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KR101281517B1 - High-speed X-ray analysis system for the analyzing of the GaN Growth layer - Google Patents

High-speed X-ray analysis system for the analyzing of the GaN Growth layer Download PDF

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KR101281517B1
KR101281517B1 KR1020100080551A KR20100080551A KR101281517B1 KR 101281517 B1 KR101281517 B1 KR 101281517B1 KR 1020100080551 A KR1020100080551 A KR 1020100080551A KR 20100080551 A KR20100080551 A KR 20100080551A KR 101281517 B1 KR101281517 B1 KR 101281517B1
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김재훈
김한석
박진근
진영덕
윤명훈
이충훈
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원광대학교산학협력단
테크밸리 주식회사
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
    • G01N23/20025—Sample holders or supports therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016—X-ray
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/309—Accessories, mechanical or electrical features support of sample holder

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Abstract

본 발명은 카세트에 있는 다수개의 시료를 이송용 로봇을 이용하여 X선 분석장치에 이송하여 X선을 이용한 고속 분석장치로 종래의 분석장치는 작업자가 시료마다 도구를 이용하여 접촉하여 작업하게 되어 시료에 손상이 가해지고 분석시간이 오래 걸리던 문제점이 발생하던바 본 고안은 공정상 시료에 손상을 가하지 않고 분석시간을 기존 시간과 비교하여 줄인 고속 선 분석장치이다The present invention is a high-speed analysis device using the X-ray by transferring a plurality of samples in the cassette to the X-ray analysis device using a transfer robot, the conventional analysis device is a worker to work in contact with each sample using a tool sample This is a high-speed line analysis device that reduces the analysis time compared to the existing time without damaging the sample in the process.

Figure 112010053583010-pat00001
Figure 112010053583010-pat00001

Description

질화갈륨의 성장층 분석을 위한 고속 엑스 선 분석 장치{ High-speed X-ray analysis system for the analyzing of the GaN Growth layer}High-speed X-ray analysis system for the analyzing of the GaN Growth layer}

본 발명은 X선을 이용한 물질 분석 장치에서 시료를 쉽게 교체하기 위한 장치이다. The present invention is a device for easily replacing the sample in the material analysis device using X-rays.

GaN의 Growth Layer의 분석을 위해 다수의 카세트를 작업자가 시료마다 도구를 이용하여 시료를 교체하므로 시료에 손상이 가해지며 분석 시간도 오래 걸리는 단점이 있었다. For the GaN growth layer analysis, a large number of cassettes were used by the operator to replace the sample by using a tool for each sample, which damages the sample and takes a long time.

따라서 본 발명은 다수개의 카세트를 시료 손상 없이 짧은 시간에 시료를 교체하는 장치를 제공하기 위한 것이다.Accordingly, the present invention is to provide an apparatus for replacing a plurality of cassettes in a short time without damaging the sample.

따라서 본 발명은 카세트에 있는 다수개의 시료를 교체할 때 이송용 로봇을 이용할 수 있다.
Therefore, the present invention can use a transfer robot when replacing a plurality of samples in the cassette.

따라서 본 발명은 작업자가 도구로 시료를 교체하는 것을 이송용 로봇을 이용함으로써 공정상 시료에 손상을 가하지 않고, 분석 시간을 줄일 수 있다.Therefore, the present invention can reduce the analysis time without damaging the sample in the process by using a transfer robot to replace the sample with a tool.

도 1은 본 발명의 고속 엑스 선 분석 장치를 나타내는 도면.1 is a diagram showing a high-speed X-ray analysis apparatus of the present invention.

도 1은 본 발명의 고속 엑스 선 분석 장치의 개념도이다.
본 발명의 고속 엑스 선 분석 장치는 시료를 고정하기 위한 X선 분석 스테이지(4) 및 상기 X선 분석 스테이지(4)로 시료를 이송하는 모듈(3)로 이루어진다.
배경 기술에서 지적한 바와 같이 다수의 카세트를 작업자가 시료마다 도구를 이용하여 시료를 교체하므로 시료에 손상이 가해지며 분석 시간도 오래 걸리는 단점이 있음은 상기한 바와 같다.
본 발명은 다수개의 카세트를 시료 손상 없이 짧은 시간에 시료를 교체하는 장치를 제공하는 것으로, 이송용 로봇을 이용하는 고속 엑스 선 분석 장치의 개념을 제공한다.
카세트모듈(1)은 시료가 담긴 카세트를 카세트 모듈에 올려놓으면 카세트 안에 담긴 시료를 매핑하여 웨이퍼의 위치를 확인한다.1 is a conceptual diagram of a high speed X-ray analysis apparatus of the present invention.
The high speed X-ray analyzer of the present invention comprises an X-ray analysis stage 4 for fixing a sample and a module 3 for transferring the sample to the X-ray analysis stage 4.
As pointed out in the background art, since a worker replaces a sample by using a tool for each sample, a large number of cassettes are damaged and the analysis takes a long time as described above.
The present invention provides an apparatus for replacing a sample in a short time without damaging a plurality of cassettes, and provides a concept of a high speed X-ray analyzing apparatus using a transfer robot.
The cassette module 1 checks the position of the wafer by mapping the sample contained in the cassette when the cassette containing the sample is placed on the cassette module.

얼 라인 모듈(2) 상기 카세트모듈의 시료를 중앙으로 센터링한다.
시료 이송 모듈(3)은 시료를 얼 라인 모듈(2)에서 X선 분석 스테이지(4)로 이송하는 모듈을 의미한다.
X선 분석 스테이지(4)는 분석 시료를 고정하기 위한 스테이지이다.
본 발명은 구체적으로, 시료가 담긴 카세트를 카세트 모듈(1)에 올려놓으면 카세트 모듈(1)이 카세트 안에 담긴 시료를 매핑하여 위치를 확인하고, 얼 라인 모듈(2)이 상기 시료를 중앙으로 센터링하면, 시료 이송 모듈(3)이 상기 얼 라인 모듈(2)에서 X선 분석 스테이지(4)로 이송하는데, 상기 시료 이송 모듈(3)은 일종의 이송용 로봇일 수 있다.
상기 시료 이송 모듈(3)에 의하여 X선 분석 스테이지(4)로 이송된 시료는 X선 튜브(5)와 X선 검출기(6)의 사이에 배치되어 분석이 이루어진다.
상기와 같은 본 발명에 따른 고속 엑스 선 분석 장치는, 작업자가 도구로 시료를 교체하는 것을 이송용 로봇을 이용함으로써 공정상 시료에 손상을 가하지 않고, 분석 시간을 줄일 수 있는 이점이 있다.
Align module (2) Center the sample of the cassette module to the center.
The sample transfer module 3 means a module for transferring a sample from the alignment module 2 to the X-ray analysis stage 4.
The X-ray analysis stage 4 is a stage for fixing an analysis sample.
Specifically, when the cassette containing the sample is placed on the cassette module 1, the cassette module 1 maps the sample contained in the cassette to check the position, and the alignment module 2 centers the sample in the center. When the sample transfer module 3 transfers from the alignment module 2 to the X-ray analysis stage 4, the sample transfer module 3 may be a kind of transfer robot.
The sample transferred to the X-ray analysis stage 4 by the sample transfer module 3 is disposed between the X-ray tube 5 and the X-ray detector 6 for analysis.
The high-speed X-ray analyzing apparatus according to the present invention as described above has an advantage of reducing the analysis time without damaging the sample in a process by using a transfer robot to replace a sample by a worker.

삭제delete

삭제delete

1...카세트모듈 2...얼 라인 모듈
3...시료 이송 모듈 4...X선 분석 스테이지
5...X선 튜브 6...X선 검출기1 ... cassette module 2 ... align module
3 ... sample transfer module 4 ... X-ray analysis stage
5 ... X-ray tube 6 ... X-ray detector

Claims (1)

X선 튜브(5)와 X선 검출기(6)를 포함하는 엑스 선 분석 장치로서,
시료가 담긴 다수개의 카세트가 배치되고 카세트 안에 담긴 시료를 매핑하여 위치를 확인하는 카세트 모듈(1);
상기 카세트 모듈의 시료를 중앙으로 센터링하는 얼 라인 모듈(2);
상기 X선 튜브(5)와 X선 검출기(6) 사이에 배치되고 시료를 고정하는 X선 분석 스테이지(4); 및
상기 얼 라인 모듈(2)에서 상기 X선 분석 스테이지(4)로 시료를 이송하는 시료 이송 모듈(3);을 포함하고,
시료가 담긴 카세트가 상기 카세트 모듈(1)에 올려지면, 상기 카세트 모듈(1)이 카세트 안에 담긴 시료의 위치를 확인하고, 상기 얼 라인 모듈(2)이 상기 카세트 모듈의 시료를 중앙으로 센터링하며, 이송용 로봇으로 이루어지는 상기 이송 모듈(3)이 상기 얼 라인 모듈(2)에서 중앙으로 센터링된 시료를 상기 X선 분석 스테이지(4)로 이송하는 것을 특징으로 하는 고속 엑스 선 분석 장치.An X-ray analyzer comprising an X-ray tube 5 and an X-ray detector 6,
A cassette module 1 for arranging a plurality of cassettes containing a sample and checking a position by mapping a sample contained in the cassette;
An alignment module 2 for centering a sample of the cassette module in the center;
An X-ray analysis stage (4) disposed between the X-ray tube (5) and the X-ray detector (6) to fix the sample; And
And a sample transfer module (3) for transferring a sample from the alignment module (2) to the X-ray analysis stage (4).
When the cassette containing the sample is placed on the cassette module 1, the cassette module 1 checks the position of the sample contained in the cassette, and the alignment module 2 centers the sample of the cassette module toward the center. , The transfer module (3) consisting of a transfer robot transfers the sample centered in the center from the alignment module (2) to the X-ray analysis stage (4).
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11118738A (en) * 1997-10-14 1999-04-30 Advantest Corp Analyzing apparatus capable of analyzing minute object to be analyzed at high speed
JP2010091324A (en) * 2008-10-06 2010-04-22 Anritsu Sanki System Co Ltd X-ray inspection device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11118738A (en) * 1997-10-14 1999-04-30 Advantest Corp Analyzing apparatus capable of analyzing minute object to be analyzed at high speed
JP2010091324A (en) * 2008-10-06 2010-04-22 Anritsu Sanki System Co Ltd X-ray inspection device

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