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JPS5395884A - Evaporating method and apparatus - Google Patents

Evaporating method and apparatus

Info

Publication number
JPS5395884A
JPS5395884A JP1042277A JP1042277A JPS5395884A JP S5395884 A JPS5395884 A JP S5395884A JP 1042277 A JP1042277 A JP 1042277A JP 1042277 A JP1042277 A JP 1042277A JP S5395884 A JPS5395884 A JP S5395884A
Authority
JP
Japan
Prior art keywords
evaporation
coated
evaporating
coating
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1042277A
Other languages
Japanese (ja)
Inventor
Sumio Maekawa
Keizaburo Kuramasu
Masaji Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1042277A priority Critical patent/JPS5395884A/en
Publication of JPS5395884A publication Critical patent/JPS5395884A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To produce evaporated coating of constant thickness and constant-composition in the formation of coating through evaporation of plural component elements from a evaporating vessel by use of two monitors which observed deposition on material to be coated by evaporation and the evaporation of evaporating source respectively to control deposition on the material to be coated.
JP1042277A 1977-02-01 1977-02-01 Evaporating method and apparatus Pending JPS5395884A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1042277A JPS5395884A (en) 1977-02-01 1977-02-01 Evaporating method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1042277A JPS5395884A (en) 1977-02-01 1977-02-01 Evaporating method and apparatus

Publications (1)

Publication Number Publication Date
JPS5395884A true JPS5395884A (en) 1978-08-22

Family

ID=11749703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1042277A Pending JPS5395884A (en) 1977-02-01 1977-02-01 Evaporating method and apparatus

Country Status (1)

Country Link
JP (1) JPS5395884A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7222516B2 (en) 2003-05-29 2007-05-29 Ngk Spark Plug Co., Ltd. Gas sensor, gas sensor cap, and gas sensor unit
US7234341B2 (en) 2003-07-17 2007-06-26 Ngk Spark Plug Co., Ltd. Gas sensor and method of manufacturing the gas sensor
US7287413B2 (en) 2004-11-15 2007-10-30 Ngk Spark Plug Co., Ltd. Gas sensor unit and sensor cap

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7222516B2 (en) 2003-05-29 2007-05-29 Ngk Spark Plug Co., Ltd. Gas sensor, gas sensor cap, and gas sensor unit
US7234341B2 (en) 2003-07-17 2007-06-26 Ngk Spark Plug Co., Ltd. Gas sensor and method of manufacturing the gas sensor
US7398673B2 (en) 2003-07-17 2008-07-15 Ngk Spark Plug Co., Ltd. Gas sensor and method of manufacturing the gas sensor
US7506534B2 (en) 2003-07-17 2009-03-24 Ngk Spark Plug Co., Ltd. Gas sensor and method of manufacturing the gas sensor
US7287413B2 (en) 2004-11-15 2007-10-30 Ngk Spark Plug Co., Ltd. Gas sensor unit and sensor cap
US7318339B2 (en) 2004-11-15 2008-01-15 Ngk Spark Plug Co., Ltd. Gas sensor unit and sensor cap

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