KR101977308B1 - Active vibration control apparatus and disturbance control method of conveyer using the same - Google Patents

Abstract

The present invention relates to an active vibration suppression apparatus, and more particularly, to a disturbance control method of a conveyance apparatus using an active vibration suppression apparatus capable of quickly removing vibration by applying a cancellation force to disturbance caused by driving of an upper stage or a gantry.
A disturbance control method of a conveyance apparatus using the active vibration suppression apparatus according to the present invention is characterized in that a vibration suppression apparatus controller of an active vibration suppression apparatus including a vibration suppression mount, a displacement sensor and a servo valve detects a clearance between the upper surface of the clamp ring A step of initializing the value of each of the displacement sensors at the landing position to zero, receiving the position and acceleration information of the linear stage from the motion controller of the linear stage moving on the upper portion of the base provided on the vibration-damping mount, Measuring an acceleration of the base with an upper vibration sensor provided on the upper plate side of the air spring and an acceleration of the ground with a floor vibration sensor provided below the air spring, Based on the position information of the linear stage, the center-of-gravity disturbance per 6 axes and the ground acceleration Estimating a disturbance of floor vibration transmission per three axes (X, Y, Z) from the signal, calculating a cancellation force for the predicted disturbance, calculating a position error signal for the target position of the base, Calculating a rotational inertia moment from the position of the linear stage, and updating the position feedback control parameter and the vibration feedback control parameter in proportion to the calculated rotational moment of inertia, respectively; Calculating a control force for the position and acceleration error of each of the six axes, and calculating a control force for the VCM inverse kinematic matrix, which is a distributor, after adding the control force for the repulsive force disturbance canceling force, the bottom vibration disturbance canceling force and the acceleration error, And the sum of the disturbance cancellation force and the position error control force is added to each servo valve through an inverse kinematic matrix which is a distributor of the servo valve. Times and the step of, characterized in that it comprises the step of waiting for a certain sampling time to match the operating cycle.

Description

TECHNICAL FIELD [0001] The present invention relates to a disturbance control method for a conveying apparatus using an active vibration isolator,

The present invention relates to an active type vibration damping device, and more particularly, to a dynamic vibration damping device using an active vibration damping device capable of rapidly removing vibration by applying a canceling force to disturbance caused by driving of a stage or a gantry, And a control method.

In general, an active vibration isolation system is a control system that blocks vibrations coming from the floor or effectively removes disturbance generated in the stage, which is an upper transfer device, and stabilizes the upper stage within a desired time . Therefore, the main performance evaluation items of the system are the transmissibility and the settling time.

The driving method of the active vibration suppression device is classified into a method using electromagnetic force (hereinafter referred to as VCM), a piezoelectric element (piezoelectric element: PZT) and a method using a pneumatic servo valve.

In the case of the large-sized VCM, the power consumption is large and the influence of the electromagnetic field is large. However, in the case of the small VCM, the actuator structure is simple and easy to manufacture. . The piezoelectric element (PZT) method has been widely applied to construct a semi-active type vibration damper system by combining with a small vibration damper system or a passive air spring in parallel by taking advantage of a small response force.

On the other hand, the pneumatic drive system is used for active control of large equipment such as SEM, TEM, and LCD inspection equipment because it is relatively slow in response but can support high load and realize high control performance.

In addition, stepper, mask aligner, 3D geometry, lithography, etc., among the production equipment and inspection equipment in the semiconductor and flat panel display fields, can transfer X, Y stage or gantry These apparatuses are required to be sensitive to the influence of vibrations, and as the process precision increases, it is required to apply a vibration damping apparatus having excellent performance. To achieve such excellent vibration damping performance, a vibration damping apparatus such as an air spring is applied There is a problem in that the base residual vibration and rolling due to the driving of the conveying apparatus become serious.

In order to solve the conventional residual vibration and rolling problem, first, Increase the stiffness and viscosity of the vibration suppression device; Temporarily increasing the viscosity during stage driving by using an MR (fluid) damper to suppress the base vibration; The conveying device itself drives the counter mass in the reverse direction, thereby canceling the base excitation force by driving the conveying device.

However, when the rigidity and viscosity of the vibration damper are increased, the vibration damping performance is weakened. Moreover, when the MR damper is used, the residual vibration due to the repulsive force can be effectively suppressed. However, And the use of a counter mass is disadvantageous in that the equipment configuration on the base becomes complicated.

Therefore, in order to avoid problems when using the precision equipment, the residual vibration must be sufficiently eliminated and the operation must be performed in a balanced state. At this time, the residual vibration and rolling by driving the transfer device increases the operation waiting time and lowers the productivity.

That is, the "Active type vibration isolation device" entitled "Active vibration isolation device", which is registered in the Korean Intellectual Property Office, is required to accurately maintain the position during the loading and unloading processes in order to remove vibration due to floor vibration and stage disturbance, There is a problem that productivity is deteriorated because a waiting time is required until the post-operation.

References: Korean Patent No. 10-1584700 entitled " Active vibration isolation device ".

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above problems, and it is an object of the present invention to suppress the base vibration by feedback control using a vibration sensor (acceleration or speed sensor) and a voice coil motor (VCM) The position feedback control is performed by using the displacement sensor that measures the gap between the top plate of the vibration suppression mount and the displacement sensor and the upper head, and the servo valve that operates in accordance with the value of the displacement sensor in the controller, The motion controller of the conveying device receives the acceleration and the position of the driving part of the conveying device from the controller connected to the vibration suppressing mount so as to prevent the disturbance caused by driving the conveying device by applying the canceling force at the same time, Control method of disturbance of conveying device using active vibration suppression device The present invention has been made in view of the above problems.

In order to attain the above object, the active vibration suppression apparatus according to the present invention is installed on the lower part of the lower frame installed at the lower part of the lower part of the base with the linear stage installed on the upper part thereof, And a vibration damping mount connected to the air spring and adapted to integrally control a plurality of vertical and horizontal VCMs, vertical and horizontal vibration sensors, an upper vibration sensor and a bottom vibration sensor, wherein displacement sensor targets A displacement sensor installed to detect a gap between the lower surface of the air spring upper plate and the upper surface of the clamp ring assembled to the upper portion of the air spring chamber, According to the value of the displacement sensor, the vibration damper controller receives a signal and operates in real time to supply air And a servo valve for adjusting the height of the air spring in real time.

In the active vibration suppression apparatus according to the present invention, the vibration suppression device controller receives the stage position and the acceleration from the stage controller of the linear stage to predict the direction and magnitude of the disturbance, and estimates the disturbance and the size, A feeder disturbance compensator for calculating a canceling force and generating a canceling force by sending a signal to a vertical VCM, a horizontal VCM, and a servo valve, which are actuators, and a sensor for detecting the position of the linear stage And a vibration feedback controller for calculating a change in the mass moment of inertia according to the change and varying the control gain in proportion to the calculated mass moment of inertia.

The active vibration suppression apparatus according to the present invention is characterized in that the conveyance apparatus disturbance compensator comprises a repulsion force compensator for receiving an acceleration signal generated by the movement of the stage and a center-of-gravity movement compensator for receiving a position signal generated by the movement of the stage .

The active vibration suppression apparatus according to the present invention is characterized in that the vibration suppression apparatus controller comprises a low pass filter (LPF) for passing only low frequency components out of signals generated from the displacement sensor to a position feedback controller, And a high pass filter (HPF) which is passed through only the high frequency component of the signal to be transmitted to the vibration feedback controller.

A control method of a transfer apparatus using an active vibration isolator according to the present invention is a control method of a transfer apparatus in which a vibration isolator controller constituting an active vibration isolator is installed below a displacement sensor target installed on an air spring upper plate of a vibration isolating mount, Initializing the value of the angular displacement sensor to zero at the landing position so as to sense the clearance between the lower surface of the air spring upper plate and the upper surface of the clamp ring assembled to the upper portion of the air spring chamber, The position of the linear stage and the acceleration information from the motion controller of the linear stage moving on the upper portion of the vibration mount mounted on the upper portion of the vibration mount, The acceleration and the acceleration of the ground are measured with a bottom vibration sensor installed at the bottom of the air spring. Axis acceleration disturbance for each of six axes from the information of the repulsive force disturbance for each of six axes (X, Y, Z, roll, pitch, yaw) Estimating a disturbance of floor vibration transmission per three axes (X, Y, Z) from the signal, calculating a cancellation force for the predicted disturbance, calculating a position error signal for the target position of the base, Calculating a rotational inertia moment from a position of the linear stage and updating a position feedback control parameter and a vibration feedback control parameter in proportion to the calculated rotational moment of inertia, Calculating a control force for each of the six axes and an acceleration error, calculating a control force for the reaction force based on the repulsive force disturbance canceling force, the bottom vibration disturbance canceling force and the acceleration And the VCM is distributed to each VCM through the inverse kinematic matrix, which is a distributor, and distributed to each servo valve through the inverse kinematic matrix, which is a distributor of the servo valve, after the center-of-gravity disturbance canceling force and the position error control force are summed And waiting for a certain sampling time to match the operation cycle.

A control method of a transfer apparatus using an active vibration suppression apparatus according to the present invention is characterized by receiving position and acceleration information of a linear stage from a motion controller of a linear stage moving on an upper portion of a base provided on the vibration suppression mount, The acceleration of the base with the upper vibration sensor provided on the upper plate side of the air spring and the acceleration of the ground by the floor vibration sensor provided on the lower portion of the air spring respectively and the position error with respect to the target position of the base Prior to the step of generating a signal and an acceleration error signal for the base of the base respectively, the base position signal is passed through only the slow frequency band generated by the displacement sensor and sent to the position feedback controller, (LPF), and only the fast frequency band generated by the upper vibration sensor The operation region of the frequency generated by the displacement sensor and the upper vibration sensor is overlapped by the high pass filter HPF to be sent to the vibration feedback controller to prevent the control signal sent to the VCM from interfering with the control signal sent to the VCM And further comprising a band separating step.

As described above, according to the disturbance control method of the conveyance apparatus using the active vibration suppression apparatus according to the present invention, feedback control is performed using a vibration sensor (acceleration or velocity sensor) and a voice coil motor (VCM) The position feedback control is performed by using the displacement sensor which measures the gap between the top plate of the vibration suppression mount and the upper head and the servo valve which operates in accordance with the value of the displacement sensor in the controller, While the acceleration and the position of the driving part of the conveying device are received from the controller connected to the vibration suppressing mount from the motion controller of the conveying device to compensate for the disturbance caused by the driving of the conveying device and simultaneously the canceling force is applied to the actuator, The effect of enhancing the productivity and safety of precision equipment is have.

As described above, according to the disturbance control method of the conveyance apparatus using the active vibration suppression apparatus according to the present invention, the disturbance generated when the stage is driven can be detected by the controller connected to the vibration suppression mount, By applying the canceling force to the actuator, it is possible to significantly reduce the movement of the object due to the stage driving, thereby minimizing the occurrence of disturbance. Further, unlike the conventional vibration damping apparatus, Therefore, the fixing time after the stage is driven can be shortened.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front view of a conveying apparatus in which a base and a linear stage are installed in an active vibration control apparatus of the present invention,
Fig. 2 is a plan view of Fig. 1,
Fig. 3 is a right side view of Fig. 1,
Fig. 4 is an explanatory view showing an installation state of a vibration damping mount constituting the active vibration damping device of the present invention; Fig.
5 is a front view of a vibration isolation mount constituting the active vibration isolation apparatus of the present invention,
Fig. 6 is a plan view of Fig. 5,
Fig. 7 is a left side view of Fig. 5,
Fig. 8 is a right side view of Fig. 5,
Fig. 9 is a rear view of Fig. 5,
10 is a cross-sectional view illustrating the air spring of FIG. 5,
11 is an explanatory view showing a state in which a vibration isolation mount constituting the active vibration isolation apparatus of the present invention is connected to a controller;
Figure 12 is a control block diagram for the vibration suppression device controller of Figure 11,
13 is a control flowchart of the vibration suppression apparatus controller of the vibration suppression mount constituting the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT Hereinafter, an active vibration suppression apparatus and a disturbance control method of a transfer apparatus using the same according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

In the drawings, the same reference numerals are given to the same elements even when they are shown in different drawings. In the drawings, the same reference numerals as used in the accompanying drawings are used to designate the same or similar elements. And detailed description of the configuration will be omitted. Also, directional terms such as "top", "bottom", "front", "back", "front", "forward", "rear", etc. are used in connection with the orientation of the disclosed drawing (s). Since the elements of the embodiments of the present invention can be positioned in various orientations, the directional terminology is used for illustrative purposes, not limitation.

As shown in FIGS. 1 to 12, the active vibration suppression apparatus 1000 according to an embodiment of the present invention includes three or more bases 1200 disposed below a base 1200 having a linear stage 1100 installed thereon, And a plurality of vertical and horizontal VCMs 1520 and 1530 and vertical and horizontal vibration sensors 1540 and 1530 are connected to the vibration damper controller 1400. The air spring 1510 and the plurality of vertical and horizontal VCMs 1520 and 1530, 1550, and a vibration damping mount 1500 that is configured to integrally control the upper vibration sensor 1560 and the floor vibration sensor 1570.

Therefore, when the linear stage 1100 moves on the base 1200, the air spring 1510 of the vibration damping mount 1500 controlled by the vibration damping device controller 1400 and the plurality of vertical and horizontal VCMs 1520 and 1530 The vibration of the base 1200 is attenuated at the upper part of the lower frame 1300 by receiving signals from the vertical and horizontal vibration sensors 1540 and 1550, the upper vibration sensor 1560 and the floor vibration sensor 1570 .

5 to 10, the vibration damping mount 1500 according to the present invention is installed so as to be positioned below the displacement sensor target 1512 provided on the air spring upper plate 1511 of the air spring 1510 The gap between the lower surface of the air spring upper plate 1511 and the upper surface of the clamp ring 1514 assembled to the upper portion of the air spring 1513 is detected in real time A servovalve valve 1580 for receiving the signal from the vibration suppression device controller 1400 according to the value of the displacement sensor and operating in real time so as to adjust the height of the air spring 1513 1590).

The clearance between the lower surface of the air spring upper plate 1511 and the upper surface of the clamp ring 1514 assembled to the upper portion of the air spring 1513 is provided on the air spring upper plate 1511 of the air spring 1510 The sensor of the displacement sensor 1580 detects the gap between the displacement sensor target 1512 and the upper surface of the displacement sensor 1580 and sends the signal of the displacement sensor 1580 to the vibration suppression device controller 1400 so as to be positioned at the setting value of the air spring 1510 At this time, the vibration suppression device controller 1400 supplies air to the servo valve 1590 through the position feedback controller 1440 of the vibration suppression device controller 1400 in real time to change the position of the piston so that the height of the air spring 1510 In real time.

As shown in the control block diagram of FIG. 12, the vibration suppression apparatus controller 1400 receives the position and acceleration of the linear stage from the stage controller 1110 of the linear stage 1100, In addition to the prediction, it is also possible to calculate the cancellation force, which is the same and opposite in magnitude and anticipate the direction, to generate a canceling force by sending a signal to the vertical VCM 1520, the horizontal VCM 1530 and the servo valve 1590, A change in mass moment of inertia is calculated in accordance with a change in the position of the linear stage 1100 and the detection signal of the conveying device disturbance compensator 1420 (stage disturbance compensator) and the upper vibration sensor 1560 provided on the air spring upper plate 1511 And a vibration feedback controller 1430 adapted to change the control gain in proportion to the calculated mass moment of inertia.

Accordingly, the transfer device disturbance compensator 1420 (stage disturbance compensator) receives the position and the acceleration of the linear stage from the stage controller 1110 of the linear stage 1100 to estimate the direction and magnitude of the disturbance, And outputs a canceling force to the vertical VCM 1520, the horizontal VCM 1530, and the servo valve 1590, which are the actuators, to generate a canceling force, and the vibration feedback controller 1430 When the mass inertia moment changes by the change of the position of the linear stage 1100 and the mass inertial moment is Iyy with respect to the rotation around the y axis before the stage moves, the weight of the driving unit is m, d, the mass moment of inertia is calculated as Iyy + md < 2 >, the control gain is changed in proportion to the calculated mass moment of inertia, A signal is sent to the vertical VCM 1520, the horizontal VCM 1530 and the servo valve 1590, which are actuators, by calculating the restraining force against the vibration generated according to the detection signal of the upper vibration sensor 1560 installed on the ring top plate 1511 So that a restraining force is generated.

The transport device disturbance compensator 1420 includes a repulsion force compensator 1421 that receives a signal acting in a direction opposite to the acceleration direction in proportion to a product of the weight of the driving part of the stage and the acceleration generated by the movement of the linear stage 1100, And a center-of-gravity movement compensator 1422 for receiving a position signal generated by the movement of the linear stage 1100.

The repulsive force compensator 1421 transmits the acceleration signal of the linear stage 1100 to the vertical and horizontal VCMs 1520 and 1530 by the VCM inverse kinematic matrices 1521 and 1531 which are vertical and horizontal distributors, And the servo valve 1590 is opened by the servo valve inverse kinematic matrix 1591 in which the position signal of the linear stage 1100 is a distributor by the center of gravity movement compensator 1422 to cancel the reaction force, (1510) to generate a control force.

As shown in the control block diagram of FIG. 12, the vibration suppression apparatus controller 1400 controls the vibration suppression device 1400 such that the signal transmitted from the displacement sensor 1580 through the low frequency component to the position feedback controller 1440 Pass filter 1451 and a high pass filter 1452 (HPF) which are passed through only the high frequency components of the signals generated by the upper vibration sensor 1560 to the vibration feedback controller 1430, (1450).

The operating range of the frequency generated by the displacement sensor 1580 and the upper vibration sensor 1560 is overlapped by the low pass filter 1451 (LPF) and the high pass filter 1452 (HPF) of the band separation filter 1450 A control signal sent to the vertical and horizontal VCMs 1520 and 1530 and a control signal sent to the servo valve 1590 are supplied to the bandpass filter 1450 by a lowpass filter 1451 (LPF) and a highpass filter 1452 (HPF) Interference with each other is prevented, and the operation performance is excellent.

The vibration sensed by the bottom vibration sensor 1570 is detected by the bottom vibration feed forward controller 1410 of Figure 12 by the vertical and horizontal VCMs 1520 and 1530 by the VCM inverse kinematic matrices 1521 and 1531, And is attenuated.

Hereinafter, a disturbance control method of the conveyance apparatus using the above-described active type vibration damper will be described with reference to FIGS. 1 to 13. FIG.

The displacement sensor target 1512 installed on the air spring upper plate 1511 of the vibration damping mount 1500 may be moved to the position of the displacement sensor target 1512. In this case, when the start button is pressed in the vibration damping device controller 1400 after power is supplied to the active vibration damping device 1000 of the present invention, The lower surface of the air spring upper plate 1511 and the upper surface of the clamp ring 1514 assembled to the upper portion of the air spring chamber 1513 are installed so as to be positioned at a lower portion of the air spring chamber 1513, (S1) for initializing the value of the angular displacement sensor to zero at the landing position so as to detect a clearance between the vibration stage and the vibration stage, and a linear stage (1100) moving from above the base (1200) Receives the position and acceleration information of the linear stage 1100 from the motion controller 1110 of the air spring 1510 and detects the position of the base 1200 with the displacement sensor 1580 and the position of the air spring 1511 ) Side A step S2 of measuring the acceleration of the base 1200 by the upper vibration sensor 1560 and the acceleration of the ground by the floor vibration sensor 1570 installed at the lower portion of the air spring 1510, (X, Y, Y, Z) from the acceleration information of the three-axis (X, Y, Z, roll, pitch, yaw) disturbance, and the positional information of the linear stage, A step S4 of calculating a cancellation force for the estimated disturbance, a step S4 of calculating a cancellation force for the estimated disturbance, A step (S5) of generating an acceleration error signal with respect to a target speed, a step of calculating an angular moment of inertia from the position of the linear stage 1100, and calculating a parameter of the position feedback controller 1440 in proportion to the calculated rotational moment of inertia The vibration of the vibration feedback controller 1430 A step S7 of calculating a control force for each of the six axes and an acceleration error, a step S7 of correcting the reaction force disturbance canceling force in the reaction force compensator 1421, , The floor vibration disturbance cancellation force and the control force for the acceleration error in the vibration feedback controller 1430 are distributed to the respective vertical and horizontal VCMs 1520 and 1530 through the VCM inverse kinematic matrices 1521 and 1531 as dividers The center-of-gravity disturbance canceling force by the center-of-gravity movement compensator 1422 and the sum of the position error control forces by the position feedback controller 1440 and the inverse kinematic matrix 1591, which is a distributor of the servo valve 1590, (Step S8) of distributing the air to the microcomputer, and step S9 of waiting for a predetermined sampling time, for example, 0.2 ms for matching the operation period.

Therefore, the disturbance of the conveyance apparatus using the active vibration suppression apparatus is detected by the vibration suppression apparatus controller 1400 by the position feedback controller 1440, the vibration feedback controller 1430, the floor vibration feedforward controller 1410, and the conveyance apparatus disturbance compensator 1420, The vibration of the base 1200 is controlled.

In the position feedback control by the position feedback controller 1440, the pressure in the air spring chamber 1513 is controlled by the servo valve 1590, and the pressure is controlled to control the height of the air spring upper plate 1511 And the height of the top plate is controlled by the feedback control for controlling the pressure by the servo valve 1590 while the parameter of the feedback controller is controlled by the displacement sensor 1580 at every sampling time, And is updated with reference to the position. In addition, since the active vibration damping system 1000 includes three or more vibration damping mounts 1500, it is possible to operate the vibration damping mounts 1500 in a synchronized manner, The posture can be precisely controlled, and the base 1200 can be leveled and stabilized by using it.

In the vibration feedback control by the vibration feedback controller 1430, the air spring 1510 is lifted and the air spring top plate 1511 is lifted by using the vertical and horizontal VCMs 1520 and 1530, And the movement of the base 1200 can be sensed by using the vertical and horizontal vibration sensors 1550 and 1540 mounted on the upper surface of the air spring. In the active vibration suppression system, three or more vibration damping Mounts are included so that you can see at least 3 horizontal and 3 vertical vibration sensors and use these signals to see the base speed or acceleration in 6 axis (X, Y, Z, roll, pitch, yaw) And the VCM also includes at least three horizontals and three vertically. Therefore, the thrust can be applied to the base 1200 in the six-axis direction by integrally driving them, while the six-axis base velocity or acceleration is sensed by each of the vibration sensors, VC M can be used to suppress the vibration of the base through the feedback control that applies thrust.

Here, the parameter of the vibration feedback controller 1430 is updated with reference to the position of the stage 1100 at every sampling time, thereby removing the disturbance due to the change in mass moment of inertia, and the position by the servo valve 1590 Feedback control and vibration feedback control by VCM can cause physical interference. That is, when an external force is applied to the base and deviates from the target position, the vibration feedback control makes the acceleration zero and the position feedback control attempts to return to the target position. At this time, a low pass filter 1451 (Low Pass Filter) is connected to the displacement sensor 1580 and a high pass filter 1452 (High Pass Filter) is connected to the upper vibration sensor 1560, The posture control through the position feedback controller 1440 corresponds to the low-frequency rolling, and the vibration control through the vibration feedback controller 1430 corresponds to the high-frequency vibration.

A bottom vibration sensor 1570 is installed on the floor of the vibration isolation mount 1500. The bottom vibration sensor 1570 detects the bottom vibration of the floor vibration sensor 1570, The floor vibration sensor in the vertical direction is installed with two floor vibration sensors in the horizontal direction and the floor vibration sensors in the vertical direction are installed in the horizontal direction, The three floor vibration sensors can detect the speed or acceleration of the ground in the X, Y, and Z axis directions, and the vibrations generated at the floor can be detected through the air spring 1510 to the base 1200 When the transfer function characteristic of the air spring 1510 is known, it is possible to predict an excitation force to be transmitted to the base 1200, Vibration of the base 1200 can be prevented by predicting the excitation force to be transmitted to the base 1200 from the detected speed or acceleration of the ground surface and applying the reverse cancellation force by using the respective VCMs through the bottom vibration feedforward control.

The linear stage 1100 is driven by the position and the acceleration command of the motion controller 1110. The linear motion of the linear stage 1100 during the driving of the linear stage and the repulsive force If the disturbance due to the movement of the center of gravity is transmitted to the base 1200 and the mechanical structure (weight, position, direction) of the linear stage is known, the repulsive force and center- The transfer device disturbance compensator 1420 receives the position and acceleration commands and obtains the predicted repulsive force and the center-of-gravity disturbance in the six-axis direction. The disturbance due to the repulsive force is determined by the position and acceleration command values In addition, the feed weight of the linear stage 1100 preliminarily input, the mounting position of the linear stage 1100, and the center of gravity of the base 1200 And calculates the force required for each of the vertical and horizontal VCMs 1520 and 1530 in order to apply a canceling force to the predicted six-axis repulsion disturbance, and finally, And the vibration of the base 1200 due to the repulsive force is prevented.

The repulsive force compensator 1421 in the feeder disturbance compensator 1420 obtains the repulsive force disturbance predicted by receiving the acceleration command in the six axial directions. The center of gravity movement compensator 1422 receives the position command, The disturbance due to the movement of the center of gravity can be predicted from the information such as the conveying weight of the linear stage inputted in advance together with the position command value, and the predicted weight in the six axial directions In order to apply the canceling force to the center disturbance, the force required for each of the vertical and horizontal VCMs is calculated. Finally, the calculated signal is output to each VCM to cancel out the base 1200 Is prevented.

That is, the vertical vibration sensor 1540 and the horizontal vibration sensor 1550, the floor vibration sensor 1570, the upper vibration sensor 1560, and the vertical and horizontal voice coil motors 1520 and 1530, respectively. (Hereinafter referred to as " VCM ") to suppress the vibration of the base 1200 and to be positioned below the displacement sensor target 1512 installed on the air spring upper plate 1511 of the vibration damping mount 1500 A displacement sensor 1580 adapted to sense the gap between the lower surface of the air spring upper plate 1511 and the upper surface of the clamp ring 1514 assembled to the upper portion of the air spring chamber 1513, And the position feedback control is performed in real time using the servo valve 1590 operating in accordance with the value of the displacement sensor 1580 in the vibration suppression device controller 1400. This facilitates maintaining the equilibrium state of the equipment, Of the linear stage 1100 The controller 1110 receives the acceleration and the position of the driving part of the conveying device from the vibration suppression device controller 1400 connected to the vibration suppression mount 1500 to compensate for the disturbance caused by the driving of the conveying device, The productivity and safety of the precision equipment can be increased.

When the step S9 of waiting for a predetermined sampling time, for example 0.2 ms, is passed in order to match the operation period, the value of the displacement sensor is circulated after the step S1 of initializing the displacement sensor to 0, Receives the position and acceleration information of the linear stage 1100 from the motion controller 1110 (stage controller) of the linear stage 1100 moving on the upper part of the base 1200 installed on the upper side of the base 1200, An acceleration of the base 1200 by the upper vibration sensor 1560 installed on the air spring upper plate 1511 side of the air spring 1510 and a bottom vibration sensor 1570 installed on the lower side of the air spring 1510. [ (S2) in which the acceleration of the ground is respectively measured by the acceleration sensor.

The position and acceleration information of the linear stage 1100 is received from the motion controller 1110 of the linear stage 1100 moving on the upper part of the base 1200 installed on the vibration damping mount 1500, 1580 and the position of the base 1200 and the acceleration of the base 1200 by the upper vibration sensor 1560 installed on the air spring upper plate 1511 side of the air spring 1510, Generating a position error signal for the target position of the base 1200 and an acceleration error signal for the velocity of the base respectively after the step S2 of measuring the acceleration of the ground by the vibration sensor 1570 The position signal of the base 1200 passes through only the slow frequency band generated by the displacement sensor 1580 and is sent to the position feedback controller 1440 through the low pass filter 1451 Upper vibration sen Generated by the displacement sensor 1580 and the upper vibration sensor 1560 by a high pass filter 1452 (HPF) that is passed through only the fast frequency band generated by the vibration sensor 1560 and sent to the vibration feedback controller 1430, (S10) for preventing the control signals sent to the vertical and horizontal VCMs 1520 and 1530 and the control signals sent to the respective servo valves 1590 from interfering with each other, .

Therefore, the displacement sensor 1580 and the upper vibration sensor 1560 are separated by the low-pass filter 1451 (LPF) and the high-pass filter 1452 (HPF) constituting the band separation filter 1450 of the band separation step S 10, The control signals sent to the vertical and horizontal VCMs 1520 and 1530 and the control signal sent to the servo valve 1590 are inputted to the low pass filter 1451 (LPF) and the high Pass filter 1452 (HPF), and the operation performance is improved.

The embodiments of the present invention described above and shown in the drawings should not be construed as limiting the technical idea of the present invention. The scope of protection of the present invention is limited only by the matters described in the claims, and those skilled in the art will be able to modify the technical idea of the present invention in various forms. Accordingly, such modifications and changes will fall within the scope of the present invention if they are apparent to those skilled in the art.

1000: Active vibration isolation device 1100: Linear stage
1200: base 1300: lower frame
1400: vibration suppression device controller 1420: transfer device (stage) disturbance compensator
1421: Repulsive force compensator 1422: Center of gravity compensator
1430: Vibration feedback controller 1450: Band separation filter
1451: Low-pass filter (LPF) 1452: High-pass filter (HPF)
1500: vibration-proof mount 1510: air spring
1520: Vertical VCM 1530: Horizontal VCM
1540: Vertical vibration sensor 1550: Horizontal vibration sensor
1560: Top vibration sensor 1570: Floor vibration sensor
1580: Displacement sensor 1590: Servo valve

Claims (6)

delete delete delete delete The vibration damping device is installed on the lower part of the lower frame installed at the lower part of the base provided with the linear stage at the upper part and at the lower part of the lower part provided at the lower part of the base with the linear stage. A vibration sensor mounted on the upper surface of the vibration spring mount of the vibration damping mount to detect an interval between the displacement sensor and the vibration sensor, A displacement sensor for detecting a gap between a lower surface of the spring upper plate and an upper surface of a clamp ring assembled at an upper portion of the air spring chamber, and a vibration sensor for receiving a signal from the vibration damper controller according to the value of the displacement sensor, Servo valve that can control the height of air spring in real time by supplying A method of controlling a conveying apparatus using an active vibration suppression apparatus comprising:
Wherein the vibration suppression device controller comprises:
It is installed so as to be positioned at the lower part of the displacement sensor target installed on the air spring upper plate of the vibration suppression mount so as to detect the gap with the displacement sensor target, so that the lower surface of the air spring upper plate and the upper surface of the clamp ring assembled to the upper part of the air spring chamber Initializing the value of the angular displacement sensor to zero at the landing position so as to sense a gap away from the displacement sensor,
And a vibration sensor for detecting the position of the linear stage and the acceleration information from the motion controller of the linear stage moving on the upper portion of the vibration mount, And a floor vibration sensor provided at a lower portion of the air spring,
(X, Y, Z, roll, pitch, yaw) disturbance disturbances from the linear acceleration information of the linear stage and the positional information of the linear stage, , Y, Z), respectively;
Calculating a cancellation force for the predicted disturbance,
Generating a position error signal with respect to the target position of the base and an acceleration error signal with respect to the target of the base with respect to the velocity (0)
Calculating a rotational inertia moment from the position of the linear stage and updating a position feedback control parameter and a vibration feedback control parameter in proportion to the calculated rotational moment of inertia,
Calculating a control force for the six-axis position and the acceleration error;
The control force for the repulsive force disturbance canceling force, the bottom vibration disturbance canceling force and the acceleration error is distributed to each VCM through a VCM inverse kinematic matrix which is a distributor after the sum of the disturbance cancellation disturbance force and the position error control force, Distributing to each servo valve through an inverse kinematic matrix,
And waiting for a predetermined sampling time in order to adjust the operation period. The method of controlling a conveying apparatus using an active type vibration damper. 6. The method of claim 5,
And a vibration sensor for detecting the position of the linear stage and the acceleration information from the motion controller of the linear stage moving on the upper portion of the vibration mount, And the acceleration of the ground by the bottom vibration sensor provided at the lower portion of the air spring,
Prior to the step of generating a position error signal for the target position of the base and an acceleration error signal for the base of the base respectively,
The position signal of the base is passed through only a low frequency band generated by the displacement sensor and is sent to a position feedback controller, and a low pass filter (LPF) passing through only a fast frequency band generated by the upper vibration sensor and sent to a vibration feedback controller A high-pass filter (HPF) is provided to prevent the interference of the control signal sent to the VCM and the control signal sent to the VCM by overlapping the operating range of the frequency generated by the displacement sensor and the upper vibration sensor And a control unit for controlling the operation of the conveying device.

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