JPS647567A - Mos transistor - Google Patents
Mos transistorInfo
- Publication number
- JPS647567A JPS647567A JP62162061A JP16206187A JPS647567A JP S647567 A JPS647567 A JP S647567A JP 62162061 A JP62162061 A JP 62162061A JP 16206187 A JP16206187 A JP 16206187A JP S647567 A JPS647567 A JP S647567A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- impurity
- diffusion layer
- doped
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Thin Film Transistor (AREA)
Abstract
PURPOSE:To enable the drive of a transistor of this design by high voltage by a method wherein a channel stopper layer doped with impurity of polarity opposite to that of impurity doped to a diffusion layer is formed adjacently to the diffusion layer on the part where a channel is to be formed. CONSTITUTION:The region, which is lightly doped with impurity of polarity opposite to that of high concentrated impurity doped into a diffusion layer 5, or A channel stopper layer 8 is formed on the part where a channel of a poly-Si layer 2 is built and the diffusion layer 5 is adjacent. Therefore, depletion layer becomes short in length W and it is hard to happen that current suddenly flows (breakdown state) even if high voltage is applied. By these processes, breakdown strength between a drain and a source is improved, and thus a transistor can be driven by high voltage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62162061A JPS647567A (en) | 1987-06-29 | 1987-06-29 | Mos transistor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62162061A JPS647567A (en) | 1987-06-29 | 1987-06-29 | Mos transistor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS647567A true JPS647567A (en) | 1989-01-11 |
Family
ID=15747347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62162061A Pending JPS647567A (en) | 1987-06-29 | 1987-06-29 | Mos transistor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS647567A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04273445A (en) * | 1991-02-28 | 1992-09-29 | G T C:Kk | Method for manufacturing thin film semiconductor devices |
| JPH0521800A (en) * | 1991-07-11 | 1993-01-29 | Victor Co Of Japan Ltd | Soimosfet |
| JPH07111333A (en) * | 1993-08-20 | 1995-04-25 | Casio Comput Co Ltd | Thin film transistor, method of manufacturing the same, and input or output device using the same |
| US6049092A (en) * | 1993-09-20 | 2000-04-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
| KR100262099B1 (en) * | 1991-03-08 | 2000-07-15 | 가나이 쓰도무 | Semiconductor memory device |
| US6259120B1 (en) | 1993-10-01 | 2001-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for fabricating the same |
| US6489632B1 (en) * | 1993-01-18 | 2002-12-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a gate oxide film |
| US6777763B1 (en) | 1993-10-01 | 2004-08-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for fabricating the same |
-
1987
- 1987-06-29 JP JP62162061A patent/JPS647567A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04273445A (en) * | 1991-02-28 | 1992-09-29 | G T C:Kk | Method for manufacturing thin film semiconductor devices |
| KR100262099B1 (en) * | 1991-03-08 | 2000-07-15 | 가나이 쓰도무 | Semiconductor memory device |
| JPH0521800A (en) * | 1991-07-11 | 1993-01-29 | Victor Co Of Japan Ltd | Soimosfet |
| US6489632B1 (en) * | 1993-01-18 | 2002-12-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a gate oxide film |
| US6995432B2 (en) | 1993-01-18 | 2006-02-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a gate oxide film with some NTFTS with LDD regions and no PTFTS with LDD regions |
| JPH07111333A (en) * | 1993-08-20 | 1995-04-25 | Casio Comput Co Ltd | Thin film transistor, method of manufacturing the same, and input or output device using the same |
| US6049092A (en) * | 1993-09-20 | 2000-04-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
| US6867431B2 (en) | 1993-09-20 | 2005-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
| US6259120B1 (en) | 1993-10-01 | 2001-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for fabricating the same |
| US6777763B1 (en) | 1993-10-01 | 2004-08-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for fabricating the same |
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