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JPS57115735A - Piezoelectric relay - Google Patents

Piezoelectric relay

Info

Publication number
JPS57115735A
JPS57115735A JP226681A JP226681A JPS57115735A JP S57115735 A JPS57115735 A JP S57115735A JP 226681 A JP226681 A JP 226681A JP 226681 A JP226681 A JP 226681A JP S57115735 A JPS57115735 A JP S57115735A
Authority
JP
Japan
Prior art keywords
piezoelectric relay
piezoelectric
relay
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP226681A
Other languages
Japanese (ja)
Inventor
Katsuhiro Kinoshita
Mitsutaka Katou
Seisuke Hinota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Tateisi Electronics Co
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tateisi Electronics Co, Omron Tateisi Electronics Co filed Critical Tateisi Electronics Co
Priority to JP226681A priority Critical patent/JPS57115735A/en
Publication of JPS57115735A publication Critical patent/JPS57115735A/en
Pending legal-status Critical Current

Links

JP226681A 1981-01-09 1981-01-09 Piezoelectric relay Pending JPS57115735A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP226681A JPS57115735A (en) 1981-01-09 1981-01-09 Piezoelectric relay

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP226681A JPS57115735A (en) 1981-01-09 1981-01-09 Piezoelectric relay

Publications (1)

Publication Number Publication Date
JPS57115735A true JPS57115735A (en) 1982-07-19

Family

ID=11524563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP226681A Pending JPS57115735A (en) 1981-01-09 1981-01-09 Piezoelectric relay

Country Status (1)

Country Link
JP (1) JPS57115735A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1788603A1 (en) * 2005-11-21 2007-05-23 Samsung Electronics Co., Ltd. RF MEMS switch and method for fabricating the same
US8018308B2 (en) 2006-02-20 2011-09-13 Samsung Electronics Co., Ltd. Downward type MEMS switch and method for fabricating the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1788603A1 (en) * 2005-11-21 2007-05-23 Samsung Electronics Co., Ltd. RF MEMS switch and method for fabricating the same
US7728703B2 (en) 2005-11-21 2010-06-01 Samsung Electronics Co., Ltd. RF MEMS switch and method for fabricating the same
US8018308B2 (en) 2006-02-20 2011-09-13 Samsung Electronics Co., Ltd. Downward type MEMS switch and method for fabricating the same

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