JPS491058B1 - - Google Patents
Info
- Publication number
- JPS491058B1 JPS491058B1 JP44075249A JP7524969A JPS491058B1 JP S491058 B1 JPS491058 B1 JP S491058B1 JP 44075249 A JP44075249 A JP 44075249A JP 7524969 A JP7524969 A JP 7524969A JP S491058 B1 JPS491058 B1 JP S491058B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP44075249A JPS491058B1 (en) | 1969-09-24 | 1969-09-24 | |
| US74412A US3624390A (en) | 1969-09-24 | 1970-09-22 | Specimen-heating means for electron beam irradiation apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP44075249A JPS491058B1 (en) | 1969-09-24 | 1969-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS491058B1 true JPS491058B1 (en) | 1974-01-11 |
Family
ID=13570747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP44075249A Pending JPS491058B1 (en) | 1969-09-24 | 1969-09-24 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3624390A (en) |
| JP (1) | JPS491058B1 (en) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2116931A5 (en) * | 1970-12-11 | 1972-07-21 | Onera (Off Nat Aerospatiale) | PROTECTION DEVICE FOR SAMPLE STUDY EQUIPMENT USING AN ELECTRON BRUSH |
| US3919558A (en) * | 1974-11-04 | 1975-11-11 | Gen Electric | Hot sub-stage for a scanning electron microscope |
| US4118630A (en) * | 1977-05-05 | 1978-10-03 | International Business Machines Corporation | Ion implantation apparatus with a cooled structure controlling the surface potential of a target surface |
| FR2608837B1 (en) * | 1986-12-23 | 1994-06-10 | Univ Metz | APPARATUS FOR HANDLING TRANSLATION OF AN ELEMENT, SUCH AS A SHAFT |
| US4833330A (en) * | 1987-11-03 | 1989-05-23 | Gatan Inc. | Anticontaminator for transmission electron microscopes |
| DE68922061T2 (en) * | 1988-10-03 | 1995-08-31 | Canon Kk | Device for regulating the temperature. |
| NL8902727A (en) * | 1989-11-06 | 1991-06-03 | Philips Nv | OBJECT HOLDER FOR SUPPORTING AN OBJECT IN A LOADED PARTICLE BUNDLE SYSTEM. |
| US5296669A (en) * | 1992-05-29 | 1994-03-22 | Hitachi, Ltd. | Specimen heating device for use with an electron microscope |
| US5563415A (en) * | 1995-06-07 | 1996-10-08 | Arch Development Corporation | Magnetic lens apparatus for a low-voltage high-resolution electron microscope |
| US6025592A (en) * | 1995-08-11 | 2000-02-15 | Philips Electronics North America | High temperature specimen stage and detector for an environmental scanning electron microscope |
| US6046457A (en) * | 1998-01-09 | 2000-04-04 | International Business Machines Corporation | Charged particle beam apparatus having anticontamination means |
| DE19845804C2 (en) * | 1998-09-30 | 2000-11-30 | Tacr Turbine Airfoil Coating A | Method and arrangement for heating metal components with electron radiation in a vacuum chamber |
| US20060196853A1 (en) * | 2005-03-04 | 2006-09-07 | The Regents Of The University Of California | Micro-joining using electron beams |
| US9161392B2 (en) * | 2009-04-07 | 2015-10-13 | Yoshinobu ANBE | Heating apparatus for X-ray inspection |
| US8507845B2 (en) * | 2011-06-02 | 2013-08-13 | Wisconsin Alumni Research Foundation | Membrane detector for time-of-flight mass spectrometry |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3171958A (en) * | 1962-03-30 | 1965-03-02 | Rca Corp | Heated specimen holder for the electron microscope |
| DE1157319B (en) * | 1962-08-28 | 1963-11-14 | Heraeus Gmbh W C | Method and device for heating materials under vacuum to high temperatures |
-
1969
- 1969-09-24 JP JP44075249A patent/JPS491058B1/ja active Pending
-
1970
- 1970-09-22 US US74412A patent/US3624390A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US3624390A (en) | 1971-11-30 |