JPS59226805A - Inclination angle detector - Google Patents

Abstract

PURPOSE:To take an accurate measurement of inclination angle over a wide range by irradiating an objective surface with laser light which is parallel luminous flux and photodetecting its reflected light by an image sensor, and detecting the inclination angle as variation in the apparent width of the parallel luminous flux. CONSTITUTION:The laser light from a laser light source 1 is collimated by a collimator 8 into parallel luminous flux to illuminate a surface 3 to be measured, and its irregularly reflected light is photodetected by the image sensor 10. In this case, the spot width on the sensor 10 narrows down when the objective surface 3 slants to left and widens when slanting to right to the contrary. This variation in the spot width on the sensor 10 is processed by a processing circuit 6 and converted into a signal corresponding to the inclination angle, which is displayed on a display circuit 7. Consequently, the variation in inclination angle is detected as variation in the apparent width of the parallel luminous flux, so the inclination angle is measured accurately over a wide range without reference to whether the inclination is large or small.

Description

Detailed Description of the Invention [Technical Field] The present invention relates to an inclination method in which a change in the inclination angle of a surface to be measured is measured as a change in the apparent width of a parallel light beam irradiated by a projection system using an image sensor. This invention relates to an angle measuring device.

[Background technology]

Conventionally, the inclination angle of the surface to be measured is measured using the following method, as shown in Figure 1.
The laser beam t'' emitted from the laser beam #, tll is applied to the measuring object 111j t31 by the mirror (2) at an incident angle θ.
The specular reflection collecting all-party position detection element (4) receives the light, the output signal is converted to voltage by the current/voltage conversion circuit (6), and the processing circuit (6) converts the light to the measurement target surface (3). ) is calculated and displayed on the display circuit (7). Here, the optical system is arranged so that the specularly reflected light enters the center of the optical position detection element (4) as shown in Figure 2 (b) when the measurement target surface (3) maintains the reference surface. do. Therefore, when the surface to be measured (3) is tilted to the left as shown in FIG. 2(a), the spot on the surface of the optical position detection element (4) moves to the left and tilts to the right. If so, the second
Move to the right as shown in figure (c). By detecting the position of this spot, fl, the inclination angle of the surface to be measured (3) can be measured. That is, the relationship between the position X of the spot on the surface of the optical position detection element (4) and the inclination angle α is as shown in FIG. 5, and the relationship with the inclination angle α is as shown in FIG.
The tilt angle α can be measured.

However, this method has the disadvantage that when the tilt angle is large, the specularly reflected light is deviated from the surface of the optical position detection element (4), resulting in a narrow measurement range of the tilt angle. was.

[Purpose of the invention]

An object of the present invention is to make it possible to measure the inclination angle of a surface to be measured at a positive f4 over a wide measurement range, regardless of the magnitude of the inclination angle of the surface to be measured.

[Disclosure of the invention]

In the example shown in FIG. 4, the laser light emitted from the laser light source il+ is transmitted through a collimator (8).
Converted into parallel light flux by ? '1. , is irradiated onto the surface to be measured (3) via the mirror f21i. The diffused reflection component is received by the image sensor (101) via the light receiving lens (9). (11) is an image sensor drive circuit.The output signal of the image sensor (101@) is sent to the processing circuit (6).
Is it converted to a signal corresponding to the tilt angle? 'L1 display times (7
). Figures 5(a) to (c) show the surface to be measured (3
) and the width of the spot on the surface of the image t (10). Figure 5(b) shows the relationship between the inclination angle of the image t (10) and the width of the spot on the surface (3). Surface to be measured (3
) tilts to the left, the spot on the image surface (101) becomes narrower as shown in FIG. Diagram (C)
Like this, the width of the seat spreads. A processing circuit (6) detects an increase or decrease in the spot on the surface of this image C.C. sensor (1o). As shown in Fig. 0, the processing circuit (6) is composed of a cosiparator 02), an AND circuit 03), a calacitor 04), and a correction circuit 051, and the image e:
/t (The output of the lot is input to the positive input terminal of the cossiparator α, while a threshold voltage is set to the negative input terminal.) The output of the cossiparator α is input to the AND circuit state. , 7t (10) are input to the input terminal of the AND circuit 03). The output of the AND circuit (13) is input to the karashita (1), and its output is input to the correction circuit (15).

Operation Now, the image t + o + a output is shown in Figure 7 (a)
When the horse mackerel is in the shape of
As shown in Figure (b), the signal 1H1 is output only when the output voltage of the image ℃shisa (+01) exceeds the threshold voltage.

By inputting the output of this cosiparator 02) and the image sensor drive pulse as shown in FIG. 7(C) to the 1iAND circuit (13), the AND circuit 03) as shown in FIG.
) will produce output like this. This output is pulsed by a calacitor (14) and converted into a signal corresponding to the tilt angle by a correction circuit θ5), thereby making it possible to measure the tilt angle of the surface to be measured (5).

〔Effect of the invention〕

As described above, the present invention includes: a collimator that converts laser light emitted from a laser light source into a parallel beam; an image sensor that irradiates the parallel light onto the measurement target surface of the Togane and receives its diffusely reflected light component; It is equipped with a processing circuit that converts the output into a signal corresponding to the inclination angle of the surface to be measured, and the inclination angle of the surface to be measured is detected as a change in the apparent width of the parallel light beam. This has the effect that the inclination angle of the surface to be measured can be accurately measured over a wide measurement range, regardless of the magnitude of the inclination angle.

[Brief explanation of the drawing]

Figure 1 is a configuration diagram of a conventional inclination angle measuring device, Figure 2 (a)
- (C) is an explanatory diagram of the same operation as above. Figure 5 is a characteristic diagram of the same as above.
FIG. 4 is a block diagram of an embodiment of the present invention, and FIG. 5(a) to (
e) is a power diagram of the same operation theory as above, FIG. 6 is a block circuit diagram of the same processing circuit as above, and FIG. 7 is a diagram of main part signal waveforms as above. Il+...Laser light source% (3)...Measurement target surface, (
6)...Processing circuit, (81-...Collimator, (
101...Image t, 7. Agent Patent Attorney Ishi 1) Choshichi

Claims (1)

[Claims] (1) A collimator that converts the laser beam emitted from the laser light source into a parallel beam, an image sensor that irradiates the parallel beam onto the surface to be measured and receives its diffusely reflected light component, and converts the output of the image sensor into the slope of the surface to be measured. 1. An inclination angle measuring device, comprising a processing circuit for converting into a signal corresponding to an angle, and detecting an inclination angle of a surface to be measured as a change in the apparent width of a parallel beam of light.