JPS60116775A - Treatment device for vapor deposition - Google Patents

Abstract

PURPOSE:To increase the number of materials for vapor deposition to be housed in each one batch by disposing alternately plural basic planetary gears and additive planetary gears attached with said materials at equal intervals on the circumference of a stationary gear and rotating synchronously the adjacent materials in opposite directions. CONSTITUTION:Plural basic planetary gears 11a-11f are freely rotatably supported at equal intervals on the circumference of a stationary gear 3 installed with a vapor deposition source 4 in the central part. Additive planetary gears 12a-12f are disposed at the intermediate of the gears 11a-11f and are rotated in opposite directions in synchronization with the gears 11a-11f by two-stage counter gears 13a-13f, 14a-14f. Discs 9a-9l are respectively attached to the gears 11a-11f and the gears 12a-12f. The pitch circle and number of teeth of the respective gears are respectively determined in such a way that the adjacent discs do not collide against each other. The treating capacity for the discs 9a- 9l is thus increased.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a vapor deposition processing apparatus, and particularly to a vapor deposition processing apparatus for forming a reflective film by vacuum vapor depositing metal on the signal surface of an optical information recording medium (hereinafter simply referred to as a disk). It is related to.

A conventional device of this type is shown in FIG. In the figure, a base 1 and a housing 2 define a vacuum deposition chamber with a metal vapor atmosphere, and a fixed gear 3 is disposed in the center of the base 1.

At the center of the fixed gear 3, a vapor deposition source 4 for metal to be vapor-deposited is arranged. As shown in FIG. It is rotatable around the circumference of the shaft, and on this drive member 7 and around the fixed gear 3, there is a circumference 1,
For example, 81 planetary gears 8a to 8h are rotatably supported at equal intervals.

These planetary gears 8a to 8h have the same diameter and mesh with the fixed gear 3, and revolve around the fixed gear 3 while rotating on its own axis as the drive member 7 rotates.

For example, the pitch circle of fixed gear 3 is 53'Qm, and the number of teeth is 3.
1"5. The module is 2, the pitch circle of the planetary gears 8α to 8h is 210IIB, and the number of teeth is 105. The module is 2.
Then, the revolution diameter is 84 Q wb, revolution/rotation =
It becomes 173. Eight disks 9a to 9h are supported on the planetary gears 8α to 8h via holders (not shown).

As the drive member 7 rotates, the eight disks 9α to 9h revolve around the fixed gear 3 while rotating together with the planetary gears 8LL to 8h. The angular ranges X and X in which the front and back surfaces of each disk substantially face the evaporation source 4 are the effective evaporation ranges, and the other angular ranges Y.

In conventional devices configured in this way, in order to prevent adjacent disks from colliding with each other when they rotate, the distance between the axes of adjacent planetary gears must be set to be larger than the rotational diameter of the disks. As a result, there is a limit to the number of disks that can be accommodated in 1' batches for a given revolution diameter. For example, if the revolution diameter is 84011, 8 disks/batch with 30crn disk, 20I:In
The limit was 12 discs/batch.

However, physically, it is possible to make the distance between the axes less than or equal to the rotational diameter of the disks by appropriately setting the phase when installing adjacent disks, but in this case, it is not practical for the following reasons. is very undesirable. That is, in the case of the rotation-revolution method, an electrode 6 for applying a potential to the evaporation source 4, a support 5 for holding this electrode 6, etc. are required.
In the angular ranges Y and Y that are shielded by these, effective deposition is not performed, and when the phase is shifted as described above, within the effective deposition ranges X and X, the disk whose entire surface should face the deposition source 4 is in the adjacent This is because it will be blocked by the other disk.

The present invention has been made in order to eliminate the disadvantages of the conventional apparatus as described above, and to provide a vapor deposition processing apparatus that improves production efficiency by increasing the number of disks accommodated per batch. With the goal.

In the vapor deposition processing apparatus according to the present invention, a plurality of basic planetary gears meshed with the fixed gear are provided on a drive member that is freely rotatable with respect to the fixed gear, and are arranged at equal intervals so as to be rotatable by 1,000 rotations.
In this method, a plurality of additional planetary gears are rotatably installed at equal intervals on the same earthen floor adjacent to the basic planetary gears, and the basic planetary gears and the additional planetary gears are synchronized with each other as the drive member rotates and are opposed to each other. It is configured to rotate in the direction.

Embodiments of the present invention will be described below based on the drawings. FIG. 3 is a plan view showing an embodiment of the present invention. Third
In the figure, a drive member 7 that is rotatable with respect to the fixed gear 3
For example, six basic planetary gears 11α to 11f are rotatably supported at equal intervals on a predetermined circumference centered on the fixed gear 3 (see FIG. 1), and these basic planetary gears l
id to 11f have the same diameter and mesh with the fixed gear 3, and revolve around the circumference of the fixed gear 3 while rotating on its own axis as the drive member 7 rotates. Further, on the predetermined circumference of the drive member 7, six additional planet gears 12α to 12/12/12/12/12/12/12/12/12/12/12/12/12/12/12/2008 are arranged on the predetermined circumference of the drive member 7 so that the adjacent basic planetary gears 11a to 11f are located at equal intervals on the same dirt floor. is rotatably supported. Between these additional planetary gears 12a to 12f and the fixed gear 3, coaxial two-stage intermediate gears 13α to 13α to
13f, 14a to 14/ are interposed between the intermediate gears 13tz-13/, 14a-147i and the additional planetary gears 12α to 12f to the basic planetary gears 11α to 11/ as the driving member 7 rotates. It constitutes a mechanical communication means for rotating the two in opposite directions while synchronizing the two. Basic planetary gears 11a to 11f and additional planetary gears 12a to 12f
Twelve disks 9α are placed on the top via a holder (not shown).
~'l are supported, and these discs, which match each other 49 times, revolve around the circumference of the fixed gear 3 in synchronization with each other and rotate in opposite directions as the driving member 70 rotates.

Here, in order for the 49 matched disks to rotate in opposite directions while being synchronized with each other, the following conditions must be satisfied between each gear. That is, the basic planetary gear txa-tt, 7
'(The pitch circle of 搏 is φh, and the number of teeth is Tb.

The pitch circle of intermediate gears 13α to 13f (Pitch circle of Q is φ., number of teeth is 1゛o, intermediate gears 14a to 14fO)) is φd.

The number of teeth is Td, and the pitch circle of the additional planetary gears (G) 12a to 12/ is φ5. When the number of teeth is T, φh=φ, 1φd1φ.

φh〉 2φ0 'r5 / Tc = Te / Td To give an example of specific numerical values, the pitch circle of the fixed gear 3 (5) is φ9. If the number of teeth is Ta, fixed gear A: φ, = 630 m I T, = 313 planetary gear B: φ, 6 = 210 m Tb = 105 intermediate gear C:
φo = 848 T, = 42' Intermediate gear D: φd - 36 〥 ``J'd = 18 Planetary gear E: φ, = 90ss
Since T, = 45, the module M of each gear is both 2.

The rotation/revolution ratio at this time is revolution/rotation - 1/3. Note that it is not limited to this value.

In addition, in order to prevent the 49 matching disks (or holders from colliding with each other when they rotate), the revolution radius R
9 Angle A between the axes of adjacent planetary gears.

It is important to appropriately set the rotational diameter 2L of the disk (or holder) and the phase difference B of the matching disk (or holder). Regarding this, Figures 4 and 5 (Q,
This will be explained with reference to (b). Now, the coordinates of the force end of the disk (or holder) I in the rotation plane are (Xz, Y
l), the coordinates of the center are (X2.Ya), and the coordinates of the external force end of the disk (or holder) (X,).

Y,), and the coordinates of the center are (Xl, Y4). Also, a straight line passing through the point (Xl, Yt) and the point (X2, Ya) and the point (X,...).

Let the coordinates of the intersection of Y, ) and the straight line passing through the point (Xl, Y4) be (LL, υn). Then, when disk I and disk ■ are both rotated by an angle P (00-1800), (u , υ) and (X2, Ya), L is (
When the distance between u,,v) and (Xl, Y4) is <L, it is determined that the disks i and n collide, and in other cases, they do not collide.

Xl-■(→-L -aaBP ・-・・-(1)Y□
= L -ain P -Mountain (2)X, = 1 too...
Group・(3) Y2= O・・・・・・(4) X8= R-006A+L -cts (-P+B)
-...15) Y8= R-5inA+L -ain (
-P1B) ・” ...(6)X, = R, -oo
s A...(7) ¥4-■Mo-18inA...
Group・(8) The equation of the straight line passing through point (Xl, Yl) and point (X2.Ya) is ~(X2-Xt) (y-Yt) = (Ya-Y
l) (z -
Y, ) = (Y4-Yll) (z-X8-a1 intersection coordinates (u,,v) are u = (Xit-Xt) (Xl-Xll) (Y
, -Yl)+(Ya-Yl) (Xl-x8)・Xyo-
(y, y3) (heart-X,)・X8/ (Ya Yt
)(Xl XB) (Y4 Ya) (X2 XI)I
' = (Ya-Yl) (Y4-Ya) (XB-X
I) + (Xl-XB) (Y21-Y, )・Ya-(X
, -X□) (y, -y8)・Y□/ (X2 Xl,
)(Y4-￥11)-(Xl-XB) (Y, -Y engineering)-A-X engineering+Y1=-A -X8+Y3Y, -Ya-
A (X knee
When , -Ya-A(X□-XB)\0, there is no collision 1 (, Substituting A, L, B, P changes from 0 to 180
When 1 door is 1 door - yy, A: Compare the size of door 7 votes A and L.

According to the experimental results of the inventor of the present application, in the case of a 30 crn disk, R = 420 sa, A = 30° + 2L = 319 sa
.

It has been found that by setting 13=120°, adjacent disks do not collide with each other. Also, 20
For Confucian discs, R = 420 blinds, A = 22°.

It has been found that by setting 2L=215ms and B=112°, adjacent disks do not collide with each other.

In addition, in the above numerical example, an experimental result has been obtained that the disk facing the vapor deposition source 4 can be effectively vaporized over the entire surface. I explained the case where 20tr
In the case of a vapor deposition processing apparatus for n disks, the combination of each gear is, for example, fixed gear A: φ, = 67218 Ta = 336 planetary gear B: φ7 = 168 m Tb = 84 intermediate gear C:
φ, = 565m Tc = 28 intermediate gear D: φd =
28m Td = 14 planetary gear E:φ, = 84 words T
, = 42, and by setting the module M of each gear to 2, the revolution/revolution ratio becomes 1/4.

Note that it is not limited to the above numerical examples.

FIG. 6 is a partial plan view showing another embodiment of the present invention. In this embodiment, an intermediate gear 15 is provided sympathically and integrally with the basic planetary gear 11. constitutes a mechanical communication means that meshes with the additional planetary gear 12 and rotates the additional planetary gear 12 in synchronization with the basic planetary gear 11 in the opposite direction. The intermediate gear 15 has approximately the same pitch circle and number of teeth as the basic planetary gear 11, and has exactly the same pitch circle and number of teeth as the additional planetary gear 12. With this configuration, it is similar to the above embodiment. The effect of this can be obtained.

As explained above, according to the present invention, a plurality of basic planetary gears meshed with the fixed gear are rotatably provided at equal intervals on a drive member that is rotatable with respect to the fixed gear, and
A plurality of additional planetary gears are installed rotatably at equal intervals on the same dirt floor adjacent to these basic planetary gears, and the basic planetary gears and the additional planetary gears are synchronized with each other as the drive member rotates, and are moved in opposite directions. Since it is configured to rotate around 300 degrees, the throughput of the disk can be increased even if the orbital diameter is the same as before.
This will improve productivity. Specifically, if the revolution diameter is, for example, 840111, the conventional 8 disks/batch for a 30I0Yn disk can be increased to 12 disks/batch, an increase of 50 inches, and the conventional 12 disks/batch for a 20cm disk. The results show that the number can be increased by 33.3% to 16 sheets/batch.

[Brief explanation of drawings]

Fig. 1 is a perspective view including a partial cross section showing a conventional device, Fig. 2 is a plan view of the main part of Fig. 1, Fig. 3 is a plan view showing an embodiment of the present invention, Figs. Figure 5 (α). (b) is a diagram showing the operating principle of FIG. 3, and FIG. 6 is a plan view showing another embodiment of the present invention. Explanation of symbols of main parts 4... Vapor deposition source 9, 9α to 9β... Disk 11.
11tL~11f...Basic planetary gear 12.12α~1
2f... Additional planetary gears 13α to 13f, 14α to 14
f, 15...Intermediate Gear Applicant Person: Pioneer Co., Ltd. Agent Patent Attorney Motohiko Fujimura (1 other person) Izumi 2 Zuo 312I

Claims (3)

[Claims] (1) A fixed gear disposed in a housing, a vapor deposition source for the metal to be vapor-deposited disposed at the center of the fixed gear, and a drive rotatably provided around the central axis of the fixed gear. a plurality of basic planetary gears having the same diameter, which are rotatably arranged on the driving member at equal intervals on a predetermined circle around the fixed gear and meshed with the fixed gear; a plurality of additional planetary gears having the same diameter rotatably arranged on the predetermined circumference on the drive member so as to be located at equal intervals between adjacent planetary gears; and the additional planetary gears and the fixed planetary gears. mechanical communication means that mechanically communicates with the gear and causes the additional planetary gear to rotate in the opposite direction while being synchronized with the basic planetary gear as the driving member rotates; and the basic and additional planetary gears. A vapor deposition processing apparatus comprising a vapor deposition target object holder provided above. (2) The vapor deposition processing apparatus according to claim 1, wherein the mechanical communication means is an intermediate gear interposed between the additional planetary gear and the fixed gear and meshed with both. . (3) The vapor deposition process according to claim 1, wherein the mechanical communication means is an intermediate gear provided coaxially and integrally with the basic planetary gear and meshed with the additional planetary gear. Device.