KR100962361B1 - Thin film solar cell manufacturing deposition equipment - Google Patents

Abstract

Disclosed is a deposition apparatus for manufacturing a thin-film solar cell, which can prevent the deposition object from being contaminated by particles when manufacturing a thin-film solar cell, reduce the performance of the solar cell, and reduce the cost of maintenance.

The deposition apparatus for manufacturing a thin-film solar cell of the present invention includes a chamber having an inlet and an outlet into and out of a deposition object, a gas supply unit supplying gas into the chamber, a heating unit assembly disposed inside the chamber, and a guide disposed inside the chamber. And a transfer unit for transferring the deposition target fixing tray and the deposition target fixing tray sliding along the rail, the guide rail.

Solar Cell, Deposition, Silicon, Thin Film, Hot Wire, Vertical

Description

Evaporation coating device for manufacturing thin film type solar cell}

The present invention relates to a thin film deposition apparatus used to manufacture a thin film solar cell, and more particularly, to prevent contamination caused by particles when manufacturing a thin film solar cell, thereby reducing and maintaining performance degradation of the solar cell. The present invention relates to a deposition apparatus for manufacturing a thin-film solar cell capable of reducing maintenance costs.

Generally, thin film solar cells are manufactured by source gas decomposition, silicon deposition, PN junction formation, and anti-reflection film and electrode formation. The decomposition of the source gas is performed by introducing a source gas such as monosilane containing silicon into a vacuum and applying high energy such as plasma or hot wire. Normally, a gas mixture containing raw material gas and boron (B ₂ H ₆ ) is mixed on a glass substrate having a transparent electrode (ITO) heated at 200 ° C. to 300 ° C. to form a P-type thin film, and then monosilane is added to silicon. This deposits on the deposited object. Next, a thin film type solar cell is manufactured by mixing an raw material gas and a gas (Ph 3) containing phosphorus to form an N type thin film. The thin film deposition apparatus used in the manufacturing process of the conventional thin film solar cell has a horizontal arrangement structure in which a deposition object (glass substrate, etc.) is disposed below and a heating part including a gas supply device and a plasma source or a heating wire is positioned above the object. Is done.

Such a conventional thin film deposition apparatus has a problem that a particle attached to a gas supply device, etc. during the deposition process may fall into a deposition target, causing a defect of a solar cell, or deteriorating performance and efficiency.

In addition, in the case of using the hot wire, generally, both ends of the hot wire are fixed to each other, so that deformations such as sag are generated through a high temperature heating process, thereby changing electrical characteristics and thickness of silicon deposition. On the other hand, there is a problem that the maintenance cost is increased because the hot wire must be replaced frequently.

Therefore, the present invention has been proposed to solve the above problems, an object of the present invention is to prevent the falling of particles to the deposition target in the process of manufacturing a solar cell deposition apparatus for manufacturing a thin film type solar cell that can reduce the defect of the product To provide.

In addition, the present invention is to provide a deposition apparatus for manufacturing a thin-film solar cell that can reduce the maintenance work by increasing the service life of the hot wire.

In order to achieve the above object, the present invention is a chamber having an inlet and an outlet through which the deposition object is introduced or discharged, a gas supply unit for supplying gas into the chamber, a heating unit assembly disposed inside the chamber, Provided is a deposition apparatus for manufacturing a thin-film solar cell comprising a guide rail disposed inside the chamber, a deposition target fixing tray sliding along the guide rail, and a transfer unit for transferring the deposition target fixing tray.

The chamber is preferably made of a body, the cover is hinged to one side of the body and the fastening portion is coupled to the other side.

The chamber is preferably provided with a gas diffusion plate for diffusing the gas introduced into the interior through the gas supply to the heating unit assembly side.

The guide rail is preferably arranged in pairs apart at a certain distance up and down.

It is preferable that the deposition target is fixed and transported in a vertical state to the deposition target fixing tray.

The deposition target fixing tray is preferably provided with a groove into which the deposition target is fitted.

The heating unit assembly may include a fixing frame, hot wires fixed to the fixing frame at regular intervals, a first fixing part to which one end of the heating wires are fixed to the fixing frame, and a second fixing part to which the other ends of the heating wires are fixed to the fixing frame, 2 preferably comprises a tension control unit for adjusting the tension of the hot wires by adjusting the position of the fixing portion.

The tension adjusting part is a support plate which is fixed to the fixing frame, a tension adjusting member which is screwed to the support plate to press the second fixing part, disposed between the fixing frame and the second fixing part is the second fixing part It is preferable to include an elastic member for pressing to the tension control member side.

The first fixing part may include a first fixing block coupled to the fixing frame, a second fixing block fixed to the first fixing block by a fastening member, and the hot wires are disposed between the first fixing block and the second fixing block. It is preferable to include a fastening member for fixing the first fixed block and the second fixed block.

The second fixing part may include a third fixing block disposed in a groove provided in the fixing frame, a fourth fixing block fixed to the third fixing block by a fastening member, and the heating wires between the third fixing block and the fourth fixing block. It is preferable to include fastening members disposed and fixing the third fixing block and the third fixing block.

The heating unit assembly is preferably fixed to the chamber with the heating wires arranged in the vertical direction.

Preferably, the transfer unit includes a driving source coupled to the chamber, and one or more transfer rods rotated by the driving source to move the deposition target or the deposition target fixing tray along the guide rail.

The present invention reduces the defects of the product by preventing contamination of the deposition object by particles falling freely on the gas supply side through a structure in which the heating unit assembly and the deposition object face each other in the vertical direction. Has the effect.

In addition, the present invention has the effect of reducing the maintenance cost by extending the life of the hot wires by optimizing by adjusting the tension of the hot wires precisely to match the characteristics of each hot wire by the tension control unit when setting the initial hot wires. .

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a view showing a position where a process chamber is arranged and applicable to an embodiment of the present invention, and shows a deposition apparatus for manufacturing a thin film solar cell.

The deposition apparatus for manufacturing a thin film solar cell includes a loading unit L, a first chamber 1, a second chamber 3, a third chamber 5, and an unloading unit UL. The loading unit L may supply a deposition target to the inside of the first chamber 1, and a conventional apparatus such as a transfer robot may be used. In addition, the unloading unit UL is a device for taking out a deposition object in a state in which the processing process is completed in the third chamber 5, and a conventional device such as a transfer robot may also be used.

In addition, in the thin film solar cell, a P-type layer and an N-type layer are usually formed on a glass substrate (hereinafter referred to as a 'deposition object') by a deposition process. The deposition process applied to the thin film solar cell may be performed by moving the deposition targets to the first chamber 1, the second chamber 3, and the third chamber 5.

2 is a perspective view showing an example of the above-described chambers for explaining an embodiment of the present invention, Figure 3 is a perspective view showing the main part of Figure 2, Figure 4 is an exploded view of the main part of Figure 3, The chamber 11 is shown.

The chamber 11 in the embodiment of the present invention may be composed of a body 13 and a cover 15. The body 13 is provided at both sides with an inlet 17 and an outlet 19 through which deposition objects (such as a glass substrate, W (shown in FIG. 4)) can enter or exit in a vertical state. Moreover, the above-mentioned chamber 11 is provided with the gas supply part 21 (shown in FIG. 2) for supplying source gas etc. in the inside.

The bottom surface of the cover 15 is hinged to the body 13. The upper portion of the cover 15 is coupled to the body 13 by the fastening member 23. As the fastening member 23 for coupling the body 13 and the cover 15, a conventional one-touch clamp or the like may be used. As such, when the cover 15 is hinged to the body 13, the structure in which the coupling state 23 can be maintained by the fastening member 23 made of a one-touch clamp, the cover 15 can be easily removed if necessary. It can be easily separated and maintained.

The gas diffusion plate 31 for diffusing the source gas supplied from the gas supply part 21 is coupled to the cover 15 described above. The gas diffusion plate 31 has a plurality of perforated holes to disperse the gas in a wide plane.

In addition, the heating unit assembly 33 is coupled to the cover 15 at a position where the gas diffusion plate 31 and a predetermined space are floated. In addition, the body 13 is provided with guide rails 35 and 37 (shown in FIG. 5) for guiding the deposition object W to slide in a vertically standing state to be introduced into or discharged from the outside. And the body 13 is provided with the conveyance part 39 (shown in FIG. 8) which conveys the deposition object W. As shown in FIG.

As shown in FIGS. 6 and 7, the heating unit assembly 33 described above has a fixing frame 41 provided with a space at a central portion and formed in a substantially rectangular shape, and is coupled to a lower end of the fixing frame 41 and has a heating wire ( The first fixing part 45 for fixing one end of the 43, the second fixing part 47 disposed on the fixing frame 41 and fixing the other end of the heating wire 43, and the second fixing part 47 And a tension control unit 49 (shown in FIG. 6) for varying the position to adjust the initial tension of the heating wire.

The first fixing part 45 includes a first fixing block 51 and a second fixing block 53, and fastening members 55 coupling the first fixing block 51 and the second fixing block 53. do. The first fixing block 51 is coupled to the groove 41a provided in the lower end of the fixing frame 41 by a fastening member such as a separate screw or bolt at regular intervals. The second fixing block 53 is coupled to one surface of the first fixing block 51 by the fastening member 55. And the heating wire 43 is disposed so that one end is sandwiched between the first fixing block 51 and the second fixing block 53 described above and is fixed by a fastening member 55 such as a screw or bolt. It is preferable that a plurality of such heating wires 43 are arranged at regular intervals.

The second fixing part 47 is another fastening member 65 for coupling the third fixing block 61 and the fourth fixing block 63 and the third fixing block 61 and the fourth fixing block 63. Include them. The third fixing block 61 is disposed at regular intervals in another groove 41b provided at the upper end of the fixing frame 41. The fourth fixed block 63 is coupled to one surface of the third fixed block 61 by another fastening member 65. And the heating wire 43 is arranged so that the other end is sandwiched between the third fixing block 61 and the fourth fixing block 63 described above and is fixed by a fastening member 65 such as a screw or bolt. A plurality of such heating wires 43 are arranged at regular intervals. In addition, the second fixing part 47 is coupled in a state where the position thereof may be changed by the tension adjusting part 49.

As shown in FIG. 6, the tension adjusting unit 49 includes a support plate 71 coupled to the fixing frame 41 as a fastening member, and a plurality of tension adjusting members 73 penetrated through the support plate 71. And an elastic member 75 having an elastic force acting to press the second fixing part 47 toward the tension control member 73.

The support plate 71 blocks a part of the groove 41b provided in the fixing frame 41 so that the second fixing parts 41 may be held in the groove 41b so as to maintain a state in which the second fixing parts 41 are received. It is coupled to a fastening member such as a bolt. In addition, the support plate 71 is provided with a plurality of holes at regular intervals, so that the heating wires 43 may be fixed therethrough. The tension adjusting member 73 may be coupled to the support plate 71 at regular intervals and may be in close contact with the third fixing block 61 or the fourth fixing block 63 of the second fixing part 47. And the elastic member 75 is preferably made of a compression coil spring, it is disposed in the groove 41b of the fixing frame 41 so that the second fixing portion 47 is in close contact with the tip of the tension control member 73.

Meanwhile, the guide rails 35 and 37 (shown in FIGS. 5 and 8) are disposed on the body 13 described above. The guide rails 35 and 37 may be disposed in a direction in which the deposition target fixing tray 91 may be moved through the inlet 15 and the outlet 17. In addition, the guide rails 35 and 37 are spaced apart in a predetermined distance in the up and down directions to form a pair. The guide rails 35 and 37 may be arranged to be moved in a state in which the deposition object W is disposed vertically, or may move the deposition object in a state inclined at a predetermined angle with respect to the vertical. It is also possible to arrange the positions differently.

In the deposition target fixing tray 91, fitting grooves 91a are formed at positions facing each other, and the deposition targets W are fitted in the fitting grooves 91a (shown in FIG. 4). The deposition object fixing tray 91 may be disposed between the above-described guide rails 35 and 37 in a state in which the deposition object W is coupled, and may slide.

And the inside of the body 13 is provided with a transfer portion 39 that can move the above-described deposition target fixing tray 91 to the adjacent chamber. The transfer part 39 includes drive sources such as the motors M1 and M2 and transfer rods 101 and 103 which rotate by the drive sources. The transfer rods 101 and 103 have a structure in which a part is bent, and is rotated by a driving source to push one side of the deposition target W or the deposition target fixing tray 91 to be transferred along the guide rails 35 and 17. Can be. In the exemplary embodiment of the present invention, the transfer part 39 is illustrated and described as an example of the transfer rods 101 and 103 that are rotated by the driving source, but the present invention is not limited thereto.

When the deposition object is deposited in the chamber according to the embodiment of the present invention made as described above are as follows.

First, the heating wires 43 are set in the fixing frame 41 forming the heating unit assembly 33. In this case, one end of the heating wire 43 is disposed between the first fixed block 51 and the second fixed block 53, and the first fixing block 51 and the second fixed block 53 are fastened by the fastening member 55. To combine. Then, one end of the heating wire 43 is inserted and fixed between the first fixing block 51 and the second fixing block 53.

In addition, the heating wire 43 is arranged so that the other end is located between the third fixed block 61 and the fourth fixed block 63, and the third fixed block 61 and the fourth fixed block with another fastening member 65. Coupling (63), the other end of the heating wire 43 is sandwiched between the third fixed block 61 and the fourth fixed block 63 is fixed. Therefore, this method fixes the heating wire 43 to the fixing frame (41).

However, the fixed heating wires 43 are in a state in which respective tensions are not fixed uniformly. Therefore, the operator adjusts the tension of each of the heating wire 43 by using the tension adjusting unit (49). That is, when the tension adjusting member 73 is rotated, the tension adjusting member 73 moves along the length of the heating wire 43 along the support plate 71. Therefore, the operator can easily set the initial tension of the heating wire 43. And since the elastic member 75 is arranged so that the elastic force is always applied to the tension adjusting member 73 side of the second fixing portion 47 can maintain the tension in a constant state.

This operation can increase the service life of the heating wires 43 by precisely setting a tension suitable for the characteristics of the heating wires 43 in advance when the heating wire 43 is repeatedly heated and expanded and contracted. Therefore, it is possible to reduce the cost required for maintenance due to the increase in the life of the heating wire (43).

The heating part assembly 33 thus set is fixed to the inside of the cover 15 in a state in which the cover 15 is opened in the body 13. The cover 15 is coupled to the body 13 using the fastening member 23. At this time, the heating wires 43 of the heating unit assembly 33 is preferably disposed in a vertical state. That is, the heating unit assembly 33 and the deposition target W should be disposed to face each other in a state perpendicular to each other to prevent particles on the gas supply unit 21 from falling onto the deposition target, resulting in poor deposition. Can be prevented.

In addition, the first chamber 1 in a state in which the deposition target W is fitted into the fitting groove 91a provided in the fixing tray 91 is shown in FIG. To feed. That is, the fixing trays 91 are fitted to both the upper and lower sides of the deposition target W.

The fixed tray 91 into which the deposition object W is fitted is supplied to the first chamber 1 through the inlet 15 by the loader in the loading part L. At this time, the fixing tray 91 is moved along the guide rails 35 and 37 and disposed at the center portion. Of course, the deposition target W is preferably arranged in a vertical state. However, depending on the deposition conditions, the deposition target W is not necessarily disposed only vertically, but may be disposed at another angle close to the vertical.

In this state, when the source gas is supplied to the inside of the first chamber 1, the source gas is decomposed by applying high thermal energy using a hot wire. At this time, a P-type silicon thin film is deposited on the deposition target W by mixing and injecting a gas containing boron gas into the source gas.

Then, the deposition target fixing tray 91 is transferred to the second chamber 3 to proceed to the next process. At this time, by controlling the motor (M1, M2) by a control unit (not shown) in order to drive. Then, the transfer rod 101 rotates to closely adhere to the deposition target fixing tray 91 and pushes the deposition target fixing tray 91 in one direction (shown in FIG. 8). Subsequently, while another transfer rod 103 is rotated, the depositing object fixing tray 91 is pushed by the same method.

Accordingly, when the deposition target fixing tray 91 is moved along the guide rails 35 and 37, the deposition target fixing tray 91 moves to the second chamber 3 disposed adjacent thereto. Therefore, the solar cell may be manufactured while the second chamber 3 is subsequently processed.

This embodiment of the present invention can be set to the optimum state by adjusting the tension of the heating wires 43 provided to the heating unit assembly 33, respectively, can extend the life of the heating wires 43 and maintenance costs Can be reduced. In addition, the embodiment of the present invention is formed so that the heating unit assembly 33 and the deposition target is disposed perpendicular to each other to prevent particles falling from the source gas supply side or the heating assembly assembly directly falling on the deposition target. This can reduce product defects.

Meanwhile, although not directly mentioned in the above-described embodiment of the present invention, another structure for preventing particles from directly falling onto the deposition target is to invert the horizontal structure of the conventional gas supply unit and the heating unit assembly, thereby heating the gas supply unit and the lower part of the substrate. Place the subassembly. Accordingly, the conventional closed end of the silicon thin film deposited on the bottom surface of the substrate and the particles fall on the substrate can be prevented.

FIG. 9 is a view corresponding to FIG. 6 to illustrate another embodiment of the present invention. The same parts as the above-described embodiment of the heating unit assembly in another embodiment of the present invention will be replaced with the description of the above-described embodiment and only the differences will be described. In another embodiment of the present invention, the first fixing part 45 is rotatably coupled to the fixing frame 41 by the rotation shaft 151. That is, a hole 41c into which the hinge shaft 151 can be inserted in the horizontal frame (see FIG. 9) is provided in the fixing frame 41. The first fixing part 45 is provided with another hole (not shown) at a position corresponding to the hole 41c. The hole provided in the first fixing part 45 is preferably provided in an eccentric position of the first fixing part 45. The first fixing part 45 is preferably coupled to the structure that can rotate by its own weight around the hinge shaft 151 described above. The fixing structure of the first fixing part 45 is that when the heat wire 43 is broken during the deposition process, the first fixing part 45 is caused by the weight of the wall by the wall of the fixing frame 41 toward the gas supply part 21 due to its own weight. It is preferable that the rotational movement is limited and can be rotated to the opposite side. This structure is intended to prevent the electrical short circuit may occur due to the hot wire 43 broken during the deposition process coming into contact with an electric device or the like that may be provided on the gas supply part 21 side.

1 is a view for explaining an arrangement position of the process chamber in order to explain the embodiment of the present invention.

Figure 2 is a perspective view showing the overall appearance of an embodiment of the present invention.

3 is a perspective view showing a part of the interior of the embodiment of the present invention.

4 is an exploded perspective view illustrating the main part of FIG. 3.

5 is a cross-sectional view taken along the line VV of FIG. 2.

6 is a perspective view showing a heating unit assembly which is a main part of the present invention.

FIG. 7 is an exploded perspective view illustrating an exploded view of the main part of FIG. 6.

8 is a view for explaining the operation of the transfer unit for transporting the deposition object or a fixed tray for fixing the deposition object.

FIG. 9 is a diagram corresponding to FIG. 6 and for explaining another exemplary embodiment.

Claims (12)

A chamber having an inlet and an outlet through which an object to be deposited is introduced or discharged; A gas supply unit supplying gas into the chamber; A heating unit assembly disposed inside the chamber and including a plurality of heating wires; A guide rail disposed inside the chamber; A deposition target fixing tray sliding along the guide rail; It includes a transfer unit for transferring the deposition target fixed tray, The heating unit assembly Deposition apparatus for manufacturing a thin-film solar cell is fixed to the chamber with the hot wires arranged in a vertical direction. The method according to claim 1, The chamber is body, One side hinged to the body and the cover coupled to the other side coupling Deposition apparatus for manufacturing a thin-film solar cell consisting of. The method according to claim 1, The chamber And a gas diffusion plate for diffusing the gas flowing into the heating unit assembly toward the heating unit assembly. The method according to claim 1, The guide rail Deposition apparatus for manufacturing thin-film solar cells are arranged in pairs apart from a certain distance up and down. The method according to claim 1, The deposition target fixed tray Deposition apparatus for manufacturing a thin-film solar cell is fixed to the deposition object is transferred in a vertical state. delete The method according to claim 1, The heating unit assembly Fixing frame; Hot wires fixed to the fixing frame at regular intervals; A first fixing part of which one end of the heating wire is fixed to the fixing frame; A second fixing part to which the other ends of the heating wires are fixed to the fixing frame; A tension adjusting unit controlling the tension of the heating wires by adjusting the position of the second fixing unit; Deposition apparatus for manufacturing a thin-film solar cell comprising a. The method of claim 7, The tension control unit A support plate fixed to the fixing frame; A tension adjusting member screwed to the support plate to press the second fixing part; An elastic member disposed between the fixing frame and the second fixing part to press the second fixing part toward the tension adjusting member; Deposition apparatus for manufacturing a thin-film solar cell comprising a. The method of claim 7, The first fixing part A first fixing block coupled to the fixing frame; A second fixing block fixed to the first fixing block by a fastening member; Fastening members arranged between the first fixing block and the second fixing block and fixing the first fixing block and the second fixing block; Deposition apparatus for manufacturing a thin-film solar cell comprising a. The method of claim 7, The second fixing part A third fixing block disposed in the groove provided in the fixing frame; A fourth fixing block fixed to the third fixing block by a fastening member; Fastening members arranged between the third fixing block and the fourth fixing block and fixing the third fixing block and the third fixing block; Deposition apparatus for manufacturing a thin-film solar cell comprising a. The method according to claim 1, The transfer unit One or more drive sources; One or more transfer rods rotated by the driving source to move the deposition target or the deposition target fixing tray and move along the guide rail; Deposition apparatus for manufacturing a thin-film solar cell having a. The method of claim 7, The first fixing part Deposition apparatus for manufacturing a thin-film solar cell is fixed to the hinge shaft while having an eccentric so as to rotate by its own weight.

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