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JPS62168328A - Mass spectrometer ion source - Google Patents

Mass spectrometer ion source

Info

Publication number
JPS62168328A
JPS62168328A JP60291378A JP29137885A JPS62168328A JP S62168328 A JPS62168328 A JP S62168328A JP 60291378 A JP60291378 A JP 60291378A JP 29137885 A JP29137885 A JP 29137885A JP S62168328 A JPS62168328 A JP S62168328A
Authority
JP
Japan
Prior art keywords
magnetic field
measurement
electromagnets
field strength
switched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60291378A
Other languages
Japanese (ja)
Inventor
Katsuaki Shirato
白土 勝章
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP60291378A priority Critical patent/JPS62168328A/en
Publication of JPS62168328A publication Critical patent/JPS62168328A/en
Pending legal-status Critical Current

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  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To heighten the sensitivity of measurement, by providing a magnetic field intensity controlling means, and switching the magnetic field intensity of source magnets corresponding to the mass number of an ion to be measured. CONSTITUTION:Source magnets 12 are electromagnets which are made by winding coils 13 around iron cores, and are disposed oppositely sandwiching an ionization chamber 1 outside a filament 7 and a trap 11. A power supply 14 which flows electric currents for the coil 13 is controlled by a CPU 15, and the output voltage thereof is changed corresponding to the molecular weight of a gas which is designated for an object to be measured by an instruction from a keyboard 16. Namely, in case of the measurement of a light gas such as hydrogen and helium, the voltage is switched for a low side, and in case of the measurement of other gases, it is switched for a high side, so that the intensity of the electromagnets can be changed by varying the electric currents which are flowed to the electromagnets.

Description

【発明の詳細な説明】 (イ)産業上の利用分野 本発明は電磁場金柑いた′ぽ量分折装置4に関する1、 (ロフ従来の技術 質M分析装置ておける試料のイオン化法として電子衝撃
イオン化法、化学イオン化法がある。
DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to an electromagnetic field kumquat mass spectrometer 4. method and chemical ionization method.

これらの方法金相いる質量分析装置のイオン源VCおい
ては、イオン化効率を高める目的で、イオン化チャンバ
ーに入射される電子線全コリメートするためのソースマ
グネットがイオン化チャンバーの近くに設置される。
In the ion source VC of a mass spectrometer using these methods, a source magnet for collimating the entire electron beam incident on the ionization chamber is installed near the ionization chamber in order to increase the ionization efficiency.

このソースマグネットはイオン化チャンバー内に電子の
入射方向の磁界を作る。磁力線は電子流と平行になるの
で、入射電子が入射穴から放射状に拡がるのをおさえる
とともに、らせん連動金させて気体分子との衝突確率を
向上させ。
This source magnet creates a magnetic field in the direction of electron incidence within the ionization chamber. Since the magnetic field lines are parallel to the electron flow, the incident electrons are prevented from spreading radially from the entrance hole, and the helical interlocking increases the probability of collision with gas molecules.

その結果イオン化効率を高める作用金する。As a result, it acts as an agent to increase ionization efficiency.

I!→発明が解決しようとする問題点 ソースマグネットi設けた上述のようなイオン源におい
ては、水素やヘリウムのような質量数の小さな元素のイ
オンは磁場の影@を強く受けて偏向し、イオン源からの
引き出し効率が低下し9分析感度が減少するという問題
があった。
I! →Problem to be solved by the invention In the above-mentioned ion source equipped with a source magnet i, ions of elements with small mass numbers such as hydrogen and helium are strongly influenced by the magnetic field and are deflected. There was a problem in that the efficiency of extraction from the sample was reduced and the sensitivity of the 9 analysis was reduced.

に)問題点を解決するための手段 本発明においては、ソースマグネットの磁場強度を測定
するイオンの質量数に応じて切り換える。磁場強度制御
手段を設ける。
B) Means for Solving the Problems In the present invention, the magnetic field strength of the source magnet is switched depending on the mass number of the ions to be measured. A magnetic field strength control means is provided.

0→作用 質量数の小さいイオンを測定するときには磁場強度を弱
くすることにより、イオン源からの引き出し効率を高く
シ、質量数の大きいイオンの場合には磁場強度を強くし
てイオン化効率を高くすることてより、いずれの場合に
も測定の感度を高くする。
0 → When measuring ions with a small acting mass number, the magnetic field strength is weakened to increase extraction efficiency from the ion source, and for ions with a large mass number, the magnetic field strength is strengthened to increase ionization efficiency. Above all, the sensitivity of the measurement is increased in both cases.

(へ)冥施例 第1図は本発明のイオン源の一実施例全示す。(to) Mysterious practice FIG. 1 shows one embodiment of the ion source of the present invention.

イオン化チャンバー(1)には試料導入口(2)より試
料気体が導入され、成虫じたイオンは取り出し口(3)
からイオン収束レンズ(4)ヲ通ってイオン流(5)と
して引き出される。イオン化チャンバー内の気体をイオ
ン化するための電子線(6)はフィラメント(7)によ
り発生しシールド(引き出し電極)(8)、穴(9)を
通って導入され、穴α0)を通ってトラップ(陽極)α
υに捕捉される。電子線(6)全コリメートするソース
マグネットαりは本実施例ではコイルα3)tl−鉄芯
に巻いて構成される電磁石であり、イオン化チャンバー
(1)をはさんでフイラメン) (71、)ラップaυ
の外側に対向配置される。
Sample gas is introduced into the ionization chamber (1) through the sample introduction port (2), and adult ions are removed through the extraction port (3).
The ions pass through the ion focusing lens (4) and are extracted as an ion stream (5). An electron beam (6) for ionizing the gas in the ionization chamber is generated by a filament (7), introduced through a shield (extraction electrode) (8) and a hole (9), and passed through a hole α0) to a trap ( anode) α
captured by υ. In this example, the electron beam (6) fully collimated source magnet α is an electromagnet composed of a coil α3) wound around an iron core, and the ionization chamber (1) is sandwiched between the filament (71,) wrap. aυ
are placed facing each other on the outside.

コイル(13)K電流を流す電源αaはCPU Qりに
よって制御されており、 CPU的の入力端末であるキ
ーボードαQからの指示によってiIf源(14)の出
力電圧を変えられるよう構成ざnている。この実施例で
は測定対象とするガスの分子#に応じてキーボードより
電源側の出力電圧全切り換える。すなわち、水素やヘリ
ウム等の軽いガスの測定のときは電圧を低側に、それ以
外のガスの測定のときには電圧を高側に切り換えること
により電磁石に流す電流ft変えて電磁石の強度を変え
るのである。
The power supply αa that flows the coil (13) K current is controlled by the CPU Q, and is configured so that the output voltage of the iIf source (14) can be changed by instructions from the keyboard αQ, which is an input terminal for the CPU. . In this embodiment, all the output voltages on the power supply side from the keyboard are switched depending on the molecule # of the gas to be measured. In other words, when measuring light gases such as hydrogen and helium, the voltage is switched to the low side, and when measuring other gases, the voltage is switched to the high side, thereby changing the current ft flowing through the electromagnet and changing the strength of the electromagnet. .

次に述べる第2の実施例においては、イオン源の構成は
第1図とほぼ同一であるが、磁場強度制御の方法が上記
と異なる。この第2の実施例はガスクロマトグラフ質量
分析(GC/MS )でのマスクロマトグラフィー又は
マスフラグメントグラフィーKM用されるものであり、
磁場強度制御手段を構成するCPUのメモリ内にあらか
じめ設定された時間(クロマトグラムのリテンションタ
イム)の経過した後、磁場の強度を自動的に切り排える
のである。第2図にマスクロマトグラムと磁場強度の関
係を例示する。第2図の上のグラフはマスクロマトグラ
ムを示し。
In the second embodiment described below, the configuration of the ion source is almost the same as that in FIG. 1, but the method of controlling the magnetic field strength is different from the above. This second embodiment is used for mass chromatography or mass fragmentography KM in gas chromatography mass spectrometry (GC/MS),
After a preset time (chromatogram retention time) in the memory of the CPU constituting the magnetic field strength control means has elapsed, the magnetic field strength is automatically cut off. FIG. 2 illustrates the relationship between the mass chromatogram and the magnetic field strength. The upper graph in FIG. 2 shows a mass chromatogram.

下のグラフは磁場強度(電磁石の電源電圧)を示シ、横
軸はリテンションタイム1Rである。第2図に示すよう
に、クロマトグラフからH2のような質量数が小さいガ
スが出力される間は磁場強度が低く設定され、それ以外
のガスが出力され始める前に自動的に磁場強度は通常の
値に切り換えられる。
The lower graph shows the magnetic field strength (power supply voltage of the electromagnet), and the horizontal axis shows the retention time 1R. As shown in Figure 2, the magnetic field strength is set low while gases with small mass numbers such as H2 are being output from the chromatograph, and the magnetic field strength is automatically set to normal before other gases begin to be output. can be switched to the value of

以上に述べた実施例の変形としては、質量分析計が質量
数の小さい部分を走査している間は磁場強度を低くシ、
それ以外の部分を走査している間は磁場強度を高くする
ことも考えられ。
A variation of the embodiment described above is to reduce the magnetic field strength while the mass spectrometer is scanning the low mass number region.
It is also possible to increase the magnetic field strength while scanning other areas.

このようなスイッチング操作を高速化してマスフラグメ
ントグラフィーの場合に適用することも可能である と
くにマスフラグメントグラフィーの場合は、質量数に応
じて最適磁場強度になるようにスイフチングすることも
できる。
It is also possible to speed up such a switching operation and apply it to the case of mass fragmentography. In particular, in the case of mass fragmentography, it is also possible to perform swifting to obtain the optimum magnetic field strength according to the mass number.

また、第1図のようにソースマグネットとして電磁石を
用いる代わりに、永久磁石を用い。
Also, instead of using an electromagnet as the source magnet as shown in Figure 1, a permanent magnet is used.

磁石とイオン化チャンバーの距5it−■械的に操作す
る機構を磁場強度制御手段としてもよい。
A mechanically operated mechanism may be used as the magnetic field strength control means.

(ト)発明の効果 本発明によれば水素やヘリウム等の質量数の小さい元素
の質量分析に際して測定感度が向上するので、特に微量
ガス分析等に用いて優れた効果を発揮するものである。
(G) Effects of the Invention According to the present invention, measurement sensitivity is improved in mass spectrometry of elements with small mass numbers such as hydrogen and helium, so it exhibits excellent effects particularly when used in trace gas analysis.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の質量分析装置のイオン源の一実施例を
示す図であり、第2図は本発明のイオン源のソースマグ
ネットの磁場強度の切り換えのタイミングをマスクロマ
トグラムとともに例示する図である。 (1)・・・イオン化チャンバー (2)・・・試料導
入口(3)・・・イオン取す出し口 (4)・・・イオ
ン収束レンズ(5) ・・・イオン流     (6)
・・・電子線(7)・・・フィラメン)    (8)
・・・シールド(9) 、 00)・・・穴     
 α1)・・・トラップQ3・・・ソースマグネット 
0・・・コイル04)・・・電源       (19
・−CPUα0・・・キーボード 本゛−“f′「 第 1 図 第2図
FIG. 1 is a diagram showing an embodiment of the ion source of the mass spectrometer of the present invention, and FIG. 2 is a diagram illustrating the timing of switching the magnetic field strength of the source magnet of the ion source of the present invention together with a mass chromatogram. It is. (1)...Ionization chamber (2)...Sample introduction port (3)...Ion extraction port (4)...Ion focusing lens (5)...Ion flow (6)
...electron beam (7) ...filamen) (8)
...Shield (9), 00)...hole
α1)...Trap Q3...Source magnet
0...Coil 04)...Power supply (19
・-CPUα0...Keyboard book ゛-"f'" Figure 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims] (1)イオン化チャンバーに入射される電子をコリメー
トするソースマグネットと、ソースマグネットの磁場強
度の制御手段を設け、この制御手段は測定するイオンの
質量数に応じて前記磁場強度を切り換えることを特徴と
する、質量分析装置のイオン源。
(1) A source magnet for collimating electrons incident on the ionization chamber and a control means for controlling the magnetic field strength of the source magnet are provided, and the control means switches the magnetic field strength according to the mass number of ions to be measured. The ion source of the mass spectrometer.
JP60291378A 1985-12-23 1985-12-23 Mass spectrometer ion source Pending JPS62168328A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60291378A JPS62168328A (en) 1985-12-23 1985-12-23 Mass spectrometer ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60291378A JPS62168328A (en) 1985-12-23 1985-12-23 Mass spectrometer ion source

Publications (1)

Publication Number Publication Date
JPS62168328A true JPS62168328A (en) 1987-07-24

Family

ID=17768142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60291378A Pending JPS62168328A (en) 1985-12-23 1985-12-23 Mass spectrometer ion source

Country Status (1)

Country Link
JP (1) JPS62168328A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7034288B2 (en) 2003-06-26 2006-04-25 Jeol Ltd. Time-of-flight mass spectrometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7034288B2 (en) 2003-06-26 2006-04-25 Jeol Ltd. Time-of-flight mass spectrometer

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