JPS63291875A - Graphite jig - Google Patents
Graphite jigInfo
- Publication number
- JPS63291875A JPS63291875A JP62126362A JP12636287A JPS63291875A JP S63291875 A JPS63291875 A JP S63291875A JP 62126362 A JP62126362 A JP 62126362A JP 12636287 A JP12636287 A JP 12636287A JP S63291875 A JPS63291875 A JP S63291875A
- Authority
- JP
- Japan
- Prior art keywords
- graphite
- jig
- thermally decomposed
- graphite jig
- decomposed carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 43
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 28
- 239000010439 graphite Substances 0.000 title claims abstract description 28
- 239000007770 graphite material Substances 0.000 claims abstract description 17
- 238000000576 coating method Methods 0.000 claims abstract description 10
- 239000011248 coating agent Substances 0.000 claims abstract description 9
- 239000002296 pyrolytic carbon Substances 0.000 claims description 8
- 239000004615 ingredient Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 abstract description 12
- 239000000919 ceramic Substances 0.000 abstract description 11
- 239000000463 material Substances 0.000 abstract description 6
- 229910052799 carbon Inorganic materials 0.000 abstract description 5
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 2
- 239000000843 powder Substances 0.000 abstract description 2
- 239000011148 porous material Substances 0.000 abstract 1
- 238000005219 brazing Methods 0.000 description 11
- 238000007789 sealing Methods 0.000 description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000004215 Carbon black (E152) Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229930195733 hydrocarbon Natural products 0.000 description 3
- 150000002430 hydrocarbons Chemical class 0.000 description 3
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000010186 staining Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 239000005394 sealing glass Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は電子工業用治具１例えばトランジスタ、ダイオ
ードの接合、ガラス封着、或いはセラミラフパッケージ
の位置決め、リードフレームのろう付等に用いる黒鉛治
具に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention is a graphite jig used for electronic industry jigs 1, such as bonding of transistors and diodes, glass sealing, positioning of ceramic rough packages, brazing of lead frames, etc. Regarding jigs.
（従来の技術）
黒鉛材料は、その優れた熱的性質（８伝導率大、熱膨張
率小）と易加工性のために、微細で精密な形状を必要と
される電子部品等のガラス封着、ろう付の治具として多
方面に利用されているが、反面１次のような欠点を有す
る。(Prior art) Due to its excellent thermal properties (8 high conductivity, low coefficient of thermal expansion) and ease of processing, graphite material is used for glass sealing of electronic components that require minute and precise shapes. Although it is used in many ways as a bonding and brazing jig, it has the following drawbacks:
１）、黒鉛粉が被処理材に付着し易く、例えばアルミナ
等の白色セラミックスの表面の四部に入り込んだ場合、
容易に除去出来ず商品価値を下げる。1) If graphite powder easily adheres to the material to be treated, for example, if it gets into the four parts of the surface of white ceramics such as alumina,
It cannot be easily removed and reduces the product value.
２）、軟質であるため被処理物との分解組み立てにより
接触摩耗し、短寿命である。2) Because it is soft, it is subject to contact wear when disassembling and reassembling the object to be treated, resulting in a short lifespan.
一方、黒鉛治具をＳｉＣ被覆することによって上記の欠
点を解決することは可能であるが、封着ガラス、ろう材
との漏れ性の点から治具と製品が接着してしまい、取り
はずせないという大きな欠点が残り、十分な効果は発揮
できなかった。On the other hand, it is possible to solve the above drawbacks by coating graphite jigs with SiC, but the jigs and products will adhere to each other due to leakage from the sealing glass and brazing filler metal, making it impossible to remove them. This major drawback remained, and the sufficient effect could not be achieved.
（発明が解決しようとする問題点）
本発明はこれらの欠点を解決し、作業性に優れた黒鉛治
具を提供することにある。(Problems to be Solved by the Invention) The object of the present invention is to solve these drawbacks and provide a graphite jig with excellent workability.
（問題点を解決するための手段）
本発明は、黒鉛材の表面に熱分解炭素を０．５ｐｍ〜２
５．０μｍの厚さで被塑してなることを特徴とする黒鉛
治具に関する。(Means for solving the problem) The present invention provides pyrolytic carbon on the surface of graphite material in an amount of 0.5 pm to 2 pm.
The present invention relates to a graphite jig characterized in that it is formed by plasticizing to a thickness of 5.0 μm.
本発明の黒鉛治具は、とくにトランジスダ又はダイオー
ドのリード線、及びリングの位置決めと、それらをガラ
スで封着するのに用いられる治具、又、半導体用セラミ
ックパッケージのリードフレーム及びセラミック基板の
位置決め及び、ろう付するのに用いられる治具に適して
いる。The graphite jig of the present invention is particularly useful for positioning lead wires and rings of transistors or diodes, and for sealing them with glass, and for positioning lead frames and ceramic substrates of semiconductor ceramic packages. It is also suitable for jigs used for brazing.
黒鉛材としては等方性黒鉛材料を用い、熱膨張係数が１
．５ｘｌｏ−６℃−’ 〜７ 、 Ｏｘ ｌ Ｏ−６℃
−１である。Isotropic graphite material is used as the graphite material, and the coefficient of thermal expansion is 1.
．． 5xlo-6℃-'~7, OxlO-6℃
-1.
（発明の作用）
黒鉛治具の全表面、又は必要な一部分をボアーか無く、
緻密で硬質、耐摩耗性を有する熱分解炭素を被覆するこ
とによって、黒鉛基材のボアー中にある加工粉をとじ込
め、被処理材の白色セラミックスの表面に黒鉛粉が付着
することを防止する。又、熱分解炭素膜はガラスのよう
に硬質で耐摩耗性に優れるので、接触摩耗による寿命低
下を大幅にｉ！に善する働きがある。(Function of the invention) The entire surface of the graphite jig or a necessary part is bored or removed.
By coating with dense, hard, and wear-resistant pyrolytic carbon, processing powder in the bore of the graphite base material is trapped, and graphite powder is prevented from adhering to the surface of the white ceramic material being treated. . In addition, since the pyrolytic carbon film is hard like glass and has excellent wear resistance, it significantly reduces the life expectancy due to contact wear. There is a work for good.
被覆方法としては、ＰＶＤ法、ＣＶＤ法のいずれの方法
も適用できるが、経済性から見てＣＶＤ法の方法がよい
。As a coating method, either the PVD method or the CVD method can be applied, but the CVD method is preferable from an economic point of view.
ＣＶＤ法はメタン、プロパン等の炭化水素ガスと水素キ
ャリヤーガスの存在下で高温のカーボン表面上で反応さ
せ熱分解炭素被膜を形成せしめるもので、処理温度は１
０００℃〜３２００℃である。キャリアーガスとしては
水素が最適であり、膜質及び経済性の点から処理温度は
、１１００’Ｃ〜１２５０℃か望ましい。In the CVD method, a pyrolytic carbon film is formed by reacting hydrocarbon gas such as methane or propane on a high-temperature carbon surface in the presence of a hydrogen carrier gas, and the treatment temperature is 1.
000°C to 3200°C. Hydrogen is most suitable as the carrier gas, and the treatment temperature is preferably 1100'C to 1250C in terms of film quality and economical efficiency.
膜厚は炭化水素ガス濃度、処理温度、処理時間で制御で
きるが、０．５４ｍ以下の膜厚ではピンホールが生成し
ており、膜の気密性の点から好ましくない。Although the film thickness can be controlled by the hydrocarbon gas concentration, processing temperature, and processing time, a film thickness of 0.54 m or less is undesirable from the viewpoint of film airtightness because pinholes are generated.
一方、膜厚を２５．０ＪＬｍ以上にすると、使用時に膜
内に限度以上の熱応力が作用して、グラツクか入る確率
が高くなることを確認した。On the other hand, it has been confirmed that when the film thickness is 25.0 JLm or more, thermal stress exceeding the limit acts on the film during use, increasing the probability of cracks.
又、使用する黒鉛材は等方性材料であることか必要であ
る。異方性黒鉛材であると、熱膨張係数の異方比が１．
３０以五となるため、熱分解炭素被膜と黒鉛材の間に、
特にコーナ一部を中心として、熱膨張のミスマツチが極
端に大きくなり、クラック、剥離が発生する。Furthermore, it is necessary that the graphite material used be an isotropic material. When the anisotropic graphite material is used, the anisotropic ratio of the coefficient of thermal expansion is 1.
30 or more, so between the pyrolytic carbon coating and the graphite material,
Especially around some corners, thermal expansion mismatch becomes extremely large, causing cracks and peeling.
等方性黒鉛材の場合、熱分解炭素被膜の膜厚か０．５ｇ
ｍ〜２５．０ｐｍであれば、黒鉛材の熱膨張係数か１．
５Ｘ１０−６℃−Ｉ〜７．０Ｘ１０−６℃−１の範囲で
あることか必要であり、特に、バ・ンケージの多ビン化
、及びパッケージの仕上り精度の向−Ｅか進んでおり、
より高付加価値の製品にとっては、熱分解炭素被膜の堅
ろう性を強化させるため、２．０Ｘ１０−６℃″１〜４
．０Ｘ１０−６℃−１の熱膨張係数のものを使用するの
が望ましい。In the case of isotropic graphite material, the thickness of the pyrolytic carbon coating is 0.5g.
m~25.0pm, the thermal expansion coefficient of the graphite material is 1.
It is necessary that the temperature be within the range of 5X10-6℃-I to 7.0X10-6℃-1.In particular, as the number of bins increases and the finishing accuracy of packages increases,
For higher value-added products, 2.0
．． It is preferable to use a material having a coefficient of thermal expansion of 0.times.10.sup.-6.degree. C.-1.
また、黒鉛材のカサ比重は大きいほど好ましいが、望ま
しくは１．７３以上である。Further, the larger the bulk specific gravity of the graphite material is, the more preferable it is, and desirably it is 1.73 or more.
（実施例） 次に実施例を示す。(Example) Next, examples will be shown.
実施例１
等方性黒鉛材料を加工して、縦１２０ ｍ ｍ、横１９
０ｍｍ及び厚さ１０ｍｍの、電子工業用黒鉛治具を作製
した。これをＣＶＤ炉に入れ、１４００℃に加熱し、水
素ガスをキャリアーとし、メタン、の炭化水素ガスを炉
内に供給し、黒鉛治具の表面に厚さ０．５ルｍの熱分解
炭素の被膜を形成した。この黒鉛治具を使用し、リード
線及び、リングの位置決めをして、炉内温度９５０°Ｃ
１炉内窒素雰囲気とし、３０分間保持してガラス封着作
業に使用した結果、１２５回以上繰返し使用しても封着
したガラスに黒鉛粉による汚れの発生は認められなかっ
た。Example 1 Isotropic graphite material was processed to form a 120 mm long and 19 mm wide
A graphite jig for the electronic industry with a thickness of 0 mm and a thickness of 10 mm was manufactured. This was placed in a CVD furnace and heated to 1400°C, hydrogen gas was used as a carrier, and hydrocarbon gas of methane was supplied into the furnace. A film was formed. Using this graphite jig, position the lead wire and ring, and keep the furnace temperature at 950°C.
1. When the furnace was kept in a nitrogen atmosphere for 30 minutes and used for glass sealing work, no staining due to graphite powder was observed on the sealed glass even after repeated use over 125 times.
よ７ｗヱ
実施例１と同様にして被膜の厚さが、ｌＯルｍの黒鉛治
具を得た。7wヱA graphite jig with a coating thickness of 10 m was obtained in the same manner as in Example 1.
この黒鉛治具を使用し、リード線及びリングの位置決め
をして、ガラス封着作業に使用した結果、両者とも３０
０回以上繰返し使用しても封着したガラスに黒鉛粉によ
る汚れは認められなかった。I used this graphite jig to position the lead wire and ring and used it for glass sealing work.
Even after repeated use 0 times or more, no staining due to graphite powder was observed on the sealed glass.
実施例３
実施例１と同様にして被膜の厚さが、０．５ｇｍの黒鉛
治具を得た。この黒鉛治具を使用し、半導体用セラミッ
クパッケージのリードフレーム及びセラミック基板の位
置決めをし、ろう付は作業に使用した結果、１２５回以
上繰り返し使用してもロー付は部の黒鉛治具への接着、
ろう付は部への黒鉛粉による反応は認められなかった。Example 3 A graphite jig with a coating thickness of 0.5 gm was obtained in the same manner as in Example 1. This graphite jig was used to position lead frames and ceramic substrates for semiconductor ceramic packages, and as a result of using it for brazing work, even after repeated use over 125 times, brazing still remained on the graphite jig. Adhesion,
No reaction due to graphite powder was observed during brazing.
支ム１」
実施例１と同様にして被膜の厚さがｌｏｇｍの黒鉛治具
を得た。この黒鉛治具を使用し、実施例３と同様な作業
に使用した結果、３００回以上、繰り返し使用してもろ
う付は部の黒鉛治具への接着、ろう付は部への黒鉛粉に
よる反応は認められなかった。"Support 1" A graphite jig with a coating thickness of logm was obtained in the same manner as in Example 1. As a result of using this graphite jig for the same work as in Example 3, even after repeated use over 300 times, the brazing part adhered to the graphite jig, and the brazing part did not adhere to the graphite jig. No reaction was observed.
比較例１
等方性黒鉛材料を加工して、縦１２０ｍｍ、横１９０ｎ
ｍ、厚さ１０ｍｍの黒鉛治具を作製した。この治具を使
用してリード線及びリングを位置決めし、ガラス封着作
業に使用した結果、１回の作業で封着したガラスに黒鉛
粉による汚れが認められた。Comparative Example 1 Isotropic graphite material is processed to have a length of 120 mm and a width of 190 nm.
A graphite jig with a thickness of 10 mm and a thickness of 10 mm was prepared. When this jig was used to position lead wires and rings and used for glass sealing work, stains due to graphite powder were observed on the glass sealed in one operation.
止Ｊむ１呈
比較例１と同様の治具を使用して、半導体用セラミック
パッケージのリードフレーム及びセラミック基板の位置
決めし、ろう付は作業に使用した結果、１回使用におい
てろう付は部の黒鉛治具への接着、ろう付は部への黒鉛
粉による反応が認められた。Using the same jig as in Comparative Example 1, the lead frame and ceramic substrate of a semiconductor ceramic package were positioned and brazed. When adhering to graphite jigs and brazing, reactions due to graphite powder were observed.
比較例３
実施例１と同様にして被膜の厚さ０．３１Ｌｍと３０４
ｍの黒鉛治具を得た。厚さ０．３ルｍの治具では、治具
表面を完全に膜で覆うことか難しくピンホール等が発生
した。また厚さ３０μｍの冶具では、膜の剥離を生した
。Comparative Example 3 The film thickness was 0.31Lm and 304Lm in the same manner as in Example 1.
A graphite jig of m was obtained. With a jig having a thickness of 0.3 m, it was difficult to completely cover the jig surface with a film, and pinholes etc. occurred. In addition, with a jig having a thickness of 30 μm, peeling of the film occurred.
（発明の効果）
以ヒ述べたように、黒鉛治具の表面が０．５〜２５用ｍ
の熱分解炭素の層で被膜されていることにより治具の長
寿命化か図られ、このような黒鉛治具によれば黒鉛粉の
付着、浸炭による商品価値の低下を防止できる。したか
って、トランジスタ又はタイオードのリード線、及びリ
ングの位置決めと、それらをガラスで封着するのに用い
られる治具、又、半導体用セラミックパッケージのリー
ドフレーム及びセラミック基板の位置決め及び、ろう付
するのに用いられる治具に最適である。(Effect of the invention) As described below, the surface of the graphite jig has a diameter of 0.5 to 25 mm.
By being coated with a layer of pyrolytic carbon, the life of the jig can be extended, and such a graphite jig can prevent adhesion of graphite powder and reduction in commercial value due to carburization. Therefore, the jig used to position the lead wires and rings of transistors or diodes and seal them with glass, and the positioning and brazing of lead frames and ceramic substrates of semiconductor ceramic packages. Ideal for jigs used in
Claims (1)
〜７．０×１０＾−＾６℃＾−＾１の範囲である黒鉛材
の表面に熱分解炭素を０．５μｍ〜２５．０μｍの厚さ
で被覆してなることを特徴とする黒鉛治具。Isotropic with a coefficient of thermal expansion of 1.5 x 10^-^6℃^-^1
A graphite treatment characterized by coating the surface of a graphite material with a temperature range of ~7.0×10^-^6℃^-^1 with pyrolytic carbon in a thickness of 0.5 μm to 25.0 μm. Ingredients.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62126362A JPS63291875A (en) | 1987-05-22 | 1987-05-22 | Graphite jig |
| JP5151334A JPH06166568A (en) | 1987-05-22 | 1993-05-28 | Graphite jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62126362A JPS63291875A (en) | 1987-05-22 | 1987-05-22 | Graphite jig |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5151334A Division JPH06166568A (en) | 1987-05-22 | 1993-05-28 | Graphite jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63291875A true JPS63291875A (en) | 1988-11-29 |
Family
ID=14933307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62126362A Pending JPS63291875A (en) | 1987-05-22 | 1987-05-22 | Graphite jig |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63291875A (en) |
-
1987
- 1987-05-22 JP JP62126362A patent/JPS63291875A/en active Pending
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