JPS5968986A - Voiceless discharge system gas laser device - Google Patents

Abstract

PURPOSE:To enable to clearly perform division between a discharge part and a non-discharge part by a simple electrode structure by coating an electrode with a dielectric whose region for electrode discharge has a larger specific dielectric constant and region for no discharge has a smaller specific dielectric constant. CONSTITUTION:In a constitution wherein a high voltage is impressed between a ground side electrode and a high voltage side electrode, thus producing the discharge 15 between both the electrodes, at least one of both electrode tubes 8 is coated with two kinds of dielectric whose region for discharge has a larger specific dielectric constant and region for no discharge has a smaller specific dielectric constant. As a result, the discharge part 16 and the non-discharge part 17 are formed on the electrode tube 8. Thereby, the division between the discharge part 16 and the non-discharge part 17 can be clearly performed in a dielectric electrode 1, and accordingly a voiceless discharge which makes the uniform discharge 15 can be obtained in the discharge part 16.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a silent discharge type gas laser device, and more particularly to polarization (1° polarization) in a silent discharge type carbon dioxide laser oscillator.

A conventional silent discharge type carbon dioxide laser generator shown in FIG. 1 is known. In Figure 1,
1 is a pair of dielectrics whose surfaces are coated with a dielectric casing such as glass, 2 is a support for the dielectric electrode 1, 3 is a radiation space, and 4 is a laser containing carbon dioxide gas (C02). This is a blower that supplies mixed gas to effectively excavate light beams. 5.
6 constitutes a resonator mirror for oscillating and amplifying the laser beam, 5 is a total reflection mirror, and 6 is a partial reflection mirror, and a part of the laser beam amplified from this partial reflection mirror 6 is transmitted to the first It is taken out to the outside in the direction shown by the arrow in the figure. 7 is each of the above (・t
This is a housing that houses J7 adults.

2(a) and 2(b) are a front view and a partially cutaway side view showing the structure of a dielectric electrode used in the silent emission type carbon dioxide laser excavator shown in FIG. 1. a).

In (b), 8 is an electrode tube made of a metal tube, 9 is a dielectric material such as glass covered on the surface of the electrode tube 8, and the dielectric electrode 1 is constituted by the electrode tube 8 and the dielectric material 9 such as glass. The dielectric electrode 1 is made up of a pair facing each other.

Reference numeral 10 denotes an insulator made of a dielectric material that forms an electrically insulating boundary of the discharge space 3, and at the same time constitutes one support of the dielectric electrode 1. It is formed by densely depositing so that more than half of it is buried. 11
is the cooling water that cools the dielectric pole 1 from the inside, 12゜1
3 is an inlet and an outlet of the cooling water 11, and 14 is a high-voltage picture center terminal, and discharge 15 in the discharge space 3 is performed on the surfaces of a pair of dielectric electrodes 1 bounded by an insulator 1o. In laser excavation, it is essential that the discharge 15 in the discharge space 3 be uniform, so that the discharge 15 in the discharge space 3 is formed only by opposing surfaces of the dielectric electrodes 1 that form a pair. This is an essential condition, and in this respect, the discharge limiting effect of the insulator 101ζ plays a large role.

Since the dielectric electrode 1 used in the conventional silent discharge type carbon dioxide laser oscillator is constructed as described above, the dielectric material 9, such as glass, which has been seeded on the surface of the electrode tube 8 is coated over the entire circumference. Therefore, all 1rri have the same permittivity, and therefore, the insulator 10 forming the discharge limiter covers the entire surface of the dielectric electrode 1 other than the area where the discharge 15 occurs. It has to be protected reliably, which has the disadvantage of making the structure complicated and making it large in size. In addition, conventionally this type of insulation
The relative dielectric constant ε of 0 was relatively small at approximately ε8≦88 degrees, but recently, as the discharge density per unit area has been increased, the relative dielectric constant ε, which is about ε≧10, has been relatively small. However, the structure and selection of the insulator 10 as a discharge limiting material became extremely difficult.

The present invention has been made in order to eliminate the drawbacks of the conventional ones as described above, and it applies a high voltage between the ground side electrode and the high voltage side electrode, and the discharge space between the two electrodes. a power source that generates a discharge; and a co-photographer that is located at both ends of the discharge space and includes a total reflection mirror and a partial reflection mirror on the laser output side that generates laser emission when the discharge occurs; At least one of the two electrodes has a structure in which a region where discharge is caused is coated with a dielectric material having a high relative permittivity, and a region where no discharge is caused is covered with a dielectric material having a low relative permittivity. Mark 11 to distinguish between non-discharge areas.
It is an object of the present invention to provide a silent discharge type or laser device which can perform the same operations as described above and which can further improve the laser output efficiency.

Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

Figures 3(a) and (bl) are a front view and a partially cutaway side view showing the structure of a dielectric electrode used in a silent emission type gas laser device, which is an embodiment of the present invention; (a).

(The same parts as bl are indicated using the same symbols,
A detailed explanation thereof will be omitted. Figure 3 (a), (b
), reference numeral 16 denotes a 'radiator' made of a dielectric material with a high relative permittivity attached to the area on the surface of the electrode tube 8 where discharge is caused.
[(The L section 17 is a non-discharge section made of a dielectric material with a low relative permittivity that covers the area on the surface of the electrode tube 8 where no discharge occurs.

FIGS. 4(a) and 4(b) are an enlarged cross-sectional view of the dielectric electrode shown in FIG. 3(b) and a characteristic diagram of the operating mode of the dielectric electrode. Dielectric material shown in 411 (al)...: Discharge in Ili; Surface of part 16 and part of surface of part 17 111: Electrostatic capacitance between electrodes C1 dielectric electrode 1 Let the radius of the body electrode 1 be rll, and the arc angle from the center of the city pole 1 be θ, then 1ft'?'rl (The surface arc distance X of the body electrode 1 is expressed as x=rθ, (b) shows the above-mentioned space 11L volume 1c and the surface arc distance of the dielectric electrode 1 x =
The relationship with rθ is clearly shown. According to this, the fourth
As is clear from the characteristic diagram shown in Figure (b), the dielectric electrode 1
In this case, the discharge part 16 and the non-discharge part 17 are clearly distinguished, and therefore the insulator 10 constituting the support structure of the dielectric electrode 1 as shown in FIGS.
Silent discharge that forms uniform discharge 15 in discharge section 16 can be obtained without requiring. And especially, the discharge part 1
The larger the dielectric constant of the dielectric material No. 6, the more significant the effect will be. As a result, the abnormal discharge in the non-discharge part 17, which forms the discharge limiting part, which was easy to occur in the past, is suppressed, and the amplification factor at the time of laser firing is increased, and the same silent discharge '
11! Since a larger laser output can be obtained relative to the force,
Laser output efficiency can be further improved.

6. In the above embodiment, as a dielectric body coated on at least one of the ground side 1M, pole and high voltage side electrode, the region where discharge is caused has a large relative permittivity, and the region where no discharge is caused has a relative permittivity. We used two types of dielectric materials with a small dielectric constant, but the dielectric materials consist of three or more types of relative permittivity values, and the region with a larger relative permittivity is made to radiate, and the region with a smaller relative permittivity is made to expand. It is also possible to use a configuration in which no discharge is caused, and the sleep material used has a large dielectric constant of 10 or more, and a small dielectric constant of 9 or less. It has been experimentally demonstrated that good results can be obtained by doing so.

Furthermore, the dielectric material with a low relative permittivity that is coated on the area where no discharge is caused may be coated on the surface of a dielectric material with a high relative permittivity, and the dielectric electrode 1 shown in FIG. 3(b) above may be used. The electrode tube 8 constituting the electrode tube 8 is shown as an example of a circular cylindrical electrode tube, but in addition to this, a square tube or an elliptical tube may also be used as a pole to achieve the same effect as in the above embodiment. play.

As described above, when the silent discharge type according to the present invention is used in a laser device, the region where discharge is caused by at least one of the ground side electrode and the high voltage side electrode has a large relative permittivity, and the radiation Since the area where the discharge is prevented is covered with a dielectric material having a low relative dielectric constant, the discharge area and the non-discharge area can be clearly distinguished from each other with an extremely flexible electrode structure. , the laser output efficiency can be significantly improved compared to the conventional one, and the electrode fabrication can be made at a very low level.
This has the excellent effect of providing an economical silent discharge type gas laser device.

[Brief explanation of drawings]

Figure 711 is a schematic configuration diagram showing a conventional silent discharge type carbon dioxide laser excavator, and Figures 2 (al and bl) are diagrams showing the silent discharge type carbon dioxide excavator shown in Figure 1.
l'i: Front view and partially cutaway plane view showing the structure of the body electrode, FIG. A front view and a partially cutaway 11th view showing the structure of the , Figure 4 (
al, (bl is an enlarged 1-1 side view of the atomized body shown in Figures 4 to 3 (1)) and a characteristic diagram of the operating mode of the abduction body and the H body force.1.・・・・・・Dielectric cabinet 4d 2・・・・・・
...Support, 3...--Discharge space, 4...
・・・Blower, 5... Total reflection line, 6...
・・・・・・Partial reflector, 7・・・・・・Housing, 8
......Electrode tube, 9...Glass etc. 14 bodies, 10.19...Insulator, 11...・Cooling water, 12... Inlet, 13... Outlet, 14...
...Supply/ton terminal, 15...Discharge, 16.
......Discharge part made of a dielectric material with a high relative permittivity, 17......Non-numerical number 1 made of a dielectric material with a poor relative permittivity. In addition, in the figures, the same reference numerals indicate the same or equivalent parts. Agent Makoto Kuzuno - Figure 1 Figure 2 Figure 3!21 (a) (b) Figure 4 (b) (a)

Claims (1)

[Scope of Claims] (11) A ground side electrode and a high voltage side electrode, a power supply that applies a high voltage between the two electrodes to cause a discharge in the discharge space between the two electrodes, and both ends of the discharge space. a resonator consisting of a total reflection mirror that generates laser excavation when the discharge occurs and a partial reflection mirror on the laser output side; A silent discharge type gas laser device characterized in that the region where no discharge is caused is coated with a dielectric material having a low relative dielectric constant.(2) The dielectric material has a relative dielectric constant value. The silent radio system according to claim 1, characterized in that the region of higher relative permittivity is made to discharge and the region of smaller relative permittivity is not caused to discharge. The ton type is a laser device. (3) The dielectric material has a large dielectric constant of 10
The silent discharge type gas laser device according to claim 1, wherein the relative dielectric constant is a small value of 9 or less.