KR101824561B1 - Apparatus for transfer - Google Patents

Abstract

More particularly, the present invention relates to a conveying device, and more particularly, to a conveying device that improves corrosion resistance and reduces unnecessary replacement of equipment and parts, thereby reducing production costs and improving productivity, To a conveying device.
According to the present invention, there is provided a transfer device comprising: power generation means; Driving means connected to the power generating means and mounted on a first shaft that rotates about its axis; Driven means mounted on one or more second shafts located apart from the drive means; And a conveyance belt connecting the drive means and the driven means and operated by the rotational force of the drive means to operate the driven means, wherein at least one of the first and second shafts is subjected to heat treatment and radiant treatment Thereby providing a transfer device.

Description

[0001] APPARATUS FOR TRANSFER [0002]

More particularly, the present invention relates to a conveying device, and more particularly, to a conveying device that improves corrosion resistance and reduces unnecessary replacement of equipment and parts, thereby reducing production costs and improving productivity, To a conveying device.

In recent years, interest in clean energy such as solar power has increased to cope with the depletion of fossil resources and environmental pollution. Research and development of solar cells that convert solar energy into electric energy has gained vitality.

In order to manufacture such a solar cell, an electrode, a semiconductor layer, an antireflection film or the like is formed on a wafer, and a transfer device such as a pick-and-place ) Type conveying device or a belt-type conveying device.

Among them, a belt-type transfer device, for example, a belt conveyor is preferred in order to prevent the wafer from being impacted, and Korean Patent Laid-Open No. 10-2003-0080368 entitled "Conveyor belt drive device for moving semiconductor wafers" Technology is disclosed.

However, in order to maximize the area exposed to the sunlight on the wafer, a texture process in which a stripe-type scratching operation is carried out, and a process in which impurities such as phosphorous acid are injected for imparting conductivity to the wafer, In the case of equipment used in the PSG process to remove thin films (silicate vitreous (PSG)) generated during the application process, the wafers are immersed in water containing various toxic gases (F, Cl, H ...), acidic, basic compounds or chemicals I will be immersed for a certain time.

At this time, if the water containing the gas or chemical of the equipment is transferred to the transfer device during the setting of the equipment, or if it is transferred in the form of gas, water, or fume, the transfer device will be corroded.

Therefore, the life span of the equipment is shortened and the maintenance time is increased, so that the production cost of the solar cell is increased and the productivity is also lowered.

The present invention solves and solves the problems caused by the above-described conventional conveying apparatus,

SUMMARY OF THE INVENTION An object of the present invention is to provide a transfer device capable of reducing the production cost and improving the productivity by reducing the replacement of unnecessary equipment or parts by improving the corrosion resistance.

Another object of the present invention is to provide a conveying device capable of easily adjusting the tension and the horizontal degree of the conveyance belt.

According to an aspect of the present invention, there is provided a transfer device comprising: power generation means; Driving means connected to the power generating means and mounted on a first shaft that rotates about its axis; Driven means mounted on one or more second shafts located apart from the drive means; And a conveyance belt connecting the drive means and the driven means and operated by the rotational force of the drive means to operate the driven means, wherein at least one of the first and second shafts is subjected to heat treatment and radiant treatment Thereby providing a transfer device.

Either or both of the drive means and the driven means may be constructed to include either or both of a hardened-anodized washer or a spacer made of an iron material and made of aluminum or aluminum.

Either or both of the driving means and the driven means may be configured to further include a bearing made of stainless steel.

A pair of panels disposed apart from each other and having a long hole facing each other; And tension adjusting means mounted on a third shaft passing through the slot and movable along the slot and adjusting the tension of the conveyance belt by adjusting the degree of contact with the conveyance belt; As shown in FIG.

The tension adjusting means comprises: a fixing block mounted on the panel away from the slot; A moving block mounted on the slot and slidably moved along the slot; A rolling member mounted on a third shaft coupled to the moving block and rotated in contact with the conveying belt; A connecting bolt that is bolted to the moving block through the fixed block and slides the moving block toward or away from the fixed block according to the rotating direction; . ≪ / RTI >

According to the transporting apparatus of the present invention, it is possible to reduce the production cost and the productivity by improving the corrosion resistance and reducing unnecessary replacement of equipment and parts.

In addition, the present invention has the effect of easily adjusting tension and horizontal accuracy of the conveyance belt.

1 is an exploded perspective view of a transfer device according to a first embodiment of the present invention.
Figs. 2 to 4 are diagrams showing the conveying apparatus shown in Fig. 1. Fig.
5 is a view illustrating a state in which a plurality of transfer devices according to the first embodiment of the present invention are used.
6 and 7 are views showing a transfer apparatus according to a second embodiment of the present invention.
8 and 9 are views showing a transfer apparatus according to a third embodiment of the present invention.

Hereinafter, the present invention will be described in detail with reference to the drawings. However, these drawings are for illustrative purposes only and the present invention is not limited thereto. Here, the conveying apparatus referred to in the present description is an example of a belt type conveying apparatus for conveying a wafer for manufacturing solar cells through a chemical treatment process such as texture or PSG.

FIG. 1 is an exploded perspective view of a transfer apparatus according to a first embodiment of the present invention, FIGS. 2 to 4 are views showing the transfer apparatus shown in FIG. 1, Fig. 8 is a diagram showing a state in which a plurality of devices are used.

1 to 5, a conveying apparatus 100 according to a first embodiment of the present invention mainly includes a power generating means 10, a driving means 20, a driven means 30, and a conveying belt 40 . In addition, in the first embodiment, a pair of panels 50 for connecting and supporting the driving means 20 and the driven means 30, tension adjusting means 60 for adjusting the tension of the conveyance belt 40, And a sensing sensor 70 for sensing a wafer (not shown) conveyed by the conveyance belt 40 so as to control the power generating means 10.

The power generating means 10 is a component that provides a driving force for driving the conveying apparatus 100 according to the first embodiment of the present invention and is a conventional motor such as a servomotor or a stepper motor, an AC motor, a DC motor, or the like can be used. In the present invention, a servo motor is used. In the present invention, the cover 12 is mounted and used for protection of the power generating means 10, noise reduction from the power generating means 10, and the like.

The driving means 20 is a component which is connected to the power generating means 10 and mounted on the first shaft 22 which rotates about its axis and operates. a drive pulley 24 is inserted into the first shaft 22 and mounted thereon. Between the shaft of the power generating means 10 and the first shaft 22, there is provided a shaft coupling, i.e., coupling 14, which is used to connect the shaft, shaft or shaft with the power transmitting device. A ball bearing B, a spacer S, a washer W and the like are provided on the first shaft 22 (see FIG. 1) to reduce friction, ).

The driven means 30 is a component which is mounted and operated on one or more second shafts 32 which are located apart from the driving means 20. [ A driven pulley 34 is inserted and mounted in the second shaft 32 so that power can be transmitted by the conveyor belt 40. In the first embodiment of the present invention, (30) is used. The driven unit 30 is also mounted with the bearing B, the spacer S, the washer W, and the like on the second shaft 32 for the same smooth operation as the driving unit 20. In this case, in the first embodiment of the present invention, the shape formed by the driving means 20 and the pair of driven means 30 is triangular, that is, the center of each of the driving means 20 and the driven means 30 The virtual line segment is configured to have a triangular shape.

At this time, since the transfer device 100 according to the first embodiment of the present invention is disposed after chemical processing such as texture or PSG, it may easily corrode. Therefore, the components used in the drive means 20 and the driven means 30, i.e., the first and second shafts 22 and 32, the bearings B, the spacers S, the washers W, It is desirable to use improved parts. Accordingly, in the present invention, the first and second shafts 22 and 32 are used by heat treatment and raydent treatment. In particular, according to the radend treatment, excellent hearing power and corrosion resistance are obtained. The washer W and the spacer S are preferably made of a material having excellent corrosion resistance so that the washer W and the spacer S made of iron are subjected to a sorting process and used. W) and the spacer (S), the aluminum surface is changed to an alumina ceramic by an electric or chemical method, and hard-anodizing treatment is performed so that the abrasion resistance is improved. The bearing (B) is made of stainless steel to prevent corrosion easily.

The conveyance belt 40 connects the drive means 20 to the driven means 30 and the tension adjusting means 60 and is operated by the rotational force of the drive means 20 to drive the driven means 30 and the tension adjusting means 60 ). In the present invention, the conveyance belts 40 are formed as a pair and are disposed apart from each other with the panel 50 as a center. Through this conveyance belt 40, a wafer used for production of a wafer, for example, a solar cell, . At this time, it is preferable to use a flat belt so as to prevent the wafer from being twisted or deformed in position.

The panel 50 is a kind of plate member, and is a component that is mounted on the base 52 with one pair disposed apart from each other. Holes 50a having a predetermined length are formed in the respective panels 50 so as to face each other along the conveying path of the conveying apparatus 100. [

The tension adjusting means 60 is mounted on the third shaft 61 passing through the elongated hole 50a formed in the panel 50 and is movable along the elongated hole 50a to adjust the degree of contact with the conveyance belt 40 And is configured to be positioned within a triangle formed by imaginary line segments connecting the center points of the drive means 20 and the driven means 30, respectively.

The tension adjusting means 60 mainly comprises a third shaft 61 and a fixed block 63, a moving block 65, a rolling member 67 and a connecting bolt 69.

The third shaft 61 is configured to be mounted on each panel 50 in a manner different from the first and second shafts 22 and 32 so that tension control of each of the conveyance belts 40 can be easily performed . The fixed block 63 is a portion that is mounted on the panel 50 apart from the slot 50a. The moving block 65 is a portion mounted on the elongated hole 50a of the panel 50 and slidably moved along the elongated hole 50a. The rolling member 67 is mounted on the third shaft 61 coupled to the moving block 65 and rotates in contact with the conveying belt 40. The rolling member 67 rotates in the direction opposite to the driving means 20 and the driven means 30 . At this time, the bearing (B), the washer (W), and the like are mounted on the third shaft (61) for smooth operation of the tension adjusting means (60). The connecting bolt 69 is a part capable of adjusting the tension of the conveying belt 40. The connecting bolt 69 is bolted to the moving block 65 through the fixing block 63 and is connected to the moving block 65 And is slid to move toward or away from the fixed block 63. [ The third shaft 61 and the connecting bolt 69 constituting the tension adjusting means 60, the bearing B and the washer (not shown) constitute the tension adjusting means 60 according to the operating environment of the conveying apparatus 100 according to the first embodiment of the present invention. W or the like may be treated so as not to be easily corroded as in the driving means 20 or the driven means 30 described above.

The detection sensor 70 is a component disposed between the pair of panels 50 to detect the wafer conveyed by the conveyance belt 40 and thereby control the power generating means 10. [

That is, in the transporting apparatus 100 according to the first embodiment of the present invention, in addition to controlling the transporting apparatus directly by the operator, the transporting apparatus 100 can be configured to be controlled automatically. For example, The power generation means 10 may be operated or stopped according to whether the wafer is detected by the power generation means 10 or the speed of the power generation means 10 may be adjusted to adjust the transfer speed of the wafer. The detection sensor 70 is fixedly disposed on the transfer device using the sensor bracket 72 and the sensor block 74.

Meanwhile, FIG. 5 shows a state in which a plurality of transfer devices according to the first embodiment of the present invention are used.

That is, the first shaft 22 is connected by the coupling 14 so that a plurality of conveying apparatuses 100 can be operated using one power generating means 10.

The use of the conveying apparatus 100 according to the first embodiment of the present invention will be described in detail with reference to the accompanying drawings. The conveying belt 40 is used to convey the wafer, It is necessary to adjust the tension of the conveyor belt 40, that is, to adjust the conveyor belt 40 to a more tight state.

In this case, the operator passes through the fixed block 63 and tightens the connecting bolt 69 bolted to the moving block 65 using a tool such as a screwdriver (not shown).

At this time, since the conveyor belts 40 are formed as a pair, the operator adjusts the tension of the conveyor belt 40, respectively. The construction of the pair of conveyor belts 40 in this manner means that even if the conveyor belt 40 rotates the connecting bolts 69 at the same rotational speed in accordance with the material or operating environment over time, 40 may exhibit different feed rates. In other words, any one of the conveyance belts 40 can be controlled to be faster or slower than the other to control the pair of conveyance belts 40 to operate at the same speed. According to this configuration, not only the tension of the conveyance belt 40 but also the horizontal level of the conveyance belt 40 can be easily adjusted.

7B, when the movable block 65 is moved toward the stationary block 63 side along the long hole 50a, the conveyance belt 40 is finally pulled and the conveyance belt is tightened will be.

On the other hand, when the conveyance belt 40 is to be loosened more, the operator releases the connection bolts 69 to move the movement block 65 away from the fixed block 63, Is gradually released.

6 and 7 are views showing a transfer apparatus according to a second embodiment of the present invention.

6, the transfer device 100 according to the second embodiment of the present invention is configured similar to the first embodiment described above, but in the first embodiment, the power generating means 10 and the driving means 20 Are connected by the first shaft 22, the second embodiment is different from the first embodiment in that the power generating means 10 and the driving means 20 are connected by the drive belt 16.

That is, the power generating means 10 and the first shaft 22 are connected by the drive belt 16, and the power generated by the power generating means 10 is transmitted to the first shaft 22 So that the driving means 20 is driven.

As shown in FIG. 7, the transport apparatus 100 according to the second embodiment of the present invention can operate a plurality of transport apparatuses 100 by using one drive means 20. In FIG. Such a configuration is similar to that described with reference to FIG. 5, and a detailed description thereof will be omitted here.

8 and 9 are views showing a transfer apparatus according to a third embodiment of the present invention.

Referring to Figs. 8 and 9, the transport apparatus 100 according to the third embodiment of the present invention is also configured similarly to the first and second embodiments.

In the third embodiment, however, one driven means 30 is disposed in a triangular shape formed by imaginary line segments connecting the center points of the driving means 20 and the driven means 30, and the tension adjusting means 60 So that the tension of the conveyance belt 40 can be controlled.

According to this configuration, in the first and second embodiments, the rolling member 67 of the tension adjusting means 60 is connected to the drive pulley 24 of the drive means 20, the driven pulley 34 of the driven means 30, But in the third embodiment, in a triangular shape formed by an imaginary line segment connecting the center point of each of the drive means 20 and the driven means 30 as well as the rolling member 67 of the tension adjusting means 60 The driven pulley 34 of the driven means 30 to be disposed is also rotated in the same direction as the rolling member 67 of the tension adjusting means 60.

Here, although not shown in the present invention, the driving pulley 24 of the driving means 20, the driven pulley 34 of the driven means 30, and the rolling member 67 of the tension adjusting means 60, It is preferable to use a crown roller that allows the conveyance belt 40 to rotate easily without being peeled off.

Thus, those skilled in the art will appreciate that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof.

Therefore, it should be understood that the above-described embodiments are to be considered in all respects as illustrative and not restrictive, and the scope of the present invention is indicated by the appended claims rather than the foregoing detailed description, It is intended that all changes and modifications derived from the equivalent concept be included within the scope of the present invention.

10: Power generating means 12: Cover
14: coupling 16: drive belt
20: drive means 22: first shaft
24: drive pulley 30: driven means
32: second shaft 34: driven pulley
40: conveying belt 50: panel
52: Base 50a: Long hole
60: tension adjusting means 61: third shaft
63: fixed block 65: movable block
67: rolling member 69: connecting bolt
70: detection sensor 72: sensor bracket
74: Sensor block 100: Feeding device
B: Bearing S: Spacer
W: Washer

Claims (7)

Power generating means;
Driving means connected to the power generating means and mounted on a first shaft that rotates about an axis;
Driven means mounted on one or more second shafts spaced apart from the driving means;
A conveyance belt that connects the drive means and the driven means and is operated by the rotational force of the drive means to operate the driven means;
A pair of panels spaced apart from each other and facing each other and having slots;
A third shaft penetrating the long hole provided in the pair of panels; And
And tension adjusting means mounted on the third shaft so as to be movable along the slot and adjusting a tension of the conveyance belt by adjusting the degree of contact with the conveyance belt,
Wherein at least one of the first and second shafts is subjected to a heat treatment and a raydent treatment. The method according to claim 1,
One or both of said driving means and said driven means,
Characterized in that the transfer device further comprises one or both of a hardened-anodized washer or a spacer made of an iron material and made of radium or aluminum. 3. The method according to claim 1 or 2,
One or both of said driving means and said driven means,
Further comprising a bearing made of stainless steel. delete The method according to claim 1,
Wherein the tension adjusting means comprises:
A fixing block mounted on the panel away from the slot;
A moving block mounted on the slot and slidably moved along the slot;
A rolling member mounted on the third shaft coupled to the moving block and rotated in contact with the conveyance belt; And
And a connecting bolt that is bolted to the moving block through the fixing block and slides the moving block toward or away from the fixed block according to the rotating direction. delete The method of claim 3,
Wherein the tension adjusting means comprises:
A fixing block mounted on the panel away from the slot;
A moving block mounted on the slot and slidably moved along the slot;
A rolling member mounted on the third shaft coupled to the moving block and rotated in contact with the conveyance belt; And
And a connecting bolt that is bolted to the moving block through the fixing block and slides the moving block toward or away from the fixed block according to the rotating direction.

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