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JPS5643718A - Semiconductor wafer shifting device - Google Patents

Semiconductor wafer shifting device

Info

Publication number
JPS5643718A
JPS5643718A JP11953379A JP11953379A JPS5643718A JP S5643718 A JPS5643718 A JP S5643718A JP 11953379 A JP11953379 A JP 11953379A JP 11953379 A JP11953379 A JP 11953379A JP S5643718 A JPS5643718 A JP S5643718A
Authority
JP
Japan
Prior art keywords
wafer
holder
stick
push
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11953379A
Other languages
Japanese (ja)
Inventor
Masatoshi Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP11953379A priority Critical patent/JPS5643718A/en
Publication of JPS5643718A publication Critical patent/JPS5643718A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)

Abstract

PURPOSE:To perform an automatic shifting of a wafer without making manual workings by a method wherein a wafer placed in a container is held by a holder and the wafer is inserted in another wafer container by shifting the holder. CONSTITUTION:The first push-up stick 12 provided at the lower section of the first wafer container 1 is moved up, a wafer 2 is pushed up to a point between holding rods 4a and 4b, and the wafer 2 is held between the holding rods 4a and 4b in such way that they are rotated with axis 5a and 5b as the central point when a rod 7a is lowered. Then the push-up stick is lowered, the holder is shifted to rightward, it stops above the second wafer container 3 and the second push-up stick 13 is moved up. After that, when the rod 7a is raised, the wafer is released from the holder and when the second push-up stick is lowered, the wafer is held in the second holder. Thus, as the shifting of a wafer is performed automatically without having handworkings, the adhesion of dust and dirt is reduced and the breaking due to collision can be eliminated.
JP11953379A 1979-09-17 1979-09-17 Semiconductor wafer shifting device Pending JPS5643718A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11953379A JPS5643718A (en) 1979-09-17 1979-09-17 Semiconductor wafer shifting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11953379A JPS5643718A (en) 1979-09-17 1979-09-17 Semiconductor wafer shifting device

Publications (1)

Publication Number Publication Date
JPS5643718A true JPS5643718A (en) 1981-04-22

Family

ID=14763631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11953379A Pending JPS5643718A (en) 1979-09-17 1979-09-17 Semiconductor wafer shifting device

Country Status (1)

Country Link
JP (1) JPS5643718A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59134834A (en) * 1983-01-21 1984-08-02 Mitsubishi Electric Corp Washing device for semiconductor wafer
JPS60252542A (en) * 1984-05-28 1985-12-13 Nippon Telegr & Teleph Corp <Ntt> Cassette changing device
JPS615541A (en) * 1984-06-20 1986-01-11 Hitachi Electronics Eng Co Ltd Shifting device
JPS61500340A (en) * 1983-05-23 1986-02-27 エイ・エス・キュ−・ボ−ツ・インコ−ポレ−テッド Wafer transfer equipment
JPH04120235U (en) * 1991-04-12 1992-10-27 大日本スクリーン製造株式会社 Wafer transfer device for surface treatment equipment
US6769948B1 (en) 1999-01-08 2004-08-03 Nec Lcd Technologies, Ltd. Method of fabricating a display panel and method of relocating a display panel
US6961639B2 (en) 2002-01-29 2005-11-01 Recif, Societe Anonyme Apparatus and process for identification of characters inscribed on a semiconductor wafer containing an orientation mark
US7108476B2 (en) 1998-05-05 2006-09-19 Recif Technologies Sas Method and device for changing a semiconductor wafer position

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59134834A (en) * 1983-01-21 1984-08-02 Mitsubishi Electric Corp Washing device for semiconductor wafer
JPS61500340A (en) * 1983-05-23 1986-02-27 エイ・エス・キュ−・ボ−ツ・インコ−ポレ−テッド Wafer transfer equipment
JPS60252542A (en) * 1984-05-28 1985-12-13 Nippon Telegr & Teleph Corp <Ntt> Cassette changing device
JPS615541A (en) * 1984-06-20 1986-01-11 Hitachi Electronics Eng Co Ltd Shifting device
JPH04120235U (en) * 1991-04-12 1992-10-27 大日本スクリーン製造株式会社 Wafer transfer device for surface treatment equipment
US7108476B2 (en) 1998-05-05 2006-09-19 Recif Technologies Sas Method and device for changing a semiconductor wafer position
US6769948B1 (en) 1999-01-08 2004-08-03 Nec Lcd Technologies, Ltd. Method of fabricating a display panel and method of relocating a display panel
US6961639B2 (en) 2002-01-29 2005-11-01 Recif, Societe Anonyme Apparatus and process for identification of characters inscribed on a semiconductor wafer containing an orientation mark

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