JPS6339767A - Abrasive supplying device - Google Patents

Abstract

PURPOSE:To enable an abrasive to be supplied in its optional supply speed uniformly with good reproductivity even for a long time, by setting a porous material to be fixed to an abrasive vessel and an abrasive passing hole and blowing air or inert gas into the porous material. CONSTITUTION:Inert gas of N2 or the like or air is previously blown from gas blowing ports 106, 107, being left as communicating with gas passing holes 203, 204 in an abrasive vessel 101. And the vessel 101 is filled with an abrasive 300, simultaneously the gas, communicating with the gas passing holes 203, 204, is evenly generated in a bubble state from a porous plate 103 and a porous pipe 104. Consequently, abrasive grains, contained in the abrasive vessel 101 and an abrasive passing hole 102, are uniformly dispersed being prevented from precipitation by making a Brownian movement-like motion. Accordingly, the abrasive 300, which is evenly stirred being prevented from deposition, can be supplied in its optional supply speed uniformly with good reproductivity even for a long time.

Description

Detailed Description of the Invention (Industrial Application Field) The present invention supplies abrasives used in lapping, polishing, or mechanochemical boring quantitatively and uniformly with good reproducibility to tools such as lapping plates and polishers. do"
It is related to JR.

(Prior Art and Problems) FIG. 2 is a block diagram of a conventional abrasive supply device equipped with a stirring motor.

Conventionally, in a supply device for abrasive containing fine particles or fine abrasive grains, as shown in FIG. A method is adopted in which the abrasive is rotated by a motor 4 to prevent the abrasive grains in the abrasive from settling, and the abrasive is allowed to fall naturally onto the tool below through a drain 5 at the bottom of the container 2 through a hose 6. was common. In this case, the abrasive in the container is being stirred, but the abrasive grains in the abrasive tend to settle in the middle of the hose or near where the abrasive supply amount adjustment valve 7 attached to the end of the hose is attached, and the supply starts. As time passes, the amount of abrasive supplied gradually decreases and eventually stops, posing a major problem in terms of reliability and reproducibility in the sublayers. It has been pointed out that one of the reasons for this is that the hose from the container 2 to the partial tray is long, so that the abrasive tends to settle in the middle of the hose. Therefore, although it is possible to shorten the hose, it is difficult to supply water continuously and uniformly over a long period of time. In particular, when using a disk for a small polisher 1, it is desired to uniformly supply the material intermittently or continuously with a small amount of supply, but this is extremely difficult even if the hose is shortened.

Another major problem is that oil, dust, etc. from the motor, bearings, belts, etc. tend to get mixed into the abrasive. In order to prevent this, the oil seal cover, etc. had to be completely removed, which had the disadvantage of complicating the structure and resulting in an expensive supply device.

(Means for Solving the Problems) The present invention was made in view of the problems with the conventional devices, and its purpose is to supply clean abrasives at a constant rate. It is an object of the present invention to provide an abrasive supplying device which can perform the following operations and has a simple structure.

The present invention allows the abrasive in the container and the abrasive in the passage hole (hose) from above the laboratory dish until it falls naturally, without the abrasive grains in the abrasive settling, especially in the narrow passage hole. The polishing agent is characterized by constantly moving the polishing agent (this is called "Brownian motion") so that the polishing agent does not come off, and by uniformly supplying the polishing agent with good reproducibility. Specifically, a tube or plate-shaped ceramic, metal, resin, etc. with many fine holes is used, and it is placed in an abrasive and air or inert gas is blown into the abrasive, causing the abrasive to undergo "Brownian motion." It is something that allows you to do a "target movement."

Furthermore, the present invention is characterized in that the supply rate (amount) can be arbitrarily changed by adjusting the amount of air or inert gas blown.

This differs from conventional stirring devices in that they only stir the inside of the abrasive container.

(Example) FIG. 1(a) is a diagram illustrating an example of the abrasive supply device of the present invention, in which 101 is an abrasive container, 102 is an abrasive passage hole installed at the bottom of 101, and 103 is an abrasive drug container 10
1, a porous plate 104 is a porous tube passed through the abrasive passage hole 102, 105 is a container lid to prevent dust from entering, and 106 and 107 are a porous plate 103 and a porous tube. 104 are respectively blowing ports for blowing gas into them, and 211 and 212 are blowing adjustment valves for blowing gas into them. In addition, Fig. 1 (b) and (C) are shown in Fig. 1 (
This is an example of a cross-sectional view taken along line AA' in a), where (b) is a circular cross-section, and (C) is a rectangular cross-section.

In the abrasive supply device having such a configuration, the abrasive (abrasive particles dispersed in water or a chemical solution at a predetermined concentration) necessary for the partial layer is placed in the abrasive container 101. There is. Immediately before that, it is desirable to blow inert gas such as N2 gas or air from 106 and 107 in advance to communicate with gas passage holes 203 and 204. At the same time as the abrasive 300 is put into the container 101, the gas flowing through the gas passage holes 203 and 204 is evenly generated in the form of bubbles from the porous plate 103 and the porous tube 104.
The abrasive grains contained in the abrasive in the abrasive passage hole 102 undergo "Brownian motion" and are uniformly dispersed, so that the abrasive grains do not precipitate. By adjusting the regulating valves 211 and 212, the amount of gas blown can be changed, and the flow 1 can be changed depending on the particle size or type of abrasive grains.

In particular, by changing the gas flow rate using the regulating valve 212, it is possible to arbitrarily change the supply rate of the abrasive 301 that naturally falls from the drain 202 of the abrasive passage hole 102 onto the upper layer.

FIG. 1 depicts a case where a porous material is used for the container lid 105, and the reason for this is to allow the blown gas to escape, and also to prevent dust from entering from the outside. It does not need to be a porous material as long as it has fine pores for the escape of the blown gas.

Next, the porous material of the porous plate 103 and the porous pipe 104 is
The shape will be explained. As shown in FIG. 1, the porous plate 103 is spread over almost the entire bottom of the container, and the gas shown in FIG. It is sufficient to process the passage groove 204 or the passage groove 204 having a shape as shown in FIG. 1(C).

The average pore diameter of this porous plate 103 is preferably larger.

As shown in FIGS. 1(b) and 1(c), the porous tube 104 is open on the upper side to allow the abrasive to pass through.
Any shape is acceptable as long as the lower side is open to allow air or inert gas to pass through. According to experiments, the average pore size is 10
It was possible to uniformly supply the abrasive at ~600 μm/porosity of 20 to 70%. Materials are polyethylene, polypropylene, polymethyl methacrylate, polystyrene,
Polymers such as acrylonitrile copolymers and polyamides [grease-resistant, stainless steel].

It is also acknowledged that metals such as aluminum and copper, and ceramics such as alumina and zirconia may be selected. In particular, when adding a chemical liquid to the polishing agent, it is necessary to select a chemically resistant material.

It has been confirmed that the gas 501 blown into the gas blowing ports 106 and 107 can be clean air or an inert gas such as N2 or Ar.

In addition, as shown in FIG. 1, the container and the abrasive passage hole 10
It has also been confirmed through experiments that the effect of the present invention is greater when the entire bottom surface of the device is used at an angle than when it is installed horizontally. Furthermore, the rate of supply of the second polishing agent can be finely adjusted depending on the degree of inclination.

(Effect of the invention) As explained above, by installing and fixing the porous material in the abrasive container and the abrasive passage hole, and blowing air or inert gas, the abrasive is uniformly stirred and does not precipitate. (
Because of the "Brownian motion" of the abrasive grains, the abrasive can be uniformly supplied onto the polishing plate at any desired abrasive supply rate with good reproducibility even over long periods of time, allowing for highly reproducible polishing even without monitoring. There is an advantage that it can be done.

It goes without saying that in addition to the embodiments of the present invention, conventional stirrers such as rotary propellers, ultrasonic waves, magnetic stirrers, etc. may be used in combination.

Furthermore, it has been confirmed that the effects of the present invention can be obtained even without using a porous plate or a porous tube if a large number of fine holes are made in the bulk material.

[Brief explanation of drawings]

FIG. 1 is a block diagram of an abrasive supply device of the present invention, and FIG. 2 is a block diagram of a conventional abrasive supply device equipped with a stirring motor. 1... Stirring propeller 2... Abrasive container 3...
・Abrasive 4...Agitation motor 5...Drain 6...Hose 7...Abrasive supply amount adjustment valve 101...Abrasive container 102...Abrasive passage hole 103...Porous hole Sex plate 104... Porous pipe 105... Container lid 106.107... Gas inlet 202... Drain 203.20
4...Gas passage hole 211212...Gas blowing pressure regulating valve 300...Abrasive 301...Dropped abrasive 501...Blowing gas Fig. 1(b) (C) Fig. 2

Claims (1)

[Claims] 1. In an abrasive supply device in free abrasive processing,
An abrasive container is provided that stores an abrasive agent made of abrasive grains and an aqueous solution containing pure water or a chemical liquid, and the container has a pipe that communicates with the outside from the bottom or a part near the bottom, and the entire surface of the bottom inside the container is provided. Alternatively, a porous material is installed and fixed on a part of the bottom of the tube, leaving a gap through which the abrasive of the tube passes, and air or inert gas is blown into the porous material to remove the abrasive. An abrasive supply device characterized in that the abrasive is uniformly supplied from above a polishing plate tool of a polishing machine while stirring. 2. The abrasive supply device according to claim 1, characterized in that the abrasive supply amount is changed by adjusting the pressure and flow rate of air or inert gas. 3. The abrasive supply device according to claim 1, characterized in that the bottom surface of the abrasive container is inclined toward the tube provided in the container. 4. An abrasive supply device according to claim 1, characterized in that a plurality of fine holes are provided in a bulk material instead of a porous material. 5. The abrasive supply device according to claim 1, characterized in that a mechanical stirring device using a magnetic stirrer or a rotating propeller is added inside the abrasive container. 6. In claim 1, a conventional mechanical stirring device is applied to stir the abrasive only in the abrasive container, and porous or micropores are used to stir the abrasive in other pipes. An abrasive supply device characterized in that it sends air or an inert gas through a material.