KR100953084B1 - Brake Device of Brittle Substrate - Google Patents

Abstract

The present invention relates to a brake device for a brittle substrate, the first chamber, a nozzle unit coupled to the first chamber and injecting a liquid having physical properties of heat transfer and expansion characteristics into the first chamber by using compressed air, the nozzle unit Steam generating means comprising a first heater for heating the droplets injected into the first chamber by the phase change to wet saturated steam or dry saturated steam; A steam heating means including a second chamber connected to the first chamber in a communicable state by a connecting pipe, and a second heater for heating wet saturated steam or dry saturated steam introduced into the second chamber; It is characterized in that it comprises a heating steam injection means for spraying the heated steam exhausted from the steam heating means to the brittle substrate to spread and break the cracks of the scribe line.

According to the brake apparatus of the brittle substrate of the present invention, since the steam generated by the steam generating means is heated by the steam heating means and then injected into the scribe line of the brittle substrate, the temperature of the heated steam injected into the scribe line is uniform and high, and thus good cracks. Diffusion can be obtained and a high brake effect can be obtained.

Brittle board, brake, steam, steam generating means, steam heating means, chamber, crack

Description

Breaking apparatus for fragile substrate and method

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a brake apparatus for a brittle substrate, and more particularly, to a brake apparatus for a brittle substrate that diffuses and brakes cracks by injecting heated steam into a scribe line of the brittle substrate.

In general, LCDs, organic EL panels, inorganic EL panels, transmissive projector substrates, and reflective projector substrates used as flat panel displays are prescribed from a mother substrate (hereinafter, referred to as a 'brittle substrate') such as glass. Cut and use unit board of size.

Here, the cutting of the brittle substrate includes a scribe line forming step of forming a scribe line by pressing and moving a scribe cutter made of diamond-like material along a cutting schedule line of the brittle substrate, and applying a bending moment or pressing a scribe line by pressing the brittle substrate. The crack process (preferably referred to as a "vertical crack") is made of a brake process to spread and cut, the apparatus for performing the scribe line forming process is commonly called a scribe device or scriber, the brake process The device for performing this is called a brake device. The scribe device and the brake device may be integrally configured to be combined with each other or alternatively may be formed separately.

On the other hand, the Republic of Korea Patent Publication No. 2005-0095912 (hereinafter referred to as "prior art") in the scribe line by means of spraying steam to the scribe line formed on the brittle substrate by the scribe line forming means of the thickness of the brittle substrate A substrate cutting device (hereinafter referred to as a scribe device) having brake means for diffusing in a direction is disclosed.

As shown in FIG. 1, the scribing apparatus of the related art has a table 31 on which the brittle substrate 1 is mounted, and guide rails 32 and 33 disposed in parallel to each other on both sides of the table 31. ), Sliders 34 and 35 slidably mounted to the guide rails 32 and 33, linear motors 37 and 38 for sliding the sliders 34 and 35 along the guide rails 32 and 33, And a guide bar 36 horizontally interposed between the upper ends of the sliders 34 and 35, and a scribe head 20 slidably mounted to the guide bar 36.

Moreover, as a control part, the 3rd driver 47 which drives the 1st driver 41 which drives linear motors 37 and 38, the 2nd driver 42, and the scribe head drive motor 45, said 1st-3rd The controller 44 controls the drivers 41, 42, 47, and a slider sensor 43 installed near the guide rail 32 and detecting the position of the slider 34.

Here, reference numeral 46 is a ball screw rotated by the scribe head drive motor 45, the scribe head 20 is reciprocated along the guide bar 36 by the rotation of the ball screw 46 Move.

On the other hand, as shown in Figure 2, the scribe head 20 is installed below the head main body portion 22, the head main body portion 22 having a pressing means (not shown) and the scribe cutter 21 The cutter holder 27 and brake means which are provided are included.

The brake means is for spreading and breaking cracks in the scribe line formed on the brittle substrate 1, and in the conventional art, a vapor having a temperature at which the brittle substrate 1 is expanded on the scribe line formed on the brittle substrate 1 is provided. The steam generator 52 which spreads the crack of a scribe line in the thickness direction of the brittle board | substrate 1 by spraying is used.

Here, the steam generator 52 is integrally attached to the body portion 52a attached to the head body portion 22, the flexible hose 52b through which steam passes, and the cutter holder 27. The nozzle head 52c and a nozzle portion 52d for injecting steam toward the brittle substrate 1. Here, one end of the hose 52b is connected to the main body portion 52a and the other end of the hose 52b is connected to the nozzle head 52c.

In addition, a circular, elliptical, rectangular or slit-shaped steam injection port is formed in the nozzle part 52d, and steam is injected into a scribe line formed by the scribe cutter 21. Heat.

Hereinafter, a scribing process and a brake process using the above-described scribing apparatus of the related art will be briefly described.

First, the scribing process is to move the scribe cutter 21 along the cutting line of the brittle substrate 1 to form a scribe line. After the brittle substrate 1 is placed on the table 31, the controller 44 The third driver 47 drives the scribe head drive motor 45 by the control of the scribe head, and the scribe head 20 is brittle along the guide bar 36 as the scribe head drive motor 45 is driven. Move near or outside the outermost cross section on the cut line (hereinafter, referred to as a scribe line) of the substrate 1, and then scribe along the cut line again from the scribing start point of the brittle substrate 1. The cutter 21 is moved while pressing against the brittle substrate 1 to form a scribe line.

After the scribing process is performed on the brittle substrate 1 as described above, the braking process is performed. The steam generator 52 is connected to the scribe line formed through the above-described scribing process through the steam injection port of the nozzle unit 52d. The steam is injected into the crack, and the injected steam penetrates into the crack of the scribe line having an opening in the micrometer by capillary phenomenon and then expands to the rear side of the brittle substrate 1 by volume expansion. Therefore, according to the prior art, it is possible to brake the brittle substrate 1 without mechanically applying a bending moment along the scribe line.

On the other hand, although not disclosed in the prior art described above, the main body portion 52a of the steam generator 52 is usually composed of a chamber having a predetermined space therein, using one side of the chamber using compressed air A nozzle for injecting water into the chamber is provided, and a heater is installed around the chamber including the nozzle to heat the water droplets injected by the nozzle to change to a vapor state.

Accordingly, the water flowing into the chamber by the compressed air becomes fine water while passing through the nozzle, and the water drops are converted into steam in the chamber heated by the heater, and then sprayed into the scribe line through the steam injection port of the nozzle unit. do.

By the way, although the heater is installed around the nozzle and the chamber in the prior art, water droplets injected through the nozzle because the water and compressed air at room temperature from the outside is continuously supplied into the nozzle and then pass instantaneously. Because the temperature of is not high enough, the vapor is mixed with water droplets that cannot vaporize in part, and thus, the steam injected into the scribe line through the steam injection port of the nozzle part is not high enough and uneven. There is a problem that crack spreading of the scribe line is not uniform.

In addition, droplets that have not yet vaporized in the chamber not only cause significant noise by being boiled by the chamber bottom heated by a heater that collects at the bottom of the chamber, but also sometimes is injected into the scribe line with the steam through the steam injection port of the nozzle section. There also existed a problem which generate | occur | produces the surface of a brittle board | substrate.

The present invention has been made to solve the problems of the prior art as described above, an object of the present invention is to brittle to uniformly spread the cracks by continuously spraying the heating steam of a uniform temperature distribution on the scribe line of the brittle substrate It is to provide a brake device for a substrate.

In addition, another object of the present invention is to eliminate the noise generated when boiling to ensure that the droplets do not remain when generating steam, and the steam is heated again and sprayed on the scribe line by the absence of droplets in the heated steam surface of the brittle substrate An object of the present invention is to provide a brake device for a brittle substrate which does not cause staining.

In order to achieve the above object, a brake device of a brittle substrate according to the present invention,

A nozzle unit coupled to the first chamber and the first chamber and injecting liquid having physical properties of heat transfer and expansion characteristics into the first chamber by using compressed air, and heating the droplet sprayed into the first chamber by the nozzle unit. Steam generating means comprising a first heater for changing the phase to wet saturated steam or dry saturated steam;

A steam heating means including a second chamber connected to the first chamber in a communicable state by a connecting pipe, and a second heater for heating wet saturated steam or dry saturated steam introduced into the second chamber;

Heated steam injection means for spraying the heated steam exhausted from the steam heating means to the brittle substrate to spread and break the cracks of the scribe line

Characterized in that it comprises a.

Here, the nozzle unit is preferably further provided with a control valve for adjusting the size or speed of the droplets injected into the first chamber.

And, the connecting pipe forms a slit which is a steam inlet on one side outer peripheral surface located in the first chamber,

It is preferable to form a discharge port for exhausting steam to the second chamber on the other side.

In addition, the first heater is preferably installed in the first chamber facing the nozzle unit.

In addition, the first chamber has a surface facing the nozzle portion at least partially open,

The open portion is closed by one side of the second chamber heated by the second heater,

One side of the second chamber is preferably the first heater.

In addition, the second chamber is provided with a temperature maintaining means for preventing the internal temperature of the drop,

The temperature maintaining means is preferably a ceramic of the porous body attached to all the inner wall except for the portion sealing the open portion of the first chamber.

In addition, the second chamber is coupled to the scribe head,

It is preferable that an insulating block having thermal insulation is interposed between the second chamber and the scribe head.

In addition, the heated steam heated by the steam heating means is preferably dry saturated steam or superheated steam.

In addition, the heating steam injection means is made by installing a heating steam injection block on the outside of one side of the second chamber in which the exhaust hole for exhausting the heating steam,

It is preferable that one side end is connected to the exhaust hole on the surface of the heating steam injection block facing one side of the second chamber and the other end forms an slit open toward the brittle substrate.

In addition, the guide bar is installed to be slidable along the guide rails disposed parallel to both sides of the table on which the brittle substrate is placed,

At least one of the steam generating means, the steam heating means and the heated steam spraying means may be installed to be movable along the guide bar.

In addition, the nozzle unit is installed so as to be slidable along guide rails disposed parallel to both sides of the table on which the brittle substrate is placed.

It is preferable to connect the heated steam injection means in communication with the nozzle unit.

According to the brake apparatus of the brittle substrate of the present invention described above, since the steam generated in the steam generating means is heated in the steam heating means and then injected into the scribe line of the brittle substrate, the temperature of the heated steam injected into the scribe line is uniform and high. Good crack spreading can be obtained and it can be braked effectively.

In addition, since there is no droplet in the heated steam heated by the steam heating means, even if heated steam is sprayed on the scribe line of the brittle substrate, there is an effect that the staining by the droplet does not occur, the production yield is improved.

In addition, the droplets of the fine particles injected into the first chamber of the steam generating means hit the first heater so as to be micronized into droplets of very fine particles and at the same time instantaneous phase change to steam due to an increase in the heat exchange area with the first heater. Since the droplets do not remain there is an effect that the noise generated by the boiling is prevented.

DETAILED DESCRIPTION Hereinafter, specific contents for carrying out the present invention described above will be described in detail with reference to the drawings. For reference, Figure 3 of the accompanying drawings is a perspective view showing a brake device of the brittle substrate according to the present invention, Figures 4 and 5 are a side view and a bottom view of the brake device shown in Figure 3, respectively, Figure 6 is Figure 4 It is a schematic sectional drawing which shows the A part of the.

The brake device for a brittle substrate according to an embodiment of the present invention is to spread and break cracks in the scribe line by spraying heated steam on the scribe line of the brittle substrate.

As shown in FIGS. 3 to 6, the brake device for the brittle substrate may include steam generating means, steam heating means for heating the steam introduced from the steam generating means, and heated steam exhausted from the steam heating means. And heated steam jetting means for jetting to the scribe line of the substrate.

Here, the steam generating means is coupled to the first chamber 100, the first chamber 100, the nozzle unit 300 for injecting liquid into the first chamber 100 using the compressed air, the nozzle unit It is installed to face 300 and comprises a first heater for heating the droplets injected into the first chamber 100 by the nozzle unit 300 to change the phase to steam.

As shown in FIG. 5, the nozzle unit 300 includes a liquid inlet 310 and an air inlet 320 facing each other, and the liquid inlet 310 is connected to an external liquid supply source and a hose. The air inlet 320 is connected to an external compressed air source and a hose.

Therefore, the liquid stored in the external liquid supply source is introduced into the nozzle unit 300 through the liquid inlet 310 by the compressed air introduced into the nozzle unit 300 through the air inlet 320, Thereafter, the liquid is changed into droplets in the form of fine particles while passing through the nozzle holes (not shown) and injected into the first chamber 100, and then strongly hits the first heater installed to face the nozzle unit 300. Phase changes to steam by heat exchange.

Here, the description 330 is a control valve installed in the nozzle unit 300, the control valve 330 is for adjusting the size or speed of the droplets are injected into the first chamber 100 through the nozzle hole.

On the other hand, one side of the first chamber 100 facing the nozzle unit 300 is opened in whole or in part (hereinafter referred to as 'open side'), the open side is steam heating means to be described later It is preferable to be sealed by the second chamber 200 of the.

In this case, it is preferable to use one side of the second chamber 200 which seals the open side of the first chamber 100 as the first heater.

That is, as will be described later, since the second chamber 200 is heated by a second heater, one of the second chambers 200 coupled to the open side of the first chamber 100 in a sealed state. The side surface is also maintained in a heated state to function as the first heater.

Therefore, the droplets of the particulate state injected from the nozzle hole of the nozzle unit 300 strongly hits the heated side of the second chamber 200 facing the spraying direction, and at the same time, the droplets are in the form of smaller microparticles. The heat exchange area between the temperature in the first chamber 100 and the heated one side of the second chamber 200 is widened to instantly change phase into steam. Here, the steam refers to wet saturated steam in which liquid and steam coexist, or dry saturated steam in which all phases are changed into steam.

Next, the steam heating means is to heat the steam generated in the first chamber 100 of the above-described steam generating means again, the second chamber 200 for receiving the steam introduced from the first chamber 100 and And a second heater 400 for heating the steam contained in the second chamber 200.

Here, the first chamber 100 and the second chamber 200 are connected to each other by a connection pipe 700 so that the steam generated in the first chamber 100 is transferred to the second chamber 200. do. To this end, one side of the connection pipe 700 is formed with an inlet for transferring the steam generated in the first chamber 100 into the connection pipe 700, while the other side exhaust port for exhausting the steam to the second chamber (200) Is formed, in the embodiment of the present invention forms a slit 710 on the outer circumferential surface of the connection pipe 700 located in the first chamber 100 is used as an inlet for the steam inlet.

The steam introduced into the second chamber 200 through the connecting pipe 700 is heated by the second heater to be heated steam. Here, the heated steam refers to dry saturated steam (乾燥 飽和 蒸氣: all phase-changed by steam) or superheated steam in which the dry saturated steam is heated again.

Meanwhile, since the inside and the surface of the second chamber 200 are maintained at a very high temperature by the second heater, that is, the heater 400 positioned in the second chamber 200, the second chamber 200 and the second chamber 200 are separated from each other. The scribe head 500 to be coupled or the guide bar to which the scribe head 500 is slidably coupled may be easily affected by the heat of the second chamber 200.

Therefore, in order to prevent this, in the embodiment of the present invention, as shown in FIG. 3, it is preferable to interpose an insulating block 600 having thermal insulation between the second chamber 200 and the scribe head 500.

In addition, the second chamber 200 preferably includes temperature maintaining means to prevent the internal temperature raised by the second heater 400 from dropping due to heat exchange with the outside. Herein, the temperature maintaining means refers to attaching a material having heat insulating properties, such as ceramics of the porous body, to the inner wall surface of the second chamber 200 or forming the wall surface of the second chamber 200 by the ceramic body of the porous body. For example, other configurations or materials may be used as long as they maintain the temperature. However, since one sidewall of the second chamber 200 that seals the open side of the first chamber 100 functions as a first heater, temperature maintaining means is omitted on one sidewall of the second chamber 200. .

Next, the heated steam heated by the second heater 400 in the second chamber 200 is exhausted through the exhaust hole 210, and the exhausted heated steam is heated to the scribe line of the brittle substrate by the heated steam spraying means. Sprayed (see FIG. 6).

Here, the heating steam injection means may be used by directly installing a conventional nozzle means to the above-described steam heating means or by using a hose or the like. However, in the exemplary embodiment according to the present invention, as shown in FIG. 6, an exhaust hole 210 is formed at one side of the second chamber 200 facing the connection pipe 700, and the exhaust hole ( The heating steam injection means is installed outside one side of the second chamber 200 in which the 210 is formed.

The heating steam injection means is formed by installing a heating steam injection block 800 in which a slit 810 is formed on an outer side of one side of the second chamber 200 in which the exhaust hole 210 is formed, wherein the slit 810 ) Is one end is connected to the exhaust hole 210 and the other end is open toward the brittle substrate.

Therefore, the steam heated in the second chamber 200 is exhausted through the exhaust hole 210, the heated steam passing through the exhaust hole 210 is the side of the second chamber 200 and the block for heating steam injection It is injected into the scribe line of the brittle substrate via the slit 810 of the (800).

The operation of the brake device of the brittle substrate of the embodiment of the present invention described above will be described below.

First, a scribe line is formed by moving a scribe cutter provided in the scribe head 500 along a cutting line of a brittle substrate, and then spraying heated steam with the above-described brake device along the scribe line of the brittle substrate to crack the crack. To spread the brakes.

Here, in the brake device, the steam generated by the steam generating means is heated by the steam heating means to be heated steam, and then sprayed toward the scribe line of the brittle substrate by the heated steam spraying means.

In more detail, in the steam generating means, the liquid stored in the external liquid supply source is introduced into the nozzle unit 300 using high pressure air, and the introduced liquid passes through the nozzle unit 300 to form a particulate state. Droplets are injected into the first chamber 100.

The sprayed droplets are phase-changed into steam by the internal temperature of the first chamber 100 and the first heater.

Here, the first heater is a heated side of the second chamber 200 which seals the open side of the first chamber 100 facing the nozzle unit 300, and passes through the nozzle unit 300. The droplets of the particulate state injected into the first chamber 100 strongly strike one side of the second chamber 200 to form droplets of smaller microparticles, and at the same time, the internal temperature of the first chamber 100 and the second chamber. The heat is exchanged with the heated side of 200 to instantly change phase into steam. At this time, the droplets of the particulate state sprayed from the nozzle unit 300 has a smaller cross-sectional area for heat exchange as the size thereof decreases, so that vaporization can be performed quickly. Thus, the adjustment of the size or speed of the droplets is performed by the nozzle unit. It is made through a control valve 330 installed on one side of (300).

Meanwhile, the steam formed in the first chamber flows back into the second chamber 200 of the steam heating means through the connecting pipe 700 and is heated by the second heater 400, and then, the connecting pipe 700. It is exhausted through the exhaust hole 210 formed in the other side facing one side of the second chamber 200 connected.

The heated steam exhausted through the exhaust hole 210 of the second chamber 200 is heated steam injection means, that is, a heated steam powder installed outside one side of the second chamber 200 in which the exhaust hole 210 is formed. The slit 810 of the use block 800 is injected into the scribe line of the brittle substrate.

As such, the heated steam injected into the scribe line of the brittle substrate diffuses and cracks the crack of the scribe line in the thickness direction of the brittle substrate.

Next, a method of braking a brittle substrate according to an embodiment of the present invention will be described. The method of braking a brittle substrate according to an embodiment of the present invention described below may be applied either by sequentially scribing or scribing a cutting line of the brittle substrate, or by breaking after the scribing process is completed.

Break method of a brittle substrate according to an embodiment of the present invention,

(Iii) generating steam by steam generating means;

(Ii) heating the steam generated by the steam generating means again by steam heating means;

(Iii) injecting the heated steam into a scribe line of the brittle substrate by means of heated steam injection means.

Here, the steam generated by the steam generating means is characterized in that the wet saturated steam or dry saturated steam, the steam heated by the steam heating means is characterized in that the dry saturated steam or superheated steam.

As mentioned above, although the Example about the brake apparatus and method of the brittle substrate of this invention was described concretely, this invention is not limited to the said Example and can be variously changed in the range which does not deviate from the technical summary.

That is, the above-mentioned brittle substrate in the present invention includes not only a glass substrate but also a quartz substrate, a sapphire substrate, a semiconductor wafer, a ceramic substrate, and the like. The liquid used to generate steam includes water (water). Of course, any one can be used as long as it has physical properties such as heat transfer and expansion characteristics that can diffuse cracks in the scribe line of the brittle substrate.

In addition, in the embodiment according to the present invention has been described taking the case that the brake device of the brittle substrate is coupled to the scribe head as an example, in contrast, the guide bar for the brake device separate from the guide bar to which the scribe head slides a guide rail It is also possible to install and use to move along this.

In this case, the heated steam injection means may be configured to slide along the guide bar, or instead of fixing the heated steam injection means to the guide bar, a nozzle extending along the width direction (Y direction in FIG. 1) of the guide bar. The unit is installed and used by connecting the slit 810 of the heating steam spray block 800 to the nozzle unit, or instead of the guide bar, the nozzle unit is installed to be slidably moved along the guide rail and thus the heating steam spraying is performed. The means may be installed and used.

In addition, in the embodiment according to the present invention, it is described that the first chamber 100 and the second chamber 200 constituting the steam generating means and the steam heating means 1: 1 correspond to each other. Various combinations are also possible depending on the size. For example, two second chambers 200 may be connected to one first chamber 100 in series or in parallel.

Here, the first chamber 100 and the second chamber 200 may be arranged to be spaced apart from each other, in this case, if the first chamber 100 and the second chamber 200 are provided with separate heating means, respectively Suffice.

1 shows a scribe device of the prior art;

2 is a schematic view showing a brake device of the prior art;

3 is a perspective view showing a brake device for a brittle substrate according to the present invention;

4 is a side view illustrating a brake device of the brittle substrate of FIG. 3.

FIG. 5 is a bottom view illustrating the brake device of the brittle substrate of FIG. 3. FIG.

FIG. 6 is a schematic cross-sectional view showing portion A of FIG. 4. FIG.

*** Explanation of symbols for the main parts of the drawing ***

100: first chamber 200: second chamber

210: exhaust hole 300: nozzle portion

310: liquid inlet 320: air inlet

330: control valve 400: heater

500: scribe head 600: insulating block

700: connector 710: slit

800: block for heating steam 810: slit

Claims (11)

A nozzle unit coupled to the first chamber and the first chamber and injecting liquid having physical properties of heat transfer and expansion characteristics into the first chamber by using compressed air, and heating the droplet sprayed into the first chamber by the nozzle unit. Steam generating means comprising a first heater for changing the phase to wet saturated steam or dry saturated steam; A steam heating means including a second chamber connected to the first chamber in a communicable state by a connecting pipe, and a second heater for heating wet saturated steam or dry saturated steam introduced into the second chamber; Heated steam injection means for spraying the heated steam exhausted from the steam heating means to the brittle substrate to spread and break the cracks of the scribe line Brake apparatus of a brittle substrate comprising a. The method of claim 1, The nozzle unit is a brake device of the brittle substrate, characterized in that further provided with a control valve for adjusting the size or speed of the droplets injected into the first chamber. The method of claim 1, The connecting pipe forms a slit which is a vapor inlet on one outer peripheral surface of the first chamber, The other side of the brittle substrate brake device, characterized in that the discharge port for exhausting the steam to the second chamber. The method of claim 1, The first heater is a brake of the brittle substrate, characterized in that installed in the first chamber facing the nozzle portion. The method of claim 4, wherein The first chamber is at least partially open to face the nozzle portion, The open portion is closed by one side of the second chamber heated by the second heater, One side of the second chamber is a brake of the brittle substrate, characterized in that the first heater. The method of claim 5, The second chamber is provided with a temperature holding means for preventing the internal temperature of the drop, The temperature holding means is a brake of a brittle substrate, characterized in that the ceramic of the porous body attached to all the inner wall except for the portion sealing the open portion of the first chamber. The method of claim 6, The second chamber is coupled to the scribe head, Brake apparatus for a brittle substrate, characterized in that the insulating block having a thermal insulation is interposed between the second chamber and the scribe head. The method of claim 1, The heating device heated by the steam heating means is a dry saturated steam or superheated steam brake apparatus of the brittle substrate. The method of claim 1, The heating steam injection means is made by installing a heating steam injection block on the outside of one side of the second chamber in which the exhaust hole for exhausting the heating steam is formed, Brake of the brittle substrate, characterized in that one side end is connected to the exhaust hole on the surface of the heating steam injection block facing one side of the second chamber, and the other end has an slit open toward the brittle substrate. Device. The method according to any one of claims 1 to 9, The guide bar is installed to be slidable along guide rails arranged parallel to both sides of the table on which the brittle substrate is placed, At least one of the steam generating means, steam heating means, heating steam injection means is installed to move along the guide bar brake device of a brittle substrate. The method according to any one of claims 1 to 9, The nozzle unit is installed to be slidable along guide rails arranged parallel to both sides of the table on which the brittle substrate is placed, Breaking device of the brittle substrate, characterized in that for connecting the heating steam injection means in communication with the nozzle unit.

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