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JPS6475930A - Force/moment detector - Google Patents

Force/moment detector

Info

Publication number
JPS6475930A
JPS6475930A JP62234589A JP23458987A JPS6475930A JP S6475930 A JPS6475930 A JP S6475930A JP 62234589 A JP62234589 A JP 62234589A JP 23458987 A JP23458987 A JP 23458987A JP S6475930 A JPS6475930 A JP S6475930A
Authority
JP
Japan
Prior art keywords
detector
axis
strain yielding
strain
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62234589A
Other languages
Japanese (ja)
Other versions
JP2607096B2 (en
Inventor
Kazuhiro Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEKUSHII KENKYUSHO KK
NEXY KENKYUSHO KK
Original Assignee
NEKUSHII KENKYUSHO KK
NEXY KENKYUSHO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEKUSHII KENKYUSHO KK, NEXY KENKYUSHO KK filed Critical NEKUSHII KENKYUSHO KK
Priority to JP62234589A priority Critical patent/JP2607096B2/en
Priority to DE3854347T priority patent/DE3854347D1/en
Priority to EP88908323A priority patent/EP0333872B1/en
Priority to PCT/JP1988/000930 priority patent/WO1989002587A1/en
Priority to US07/362,399 priority patent/US5092645A/en
Publication of JPS6475930A publication Critical patent/JPS6475930A/en
Priority to US07/765,588 priority patent/US5263375A/en
Application granted granted Critical
Publication of JP2607096B2 publication Critical patent/JP2607096B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

PURPOSE:To use a detector both as a force sensor and a moment sensor, by attaching an arm body, to the detector, in which a transducer for transducing mechanical deformation into an electric signal and strain yielding bodies for performing strain yielding action are provided. CONSTITUTION:A title detector is composed of a semiconductor substrate 10, a first strain yielding body 20 and a second strain yielding body 30. A transducer comprising the total of 12 resistor elements is formed on the substrate 10. Forces in the directions of an X axis, a Y axis and a Z axis are detected. A flexible part 32 and an arm part 33 are formed in the strain yielding body 30 and bonded to the tip of an acting part 23 of the strain yielding body 20. Moments, which act around the X axis, the Y axis and Z axis at an acting point, are detected with the device comprising the substrate 10 and the strain yielding body 20. The detector is made to function as a force detector by mounting the second strain yielding body 30. Therefore, this detector can be applied as the force sensor and the moment sensor by using the same transducer.
JP62234589A 1987-09-18 1987-09-18 Force / moment detector Expired - Lifetime JP2607096B2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP62234589A JP2607096B2 (en) 1987-09-18 1987-09-18 Force / moment detector
DE3854347T DE3854347D1 (en) 1987-09-18 1988-09-14 Grippers for robots.
EP88908323A EP0333872B1 (en) 1987-09-18 1988-09-14 Gripper for a robot
PCT/JP1988/000930 WO1989002587A1 (en) 1987-09-18 1988-09-14 Force detection apparatus using resistance element and its application
US07/362,399 US5092645A (en) 1987-09-18 1988-09-14 Robotic gripper having strain sensors formed on a semiconductor substrate
US07/765,588 US5263375A (en) 1987-09-18 1991-09-25 Contact detector using resistance elements and its application

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62234589A JP2607096B2 (en) 1987-09-18 1987-09-18 Force / moment detector

Publications (2)

Publication Number Publication Date
JPS6475930A true JPS6475930A (en) 1989-03-22
JP2607096B2 JP2607096B2 (en) 1997-05-07

Family

ID=16973391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62234589A Expired - Lifetime JP2607096B2 (en) 1987-09-18 1987-09-18 Force / moment detector

Country Status (1)

Country Link
JP (1) JP2607096B2 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0382928A (en) * 1989-08-25 1991-04-08 Nitta Ind Corp Force/moment detector
JPH0566534U (en) * 1992-02-20 1993-09-03 株式会社エンプラス Triaxial semiconductor force sensor
EP0730210A1 (en) * 1995-03-03 1996-09-04 Faro Technologies Inc. Three dimensional coordinate measuring apparatus
EP1739401A1 (en) 2005-06-28 2007-01-03 HONDA MOTOR CO., Ltd. Force sensor
JP2008051625A (en) * 2006-08-24 2008-03-06 Honda Motor Co Ltd Force sensor
JP2008190865A (en) * 2007-01-31 2008-08-21 Honda Motor Co Ltd Force sensor
JP2008292509A (en) * 2008-09-11 2008-12-04 Honda Motor Co Ltd Force sensor
JP2008292510A (en) * 2008-09-11 2008-12-04 Honda Motor Co Ltd Force sensor
CN113340487A (en) * 2021-07-12 2021-09-03 西南交通大学 Earth pressure cell

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102135458A (en) * 2010-12-30 2011-07-27 浙江大学 Strain beam type soil pressure sensor
CN103335755A (en) * 2013-06-14 2013-10-02 浙江大学 Strain axis type soil pressure sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61223626A (en) * 1985-03-29 1986-10-04 Nec Corp Sensor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61223626A (en) * 1985-03-29 1986-10-04 Nec Corp Sensor

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0382928A (en) * 1989-08-25 1991-04-08 Nitta Ind Corp Force/moment detector
JPH0566534U (en) * 1992-02-20 1993-09-03 株式会社エンプラス Triaxial semiconductor force sensor
US5611147A (en) * 1993-02-23 1997-03-18 Faro Technologies, Inc. Three dimensional coordinate measuring apparatus
EP0730210A1 (en) * 1995-03-03 1996-09-04 Faro Technologies Inc. Three dimensional coordinate measuring apparatus
EP2278292A1 (en) 2005-06-28 2011-01-26 Honda Motor Co., Ltd. Force sensor
US7594445B2 (en) 2005-06-28 2009-09-29 Honda Motor Co., Ltd. Force sensor
US7757571B2 (en) 2005-06-28 2010-07-20 Honda Motor Co., Ltd. Force Sensor
EP2278291A1 (en) 2005-06-28 2011-01-26 Honda Motor Co., Ltd. Force sensor
EP1739401A1 (en) 2005-06-28 2007-01-03 HONDA MOTOR CO., Ltd. Force sensor
US7938028B2 (en) 2005-06-28 2011-05-10 Honda Motor Co., Ltd. Force sensor
JP2008051625A (en) * 2006-08-24 2008-03-06 Honda Motor Co Ltd Force sensor
US8113065B2 (en) 2006-08-24 2012-02-14 Honda Motor Co., Ltd. Force sensor
JP2008190865A (en) * 2007-01-31 2008-08-21 Honda Motor Co Ltd Force sensor
JP2008292509A (en) * 2008-09-11 2008-12-04 Honda Motor Co Ltd Force sensor
JP2008292510A (en) * 2008-09-11 2008-12-04 Honda Motor Co Ltd Force sensor
CN113340487A (en) * 2021-07-12 2021-09-03 西南交通大学 Earth pressure cell

Also Published As

Publication number Publication date
JP2607096B2 (en) 1997-05-07

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