the light receiving angle with respect to the light receiving angle and the surface to be inspected The sum of the angle of incidence of the illumination light from the light source is set to a value that is twice the Brewster angle of the non-uniformity-causing substance, and a second light that receives light other than the specular reflection light of the illumination light
And a determination processing unit that determines the presence or absence of a surface flaw on the surface to be inspected based on the regular reflection light received by the first and second light reception units and light other than the regular reflection light. Surface flaw inspection device. 2. A light source for illuminating a predetermined range of a surface to be inspected having an uneven surface with illumination light linearly polarized in a direction parallel to an incident surface with respect to the surface to be inspected, and a light receiving angle from the surface to be inspected is A first light receiving unit that is set to the Brewster angle of the substance causing the unevenness and receives the specularly reflected light of the illumination light; and a light receiving angle from the surface to be inspected, the light receiving angle with respect to the light receiving angle and the surface to be inspected The sum of the angle of incidence of the illumination light from the light source is set to a value that is twice the Brewster angle of the non-uniformity-causing substance, and a second light that receives light other than the specular reflection light of the illumination light
The light receiving angle from the surface to be inspected is set to a value different from the light receiving angle of the second light receiving unit, and the light receiving angle and the incident angle of the illumination light from the light source to the surface to be inspected are Is set to a value that is twice as large as the Brewster angle of the unevenness-causing substance, and a third light receiving light other than the regular reflection light of the illumination light is set.
Determination processing for determining the presence or absence of surface flaws on the surface to be inspected based on light other than the regular reflection light and the plurality of regular reflection lights received by the first, second, and third light receiving means Surface inspection device provided with a part. 3. The surface flaw inspection apparatus according to claim 1, wherein the light source is a linear diffusion light source. 4. A predetermined range of a surface to be inspected having unevenness on its surface is illuminated with illumination light linearly polarized in a direction parallel to an incident surface with respect to the surface to be inspected, and set to a Brewster angle of the substance causing the unevenness. The specular reflection light of the illumination light is received from the received light receiving direction, and the sum with the incident angle of the illumination light with respect to the surface to be inspected is set to a value that is twice the Brewster angle of the substance causing the unevenness. From the light receiving angle direction, light other than the specular reflection light of the illumination light is received, and the presence or absence of a surface flaw on the surface to be inspected is determined based on the received light other than the specular reflection light and the specular reflection light. Features a surface flaw inspection method.