JPS58166430A - Finger touch coordinate detection panel - Google Patents

Abstract

PURPOSE:To improve detection sensitivity by employing a double-layer structure of chrominum and copper for Y electrodes and Y electrodes succeeding to detection electrodes and decreasing resistance and the capacity of each intersection of those electrodes. CONSTITUTION:A finger touch type coordinate panel has the 1st (Y) electrodes 2 of metallic wires of the double-layer structure made of chromium (Cr) and copper (Cu) on a transparent glass substrate 1 at specific pitch. On the Y electrodes 2, the 2nd (X) electrodes 4 of metallic wires of the double-layer structure of Cr and Cu are formed crossing the Y electrodes at right angles togther with an interposed dielectric film 3 made of a low-dielectric borosilicate glass film in a prescribed pattern. In areas sectioned by the Y electrodes 2 and X electrodes 4, detection electrodes 5 and 6 made of indium tin oxide layer are formed separately in a prescribed pattern and then connected to the Y electrodes and X electrodes 4, respectively.

Description

DETAILED DESCRIPTION OF THE INVENTION Technical Field of the Invention The present invention relates to a finger-touch type coordinate detection spring.

■) Background of the technology Recently, as a means for inputting multi-item information, a transparent coordinate board is installed in front of the display surface of a cathode ray tube. A device for checking and inputting information has been developed.

(0) Prior Art and Problems Conventionally, such a device is made of a layer of indium tin oxide (ITO), which is made by adding fil (Sn) to transparent indium oxide (InO3), on a transparent glass substrate, with lines at a predetermined pitch. A second electrode is formed perpendicularly on the first electrode of the shape and the first electrode through the dielectric material 11 of a predetermined pattern, and within the area defined by the first and second electrodes. A transparent detection 1 made of an ITo layer is connected to each of the first and second electrodes, and is divided into two. ．By operating the spring μ having a transparent detection electrode within the area defined by the second electrode at a certain frequency, and touching or not touching this transparent detection electrode with a finger, the human body's The coordinate position is detected by detecting fluctuations in the output voltage of the transparent detection electrode using ground capacitance.

By the way, the first. The ITo layer serving as the second electrode has poor conductivity and high resistance.

Therefore, if such a high-resistance electrode material is used, the output voltage (VoFF
) and the detection electrode are in contact with your finger (VoN)
The difference is not too large. In other words, this has the disadvantage of being a finger-touch type detection panel with poor detection sensitivity.

In addition, a detection electrode is formed using the transparent conductive layer of the above-mentioned work To, and in order to designate the two-dimensional coordinates of the detection electrode, a first Y[pole and a second X electrode are formed and connected to the detection electrode. It becomes necessary to intersect the X electrode and the X[pole, and it is necessary to interpose an insulating film between the X electrode and the X electrode at this intersection. At this time, in order to improve the detection sensitivity mentioned above, it is desirable to reduce the area of the intervening insulating film as much as possible to reduce the capacitance between the electrodes. However, in doing so, the above-mentioned transparent defect forming the X electrode-X electrode occurs.

((1) Purpose of the Invention The present invention eliminates the above-mentioned drawbacks and improves the detection [Yv
t pole,... ) Structure of the Invention In order to achieve the above object, the finger-touch coordinate detection spring of the present invention includes a first metal linear electrode having a predetermined pitch on a transparent insulating substrate, and the first electrode. A second metal wire electrode is provided at a predetermined pitch orthogonal to the first electrode via a dielectric film, and the first electrode is arranged at a predetermined pitch. The present invention is characterized in that a transparent detection electrode divided into two parts is formed in a region defined by the second electrode so as to be connected to each of the first and second electrodes.

(f) Embodiment of the invention □ Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.
Ru.

Figure Ijg1 is a plan view of the finger-touch type coordinate panel of the present invention, and Figure 2 is a cross-sectional view taken along the line AA' in Figure 1 for explaining the manufacturing method 1 of the panel.

As shown in FIG. 1, the finger-touch coordinate panel of the present invention is made of chromium ((:r) and copper (:r) on a transparent glass substrate l.
First (Y) electrodes 2 in the form of two-layered metal wires made of Cu) are formed at a predetermined pitch, and the X electrodes 2F:.

A second (x) electrode 4 in the form of a metal wire having a two-layer structure of Ct and Cu is perpendicular to the X electrode through a dielectric 1118 made of a low dielectric borosilicate gaff film having a predetermined pattern. It is formed.

And this X electrode 2 and X%F! In the area defined by 714, a detection electrode 5. made of an ITo layer with a predetermined pattern is provided.
These detection voltages FIA 5.6 are connected to the X electrode 2 and the X electrode 4, respectively.

According to a panel having such a structure, the metal wire-shaped Y[pole and X electrode serve as auxiliary electrodes for the detection electrode 6.6, and the specific resistance of the detection electrode is lowered, thereby improving detection sensitivity.

In addition, since metal is used for the X electrode and the X electrode low V pile, even if they are formed thin like a line, their resistance will not increase much, and therefore the Y[pole and X1! The area of the dielectric film formed at the point where the poles intersect can be reduced, thus reducing the capacitance between the electrodes and increasing the detection sensitivity.

To describe the manufacturing method of such a finger-touch type coordinate detection panel, first, as shown in FIG. After forming a photoresist film into a predetermined pattern using a photolithography method, etching the photoresist film using the patterned photoresist film as a mask (dcr, Cu, Cr@f etching to a predetermined pin NaOH). Using dissolved red blood salt, also C
The u layer is sulfuric acid (H2SO, ) and hydrogen peroxide (Hang)
Etch with a mixture of In the figure, it is assumed that a large number of the X electrodes 2 are arranged parallel to the paper surface. Next, a low dielectric borosilicate glass film with a thickness of 1 to 5 μm is coated on the substrate.
After forming the photoresist film to a certain thickness by vapor deposition, the photoresist film is formed on the substrate in a predetermined pattern using a photolithography method after forming a photoresist FTM cloth. Then, using the patterned photoresist film as a mask, the lower borosilicate glass film was coated with hydrofluoric acid (HF).
It is formed by patterning at the intersection of the pole and X[m, which will be formed later on. In the figure, 8Fi is a dielectric film formed in this manner.

Next, after forming an Or and Cu layer in a two-layer structure by vapor deposition, a photoresist film was further applied, and then the photoresist film was formed into a predetermined pattern using a photolithography method and hindlimb buttering was performed.Resist PII! Using the upper Cu@F as a mask, the upper layer was first etched with red blood deposits dissolved in NaoH, and then the lower Or layer was etched with a mixture of SO4 and H,02 (7). At this time, the top layer of O of the lower Ylj pole
Since the r layer is also etched and removed, the Y electrode also has a two-layer structure of Cu and Or.

At this time, Photoresist 81! ! The work of aligning the mask to expose the coating machine to a predetermined pattern is the dielectric material mentioned above!
It is preferable that the pattern of the convex dielectric film 3 formed by forming II8 is about 1 km.

Furthermore, LToll is deposited to a thickness of 0.1 to 0.5 μm.
After forming a photoresist film on it in a predetermined pattern by photolithography, the patterned resist film was etched with hydrochloric acid (HCl) as shown in Figure 1. , 6 are formed in a predetermined pattern.

Next, as shown in FIG. 2, a protective layer of alumina (A120a) or borosilicate glass as a surface protection line for the transparent electrode hood is formed by vapor deposition to a thickness of about 1 to 5 μm. As described above, according to the finger-touch type coordinate detection panel of the present invention, the resistance of the detection electrode is reduced, and the area of the dielectric film at the intersection of the X[pole and Y[pole] can be reduced, so that A highly sensitive detection spring with a small capacity can be obtained. Since the auxiliary electrodes of the X electrode and the Y electrode can be made small in size, there is an advantage that the information items to be displayed on the screen and input can be easily seen.

[Brief explanation of the drawing]

FIG. 1 is a plan view of the finger-touch type coordinate detection panel of the present invention;
FIG. 2 is a first diagram for explaining the manufacturing method of the detection panel.
It is a sectional view taken along the line AA' in the figure. In the figure, l is a glass substrate, 2 is a Y electrode, and 3 is a 114v
t body membrane, sq.
u indicates a protective film. Figure 1

Claims (1)

[Claims] A first metal linear electrode having a predetermined pitch is placed on a transparent insulating substrate, and the first metal wire electrode is placed on the first electrode via a dielectric M.
and a second metal wire electrode at a predetermined pitch perpendicular to the first electrode. The first electrode is located within the area defined by the second electrode. A finger-touch type coordinate detection panel characterized in that a transparent detection electrode divided into two is formed so as to be connected to each of the second electrodes.