[go: up one dir, main page]

JPS539566A - Shape measurement method of electron beams - Google Patents

Shape measurement method of electron beams

Info

Publication number
JPS539566A
JPS539566A JP8432776A JP8432776A JPS539566A JP S539566 A JPS539566 A JP S539566A JP 8432776 A JP8432776 A JP 8432776A JP 8432776 A JP8432776 A JP 8432776A JP S539566 A JPS539566 A JP S539566A
Authority
JP
Japan
Prior art keywords
measurement method
electron beams
shape measurement
electron beam
faraday cage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8432776A
Other languages
Japanese (ja)
Inventor
Seigo Igaki
Masahiro Okabe
Noriaki Nakayama
Yasuo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8432776A priority Critical patent/JPS539566A/en
Publication of JPS539566A publication Critical patent/JPS539566A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Radiation (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Abstract

PURPOSE: Two dimensional shape of an electron beam is measured at high accuracy by masking a part of the inlet of a Faraday cage with a knife edge, letting an electron beam scan in the direction perpendicular to the edge and measuring the output of the Faraday cage.
COPYRIGHT: (C)1978,JPO&Japio
JP8432776A 1976-07-14 1976-07-14 Shape measurement method of electron beams Pending JPS539566A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8432776A JPS539566A (en) 1976-07-14 1976-07-14 Shape measurement method of electron beams

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8432776A JPS539566A (en) 1976-07-14 1976-07-14 Shape measurement method of electron beams

Publications (1)

Publication Number Publication Date
JPS539566A true JPS539566A (en) 1978-01-28

Family

ID=13827409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8432776A Pending JPS539566A (en) 1976-07-14 1976-07-14 Shape measurement method of electron beams

Country Status (1)

Country Link
JP (1) JPS539566A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02263191A (en) * 1989-04-03 1990-10-25 Sumitomo Heavy Ind Ltd Beam advance direction measuring instrument
US5382895A (en) * 1992-12-28 1995-01-17 Regents Of The University Of California System for tomographic determination of the power distribution in electron beams
US5483036A (en) * 1993-10-28 1996-01-09 Sandia Corporation Method of automatic measurement and focus of an electron beam and apparatus therefor
WO2000072048A1 (en) * 1999-05-26 2000-11-30 The Regents Of The University Of California Faraday cup for determination of power density distribution of electron beams

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02263191A (en) * 1989-04-03 1990-10-25 Sumitomo Heavy Ind Ltd Beam advance direction measuring instrument
US5382895A (en) * 1992-12-28 1995-01-17 Regents Of The University Of California System for tomographic determination of the power distribution in electron beams
US5483036A (en) * 1993-10-28 1996-01-09 Sandia Corporation Method of automatic measurement and focus of an electron beam and apparatus therefor
WO2000072048A1 (en) * 1999-05-26 2000-11-30 The Regents Of The University Of California Faraday cup for determination of power density distribution of electron beams
US6300755B1 (en) 1999-05-26 2001-10-09 Regents Of The University Of California Enhanced modified faraday cup for determination of power density distribution of electron beams

Similar Documents

Publication Publication Date Title
JPS539566A (en) Shape measurement method of electron beams
JPS51137443A (en) Method for measuring dimensions of three-dimensional structures
JPS522452A (en) Method and apparatus for measuring plate thickness
JPS5366756A (en) Measuring method and apparatus of three-dimentional curved surface
JPS5376055A (en) Method of position detection
JPS5578451A (en) Inspecting method of contamination in electron-optical system
JPS53115494A (en) Fuel particle distribution measurement of nuclear fuel compact
JPS5770212A (en) Measuring device for profile of heap of charge in blast furnace
JPS5358769A (en) Ion injector
JPS54107254A (en) Scanning-type electron microscope
JPS5228872A (en) Method for measuring the size of thin plane
JPS5211975A (en) Supersonic flaw detector
JPS533262A (en) Radiation thickness meter
JPS52123646A (en) Scanning type length measuring apparatus
JPS5328380A (en) Function inspecting method of semiconductor elements
JPS5240163A (en) Measurement method
JPS52100873A (en) Measurement of damage distribution by ion implantation
JPS52100280A (en) White x-ray diffractor
JPS5430865A (en) Surface shape measuring method
JPS53126960A (en) Radiation thickness gauge
JPS5524365A (en) Pitch measuring device for rectangular hole of shadow mask for color braun tube
JPS52104865A (en) X-ray analysis apparatus in electronic microscope or like
JPS5630629A (en) Inspection jig for optical type face plate fault detector
JPS542168A (en) Detecting method of electromagnetic field characteristic
JPS52125266A (en) Cathode constant length welder unit in cathode ray tube