[go: up one dir, main page]

JPS5661733A - Field emission cathode and its manufacture - Google Patents

Field emission cathode and its manufacture

Info

Publication number
JPS5661733A
JPS5661733A JP13641079A JP13641079A JPS5661733A JP S5661733 A JPS5661733 A JP S5661733A JP 13641079 A JP13641079 A JP 13641079A JP 13641079 A JP13641079 A JP 13641079A JP S5661733 A JPS5661733 A JP S5661733A
Authority
JP
Japan
Prior art keywords
field emission
ambient
oxygen gas
emitted
depth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13641079A
Other languages
Japanese (ja)
Other versions
JPS6223418B2 (en
Inventor
Shigeyuki Hosoki
Yoshihiko Yamamoto
Hideo Todokoro
Susumu Kawase
Yasuharu Hirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13641079A priority Critical patent/JPS5661733A/en
Priority to US06/198,176 priority patent/US4379250A/en
Priority to DE19803039283 priority patent/DE3039283A1/en
Priority to NL8005772A priority patent/NL8005772A/en
Publication of JPS5661733A publication Critical patent/JPS5661733A/en
Publication of JPS6223418B2 publication Critical patent/JPS6223418B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes

Landscapes

  • Cold Cathode And The Manufacture (AREA)

Abstract

PURPOSE:To take out large probe current stably by adsorbing a particular metal through oxygen within the depth of mono atomic layer on the surface of area where electrons are emitted from a needle cathode. CONSTITUTION:In a vacuum container ambient where the field emission can be performed, at least one metal selected from Cr, Al, Ce, Mg, Ti, Si is deposited on the surface of area where at least the electron is emitted from a needle electrode 1 with the depth approximately same with that of mono atomic layer. Thereafter proper amount of oxygen gas is provided into the vacuum ambient to adsorb the oxygen gas with the depth approximately same with that of monomolecular layer on the metallic monomolecular layer, then the oxygen gas is evacuated to return to the ambient where the field emission can be performed. Thereafter the needle cathode 1 is heated for 10-60sec under the temperature range of 1,300-1,500 deg.C.
JP13641079A 1979-10-19 1979-10-24 Field emission cathode and its manufacture Granted JPS5661733A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP13641079A JPS5661733A (en) 1979-10-24 1979-10-24 Field emission cathode and its manufacture
US06/198,176 US4379250A (en) 1979-10-19 1980-10-17 Field emission cathode and method of fabricating the same
DE19803039283 DE3039283A1 (en) 1979-10-19 1980-10-17 FIELD EMISSION CATHODE AND METHOD FOR THEIR PRODUCTION
NL8005772A NL8005772A (en) 1979-10-19 1980-10-20 FIELD EMISSION CATHOD AND METHOD FOR MANUFACTURING SUCH A CATHOD

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13641079A JPS5661733A (en) 1979-10-24 1979-10-24 Field emission cathode and its manufacture

Publications (2)

Publication Number Publication Date
JPS5661733A true JPS5661733A (en) 1981-05-27
JPS6223418B2 JPS6223418B2 (en) 1987-05-22

Family

ID=15174504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13641079A Granted JPS5661733A (en) 1979-10-19 1979-10-24 Field emission cathode and its manufacture

Country Status (1)

Country Link
JP (1) JPS5661733A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5971232A (en) * 1982-10-14 1984-04-21 Natl Inst For Res In Inorg Mater Manufacturing method of surface oxidized carbide field emitter
JPS6079636A (en) * 1983-10-07 1985-05-07 Hitachi Ltd Thermal field emission cathode and its application equipment
JPS6086728A (en) * 1983-10-19 1985-05-16 Natl Inst For Res In Inorg Mater field emitter
JPH01186740A (en) * 1988-01-18 1989-07-26 Canon Inc Electron-emitting device and its manufacturing method
US5938495A (en) * 1996-05-10 1999-08-17 Nec Corporation Method of manufacturing a field emission cold cathode capable of stably producing a high emission current
JP2006134638A (en) * 2004-11-04 2006-05-25 Univ Waseda Electron beam source for electron optics
EP1950786A3 (en) * 2007-01-24 2009-03-25 FEI Company Cold field emitter
JP2009238443A (en) * 2008-03-26 2009-10-15 Univ Waseda Electron source, and manufacturing method of electron source
WO2011142054A1 (en) * 2010-05-10 2011-11-17 電気化学工業株式会社 Electron source
US8736170B1 (en) 2011-02-22 2014-05-27 Fei Company Stable cold field emission electron source

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01247877A (en) * 1988-03-30 1989-10-03 Aisin Seiki Co Ltd Electromagnetic pressure control valve

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5971232A (en) * 1982-10-14 1984-04-21 Natl Inst For Res In Inorg Mater Manufacturing method of surface oxidized carbide field emitter
JPS6079636A (en) * 1983-10-07 1985-05-07 Hitachi Ltd Thermal field emission cathode and its application equipment
JPS6086728A (en) * 1983-10-19 1985-05-16 Natl Inst For Res In Inorg Mater field emitter
JPH01186740A (en) * 1988-01-18 1989-07-26 Canon Inc Electron-emitting device and its manufacturing method
US5938495A (en) * 1996-05-10 1999-08-17 Nec Corporation Method of manufacturing a field emission cold cathode capable of stably producing a high emission current
JP2006134638A (en) * 2004-11-04 2006-05-25 Univ Waseda Electron beam source for electron optics
EP1950786A3 (en) * 2007-01-24 2009-03-25 FEI Company Cold field emitter
US7888654B2 (en) 2007-01-24 2011-02-15 Fei Company Cold field emitter
US8217565B2 (en) 2007-01-24 2012-07-10 Fei Company Cold field emitter
JP2009238443A (en) * 2008-03-26 2009-10-15 Univ Waseda Electron source, and manufacturing method of electron source
WO2011142054A1 (en) * 2010-05-10 2011-11-17 電気化学工業株式会社 Electron source
JP2011238459A (en) * 2010-05-10 2011-11-24 Denki Kagaku Kogyo Kk Electron source
US8593048B2 (en) 2010-05-10 2013-11-26 Denki Kagaku Kogyo Kabushiki Kaisha Electron source having a tungsten single crystal electrode
US8736170B1 (en) 2011-02-22 2014-05-27 Fei Company Stable cold field emission electron source

Also Published As

Publication number Publication date
JPS6223418B2 (en) 1987-05-22

Similar Documents

Publication Publication Date Title
JPS5661733A (en) Field emission cathode and its manufacture
GB2058843B (en) Method for the manufacture of goldcoloured coatings
JPS5710329A (en) Sputter vapor depositing device
JPS5566819A (en) Oxide cathode for electron tube
JPS641220A (en) Polarizable electrode and manufacture thereof
JPS579051A (en) Cathode ray tube
GB586000A (en) Improvements in or relating to secondary electron emitting electrodes, and to electron discharge devices embodying such electrodes
GB503211A (en) Improvements in or relating to secondary electron multipliers
US2171227A (en) Secondary electron emitter and method of making it
CN113471034B (en) Preparation method of magnesium oxide secondary emitter
JPS5661734A (en) Field emission cathode and its manufacture
JPS5659422A (en) Field emissive cathode
JPS57128437A (en) Manufacture of lanthanum-boride thermionic emission electrode
GB862892A (en) A high-vacuum ion-getter pump
JPS5633475A (en) Manufacture of exterior ornamental parts
Satoh et al. LEED and XPS studies of the ZrOW (100) surface
JPS5674836A (en) Production of magnetic recording medium
JPS6125775B2 (en)
JPS5717535A (en) Electron gun constituent
JPH02281531A (en) Diode and its manufacture
JPS55110776A (en) Vapor depositing apparatus
JPS5813006B2 (en) Sankabutsuhandoutaihakumakuno Seizouhouhou
GB824902A (en) Improvements in cathodes and emissive material therefor
JPS5662959A (en) Blackening method for surface of metal
JPH01275746A (en) Method for forming metallic carbide layer onto diamond