KR101721191B1 - Ultrasonic suction device and laser scanner device including it - Google Patents

Abstract

The present invention relates to a method of manufacturing a semiconductor device, which comprises a housing body formed such that discharge particles generated in a processed portion of a substrate are positioned inside thereof, an ultrasonic wave generating portion formed around the housing body, and an ultrasonic wave generated by the ultrasonic wave generating portion, And a suction unit formed in a direction of the ultrasonic wave propagating in the direction of being reflected by the horn and being formed to generate a suction force by a suction pump, wherein the ultrasonic wave generator includes a diaphragm formed in a plate shape, a horn connected to the diaphragm, And a piezoelectric element connected to the booster. When the ultrasonic wave is generated in the ultrasonic wave generator, the discharge particles generated during the processing operation are lifted and then introduced into the suction part by the suction pressure of the suction pump. And an ultrasonic suction device.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an ultrasonic suction device and a laser scanner device including the same,

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an ultrasonic suction apparatus and a laser scanner apparatus including the same, and more particularly, to an ultrasonic suction apparatus for removing discharge particles generated when a flexible material is processed by a carbon dioxide laser, and a laser scanner apparatus including the same .

In recent years, demand for flexible materials has rapidly increased in place of existing glass substrates due to the growth of the wearable device industry.

Processing of such a flexible material, the carbon dioxide (CO ₂₎ laser scanner processing and the like are used.

The carbon dioxide laser uniquely utilizes the vibration energy level of CO ₂ molecule, so it emits 10.6 ㎛ of infrared light, and the output in continuous oscillation reaches several hundred kW, which is widely used in industrial applications such as metal processing.

When the flexible material is processed through the carbon dioxide laser scanner, the particles generated on the cut surface must be removed promptly and accurately because it hinders further processing or adversely affects the working environment.

However, conventionally, there is no apparatus for quickly and accurately removing particles generated from such a material during the processing of a carbon dioxide laser scanner, resulting in work defects or contamination of the working environment.

Korean Patent Publication No. 2008-0040601

The ultrasonic suction apparatus according to the embodiment of the present invention and the laser scanner apparatus including the ultrasonic suction apparatus according to the embodiment of the present invention are provided with an ultrasonic suction apparatus having a structure capable of quickly and accurately removing discharge particles generated during laser machining of a flexible material, ≪ / RTI >

According to an aspect of the present invention, there is provided an ultrasonic diagnostic apparatus including a housing main body formed so that discharge particles generated in a processed portion of a substrate are positioned inside thereof, an ultrasonic wave generating unit formed around the housing main body and an ultrasonic wave generated by the ultrasonic wave generating unit And a suction unit formed in a direction that is reflected by the processed portion of the substrate and formed to generate a suction force by a suction pump. The ultrasonic generator includes a plate having a plate shape, a horn formed to be connected to the plate, And a piezoelectric element formed to be connected to the booster. When the ultrasonic wave is generated in the ultrasonic wave generator, the discharge particles generated during the machining operation are raised, and the suction pressure of the suction pump Is introduced into the suction portion by an ultrasonic suction pump It provides.

The ultrasonic wave generator may be configured to control a frequency of an ultrasonic wave by controlling a voltage amount or a current amount applied to the piezoelectric element.

A cover plate may be formed on the upper portion of the housing body.

The suction unit includes a suction body formed in a direction in which the ultrasonic waves generated by the diaphragm are reflected by the processed portion of the substrate, a pipe formed to extend from the suction body, and a suction pump connected to the pipe The suction body may have a distal end portion formed with an inlet hole and formed to be streamlined outwardly.

An auxiliary housing formed to surround the outer circumference of the housing body, and an auxiliary suction unit formed in the auxiliary housing.

The present invention relates to a scanner comprising a scanner formed to irradiate a laser on a flexible substrate, a housing main body formed to be connected to the scanner with a connecting member, an ultrasonic wave generating unit formed around the housing main body and ultrasonic waves generated by the ultrasonic wave generating unit And a suction unit formed in a direction in which the ultrasonic wave is reflected and progressed by the processing part of the substrate and is generated so as to generate a suction force by a suction pump and the ultrasonic wave generator comprises a plate having a plate shape, And a piezoelectric element formed to be connected to the booster. The discharge particles of the flexible substrate generated by the laser irradiated by the scanner are lifted by the ultrasonic waves of the ultrasonic wave generator, It is a feature of the present invention that Including the ultrasonic aspiration apparatus of the laser also includes a scanner device.

The effects produced by the present invention are as follows.

First, there is an effect that the ejected particles generated in the laser processing of the flexible material can be removed quickly and accurately.

Second, the emission particles can be effectively raised by controlling the voltage or current amount applied to the piezoelectric element so that the frequency of the ultrasonic waves is controlled.

Thirdly, when the suction pump is operated, the shape of the suction tip is made streamlined outward from the suction tip, and the air around the suction tip formed with the suction hole is effectively sucked into the suction body through the suction hole by the coanda effect .

Fourthly, a quartz plate, which is a cover plate, is formed on the upper part of the housing main body, so that the ultrasonic wave is transmitted to the lower part of the housing main body.

Fifth, the quartz plate functions to cut off the path through which the exhaust particles ascending from the inside of the housing body can be discharged to the outside through the upper portion of the housing main body, so that it can be more effectively introduced into the suction portion.

Sixth, the discharge particles discharged from the flexible substrate are primarily sucked through the main suction part formed in the housing main body, and absorbed through the auxiliary suction part formed in the secondary auxiliary housing to maximize the suction efficiency of the discharged particles.

1 is a perspective view showing an ultrasonic suction apparatus according to a first embodiment of the present invention formed on a scanner apparatus.
Fig. 2 (a) is a front sectional view of a portion of Fig. 1, and Fig. 2 (b) is a plan sectional view of a portion of Fig.
Fig. 3 (a) is a schematic front sectional view showing the operation of the ultrasonic suction apparatus according to the first embodiment of the present invention, and Fig. 3 (b) is a schematic view showing the operation of the ultrasonic suction apparatus according to the first embodiment of the present invention Flat section.
4 is a front sectional view showing an ultrasonic suction apparatus according to a second embodiment of the present invention.
5 is a schematic front sectional view showing an ultrasonic suction apparatus according to a third embodiment of the present invention.
6 is an operational state diagram of the ultrasonic suction apparatus according to the third embodiment of the present invention.
7 is an enlarged sectional view showing the ultrasonic wave generator.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. It is to be understood, however, that the appended drawings illustrate the present invention in order to more easily explain the present invention, and the scope of the present invention is not limited thereto. You will know.

In describing the present embodiment, the same designations and the same reference numerals are used for the same components, and further description thereof will be omitted.

Also, the terms used in the present application are used only to describe certain embodiments and are not intended to limit the present invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In the present application, the terms "comprises" or "having" and the like are used to specify that there is a feature, a number, a step, an operation, an element, a component or a combination thereof described in the specification, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

Fig. 1 is a perspective view showing an ultrasonic suction apparatus according to a first embodiment of the present invention formed on a scanner device, Fig. 2 (a) is a front sectional view of a part of Fig. 1, Of FIG.

The ultrasonic suction apparatus 100 according to the first embodiment of the present invention is mounted on the scanner 200 that irradiates the carbon dioxide laser 220 and is positioned above the flexible substrate 300 at a predetermined distance.

Since the carbon dioxide laser 220 uses the vibration energy level of carbon dioxide (CO ₂ ) molecules, it emits infrared rays of 10.6 μm and the output in continuous oscillation reaches several hundreds of kilowatts (kW), and is widely used in industrial applications such as metal processing.

The carbon dioxide laser 220 is operated at a high efficiency of about 15% by adding nitrogen (N ₂ ) and neon (Ne) as mediators to increase the efficiency.

1, the ultrasonic suction apparatus 100 includes a housing body 110 formed to be connected to a scanner 200 irradiating a carbon dioxide laser 220 with a connection member 230, And a suction unit 150 formed to face the ultrasonic wave generating unit 130 around the housing main body 110. [

The housing body 110 having both the upper and lower portions opened is formed with a first side wall 112 connected to the ultrasonic wave generator 130 and a second side wall 114 connected to the suction unit 150.

The ultrasonic wave generator 130 is coupled to the housing body 110 by a first bracket 232 and the suction unit 150 is coupled to the housing body 110 by a second bracket 234.

On the other hand, ultrasonic waves refer to sound waves of about 20 kHz or more, which is higher than the human audible frequency, and are widely used throughout the industry. Moreover, the applications are also very diverse, and various ultrasonic devices using piezoelectric ceramics and ferrite have been studied and commercialized.

Applications of ultrasonic waves are roughly classified into the fields using high energy (50-3000W) / low frequency (15kHz-100kHz) and ultrasonic waves using low energy (50W or less) / high frequency (1-10MHz). The former uses cavitation in the water by ultrasonic wave, and it is typical such as a washing machine, a welder, an underwater acoustic wave flaw detector, a gallstone or a stone remover, a fat remover, and a chemical reaction promoter by sound, and the latter is an ultrasonic diagnostic device, Are typical applications.

The ultrasonic wave generator 130 includes a diaphragm 131 formed in a plate shape, a horn 132 connected to the diaphragm 131, A booster 134 connected to the booster 134 and a piezoelectric element 136 connected to the booster 134. The booster 134 is connected to the piezoelectric element 136. The booster 134 is connected to the piezoelectric element 136, (138).

A part of the ultrasonic wave generator 130 is inserted into the housing main body 110 through the first side wall 112 and the diaphragm 131 and the horn 132 are positioned inside the housing main body 110.

The horn 132 has the same diameter as the booster 134 and concentrates ultrasound transmitted from the booster 134 to the diaphragm 131.

The booster 134 amplifies the vibration generated in the piezoelectric element 136 and transmits the amplified vibration to the horn 132.

The piezoelectric element 136 is a device having a property of compressing its shape depending on the amount of applied voltage or amount of current when it is supplied with electric power and returning to its original state when electricity is cut off. The ultrasonic waves due to the vibration are generated while repeating compression deformation.

The user controls the amount of voltage or the amount of current to adjust the frequency of the ultrasonic waves generated by the ultrasonic wave generator 130 to be 35 kHz to 40 kHz.

The cooling section 138 is formed by air cooling or water cooling to cool the heat generated by the vibration of the piezoelectric element 136.

The ultrasonic wave generated from the ultrasonic wave generator 130 is in the range of 35 kHz to 40 kHz and is transmitted to the discharge particle 310 of the flexible substrate 300 generated in the laser processing through the diaphragm 131.

The discharge particles 310 are quickly raised before being attached to the substrate by ultrasonic waves.

The suction unit 150 includes a suction body 156 formed in a direction in which the ultrasonic waves generated by the diaphragm 131 are reflected by the processed portion of the substrate and proceed in a reflection angle according to the same law as the incident angle and the reflection angle, A pipe 151 formed to extend in the inner circular space of the suction body 156 and a suction pump 152 connected to the pipe 151.

2, the suction body 156 is formed at a position lower than the reflection angle according to the law of the incident angle and the reflection angle when the ultrasonic wave is reflected on the processed portion of the substrate, because the discharge particle 310 has its own weight Is lower than the reflection angle direction.

The suction body 156 is formed with a slit-shaped inlet hole 154 at the suction front end 158 and the inside of the suction body 156 is connected to the inlet hole 154 in the rear end direction from the suction front end 158, The space gradually expands.

The suction pressure generated by the suction pump 152 is maximized at the suction tip portion 158 whose size is narrowed.

When the suction pump 152 is operated, the air around the suction tip end portion 158 formed with the inlet hole 154 is sucked into the suction body 156 through the inlet hole 154. At this time, the coanda effect, The shape of the suction tip end portion 158 is formed to be streamlined outward from the suction tip end portion 158. [

The Coanda effect refers to a property of flowing along a streamline when a streamline surface is encountered in the flow of the fluid.

And a suction guide member 159 is formed upward at the suction tip end 158 so that the discharge particle 310 can be guided to the inlet hole 154 by a Coanda effect.

The suction induction member 159 is formed in a plate shape having a lower end curved so as to be connected to the suction distal end portion 158 in a streamlined manner and forms a certain angle with the housing main body 110.

Since the suction body 156 is formed to be inclined toward the substrate, an obtuse angle is formed between the lower portion of the suction tip end portion 158 and the adjacent housing body 110 to effectively generate the coanda effect. However, And an acute angle is formed between the housing main body 110 and the housing main body 110 by forming a suction induction member 159 because an acute angle is formed between the housing main body 110 and the housing main body 110. [

The discharge particles 310 moved in the vicinity of the suction tip portion 158 are quickly drawn into the inlet hole 154 along the streamlined shape of the suction tip portion 158.

The operation of the ultrasonic suction apparatus 100 according to the first embodiment of the present invention formed as described above will be described below.

Fig. 3 (a) is a schematic front sectional view showing the operation of the ultrasonic suction apparatus according to the first embodiment of the present invention, and Fig. 3 (b) is a schematic view showing the operation of the ultrasonic suction apparatus according to the first embodiment of the present invention Flat section.

When the carbon dioxide laser 220 is irradiated onto the flexible substrate 300 according to a predetermined path in the scanner 200, the discharge particle 310 is discharged while processing such as cutting is progressed on the flexible substrate 300.

At this time, when the ultrasonic wave generator 130 generates ultrasonic waves through the diaphragm 131, the ultrasonic waves collide with the processed portion of the flexible substrate 300.

The discharge particles 310 separated from the flexible substrate 300 are swung by the diaphragm 131 transmitted by ultrasonic waves and are in an excited state.

Air is introduced into the inlet hole 154 by the suction pressure of the suction unit 150 positioned opposite to the ultrasonic wave generator 130 and a coanda effect is generated around the inlet hole 154. The discharge particle 310 Is introduced into the inlet hole 154 along the air flow 115.

The ultrasonic suction apparatus 100 according to the first embodiment of the present invention can remove the discharge particles 310 at the same time as the laser 220 is being processed and can remove the discharge particles 310 quickly and accurately .

However, in the ultrasonic suction apparatus 100 according to the first embodiment of the present invention, the upper and lower portions of the housing main body 110 are all opened, and the ultrasonic waves and the discharge particles 310 are discharged through the upper open space of the housing main body 110 There is a problem that can happen.

4 is a front sectional view showing an ultrasonic suction apparatus according to a second embodiment of the present invention.

The ultrasonic suction apparatus 100 according to the second embodiment of the present invention has a structure in which a quartz plate 119 is formed as a lid plate on the upper portion of the housing main body 110 to seal the upper portion of the housing main body 110, And therefore, the following description will focus on the different parts.

The quartz plate 119 is a transparent plate, and has a property that the laser 220 irradiated from the scanner 200 is transmitted and does not change during the transmission process of the laser 220.

The ultrasonic suction apparatus 100 according to the second embodiment of the present invention is configured such that the discharge particles 310 of the flexible substrate 300 processed by the carbon dioxide laser 220 irradiated from the scanner 200 rise while being oscillated by ultrasonic waves And is drawn into the suction unit 150 through the inlet hole 154 by the Coanda effect.

The quartz plate 119 blocks a path through which exhaust particles 310 ascending from the inside of the housing main body 110 can be discharged to the outside through the upper portion of the housing main body 110, So that it can be pulled in.

The ultrasonic suction apparatus 100 according to the first embodiment and the second embodiment are not in a state in which the lower portion of the housing main body 110 is in close contact with the upper surface of the flexible substrate 300, A portion of the discharge particles 310 discharged from the flexible substrate 300 is swung by the ultrasonic waves generated in the housing 130 and the housing body 110 is rotated through the interval between the housing body 110 and the flexible substrate 300, There may be a problem that it is discharged to the outside.

Fig. 5 is a schematic front sectional view showing an ultrasonic suction apparatus according to a third embodiment of the present invention, and Fig. 6 is an operational state view of the ultrasonic suction apparatus according to the third embodiment of the present invention.

The ultrasonic suction apparatus 100 according to the third embodiment of the present invention comprises an auxiliary housing 180 additionally formed around the outer periphery of the housing main body 110 of the second embodiment, (190).

That is, the ultrasonic suction apparatus 100 according to the third embodiment of the present invention includes a housing body 110, an ultrasonic wave generator 130 formed on the housing body 110, A quartz plate 119 formed on the upper portion of the housing main body 110; an auxiliary housing 180 formed around the outer periphery of the housing main body 110; And a second sucking portion 190 formed on the second sucking portion.

The auxiliary housing 180 is formed to be larger than the housing main body 110 and to surround the outer periphery of the housing main body 110. The lower portion of the auxiliary housing 180 is also formed as a lower portion of the housing main body 110, As shown in FIG.

The auxiliary suction unit 190 is connected to one side of the auxiliary side wall 182 formed in the auxiliary housing 180 and the other side is connected to the suction pump 152 of the main suction unit 150a.

The suction pump 152 functions to draw the discharge particles 310 through the main suction part 150a and the auxiliary suction part 190. [

6, the ultrasonic wave generated by the ultrasonic wave generator 130 is transmitted through the diaphragm 131 directly to the flexible substrate 100. The operation of the ultrasonic wave suction apparatus 100 according to the third embodiment of the present invention, Thereby forming an ultrasonic vibration above the working portion of the work 300.

The discharge particle 310 discharged from the working portion of the flexible substrate 300 is oscillated by the ultrasonic vibration generated by the diaphragm 131 so that the air flow due to the ultrasonic vibration, The part 310a of the discharge particles 310 is moved between the housing main body 110 and the flexible substrate 300 by the coanda effect, And is drawn into the auxiliary suction unit 190 through the auxiliary inlet 182 formed in the auxiliary housing 180. [

Accordingly, in the ultrasonic suction apparatus 100 according to the third embodiment of the present invention, the discharge particles 310 discharged from the flexible substrate 300 are primarily sucked through the main suction unit 150a formed in the housing main body 110 The secondary suction part 190 formed in the auxiliary housing 180 and absorbing the exhausted particles 310 can be maximized.

7 is an enlarged sectional view showing the ultrasonic wave generator.

The ultrasonic generator 130 used in the embodiment of the present invention may be formed as shown in FIG.

The horn 132 connected to the plate-shaped diaphragm 131 is formed to have the same cross section as the booster 134 and transmits the ultrasonic wave amplified by the booster 134 to the diaphragm 131.

The booster 134 includes a convex curve portion 134a formed to be curved convexly toward the front end and a flange 134b formed at the rear end to facilitate the fastening.

The convex curve portion 134a functions to amplify the vibration energy generated from the piezoelectric element 136 in a convexly curved wave form to naturally amplify and transmit the wave in an effective form.

The cooling unit 138 formed to enclose the flange 134b and the piezoelectric element 136 includes a coupling bracket 138a coupling the booster 134 and the piezoelectric element 136, And a plurality of heat radiating fins 138b formed on the outer side of the heat radiating fins 138b.

The coupling bracket 138a may be formed of a flexible material that can be interlocked with the vibration of the piezoelectric element 136. [

The cooling unit 138 simultaneously performs the function of the coupling member for coupling the booster 134 and the piezoelectric element 136 and the cooling operation for discharging the heat generated in the piezoelectric element 136.

It will be apparent to those skilled in the art that the present invention may be embodied in other specific forms without departing from the spirit or scope of the invention as defined in the appended claims. . Therefore, the above-described embodiments are to be considered as illustrative rather than restrictive, and the present invention is not limited to the above description, but may be modified within the scope of the appended claims and equivalents thereof.

100: ultrasonic suction device 110: housing body
112: first side 114: second side
119: quartz plate 130: ultrasonic wave generator
132: Horn 134: Booster
150: suction portion 150a: main suction portion
180: auxiliary housing 190: auxiliary suction portion
200: scanner 300: flexible substrate

Claims (6)

1. An ultrasonic suction apparatus for sucking and removing exhaust particles generated from a substrate in a process of processing a flexible substrate by a scanner for irradiating a laser,
A housing body which is formed between the scanner and the substrate so as to be able to receive therein exhaust particles generated from the substrate and has a cover plate of a transparent material so that the laser of the scanner can pass therethrough,
An ultrasonic wave generating unit formed around the housing main body and generating ultrasonic waves toward the processed portion of the substrate;
And a suction unit formed around the housing main body such that the ultrasonic wave generated by the ultrasonic wave generator is reflected in a direction in which the ultrasonic wave is reflected by the processed part of the substrate,
The suction unit
A suction body formed to communicate with the housing main body so that the ultrasonic wave generated by the ultrasonic wave generator is positioned in a direction in which the ultrasonic wave is reflected by the processed portion of the substrate,
A pipe formed to extend from the suction body,
And a suction pump connected to the pipe,
Wherein the suction body is formed with a slit-like inlet hole at a suction front end portion connected to the housing main body, and the inner space is enlarged from the suction front end portion toward the rear end portion,
Wherein a suction induction member is formed on an upper portion of the suction tip so that discharge particles can be guided to the suction hole. The method according to claim 1,
Wherein the ultrasonic wave generator is configured to control the frequency of the ultrasonic wave by controlling the amount of voltage or current applied to the piezoelectric element. delete delete The method according to claim 1,
An auxiliary housing formed to surround the outer circumference of the housing body, and an auxiliary suction unit formed in the auxiliary housing.
delete

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