JPS5539630A - Vapor phase growth device - Google Patents
Vapor phase growth deviceInfo
- Publication number
- JPS5539630A JPS5539630A JP11249478A JP11249478A JPS5539630A JP S5539630 A JPS5539630 A JP S5539630A JP 11249478 A JP11249478 A JP 11249478A JP 11249478 A JP11249478 A JP 11249478A JP S5539630 A JPS5539630 A JP S5539630A
- Authority
- JP
- Japan
- Prior art keywords
- liner pipes
- pipes
- liner
- reactor pipe
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To make vapor phase growth without replacing the different diameter liner pipes provided in a reactor pipe while removing said liner pipes one by one starting with the innermost one thereof on the completion of each process.
CONSTITUTION: Liner pipes 61W64 are provided on the inner side of a reactor pipe 10 at a distance of about 1mm from each other. Said liner pipes 61W64 hardly pass reaction gas and can be readily slid close to each other. Said liner pipes 61W64 are easy to take out one by one if larger lengths are given to inner liner pipes. Said liner pipes 61W64 are easy to handle if a stoper 61' is attached at the upper course end thereof or a stopper 10' inside said reactor pipe 10. Thereby, operation can be easily made in a short period simply by drawing out said liner pipes 61W64 on the completion of each process since no replacement is required with new liner pipes. Therefore, said reactor pipe and liner pipes 61W64 can be considerably prevented from failure and the contamination due to air admixture.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11249478A JPS5539630A (en) | 1978-09-13 | 1978-09-13 | Vapor phase growth device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11249478A JPS5539630A (en) | 1978-09-13 | 1978-09-13 | Vapor phase growth device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5539630A true JPS5539630A (en) | 1980-03-19 |
| JPS6136372B2 JPS6136372B2 (en) | 1986-08-18 |
Family
ID=14588043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11249478A Granted JPS5539630A (en) | 1978-09-13 | 1978-09-13 | Vapor phase growth device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5539630A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57104524U (en) * | 1980-12-19 | 1982-06-28 | ||
| JPS58181796A (en) * | 1982-04-19 | 1983-10-24 | Matsushita Electric Ind Co Ltd | Crystal growth method |
| JPS6167915A (en) * | 1984-09-12 | 1986-04-08 | Hitachi Tokyo Electronics Co Ltd | Plasma CVD equipment |
| JPH04180619A (en) * | 1990-11-15 | 1992-06-26 | Nec Yamagata Ltd | Horizontal type reactor for semiconductor manufacturing |
| JP2006228973A (en) * | 2005-02-17 | 2006-08-31 | Denso Corp | Heat treatment apparatus |
| US8164868B2 (en) | 2006-02-23 | 2012-04-24 | Siemens Aktiengesellschaft | Device for short-circuiting power semiconductor modules |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106824935B (en) * | 2016-12-08 | 2019-03-05 | 尚涛 | A kind of cleaning method of gas-chromatography glass bushing pipe |
-
1978
- 1978-09-13 JP JP11249478A patent/JPS5539630A/en active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57104524U (en) * | 1980-12-19 | 1982-06-28 | ||
| JPS58181796A (en) * | 1982-04-19 | 1983-10-24 | Matsushita Electric Ind Co Ltd | Crystal growth method |
| JPS6167915A (en) * | 1984-09-12 | 1986-04-08 | Hitachi Tokyo Electronics Co Ltd | Plasma CVD equipment |
| JPH04180619A (en) * | 1990-11-15 | 1992-06-26 | Nec Yamagata Ltd | Horizontal type reactor for semiconductor manufacturing |
| JP2006228973A (en) * | 2005-02-17 | 2006-08-31 | Denso Corp | Heat treatment apparatus |
| US8164868B2 (en) | 2006-02-23 | 2012-04-24 | Siemens Aktiengesellschaft | Device for short-circuiting power semiconductor modules |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6136372B2 (en) | 1986-08-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5539630A (en) | Vapor phase growth device | |
| JPS5350528A (en) | Repairing method of liquid transportation pipe | |
| JPS5683656A (en) | Pressure vessel | |
| JPS5211419A (en) | Jointing structure of pipe | |
| JPS5292123A (en) | Parting construction for pipe line with double tube construction | |
| JPS53143887A (en) | Steam condensing tube | |
| JPS5397611A (en) | Inserting apparatus for liquid transporting syphon tube | |
| JPS5210191A (en) | Sample gas collecting bag | |
| JPS54108922A (en) | Pipe coupling | |
| JPS5695361A (en) | Gunning equipment | |
| JPS51113220A (en) | Formation of cave for leading pipe. | |
| JPS52155969A (en) | Reduced pressure heat treatment furnace of semiconductor wafers | |
| JPS53105866A (en) | Apparatus for manually cleaning metal pipes | |
| JPS51129926A (en) | Process for preventing corrosive of steel pipe | |
| JPS55225A (en) | Case for seal | |
| JPS52124004A (en) | Prevention of choking of reaction apparatus for cracking hydrocarbons | |
| JPS52120682A (en) | Gas phase growth method | |
| JPS5420954A (en) | Reflux type vapor removing apparatus | |
| JPS6474395A (en) | Steam remover for steam trap | |
| JPS557533A (en) | Production of carbonaceous whisker | |
| JPS5264560A (en) | Pipe coupling mechanism | |
| JPS52144844A (en) | End packing method for cease heater | |
| JPS5341972A (en) | Exhauster for vacuum tube production | |
| JPS5262724A (en) | Manufacturing of faucet pipe | |
| JPS547289A (en) | Superconductive coil equipment for nuclear fusion device |