JPH11290801A - Cleaning tank - Google Patents

Abstract

PROBLEM TO BE SOLVED: To increase a circulating amount in a tank main body without increasing a discharge amount of a cleaning liquid. SOLUTION: A cleaning tank 20 is equipped with a tank main body 11 for cleaning a material to be cleaned 2 with a cleaning liquid 1 to be supplied by containing the material to be cleaned inside: a discharge pipe 2 wherein it is disposed downward inside the tank main body 11, and a discharge hole for discharging the cleaning liquid 1 is formed along its longitudinal direction: and a couple of guide boards 21 which surround an outer peripheral surface on the discharge hole side of the discharge pipe 12 via a specific interval from the outer peripheral surface of the discharge pipe 12, and open a specific range near the discharge hole.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a turbulent cleaning tank for spraying a cleaning liquid in a tank main body to clean an object to be cleaned such as a wafer or a substrate housed in the tank main body.

[0002]

2. Description of the Related Art FIGS. 5 and 6 are front sectional views showing one example of a conventional turbulent washing tank, which shows a chemical circulation type and a water washing type, respectively. In the cleaning tanks 10 and 10A, a discharge pipe 12 for discharging the cleaning liquid 1 is provided on both lower sides inside the tank main body 11, and this discharge pipe 1
2 includes a pump 13 and a filter 15 through a pipe 13.
(FIG. 5) or DIW 17 (FIG. 6).

The object 2 to be cleaned is accommodated in a tank body 11, and the object 2 to be cleaned is washed by ejecting a cleaning liquid 1 (chemical solution or water) from a discharge pipe 12 by a pump 14 or DIW 17. The object 2 to be cleaned is a silicon wafer, a glass substrate of a liquid crystal display, or the like, and is supported by a receiving table (not shown) installed on the inner bottom surface of the tank body 11. In the example of FIG. 5, the cleaning liquid 1 overflowing from the opening surface of the tank body 11 is supplied to the storage tank 16 provided on the outer periphery of the tank body 11.
And is again supplied into the tank body 11 by the pump 14.

[0004]

However, in the conventional cleaning tanks 10 and 10A described above, if the discharge amount of the cleaning liquid 1 from the discharge pipe 12 is insufficient, the cleaning liquid 1
Cannot sufficiently circulate, so that the stagnation portion of the cleaning liquid 1 in the tank body 11 increases, and particles adhering to the surface of the cleaning target 2 may not be sufficiently removed and may remain. was there. Here, it is conceivable to further increase the discharge amount of the cleaning liquid 1 from the discharge pipe 12, but it is necessary to increase the supply amount of the cleaning liquid 1,
There is a problem that the cost increases.

[0005] Therefore, an object of the present invention is to increase the circulation amount of the cleaning liquid in the tank body with the same discharge amount of the cleaning liquid as before.

[0006]

According to a first aspect of the present invention, there is provided a tank body for accommodating an object to be cleaned and cleaning the object with a supplied cleaning liquid. And a discharge pipe which is disposed below the inside of the tank body and has a discharge hole for discharging a cleaning liquid formed in a longitudinal direction, and the discharge pipe having a predetermined interval from an outer peripheral surface of the discharge pipe. A pair of guide plates is provided, which surrounds the outer peripheral surface on the side of the discharge hole and opens a certain range near the discharge hole. The invention of claim 2 is
The cleaning tank according to claim 1, wherein a tip portion of the guide plate near the discharge hole projects in a direction opposite to the discharge pipe.

[0007]

In the present invention, the cleaning liquid sprayed from the discharge hole of the discharge pipe passes through the opening formed by the pair of guide plates. At this time, since the portion where the flow rate of the cleaning liquid is increased becomes a negative pressure, the cleaning liquid existing between the outer peripheral surface side of the discharge pipe and the inner peripheral surface side of the guide plate is discharged at the same time. To increase. Therefore, the circulation amount of the cleaning liquid in the tank body increases.

[0008]

An embodiment of the present invention will be described below with reference to the drawings. In the following embodiment,
The same parts as those in the conventional example are denoted by the same reference numerals. FIG.
1 is a front sectional view showing one embodiment of a cleaning tank according to the present invention. The washing tank 20 is of a turbulent flow type chemical liquid circulation type. In FIG. 1, a tubular (hollow cylindrical) discharge pipe 12 connected to a pump 14 and a filter 15 via a pipe 13 is provided on both lower sides inside the tank body 11. As shown in FIG. 2, the discharge pipe 12 is provided with a discharge hole 12a. The discharge holes 12a are formed at predetermined positions in the circumferential direction of the discharge pipe 12 at predetermined positions in the longitudinal direction (central axis direction) of the discharge pipe 12.

A pair of guide plates 21 is provided near the outside of the discharge pipe 12. FIG. 3 and FIG.
It is the perspective view and front sectional drawing which show the positional relationship between the discharge pipe 12 and the guide plate 21. Each guide plate 21 includes an arc-shaped portion 21a formed by bending a plate-like body and a flat portion 21b. It is arranged so as to surround the outer peripheral surface. At this time, the discharge pipe 1
2 and the arcuate portion 21a of the guide plate 21 are arranged so as to be substantially concentric.

Furthermore, each flat portion 2 of the pair of guide plates 21
1b, they are arranged so that a fixed opening S is formed. Further, the guide plate 21 is arranged such that the opening S faces in the same direction as the discharge hole 12a of the discharge pipe 12. Therefore, the flat portions 21 of the pair of guide plates 21
By b, a certain range near the discharge hole 12a of the discharge pipe 12 is opened, and the flat portion 21b of the guide plate 21 protrudes in a direction opposite to the discharge pipe 12.

In the cleaning tank 20 having the above structure, the object 2 to be cleaned is accommodated in the tank body 11 and
When the pump 14 is driven, the cleaning liquid (chemical liquid) 1 is supplied from the conduit 13 to the discharge pipe 12 via the filter 15, and is discharged at a high pressure from the discharge hole 12a. The discharged cleaning liquid 1 passes through the opening S formed by the pair of guide plates 21 and moves toward the object 2 to be cleaned.
1 circulates the cleaning liquid 1.

When the cleaning liquid 1 is ejected from the discharge holes 12a of the discharge pipe 12, the discharge holes 12a and the guide plate 2
Since the flow rate of the cleaning liquid 1 between the first opening S and the opening S becomes extremely high, a negative pressure is generated in this part. Therefore, the cleaning liquid 1 existing between the outer peripheral surface side of the discharge pipe 12 and the inner peripheral surface side of the guide plate 21 simultaneously causes the opening S
4 (in the direction of the arrow in FIG. 4), the discharge amount increases. Thereby, even if the supply amount of the cleaning liquid 1 from the pump 14 is the same as the conventional one (without increasing the supply amount of the cleaning liquid 1 from the pump 14), the discharge amount is increased and the cleaning liquid 1 in the tank body 11 is increased. Circulation amount can be increased.

Therefore, the tank body 1 can be manufactured without increasing the cost.
1 to reduce stagnation of the cleaning liquid 1 and particles,
The effect of removing particles adhering to the surface of the cleaning target 2 can be enhanced. Further, the cleaning liquid 1 that has overflowed from the upper surface side of the tank body 11 is collected by the storage tank 16, and is again supplied from the pump 14 into the tank body 11 through the pipe 13. In the above embodiment, the chemical circulation type shown in FIG. 5 of the conventional example is shown. However, the present invention can be similarly applied to a washing type shown in FIG. 6 of the conventional example.

[0014]

According to the present invention, it is possible to increase the discharge amount and increase the circulation amount of the cleaning liquid in the tank body without increasing the supply amount of the cleaning liquid. Thereby, the stagnation of the cleaning liquid and the particles in the tank body can be reduced without increasing the cost, and the effect of removing the particles adhering to the surface of the object to be cleaned can be enhanced.

[Brief description of the drawings]

FIG. 1 is a front sectional view showing an embodiment of a cleaning tank according to the present invention, showing a chemical circulation type.

FIG. 2 is a perspective view showing the discharge pipe of FIG.

FIG. 3 is a perspective view showing a guide plate and a discharge pipe of FIG. 1;

FIG. 4 is a front sectional view showing a guide plate and a discharge pipe of FIG. 1 in detail;

FIG. 5 is a front sectional view showing an example of a conventional turbulent cleaning tank, and shows a chemical circulation type.

FIG. 6 is a front sectional view showing an example of a conventional turbulent washing tank, which is a washing type.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Cleaning liquid 2 Object to be cleaned 11 Tank body 12 Discharge pipe 12a Discharge hole 13 Pipeline 14 Pump 15 Filter 16 Storage tank 20 Cleaning tank 21 Guide plate 21a Arc-shaped part 21b Flat part S Opening part

Claims (2)

[Claims] 1. A tank body for accommodating an object to be cleaned therein and cleaning the object to be cleaned with a supplied cleaning liquid, and a discharge hole disposed below the inside of the tank body and discharging a cleaning liquid. A discharge pipe formed along the longitudinal direction, and surrounding the outer peripheral surface on the discharge hole side of the discharge pipe with a predetermined interval from the outer peripheral surface of the discharge pipe, and opening a certain range near the discharge hole. A cleaning tank comprising: a pair of guide plates; 2. The cleaning tank according to claim 1, wherein a tip portion of the guide plate near the discharge hole projects in a direction opposite to the discharge pipe.