[go: up one dir, main page]

JPS5250688A - Checking device for defect of oriented pattern - Google Patents

Checking device for defect of oriented pattern

Info

Publication number
JPS5250688A
JPS5250688A JP12702675A JP12702675A JPS5250688A JP S5250688 A JPS5250688 A JP S5250688A JP 12702675 A JP12702675 A JP 12702675A JP 12702675 A JP12702675 A JP 12702675A JP S5250688 A JPS5250688 A JP S5250688A
Authority
JP
Japan
Prior art keywords
defect
checking device
oriented pattern
oriented
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12702675A
Other languages
Japanese (ja)
Other versions
JPS5419748B2 (en
Inventor
Masakata Minami
Hidekazu Sekizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12702675A priority Critical patent/JPS5250688A/en
Publication of JPS5250688A publication Critical patent/JPS5250688A/en
Publication of JPS5419748B2 publication Critical patent/JPS5419748B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To display normal and defective oriented pattern such as IC mask by different colour on the monitor scope.
COPYRIGHT: (C)1977,JPO&Japio
JP12702675A 1975-10-22 1975-10-22 Checking device for defect of oriented pattern Granted JPS5250688A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12702675A JPS5250688A (en) 1975-10-22 1975-10-22 Checking device for defect of oriented pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12702675A JPS5250688A (en) 1975-10-22 1975-10-22 Checking device for defect of oriented pattern

Publications (2)

Publication Number Publication Date
JPS5250688A true JPS5250688A (en) 1977-04-22
JPS5419748B2 JPS5419748B2 (en) 1979-07-17

Family

ID=14949831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12702675A Granted JPS5250688A (en) 1975-10-22 1975-10-22 Checking device for defect of oriented pattern

Country Status (1)

Country Link
JP (1) JPS5250688A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114154A (en) * 1988-10-24 1990-04-26 Hitachi Ltd Defect or foreign matter inspection method and device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114154A (en) * 1988-10-24 1990-04-26 Hitachi Ltd Defect or foreign matter inspection method and device

Also Published As

Publication number Publication date
JPS5419748B2 (en) 1979-07-17

Similar Documents

Publication Publication Date Title
JPS5276088A (en) System for inspecting defects of pattern having directivity
JPS51120180A (en) Pattern printing device
JPS5218175A (en) Circuit pattern formation method and its device
JPS5225575A (en) Inspection method of the state of object
JPS5250639A (en) Character pattern generating device
JPS5250688A (en) Checking device for defect of oriented pattern
JPS51140875A (en) An apparatus for arresting foreign matter in liquid
JPS5218170A (en) Position detection method
JPS51126071A (en) Mask pattern printing method and the equipment
JPS52132777A (en) Ic pin number display method
JPS5222479A (en) Method of inspecting masks
JPS5431282A (en) Pattern formation method
JPS52155922A (en) Pattern verifying unit for letter and graph
JPS5247343A (en) Test equipment for program control apparatus
JPS5232676A (en) Pattern check system
JPS51121229A (en) A console for a micro-computer
JPS51129283A (en) Examination method of glass bottles
JPS51131002A (en) Car inspection and examination device
JPS5222473A (en) Panel measuring device
JPS5413272A (en) Measuring unit for semiconductor
JPS5232271A (en) Inspection method and equipment for photomask pattern
JPS5338266A (en) Screening method of semiconductors and device for the same
JPS52122084A (en) Inspection system for semiconductor substrates
JPS5348678A (en) Integrated circuit package
JPS51113665A (en) Method and apparatus of the selection of goods for testing