JPS557555Y2 - - Google Patents

Info

Publication number: JPS557555Y2
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP1976024712U

Other languages

Other versions

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1976-03-02

Filing date

1976-03-02

Publication date

1980-02-20

1976-03-02 Application filed filed Critical

1976-03-02 Priority to JP1976024712U priority Critical patent/JPS557555Y2/ja

1977-09-06 Publication of JPS52117548U publication Critical patent/JPS52117548U/ja

1980-02-20 Application granted granted Critical

1980-02-20 Publication of JPS557555Y2 publication Critical patent/JPS557555Y2/ja

Status Expired legal-status Critical Current

Landscapes

Physical Vapour Deposition (AREA)

JP1976024712U 1976-03-02 1976-03-02 Expired JPS557555Y2 (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP1976024712U JPS557555Y2 (en)	1976-03-02	1976-03-02

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1976024712U JPS557555Y2 (en)	1976-03-02	1976-03-02

Publications (2)

Publication Number	Publication Date
JPS52117548U JPS52117548U (en)	1977-09-06
JPS557555Y2 true JPS557555Y2 (en)	1980-02-20

Family

ID=28484583

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1976024712U Expired JPS557555Y2 (en)	1976-03-02	1976-03-02

Country Status (1)

Country	Link
JP (1)	JPS557555Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP5803488B2 (en) *	2011-09-22	2015-11-04	凸版印刷株式会社	Film forming method and film forming apparatus on flexible substrate by atomic layer deposition method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4960046U (en) *	1972-09-08	1974-05-27
JPS4974674A (en) *	1972-11-10	1974-07-18
US3878085A (en) *	1973-07-05	1975-04-15	Sloan Technology Corp	Cathode sputtering apparatus
US4166018A (en) *	1974-01-31	1979-08-28	Airco, Inc.	Sputtering process and apparatus

1976
- 1976-03-02 JP JP1976024712U patent/JPS557555Y2/ja not_active Expired

Also Published As

Publication number	Publication date
JPS52117548U (en)	1977-09-06

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