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KR101555955B9 - Method for manufacturing substrate-type solar cells - Google Patents

Method for manufacturing substrate-type solar cells

Info

Publication number
KR101555955B9
KR101555955B9 KR1020090054760A KR20090054760A KR101555955B9 KR 101555955 B9 KR101555955 B9 KR 101555955B9 KR 1020090054760 A KR1020090054760 A KR 1020090054760A KR 20090054760 A KR20090054760 A KR 20090054760A KR 101555955 B9 KR101555955 B9 KR 101555955B9
Authority
KR
South Korea
Prior art keywords
solar cells
type solar
manufacturing substrate
substrate
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020090054760A
Other languages
Korean (ko)
Other versions
KR101555955B1 (en
KR20090132541A (en
Inventor
현덕환
황철주
Original Assignee
주성엔지니어링(주)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주성엔지니어링(주) filed Critical 주성엔지니어링(주)
Publication of KR20090132541A publication Critical patent/KR20090132541A/en
Application granted granted Critical
Publication of KR101555955B1 publication Critical patent/KR101555955B1/en
Publication of KR101555955B9 publication Critical patent/KR101555955B9/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/70—Surface textures, e.g. pyramid structures
    • H10F77/703—Surface textures, e.g. pyramid structures of the semiconductor bodies, e.g. textured active layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/70—Surface textures, e.g. pyramid structures
    • H10F77/707—Surface textures, e.g. pyramid structures of the substrates or of layers on substrates, e.g. textured ITO layer on a glass substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/546—Polycrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
KR1020090054760A 2008-06-19 2009-06-19 Method for manufacturing Wafer type Solar Cell Active KR101555955B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20080057846 2008-06-19
KR1020080057846 2008-06-19

Publications (3)

Publication Number Publication Date
KR20090132541A KR20090132541A (en) 2009-12-30
KR101555955B1 KR101555955B1 (en) 2015-09-25
KR101555955B9 true KR101555955B9 (en) 2024-12-20

Family

ID=41691566

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090054760A Active KR101555955B1 (en) 2008-06-19 2009-06-19 Method for manufacturing Wafer type Solar Cell

Country Status (1)

Country Link
KR (1) KR101555955B1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101222910B1 (en) * 2011-05-06 2013-01-16 (주)울텍 Plasma etching apparatus and texturing method for solarcell using same
KR101362610B1 (en) * 2011-12-14 2014-02-13 엘지전자 주식회사 Solar cell manufacturing apparatus
KR102039611B1 (en) * 2012-05-22 2019-11-01 주성엔지니어링(주) Wafer type solar cell and method for manufacturing thereof, method and apparatus for doping of wafer type solar cell

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6477980B1 (en) 2000-01-20 2002-11-12 Applied Materials, Inc. Flexibly suspended gas distribution manifold for plasma chamber
US7429410B2 (en) 2004-09-20 2008-09-30 Applied Materials, Inc. Diffuser gravity support

Also Published As

Publication number Publication date
KR101555955B1 (en) 2015-09-25
KR20090132541A (en) 2009-12-30

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