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JPS523536A - Electrolytic grinding liquid - Google Patents

Electrolytic grinding liquid

Info

Publication number
JPS523536A
JPS523536A JP7979375A JP7979375A JPS523536A JP S523536 A JPS523536 A JP S523536A JP 7979375 A JP7979375 A JP 7979375A JP 7979375 A JP7979375 A JP 7979375A JP S523536 A JPS523536 A JP S523536A
Authority
JP
Japan
Prior art keywords
grinding liquid
electrolytic grinding
electrolytic
liquid
grinding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7979375A
Other languages
Japanese (ja)
Other versions
JPS5646939B2 (en
Inventor
Kiyoshi Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inoue Japax Research Inc
Original Assignee
Inoue Japax Research Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inoue Japax Research Inc filed Critical Inoue Japax Research Inc
Priority to JP7979375A priority Critical patent/JPS523536A/en
Publication of JPS523536A publication Critical patent/JPS523536A/en
Publication of JPS5646939B2 publication Critical patent/JPS5646939B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
JP7979375A 1975-06-26 1975-06-26 Electrolytic grinding liquid Granted JPS523536A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7979375A JPS523536A (en) 1975-06-26 1975-06-26 Electrolytic grinding liquid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7979375A JPS523536A (en) 1975-06-26 1975-06-26 Electrolytic grinding liquid

Publications (2)

Publication Number Publication Date
JPS523536A true JPS523536A (en) 1977-01-12
JPS5646939B2 JPS5646939B2 (en) 1981-11-06

Family

ID=13700085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7979375A Granted JPS523536A (en) 1975-06-26 1975-06-26 Electrolytic grinding liquid

Country Status (1)

Country Link
JP (1) JPS523536A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005508074A (en) * 2001-03-14 2005-03-24 アプライド　マテリアルズ　インコーポレイテッド Substrate planarization using electrolytic chemical mechanical polishing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005508074A (en) * 2001-03-14 2005-03-24 アプライド　マテリアルズ　インコーポレイテッド Substrate planarization using electrolytic chemical mechanical polishing

Also Published As

Publication number Publication date
JPS5646939B2 (en) 1981-11-06

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