KR101030536B1 - Liquid crystal display mask and pattern spacer manufacturing method using same - Google Patents

Abstract

The present invention relates to a mask for a liquid crystal display device that can form a pattern of the patterned spacer so as to fill the space between the patterned spacer and the remaining film to prevent damage of the patterned spacer due to the pressure of the liquid crystal. Blocking unit to block; A first transmission part for transmitting the light; And at least one second transmission part that transmits the light and is formed along a circumference of the first transmission part.

Liquid Crystal Display, Mask, Diffraction, Patterned Spacer

Description

A mask for a liquid crystal display device and a method for fabricating a patterned spacer}

1 is a cross-sectional view showing a schematic configuration of a conventional liquid crystal display device

2 is a cross-sectional view of a liquid crystal display device including a conventional patterned spacer.

Figure 3a is a process cross-sectional view showing a manufacturing method of a conventional patterned spacer

4 is a view for explaining the energy distribution of light by diffraction of light onto a mask for a conventional liquid crystal display device;

5 is a perspective view of a mask for a liquid crystal display according to a first embodiment of the present invention.

FIG. 6 is a diagram illustrating an energy distribution of light passing through the first transmission part and the second transmission part of FIG. 5.

7A to 7C are cross-sectional views illustrating a method of manufacturing a patterned spacer using a mask for a liquid crystal display according to an exemplary embodiment of the present invention.

8 is a perspective view of a mask for a liquid crystal display according to a second embodiment of the present invention.

* Explanation of symbols on the main parts of the drawings

155: mask 160: blocking unit

170a: first transmission part 170b: second transmission part

The present invention relates to a manufacturing apparatus of a liquid crystal display device, and fills the space between the patterned spacer and the remaining film to form a pattern of the patterned spacer so as to prevent breakage of the patterned spacer due to the pressure of the liquid crystal. A mask for a liquid crystal display device.

As the information society develops, the demand for display devices is increasing in various forms.In recent years, liquid crystal display (LCD), plasma display panel (PDP), electro luminescent display (ELD), and vacuum fluorescent display (VFD) have been developed. Various flat panel display devices have been studied, and some of them are already used as display devices in various devices.

Among them, LCD is the most widely used as a substitute for CRT (Cathode Ray Tube) for the use of mobile image display device because of the excellent image quality, light weight, thinness and low power consumption. In addition, it is being developed in various ways, such as a television for receiving and displaying broadcast signals, and a monitor of a computer.

As described above, although various technical advances have been made in order for the liquid crystal display device to serve as a screen display device in various fields, the task of improving the image quality as the screen display device has many advantages and disadvantages.

Therefore, in order for a liquid crystal display device to be used in various parts as a general screen display device, the key to development is how much high quality images such as high definition, high brightness, and large area can be realized while maintaining the characteristics of light weight, thinness, and low power consumption. It can be said.

Such a liquid crystal display device may be broadly divided into a liquid crystal panel displaying an image and a driving unit for applying a driving signal to the liquid crystal panel, wherein the liquid crystal panel includes a first and second substrates having spaces, and It consists of a liquid crystal layer injected between the first substrate and the second substrate.

The first substrate (TFT array substrate) may include a plurality of gate lines arranged in one direction at a predetermined interval, a plurality of data lines arranged at regular intervals in a direction perpendicular to the gate lines, and the respective gates. A plurality of thin film transistors which are switched by signals of the gate line and a plurality of pixel electrodes formed in a matrix form in each pixel region defined by crossing a line and a data line, transmit a signal of the data line to each pixel electrode. Formed.

In addition, the second substrate (color filter substrate) includes a black matrix layer for blocking light in portions other than the pixel region, an R, G, and B color filter layers for expressing color colors, and a common electrode for implementing an image. Is formed.

The first and second substrates have a predetermined space by spacers and are bonded by a sealant to form a liquid crystal between the two substrates.

Hereinafter, a conventional general liquid crystal display device will be described in detail with reference to the accompanying drawings.

1 is a cross-sectional view showing a schematic configuration of a conventional liquid crystal display device.                         

As shown in FIG. 1, a conventional liquid crystal display device includes first and second substrates 10a and 10b having a space and face each other, and the first substrate 10a and the second substrate ( The liquid crystal layer 70 is formed between 10b), and the first substrate 10a is divided into a thin film transistor region T and a pixel region P. As shown in FIG.

The first substrate 10a may include a gate line (not shown) arranged in one direction, a gate electrode GE protruding from the gate line, and formed in the pixel region P, and the gate electrode GE. Gate insulating film GI formed on the entire surface of the first substrate 10a including the semiconductor substrate 20, the semiconductor layer 20 formed on the gate insulating film GI above the gate electrode GE, and the gate line. Data lines (not shown) arranged in a direction perpendicular to the source and source / drain electrodes SE and DE formed at both edges except the channel region of the semiconductor layer 20, and a part of the drain electrode DE. A pixel having a drain contact hole C exposing the light emitting layer, the passivation layer 40 formed on the entire surface of the first substrate 10a, and the drain electrode hole C connected to the drain electrode DE through the drain contact hole C. The pixel electrode 50 formed in the region P. There.

The second substrate 10b includes a black matrix layer BM for blocking light in portions other than the pixel region P, and a color filter layer formed in each pixel region P to express color. And a common electrode 65 formed on the entire surface of the second substrate 10b including the color filter layer 60 and the black matrix layer BM.

In addition, although not shown in the drawings, the first alignment layer and the second alignment layer for aligning the liquid crystal molecules of the liquid crystal layer 70 in one direction on opposite surfaces of the first substrate 10a and the second substrate 10b. An alignment film is formed.

The first substrate 10a and the second substrate 10b are held in the cell gap by the ball spacer 80, and are bonded by a sealing material (not shown).

The liquid crystal layer 70 is formed between the first substrate 10a and the second substrate 10b bonded by the sealing material.

Here, the material forming the ball spacer 80 is selected from glass fibers or organic materials having elasticity against external pressure, and the ball spacer 80 is randomly formed on the first or second substrates 10a and 10b. As distributed randomly, the following problems occur.

First, each of the alignment layer defects may occur as the ball spacers 80 move.

Second, a light leakage phenomenon occurs around the ball spacer due to the adsorption force between the liquid crystal molecules of the liquid crystal layer 70 adjacent to the ball spacer 80.

Third, when applied to a large area liquid crystal display device, it is difficult to maintain a stable cell gap.

Fourth, since the ball spacer 80 has an elastic force and cannot be fixed in position, a ripple phenomenon in which the image quality of the screen darkens in a wavy shape when the screen is touched may appear severely.

In conclusion, there is a problem that it is difficult to secure high-definition characteristics in the liquid crystal display device which maintains the cell gap using the ball spacer 80.

In order to solve this problem, a patterned spacer of a method of forming a spacer pattern at a predetermined position using a photo and etching process has been proposed.

2 is a cross-sectional view of a liquid crystal display device including a conventional patterned spacer.

The structure of the liquid crystal display including the conventional patterned spacer is the same as the conventional liquid crystal display shown in FIG. 2, and only the spacers show a difference, and thus the description of the rest of the configuration except for the spacer will be omitted. Shall be.

That is, as shown in FIG. 2, the patterned spacer 90 maintains a cell gap between the first substrate 10a and the second substrate 10b and is disposed on the black matrix layer BM. Formed.

When the patterned spacer 90 is used, a cell gap can be easily maintained, and can be formed to be fixed only in a portion except the pixel region P, thereby reducing light leakage and in a model requiring a small cell gap. Even when applied, the cell gap can be precisely controlled, and the rigidity of the product can be improved by fixing the position of the patterned spacer 90, and this characteristic has the advantage of preventing the ripple phenomenon when the screen is touched.

The patterned spacers 90 may be formed on the first substrate 10a or the second substrate 10b. As described above, the patterned spacers 90 may be patterned through photo and etching processes under the respective alignment layers.

Hereinafter, the process of forming the patterned spacer will be described in detail.                         

FIG. 3A is a process cross-sectional view showing a conventional method for manufacturing a patterned spacer, and FIG. 4 is a view for explaining an energy distribution of light due to diffraction of light onto a mask for a conventional liquid crystal display device.

First, as shown in FIG. 3A, a substrate 31 having an alignment layer 32 formed thereon is prepared, and a photoresist 33 is formed on the entire surface of the substrate 31 including the alignment layer 32.

Subsequently, as shown in FIG. 3B, the mask 55 is aligned on the substrate 31 including the photoresist 33, and light (ultraviolet ray) is applied to the photoresist 33 through the mask 55. ), The photoresist 33 is selectively exposed.

Thereafter, when the exposed photoresist 33 is developed, a portion of the exposed photoresist 33 positioned in the transmissive part 55a of the mask 55 remains as shown in FIG. 3C, and the mask ( The portion of the photoresist 33 that is not exposed because it is located at the blocking portion 55b of 55 is removed. Here, the portion of the photoresist 33 that remains as it is exposed is the patterned spacer 95. At this time, due to the diffraction of the light, the photoresist pattern 18 (hereinafter, referred to as a residual film) remains around the patterned spacer 95.

That is, as shown in FIG. 4, the energy distribution of the light passing through the transmission part 55a of the mask 55 is the strongest at the center of the transmission part 55a and weakens as it moves away from the center part. The energy of the light increases in a portion of the blocking portion 55b spaced apart from the transmission portion 55a by a diffraction phenomenon so that the photoresist 33 positioned in the portion is exposed to form the residual film 18. In detail, the remaining film 18 is spaced apart from the patterned spacer 95 by a predetermined interval and is formed around the patterned spacer 95.

As described above, the substrate 31 on which the patterned spacers 95 are formed is subjected to a liquid crystal injection process. In general, the liquid crystal 18 is a liquid crystal that injects the liquid crystal 18 by osmotic pressure by keeping the inlet in the liquid crystal liquid by maintaining the vacuum between the first and second substrates bonded by the sealing material in a vacuum state. After the appropriate amount of liquid crystal is dropped into the injection method and the first substrate or the second substrate, the liquid crystal dropping method may be formed by bonding the first substrate and the second substrate together.

Meanwhile, when the liquid crystal is injected into the space formed by the patterned spacer 95 and the residual film 18, pressure increases in the space by the liquid crystal, and the patterned spacer ( 95) had a problem that is broken.

The present invention has been made to solve the above problems, and provides a mask for a liquid crystal display device that can prevent the damage of the patterned spacer by the liquid crystal injection by patterning to fill the space between the patterned spacer and the residual film. Its purpose is to.

According to an aspect of the present invention, a mask for a liquid crystal display device includes: a blocking unit for blocking light; A first transmission part for transmitting the light; And a second transmission portion formed around the first transmission portion.

Hereinafter, a mask for a liquid crystal display according to the present invention will be described in detail with reference to the accompanying drawings.

5 is a perspective view of a mask for a liquid crystal display according to a first embodiment of the present invention.

As shown in FIG. 5, the mask 155 for a liquid crystal display according to the first embodiment of the present invention includes a blocking unit 160 for blocking light, a first transmitting unit 170a for transmitting the light, And a second transmission part 170b formed around the first transmission part 170a.

Here, the first transmission portion 170a has a circular shape, and the second transmission portion 170b has a ring shape.

When forming the patterned spacer using the exposure mask 155 according to the embodiment of the present invention configured as described above, how the space between the patterned spacer and the remaining film is filled in detail as follows.

FIG. 6 is a diagram illustrating energy distribution of light passing through the first and second transmission parts of FIG. 5, and FIGS. 7A to 7C illustrate a method of manufacturing a patterned spacer using a mask for a liquid crystal display according to an exemplary embodiment of the present invention. Process cross-sectional view showing the.

First, as shown in FIG. 7A, a substrate 131 having an alignment layer 132 formed thereon is prepared, and a photoresist 133 is formed on the entire surface of the substrate 131 including the alignment layer 132. The substrate 131 may be a first substrate on which a thin film transistor array is formed or a second substrate on which a color filter array is formed.                     

Next, as shown in FIG. 7B, the mask 155 is aligned on the substrate 131 on which the photoresist 133 is formed, and light (ultraviolet) is irradiated through the mask 155 to provide the photo. The resist 133 is selectively exposed.

Next, as illustrated in FIG. 7C, when the exposed photoresist 133 is developed, a portion of the exposed photoresist 133 positioned in the first transmission part 170a of the mask 155 may be patterned spacers. (195). The first residual layer 118 is formed to be spaced apart from the patterned spacer 195 by light passing through the second transmission unit 170b and light diffracted from the first transmission unit 170a. In addition, a second residual layer 750 is formed between the patterned spacer 195 and the first residual layer 118 by light diffracted from the second transmission unit 170b. That is, as shown in FIG. 6, the second residual film 750 has light diffracted from the second transmission portion 170b of the mask 155 with the patterned spacer 195 and the first residual film 118. Is formed by exposing a portion of the photoresist 133 positioned between the layers. In this way, the space between the patterned spacer 195 and the first residual film 118 may be filled. In addition, reference numeral 200a, which has not been described, is an energy distribution curve of light passing through the first transmission part, and reference numeral 200b is an energy distribution curve of light passing through the second transmission part.

In the substrate 131 on which the patterned spacer 195 formed as described above is formed, liquid crystal is injected between another substrate facing the substrate 131.

The liquid crystal 18 is a liquid crystal injection method and a first substrate in which a liquid crystal is injected by osmotic pressure by holding an inlet in a liquid crystal liquid by maintaining a vacuum state between a first substrate and a second substrate bonded by a sealing material. Alternatively, the liquid crystal dropping method may be formed by dropping an appropriate amount of liquid crystal onto the second substrate and then attaching the first substrate and the second substrate.

In this case, since the second residual film 750 is formed between the patterned spacer 195 formed on the substrate 131 and the first residual film 750, the patterned spacer 195 and the first residual film 118 are formed. The liquid crystal cannot penetrate between the two layers. Therefore, an increase in pressure between the patterned spacer 195 and the first residual film 118 due to the liquid crystal may be prevented, and the patterned spacer 195 may be prevented from being damaged by the pressure. .

Meanwhile, the first transmission part 170a and the second transmission part 170b of the mask 155 may have various shapes.

8 is a perspective view of a mask for a liquid crystal display according to a second embodiment of the present invention.

That is, as shown in FIG. 8, the first transmission part 270a of the mask 255 may have a quadrangular shape, and the second transmission part 270b may have a rectangular frame shape. Meanwhile, reference numeral 260, which has not been described, indicates a blocking unit.

The present invention described above is not limited to the above-described embodiment and the accompanying drawings, and it is common in the art that various substitutions, modifications, and changes can be made without departing from the technical spirit of the present invention. It will be evident to those who have knowledge of.

The mask for a liquid crystal display device according to the present invention described above has the following effects.

The mask for a liquid crystal display of the present invention may form a pattern of the patterned spacer so as to fill the space between the patterned spacer and the remaining film. Therefore, the damage of the said patterned spacer by the pressure of the conventional liquid crystal can be prevented.

Claims (6)

Blocking unit for blocking the light; A first transmission part for transmitting the light; And At least one second transmission portion that transmits the light and is formed along a circumference of the first transmission portion; By this 1st and 2nd permeation | transmission part, A portion of the photoresist exposed and positioned in the first transmission portion is formed of a patterned spacer; A first residual film is formed by being spaced apart from the patterned spacer by light passing through the second transmission portion and light diffracted from the first transmission portion; And, And a second residual film is formed between the patterned spacer and the first residual film by light diffracted from the second transmission part. The method of claim 1, And the first transmission part is a circular shape. The method of claim 1, And the second transmission portion has a ring shape. The method of claim 1, And the first transmission part is a quadrangle. The method of claim 1, The second transmission portion is a mask for a liquid crystal display device, characterized in that the rectangular frame shape. Blocking unit for blocking the light; A first transmission part for transmitting the light; And preparing a mask for liquid crystal display device that transmits the light and includes at least one second transmission part formed along a circumference of the first transmission part. Preparing a substrate having an alignment layer formed on its entire surface; Forming a photoresist on the entire surface of the substrate including the alignment layer; Aligning the mask for the liquid crystal display device on the substrate on which the photoresist is formed, and selectively exposing the photoresist by irradiating light through the mask for the liquid crystal display device; Developing the exposed photoresist; When this exposed photoresist pattern is developed, A portion of the photoresist exposed and positioned in the first transmission portion is formed of a patterned spacer; A first residual film is formed by being spaced apart from the patterned spacer by light passing through the second transmission portion and light diffracted from the first transmission portion; And, And a second residual film is formed between the patterned spacer and the first residual film by the light diffracted from the second transmission part.

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