KR102033083B1 - Semiconductor stocker systems and methods - Google Patents

Abstract

In one embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness products, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber can be used to clean the stored workpieces. A purge gas system can be used to prevent contamination of the products stored in the workpieces. The robot can be used to detect the state of the storage compartment prior to delivering the workpieces. A monitor device can be used to monitor the status of the stocker.

Description

Semiconductor Stocker Systems and Methods {SEMICONDUCTOR STOCKER SYSTEMS AND METHODS}

This application claims priority to US Provisional Patent Application Serial No. 61 / 501,792, filed June 28, 2011 and entitled “Semiconductor stocker systems and methods”, which is incorporated herein by reference.

The present invention relates to apparatuses and methods for storing workpieces or workpiece containers, such as wafer or reticle carriers used in the semiconductor manufacturing industry.

Stokers are typically installed in a semiconductor facility to temporarily store workpieces such as wafers, flat panel displays, LCDs, photolithography reticles, or masks. In the process of manufacturing semiconductor devices, LCD panels, and the like, there are hundreds of processing equipment and therefore hundreds of manufacturing steps. It is very difficult for the flow of wafers, flat panels, or LCDs (hereinafter, workpiece) to be uniform from step to step, from tool to tool. Despite the best planners, there are always unexpected scenarios such as tool down, emergency lot coming through, and regular maintenance that lasts longer than planned, so there are specific tools for specific tools. There are various accumulations of workpieces in the steps. Accumulated workpieces are stored in a storage stocker and need to wait for processing.

For example, a photolithography process is an important process in a semiconductor manufacturing facility, involving a number of photolithography masks or reticles (hereinafter reticles). Thus, the reticles are typically stored in a storage stocker and returned to the lithographic exposure equipment as needed.

Storage of workpieces and reticles (hereinafter products) is much more complicated due to the requirement of cleanliness. Damages to the products can be physical damages in the form of particles or chemical damages in the form of interactions. If the critical dimension of semiconductor device processing exceeds 0.1 micron, it will be necessary to prevent particles of 0.1 micron size, and reactive species from accessing the products. Storage areas will typically need to be cleaner than processing facilities to ensure less cleaning between processing.

Thus, stocker storage areas are typically designed to be sealed from the external environment, even with constant purging and inert gas flow to prevent possible chemical reactions. Access to the storage areas is load-locked to ensure isolation between the clean storage environment and the external environment.

Advances in semiconductor devices and processing have raised requirements for cleanliness in modern semiconductor factories, such as enhanced requirements for cleanliness in storage stockers.

In one embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness products, such as extreme ultraviolet (EUV) reticle carriers. The decontamination chamber can be used to clean the stored workpieces. The purge gas system can be used to prevent contamination of the products stored in the workpieces. The robot can be used to detect the state of the storage compartment before delivering the workpieces. The monitor device can be used to monitor the status of the stocker.

1A and 1B illustrate configurations of a stocker system, in accordance with an embodiment of the present invention.
2A and 2B illustrate an example of a decontamination process, in accordance with one embodiment of the present invention.
3A and 3B illustrate different configurations for a decontamination system, according to one embodiment of the invention.
4A and 4B illustrate flowcharts for decontaminating objects using a decontamination chamber, according to one embodiment of the invention.
5A and 5B illustrate other flowcharts for decontaminating objects using a decontamination chamber, according to one embodiment of the invention.
6A-6C illustrate flowcharts for decontaminating objects in a stocker using a decontamination chamber, according to one embodiment of the invention.
7 illustrates a storage chamber including a plurality of storage compartments, according to one embodiment of the invention.
8 illustrates a stocker system using purged gas storage compartments, according to one embodiment of the invention.
9A-9C illustrate flowcharts for storing objects using purge gas compartments, according to one embodiment of the invention.
10A-10E illustrate a robotic arm with a flow sensor, in accordance with an embodiment of the present invention.
11A and 11B illustrate sensor configurations on gripper arms, according to one embodiment of the invention.
12A-12D illustrate a flow detection sequence, according to one embodiment of the invention.
13A and 13B illustrate flowcharts for sensing purge gas flow prior to placing objects, according to one embodiment of the invention.
14A illustrates a monitor carrier, in accordance with an embodiment of the present invention.
14B illustrates the movements of the monitor carrier in the stocker.
15A-15C illustrate flowcharts for collecting data from a monitor carrier, in accordance with an embodiment of the present invention.
16A illustrates a system including a data collection station, in accordance with an embodiment of the present invention.
16B illustrates a flowchart for a data collection station, in accordance with an embodiment of the present invention.
17 illustrates an example configuration for overhead and manual loading stations, in accordance with an embodiment of the present invention.
18A and 18B illustrate example flowcharts for accessing overhead loading stations, in accordance with an embodiment of the present invention.
19 illustrates an example transfer and / or storage station with purge nozzles, in accordance with an embodiment of the present invention.
20 illustrates the configuration of an EUV reticle carrier.

In some embodiments, the present invention discloses methods and apparatuses for storage of objects such as semiconductor workpiece containers and reticle carriers. In one embodiment, the storage process may include a clean environment for storage through purge gas to the internal volume of stored objects, and a decontamination chamber for periodically cleaning the stored objects.

Cleanliness is an important requirement for semiconductor products such as cassettes, FOUPs, holders, carriers and the like. In cleaned storage, the clean environment is clean, such as reduction of particles and reduction of trace contaminants, organic, inorganic metals, natural oxides and particulate matters in the range from several microns to sub-micron levels. To keep the level.

In one embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness products, such as extreme ultraviolet (EUV) reticle carriers. The description below uses exemplary EUV reticle carriers, but the invention is not so limited, and may be applied to any objects having stringent cleanliness requirements, such as low particulate contaminations and low degassing components. .

20 illustrates the configuration of an EUV reticle carrier 209 to be stored. The EUV reticle 200 is typically stored in the double-container carrier 209 along with having nitrogen in the space 207 between the inner container and the outer container. The inner container is typically made of metal and includes an upper lid 201 mated with the lower support 202. The outer container is typically made of a low degassing polymer and includes an upper lid 203 that mates with the lower support 204. Both containers may have handles for holding by an operator or an automatic transport system. The handle 205 is shown for the upper lid 203 of the outer container. The support 204 of the outer container may have inlets for receiving a nitrogen purge into the inner volume 207 of the reticle carrier.

The double container EUV reticle carrier is an example of high level cleanliness for semiconductor processing, where the reticle is stored in two levels of containers to prevent contamination. In addition, the volume between the two levels is purged with nitrogen to avoid bacterial growth or to prevent degassed particles from the outer container from adhering to the inner container. Thus, the storage system for these cleaned objects requires improved features to maintain the desired level of cleanliness.

In one embodiment, the present invention discloses a cleaning chamber and process for periodically purging, cleaning or degassing stored objects. The cleaning chamber can restore the cleanliness of the stored object, for example, by degassing any contaminants attached to the objects during storage. Periodic cleaning can reduce or eliminate any contamination, thereby restoring objects back to a high level of cleanliness.

In one embodiment, the cleaning chamber may include a decontamination chamber that uses high vacuum to perform degassing of contaminants on the objects. Objects to be archived may be decontaminated before being placed in storage. Archived objects can be decontaminated before being taken out of the stocker. Archived objects may be decontaminated following certain procedures, such as after a certain time, when the objects are dirty, or when there are some problems with the level of cleanness to the stocker.

In one embodiment, the decontamination process uses high vacuum, for example 10 ⁻⁶ Torr or less, to release any contaminants trapped on the surface or subsurface of the objects. Also, the volume inside the objects can be evacuated to the same high vacuum level, for example. In addition, purging processes may be performed on the internal volume to further remove any particulates and contaminants in the objects.

In one embodiment, the objects are decontaminated while the internal volume is pumped and / or pumped / purged with clean nitrogen. In another embodiment, the objects are decontaminated while opening, so all parts of the objects are treated with a high level vacuum to discharge any trapped contaminants.

1A and 1B illustrate configurations of a stocker system, in accordance with an embodiment of the present invention. The stocker may include a storage chamber 12, a loading and unloading station 18, and a transport system 16 for transporting objects between the loading / unloading station 18 and the storage chamber 12. In addition, the stocker may also include a decontamination chamber 14 for cleaning the stored objects. Decontamination chamber 14 may be located opposite the storage chamber 12 (FIG. 1A) or may be located next to storage chamber 12 (FIG. 1B). Alternatively, the decontamination chamber 14 may be located anywhere in the stocker system, for example within the access range of the transfer robot 16.

2A and 2B illustrate an example of a decontamination process, in accordance with one embodiment of the present invention. The object shown to be decontaminated is a double container reticle carrier comprising an outer container 22B and an inner container 22A protecting the reticle 21. Decontamination chamber 20 includes a vacuum pump 25 that maintains a vacuum in decontamination chamber 23A, a gas purge system that includes a clean, inert or inert gas, such as nitrogen or compressed air, to establish a pressurized chamber. (26) may include one or more manifolds 28 coupled to an internal volume of the object, eg, volume 23B between outer container 22B and inner container 22A. . Manifolds 28 are coupled to pumping line 29B to exhaust the internal volume and purge gas 29A to purge the internal volume. A heater 24 may be included to heat the object and / or decontamination chamber. Sensors such as residual gas analyzers (RGA) may also be included to monitor the contamination levels of the object.

In FIG. 2A, the vacuum volume 23A is, for example, by the vacuum pump 25 together with the vacuum volume 23B inside the object established by the manifolds 28 switching to the pumping line 29B. Is established by the shutdown flow 26. Heater 24 and RGA 27 may be turned on. The time for decontamination may be predetermined or set by the level of contaminants observed by the sensor 27. In FIG. 2B, after completing the vacuum decontamination, the vacuum is turned off and the purge gas 26 is turned on to establish the pressurized environment 23A * in the decontamination chamber. In addition, manifolds 28 are switched to purge gas 29A so that purge gas flows to internal volume 23B *. A pressurized atmosphere may be established prior to opening the decontamination chamber 20 to the atmosphere, for example before taking the object out of the decontamination chamber. The pressurized atmosphere can prevent contaminants and particulates from trapping back to the object surface.

In one embodiment, during the vacuum decontamination step (FIG. 2A), the manifolds 28 can be cyclically switched between pumping and purging, thereby effectively pumping / purging cycles for cleaning the internal volume 23B. To perform.

3A and 3B illustrate different configurations for a decontamination system, according to one embodiment of the invention. In FIG. 3A, the outer container 22B is opened during decontamination. In such a case, the manifolds 28 may be coupled directly to the purging line 29A since the internal volume may be pumped through the decontamination chamber 23. The decontamination process is performed as before, and the vacuum, together with the heater 24 and the sensor 27, provides a degassing process for the trapped contaminants. Purge gas, such as purge gas 26 for the chamber and purge gas 29A for the container, is shut off. After completion of the decontamination process, in addition to purge gas 29A filling the internal volume, purge gas 26 may be introduced to establish a pressurized atmosphere. The outer container can be closed under a clean environment with purge gas 29A before the finished object is discharged to the outside atmosphere.

In FIG. 3B, both inner and outer containers are opened during decontamination. The inner and outer containers are closed under a purge gas atmosphere before discharging the closed object to the outside.

4A and 4B illustrate other flowcharts for decontaminating objects using a decontamination chamber, according to one embodiment of the invention. In one embodiment, the outside of the carrier is affected by the vacuum degassing process and the vacuum in the carrier is affected by the pumping / purge process. The pumping / purge process may be vacuum pumping for degassing followed by a clean gas purge.

Alternatively, the pumping / purge process may include pumping and purging of multiple cycles. In FIG. 4A, operation 40 decontaminates the carrier by evacuating gases in the decontamination chamber. The operation pumps and purges the gases in the carrier, in one or multiple cycles. Operation 42 causes nitrogen to flow into the decontamination chamber prior to removing the carrier.

In one embodiment, the volume in the carrier is optionally pumped out. For example, if the time between decontamination is short, which means that the clean gas in the carrier is still very clean with minimal or negligible contaminants attached to the object inside the internal volume, degassing of the internal volume is not necessary. It may not. In most cases, clean gas (eg, nitrogen) in the carrier is replaced with fresh clean gas, for example by a purge process of the internal volume. In FIG. 4B, operation 43 transfers the carrier to the decontamination chamber. Operation 44 exhausts gases in the decontamination chamber. Operation 45 optionally exhausts gases in the carrier. Operation 46 causes nitrogen to flow to the volume in the carrier. Operation 47 causes nitrogen to flow into the decontamination chamber. Operation 48 transfers the carrier out of the decontamination chamber.

5A and 5B illustrate other flowcharts for decontaminating objects using a decontamination chamber, according to one embodiment of the invention. In one embodiment, the carrier is opened to decontaminate the outside and inside of the carrier. For example, the outer container is opened to decontaminate the volume between the outer volume and the inner volume. The innermost volume is still closed to protect the reticle. In FIG. 5A, operation 50 transfers the carrier to the decontamination chamber.

Operation 51 causes nitrogen to flow into the decontamination chamber. Operation 52 opens the outer container of the carrier. Operation 53 exhausts gases in the decontamination chamber. Operation 54 causes nitrogen to flow into the decontamination chamber. Operation 55 causes nitrogen to flow into the internal volume of the carrier. Operation 56 closes the outer container of the carrier. Operation 57 removes the carrier.

In one embodiment, both outer and inner containers are open for decontamination.

Thus, the sequence can be used such that operations 52 and 56 are changed to 52A and 56A. In FIG. 5B, operation 52A opens the outer container and the inner container of the carrier. Operations 53 to 55 are similar, operation 53 exhausts gases from the decontamination chamber, operation 54 causes nitrogen to flow into the decontamination chamber, and operation 55 is nitrogen to the internal volume of the carrier. To flow. Operation 56A closes the inner container and outer container of the carrier.

6A-6C illustrate flowcharts for decontaminating objects in a stocker using a decontamination chamber, according to one embodiment of the invention. In one embodiment, objects stored in the stocker are periodically or occasionally moved to a cleaning chamber (eg, decontamination chamber) for cleaning or conditioning. In FIG. 6A, operation 60 stores carriers in a storage chamber. Operation 61 periodically moves the carrier to the decontamination chamber for decontamination. Operation 62 returns the decontaminated carrier back to storage.

In one embodiment, objects are cleaned or decontaminated before being moved to the stocker. In FIG. 6B, operation 63 loads the carrier into the stocker load port. Operation 64 transfers the carrier to the decontamination chamber for decontamination. Operation 65 keeps the carrier in the stocker's storage.

In one embodiment, objects are cleaned or decontaminated before being taken out of the stocker. In FIG. 6C, operation 66 keeps the carriers in the stocker's storage. Operation 67 transfers the carrier to the decontamination chamber for decontamination. Operation 68 transfers the decontaminated carrier to the load port of the stocker.

In some embodiments, the present invention discloses a decontamination chamber for decontaminating a workpiece. The workpiece may comprise a first container for storing the product. The first container can be stored in a second container. For example, the workpiece can be a carrier for an EUV reticle. The decontamination chamber can include a support for supporting the workpiece. The support may comprise a wall of the chamber.

The support may comprise a pedestal. The decontamination chamber can include a first pumping mechanism, where the first pumping mechanism is coupled to the decontamination chamber. The first pumping mechanism can include a pump, such as a turbo pump or cryo pump. The pumping mechanism can include a high speed pumping system for fast throughput. The decontamination chamber can include a first gas delivery system for delivering an inert gas to the decontamination chamber. The first delivery system can include a shut off valve to stop the gas flow. The decontamination chamber can include a second pumping mechanism, the second pumping mechanism coupled to the workpiece, and the second pumping mechanism is configured to pump the volume between the first container and the second container. The decontamination chamber can include a second gas delivery system, the second gas delivery system coupled to the workpiece, the second gas delivery system to deliver inert gas to a volume between the first container and the second container. It is composed. In some embodiments, the decontamination chamber can include nozzles that connect the workpiece to the second pumping system and the second delivery system, for example, via a manifold for switching between pumping and purging. The nozzles may protrude from the exterior of the decontamination chamber into the interior of the decontamination chamber. For example, the nozzles can be coupled to the support, such that the workpiece can be coupled to the nozzles when placed on the support. Alternatively, the nozzles can be placed anywhere in the decontamination chamber and are coupled to the openings of the workpiece for pumping and purging. In some embodiments, the second pumping mechanism can be coupled to the nozzles to pump the volume between the first container and the second container. The second gas delivery system may be coupled to the nozzles for delivering inert gas to the volume between the first container and the second container. A manifold can be provided, where the manifold is coupled to the nozzles to switch between the delivery of the inert gas to the nozzles and the pumping of the inert gas through the nozzles. In some embodiments, the decontamination chamber can include a first mechanism for opening the second container, wherein opening of the second container exposes the first container to the atmosphere of the second station. For example, the top portion of the second container can be raised. The decontamination chamber can include a second mechanism for opening the first container, where opening of the first container exposes the product to the atmosphere of the second station. For example, the top of the first container can be raised.

In some embodiments, the present invention discloses a stocker for storing a workpiece. The workpiece may comprise a first container for storing the product, the first container being stored in the second container. The stocker may comprise a first station, the first station being operable to load or unload the workpiece. The first station may be a loading station, an unloading station, or a station that functions as a loading and unloading station. The stocker may comprise a second station, wherein the second station comprises a first pumping mechanism, the first pumping mechanism is operable to establish a vacuum atmosphere within the second station, and the second station may It is operable to degas. The second station can operate as a decontamination chamber using a vacuum to degas the surfaces of the workpiece. The stocker may include a storage chamber, where the storage chamber includes a plurality of compartments for storing the workpieces. The stocker may comprise a third station, where the third station includes a robotic mechanism for transferring the workpiece between the first station, the second station, and the storage chamber.

In some embodiments, the second station can include a gas delivery system for delivering inert gas to the second station. The second station may include a gas delivery system for delivering inert gas to the volume between the first container and the second container. The second station may include one or more nozzles that project from the outside of the second station into the interior of the second station, where the workpiece is coupled to the nozzles. The nozzles may be configured to deliver inert gas to the volume between the first container and the second container, or the nozzles are configured to pump the volume between the first container and the second container. The second station may include a second pumping mechanism for pumping the volume between the first container and the second container. The second station may comprise a first mechanism for opening the second container, wherein opening of the second container exposes the first container to an atmosphere of the second station, and the second station opens the first container. It further includes a second mechanism, wherein opening of the first container exposes the product to the atmosphere of the second station.

In some embodiments, the present invention discloses a method for decontaminating a workpiece. The workpiece includes a first container for storing the product. The first container can be stored in a second container. The method may include transferring the workpiece to a first station, where the first station is configured to decontaminate the workpiece. After the workpiece is placed in the first station, a vacuum can be established in the first station. Also, the volume between the first container and the second container can be pumped. Degassing of the workpiece is then monitored, where degassing is caused by vacuum atmosphere and pumping. After the workpiece is cleaned, for example, by monitoring indicating no contamination or minimal contamination, for example if the monitor shows a certain level of contamination, the workpiece can be removed from the first station. Prior to removal, inert gas flows to the first station. The active gas also flows in the volume between the first container and the second container. The inert gas can prevent cross contamination from the atmosphere to the cleaned workpiece. The workpiece can then be transferred out of the first station.

In some embodiments, the method may include opening the first container and / or opening the second container during the decontamination process. The method includes transferring the workpiece from the load port to the first station for decontamination, after the storage at a specific time or from the storage chamber to the first station for decontamination when taking the workpiece out of storage. Transporting the piece, transferring the workpiece from the first station to the unload port for removal out of storage, and transferring the workpiece from the first station to the storage chamber for storage of the workpiece after being cleaned. It may include.

The above description describes a stocker using a decontamination chamber for cleaning the stored objects. However, the present invention is not limited thereto, and may equally be applied to any cleaning chamber, such as cryogenic cleaning, gas blasting cleaning, cryogenic particle blasting, laser cleaning, or supercritical liquid cleaning.

In one embodiment, the present invention discloses a storage compartment having a purge gas system that keeps the internal volume of stored objects clean. The purge gas system can deliver nitrogen to the interior of the object, effectively replacing the internal atmosphere, restoring cleanliness levels, and eliminating or reducing particulate degassing. For example, the volume between the outer container and the inner container of a double container EUV reticle carrier is continuously (or intermittently) purged with nitrogen during storage, so that any contaminants degassed from the outer container are removed and not attached to the inner container. .

In one embodiment, the storage chamber can be purged with laminar flow to keep the storage clean, thereby preventing or reducing any contaminants from adhering to the exterior of the carrier. For example, after filtering, clean gas, such as compressed air, may enter the storage chamber from the top or sides to reduce or eliminate cross contamination.

In one embodiment, the purge gas may be recycled, eliminating any chance of contamination from the outside atmosphere. The recycle gas may comprise an inert gas such as nitrogen or an inert gas such as air. The recycle gas can be filtered to remove particulates and cooled to reduce thermal movements. Thus, the interior atmosphere of the storage compartment is isolated from the exterior atmosphere, allowing a level of cleanliness for the stored objects.

7 illustrates a storage chamber including a plurality of storage compartments, according to one embodiment of the invention. Central gas line 74 delivers purge gas to the storage compartments. In one embodiment, the purge gas continuously delivers the purge gas 73A / 73B without any active metering or control valves. The purge gas flow may be predetermined during manufacture and may have optional metering valves for different manual adjustments for the same or different compartments for all compartments, but there may be no active or feedback control means. The purge gas may allow a fixed amount of gas to flow regardless of whether the object is located in its compartment. In another embodiment, the purge gas may be actively controlled to reduce the loss of purge gas, for example, for compartments without any stored object.

The purge gas may deliver a clean gas, such as nitrogen, to the internal volume of the stored object, eg, the volume between the outer container 72A and the inner container 72B of the double container reticle carrier. Laminar flow (from an external atmosphere or a recycled atmosphere) is transferred from the top 71A (or from the bottom (not shown)) for all compartments, or from the sides 71B to the storage compartments for the individual compartments. Can be.

8 illustrates a stocker system using purged gas storage compartments, according to one embodiment of the invention. Objects such as dual container carrier 81B may be loaded into an input loading station and transported by robot 84 to storage compartment 81A of stocker 80. In one embodiment, the storage chamber may include a carousel that is rotatable in the direction 85 such that the input / output compartment 81A faces the robot 84.

Each storage compartment 81 may include a purge gas line 83C that purges the internal volume of the stored carrier. The purge gas can be delivered from the central line 83 to the delivery line 83A, distributed to the ring 83B, and then provided to the storage compartments. Since the carousel is rotatable, a rotational seal, such as a ferro fluid seal 82, can be coupled between the rotational lines 83A / 83B / 83C in the fixed input line 83. Laminar flow 88, which is filtered atmosphere gas or filtered recycle gas, is provided in the storage compartments. In one embodiment, the input loading station is provided with a purge gas line 87 to purge the internal volume of the carrier 81B at the loading position.

Similar processes can be used to move the carrier from the storage compartments to the loading / unloading station.

9A-9C illustrate flowcharts for storing objects using purge gas compartments, according to one embodiment of the invention. In one embodiment, the carriers may be stored at locations with purge gas relative to the internal volume of the carriers. In FIG. 9A, operation 90 transfers the carrier to the stocker. Operation 91 causes nitrogen to flow to the stocker at the storage location. Operation 92 stores the carrier at a storage location, where the carrier is coupled to the nitrogen flow to flow nitrogen to the internal volume of the carrier.

In one embodiment, each compartment may have a purge gas and each carrier may be loaded into the stocker at a location with the purge gas. In FIG. 9B, the carrier may be transported to the storage compartment in the stocker through the rotation of the storage carousel. Operation 93 transfers the carrier to the stocker load port. Operation 94 rotates the stocker's storage carousel to an empty storage location. Operation 95 causes nitrogen to flow in the empty storage location. Operation 96 transfers the carrier to a storage location, where the carrier is coupled to the nitrogen flow to flow nitrogen to the internal volume of the carrier.

In one embodiment, each compartment may have a purge gas and each carrier may be unloaded to the load port. In FIG. 9C, the carrier may be transferred to the unload port through the rotation of the storage carousel. Operation 97 stores the carriers in a stocker carousel, where each carrier is coupled to a nitrogen flow, causing nitrogen to flow in the carrier's internal volume. Operation 98 rotates the stocker's storage carousel to the desired carrier position. Operation 99 transfers the desired carrier to the stocker load port.

In some embodiments, the present invention discloses a stocker for storing a workpiece. The workpiece may comprise a first container for storing the product. The first container can be stored in a second container. The stocker is a first station, the first station being operable to load or unload the workpiece; Storage chamber, the storage chamber including a plurality of compartments for storing the workpieces; Second station, the second station including a robotic mechanism for transferring the workpiece between the first station and the storage chamber; Gas Delivery System—The gas delivery system is distributed in one or more nozzles in each compartment of the storage chamber, the nozzles in each compartment to deliver inert gas to the volume between the first and second containers of the workpiece. Configured to couple to the stored workpiece.

In some embodiments, the gas delivery system delivers inert gas to the nozzles with or without the workpiece coupled to the nozzles. In some embodiments, the stocker may include a mechanism to deliver inert gas to the nozzles when the workpiece is coupled to the nozzles; A metering valve coupled to the nozzles for controlling the flow rate of the inert gas through the nozzles; A flow mechanism for delivering laminar flow to the compartments, the laminar flow being provided from the top of the storage chamber; Flow mechanism for delivering laminar flow to the compartments, where the laminar flow is provided from the side of each individual compartment; A circulation mechanism coupled to the raised floor for circulating the flow within the storage chamber; And a chiller for cooling the gas in the storage chamber.

In some embodiments, the stocker is a first station, the first station being operable to load or unload the workpiece; First Gas Delivery System—The first gas delivery system is coupled to one or more first nozzles at a first station, the first nozzles being inert gas in a volume between the first and second containers of the workpiece. Is configured to couple to a workpiece located at a first station to deliver a; A storage chamber, the storage chamber including a plurality of compartments for storing the workpieces, the compartments being disposed on the rotatable carousel; Second station, the second station including a robotic mechanism for transferring the workpiece between the first station and the storage chamber; A second gas delivery system, the gas delivery system being distributed to one or more nozzles in each compartment of the storage chamber via a rotation seal, the rotation seal configured to couple the second gas delivery system to the rotatable carousel; And the nozzles are configured to couple to the workpiece stored in each compartment to deliver an inert gas to the volume between the first container and the second container of the workpiece.

In some embodiments, the stocker is a flow mechanism that delivers laminar flow to the compartments, where the laminar flow is provided from the side of each individual compartment; A circulation mechanism coupled to the top floor to circulate the flow within the storage chamber; A chiller to cool the gas in the storage chamber; And a decontamination chamber, wherein the decontamination chamber is operable to decontaminate the workpiece.

In some embodiments, the present invention discloses a method of storing a workpiece. The workpiece may comprise a first container for storing the product. The first container can be stored in a second container. The method includes transferring a workpiece to a compartment of a storage chamber, wherein the workpiece is coupled to one or more nozzles, the nozzles to deliver inert gas to a volume between the first container and the second container of the workpiece. Configured; And flowing an inert gas to the nozzles.

In some embodiments, a method includes receiving a workpiece in a load port prior to transferring the workpiece from the load port to the compartment, wherein the workpiece is coupled to one or more second nozzles at the load port and The second nozzles are configured to deliver an inert gas to a volume between the first container and the second container of the workpiece; Flowing an inert gas to the second nozzles; Flowing inert gas to the nozzles with or without the workpiece coupled to the nozzles; Flowing inert gas to the nozzles when the workpiece is coupled to the nozzles; Delivering laminar flow to the compartment, the laminar flow being provided from the side of the compartment; Delivering a circulating flow to the compartment through the top floor; And delivering a circulating flow through the chiller.

In one embodiment, the present invention discloses a robot arm that handles an object during transfer between a storage chamber and a load port. The robot may include a flow sensor that detects purge gas in the storage compartment prior to storing the object at that location. In one embodiment, the detection may be performed on-the-fly, which means during the path to the storage compartment, so that no transfer overhead occurs. In one embodiment, the detection may be performed in a separate operation to detect the presence of a purge flow prior to selecting the storage compartment.

In one embodiment, a sensor can be used for each purge gas, so that for multiple purge gas systems, the robot arm can detect any number of defective purge gas nozzles. The sensor can be positioned to be directly above the purge gas nozzle, so that it can reliably detect the presence of the gas flow. In one embodiment, the sensor is positioned to be offset from the purge gas nozzle, for example, when the robot arm grips the outer edge of the carrier and the purge gas nozzles are placed inside the outer edge region.

In one embodiment, a gripper handler with gripper arms can be used to handle stored objects, such as dual container carriers. For example, the gripper arm can handle the outer container. Alternatively, the gripper arm can handle an overhead handle designed for an overhead transport system.

10A-10E illustrate a robotic arm with a flow sensor, in accordance with an embodiment of the present invention. The robot arm 101 may have a flow sensor 102 disposed in the end region of the robot arm to detect the flow 104 during robot arm movement and before the carrier 105 reaches the gas nozzle 103. can do. After detecting the presence of the gas flow at the desired position, the robot arm can continue its movement and stop when the carrier reaches the nozzle 103. The robot can then place the carrier 105 on the purge gas nozzle, which allows purge gas 104A from the nozzle to enter the internal volume 106 of the carrier 105. If no purge gas flow is detected, the robot arm can move to another storage compartment and optionally label this location as having a defective purge gas. Detection may be performed during the path to the desired storage location, thus without incurring overhead, and the throughput of the stocker remains essentially the same despite the additional operation of detecting purge gas flow.

11A and 11B illustrate sensor configurations on gripper arms, according to one embodiment of the invention. In one embodiment, the sensor may be located at the front end of the robot arm, such as a gripper arm, so that the sensor may detect the flow before the carrier reaches the gas nozzle. In FIG. 11A, the gripper arms 110 may grip the carrier 111 by an edge. Sensors 112 may be disposed at the tips of gripper arms 110, and may detect lateral flow from nozzles 113 as the gripper arms move past gas nozzles 113. . In one embodiment, the gripper arms can move so that the carrier 111 is aligned with the gas nozzles 113. In that direction of movement, the flows from the nozzles may be offset with the sensors 112. Alternatively, the gripper arms can move to detect the flow and then adjust the movements to align the carrier with the nozzles.

In one embodiment, the sensors may be arranged to align with the nozzles during the travel path. In FIG. 11B, the gripper arms 110A may grip the carrier 111A at the overhead handle 115, such that the sensors 112A may cause the gripper arms to move the carrier 111A onto the nozzles 113. It may be directly above the nozzles 113 as it moves to place.

12A-12D illustrate a flow detection sequence, according to one embodiment of the invention. The sequence indicates that the gripper arms 110A grip the carrier 111A at the upper handle 115. Sensors 112 may be located at the ends of the gripper arms 110A. 12A shows gripper arms 110A on the path for placing carrier 111A on a storage location such that the carrier is mated with purge nozzles 113. On the travel path, the sensors 112 may be on top of the flow nozzles 113 and thus detect whether there is a flow (FIG. 12B). Other configurations are also possible, depending on the positions of the sensors, the flow nozzles and the path of the gripper arms. Upon detecting the presence of at least one flow (or all two flows depending on the flow requirements purging the carriers), the gripper arms can continue the path and stop when the nozzles are aligned with the carrier ( 12c). After alignment, the gripper arms can place the carrier in a storage location, which allows the nozzles to provide purge gas to the internal volume of the carrier. The gripper arms can then be removed (FIG. 12D).

This sequence describes a configuration capable of detecting nozzle flow on a path for arranging carriers. Other configurations may be used, such as detecting lateral flow, moving to detect nozzle flow prior to correcting the path for carrier placement.

13A and 13B illustrate flowcharts for sensing purge gas flow prior to placing objects, according to one embodiment of the invention. In FIG. 13A, the robotic arm can detect the presence of a gas flow at the storage location and can identify that the storage location has a purge gas flow suitable for storing objects. Flow identification can be incorporated into object placement operations, which identify flows in the path of object placement.

Operation 130 moves the robot arm to a storage location. Operation 131 detects the presence of a gas flow at the storage location by a sensor on the gripper arm. Operation 132 identifies the storage location as having a purge gas flow.

In FIG. 13B, the sequence of object placement may be performed by a robotic arm with one or more integrated sensors. Operation 133 picks up the carrier by the gripper arm.

Operation 134 moves to the desired storage location. Operation 135 senses the presence of a gas flow on the path to the storage location by a sensor on the gripper arm. Operation 136 locates the carrier at a desired storage location such that when gas flow is detected, gas flows into the carrier. Operation 137 transfers the carrier to another storage location if no gas flow is detected.

In some embodiments, the present invention discloses a robot for transporting a workpiece. The robot includes a robot arm supporting the workpiece; One or more sensors coupled to the first end of the robot arm, the sensors being operable to detect gas flow; A movement mechanism coupled to the second end of the robot arm, the movement mechanism being operable to move the robot arm.

In some embodiments, the robot arm forms a gripper for gripping the workpiece. The robot may further include a mechanism to change the gripping distance of the robot arm. The workpiece can be supported between the first end and the second end. The sensors can be configured to detect upward gas flow. The sensors can be configured to detect side gas flow. The sensors may be configured to detect gas flow during transfer of the workpiece to the destination.

In some embodiments, the present invention discloses a stocker for storing a workpiece. The stocker comprises a storage chamber, the storage chamber including a plurality of compartments for storing the workpieces, the storage chamber including one or more nozzles for delivering a gas flow; And a robot transferring the workpiece to or from the storage chamber, the robot including one or more sensors coupled to an end of the robot arm, the sensors being operable to detect gas flow. .

In some embodiments, the robotic arm may form a gripper that grips the workpiece. The robot can include a mechanism to change the gripping distance of the robot arm. The workpiece may comprise a first container for storing the product, where the first container is stored in the second container, the second container receiving gas flow flowing in the volume between the first container and the second container. It includes an injection port. The sensors can be configured to detect upward gas flow. The sensors can be configured to detect side gas flow. The sensors may be configured to detect gas flow during transfer of the workpiece to the compartment.

In some embodiments, the present invention discloses a method of transferring a workpiece. The method includes supporting a workpiece by a robot arm; Transferring the workpiece to the compartment, the compartment including a nozzle, the nozzle configured to deliver a gas flow; Detecting the presence or absence of a gas flow during transfer of the workpiece to the compartment; And placing the workpiece in the compartment such that the nozzle is coupled to the workpiece when gas flow is detected.

In some embodiments, after the sensor at the end of the robot arm detects the presence of gas flow, the robot can continue to move the workpiece to place the compartment, where the workpiece is supported in the middle of the robot arm. do. The gripper formed by the robot arm can be released to place the workpiece in the compartment.

In some embodiments, the method includes transferring the workpiece to another compartment if no gas flow is detected; Marking the compartment as a defect if no gas flow is detected; Transferring the workpiece to a load port, the load port including a nozzle, the nozzle configured to deliver a gas flow; Detecting the presence or absence of gas flow during transfer of the workpiece to the load port; And placing the workpiece in the compartment such that the nozzle is coupled to the workpiece when gas flow is detected.

In one embodiment, the present invention discloses a monitor object that can be made in a size and shape similar to the objects to be stored in the stocker. The monitor object may move to different storage locations to collect data regarding different storage locations, with respect to time and positions. For example, the monitor object may move to different locations to identify purge gas flow features at different locations within the stocker. In addition, the monitor object may collect data about time to provide time evolution for purge gas characteristics.

In one embodiment, the monitor carrier acts on purge gas, for example, whether there is a purge gas, what purge gas flow is there, the quality of the purge gas, the composition of the purge gas, the level of particles in the purge gas, and Any other characteristics of the gas can be monitored.

In one embodiment, the monitor carrier may monitor the behavior of the environment, eg, clean gas flow in the storage chamber. The monitor carrier can detect the quality of the storage atmosphere, eg, particle production rate, contaminant production rate, flow rate, and any other features of the atmosphere. Other data may also be collected, such as temperature, cleanliness, particulates, and the like.

14A illustrates a monitor carrier according to an embodiment of the present invention. The monitor carrier 140 may have a similar shape and size to other carriers, including handles that are picked up and released by the robot arm and a bottom surface disposed on the compartment support. The monitor carrier may include a battery 142 for powering the electronics. The battery may be a rechargeable battery, but other battery types may be used. The monitor carrier may include one or more sensors 141A and 141B for sensing purge flow in the internal volume or for sensing external ambient features. The sensors can communicate via interface 143, for example, to load instructions and unload data.

14B illustrates the movements of the monitor carrier in the stocker. In one embodiment, the monitor carrier can be used during the operation of the stocker, and the plurality of stored carriers 145 have reticles 146. The monitor carrier 140 may be placed in an empty position and collect data at that position. The monitor carrier can then be moved to a new location, ie another empty position 147 or a position that becomes empty by moving the occupied carrier to another position.

By moving the monitor carrier, position dependent data can be collected. For example, data collected by correlating with robot movements may be due to different locations in the stocker. In addition, time dependent data may also be provided, for example by correlating the data with a time stamp or robot movements.

15A-15C illustrate flowcharts for collecting data from a monitor carrier, in accordance with an embodiment of the present invention. In FIG. 15A, one or more sensors may be coupled to a carrier shelf to collect data. Operation 150 provides a carrier shelf. Operation 151 couples one or more sensors to a carrier shelf that collects data about the atmosphere.

In FIG. 15B, data may be collected at empty locations in the stocker. Operation 152 moves the monitor carrier to an empty storage location in the stocker. Operation 153 collects data regarding purge flows at empty storage locations.

In FIG. 15C, the collected data may be correlated with respect to time and positions.

Operation 154 transfers the monitor carrier to storage locations in the stocker. Operation 155 collects data regarding purge flow at storage locations in the stocker. Operation 156 correlates data regarding purge flow with respect to time and locations.

In some embodiments, the present invention discloses a device for monitoring the status of a stocker, wherein the stocker is configured to store a plurality of workpieces. The device comprises one or more sensors coupled to or within the outer surface of the device, the device comprising a size and shape similar to the workpiece; A memory coupled to the sensors to store data collected by the sensors; And a battery coupled to the memory that powers the memory.

In some embodiments, the sensor can be configured to detect gas flow. The sensor may be configured to detect the quality of the gas flow. The quality of the gas flow may comprise at least one of the composition of the gas flow, and the level of particles in the gas flow. The sensor may be configured to detect a characteristic of the atmosphere. The feature may include at least one of temperature, cleanliness, and level of particulates. Sensors can collect data as a function of time. A controller can be included to operate the sensors and the memory. An interface may be included for sensors in communication with the data processing system.

The above description describes the monitor carrier used in the storage stocker. However, the present invention is not so limited, and may be used for other systems, eg, processing systems or cleaner systems that monitor system features under operating conditions.

In one embodiment, the present invention discloses a station in a system containing a monitor carrier. The station may, for example, provide interfaces to the monitor carrier for transferring data and power. In one embodiment, the station may include a mating interface that mates with an interface of the monitor carrier. Through this interface, for example, power for charging a rechargeable battery in the monitor carrier, and data, for example for transferring collected data or for accepting commands, can be transferred between the station and the monitor carrier. The station can be coupled to an electronic subsystem of the system so that data can be processed.

16A illustrates a system including a data collection station in accordance with one embodiment of the present invention. The stocker may include a storage chamber 160, a transfer module 161, a loading and unloading station 162, control equipment 164, and a data collection station 163. The transfer module may transfer one or more monitor carriers throughout the storage chamber 160 and to and from the data collection station 163 for battery recharge and data transfer. From the data collection station, data can be transferred to electronic equipment for further processing and display.

In one embodiment, the present invention discloses a stocker for storing workpieces. The stocker comprises a storage chamber, the storage chamber including a plurality of compartments for storing the workpieces, the storage chamber including one or more nozzles for delivering a gas flow; A robot for transferring the workpiece to or from the storage chamber; And a station, the station operable to support the workpiece, the station including an interface that mates with the device, the device comprising a size and shape similar to the workpiece.

In some embodiments, a controller can be coupled to a mating interface that processes data from the device. The device may collect data about the stocker and transfer it to the interface. The data may include at least one of the presence of a gas flow, the quality of the gas flow, and the characteristics of the atmosphere. The quality of the gas flow may comprise at least one of the composition of the gas flow, and the level of particles in the gas flow. The feature may include at least one of temperature, cleanliness, and level of particulates. The device may collect data as a function of time and transfer it to the interface.

16B illustrates a flowchart for a data collection station, in accordance with an embodiment of the present invention. Operation 165 transfers the monitor carrier to the data station. Operation 166 couples electrical connections between the monitor carrier and the data station. Operation 167 uploads the instructions to the monitor carrier (optional).

Operation 168 downloads data from the monitor carrier to the data processing system. Operation 169 charges the battery in the monitor carrier (optional).

In some embodiments, the present invention discloses a method of monitoring the status of a stocker, wherein the stocker is configured to store a plurality of workpieces. The method includes transferring a device to a storage compartment of the stocker, wherein the device comprises a size and shape similar to the workpiece, the device is configured to be transported by the same mechanism as the workpiece, and the device is disposed in the storage compartment as a workpiece Configured; Collecting data regarding the gas flow or the atmosphere by the device; And transferring the device to another storage compartment.

In some embodiments, a method includes picking up a device from a station, the station including an interface for transferring data from the device; And recharging the battery of the device at the station. The data regarding the gas flow or the atmosphere may include at least one of the quality of the gas flow, the composition of the gas flow, the level of particles in the gas flow, the characteristics of the atmosphere, the temperature, the cleanliness, and the level of the particulates.

In one embodiment, the present invention discloses a loading station for overhead transport (OHT). Overhead conveying typically drives overhead to connect different process equipment in a manufacturing facility. Overhead feed is also typically linear, driving straight lines from one machine to another. Thus, overhead transfer loading stations are typically linear and interface vertically with the overhead transfer line. In contrast, manual loading stations are typically located radially, interfacing with the center point where the robot arm is located.

In one embodiment, the present invention discloses methods and systems for rotating objects from a linear orientation to a radial orientation facing a central robot arm at an overhead transfer loading / unloading station. In one embodiment, the overhead loading station is located at a higher position than the manual loading station. The same robot can be used to access both manual loading stations and overhead loading stations, with the robot moving in the vertical direction connecting the two loading stations. As the overhead loading stations are redirected to face the central robot, accessing the objects at the overhead loading stations can be simplified.

17 illustrates an example configuration for overhead and manual loading stations, in accordance with an embodiment of the present invention. The manual loading / unloading stations 171 and the corresponding objects 172 are radially designed to face the central robot 170A at the height of the manual loading stations. Overhead loading / unloading stations 173 are designed linearly to accommodate overhead transfer line 179. After transferring from the overhead transfer line 179, the objects are oriented linearly (175). Overhead loading stations include a rotation mechanism 174 to rotate the objects 177 to radially face the robot 170B. As shown, the left and right objects are rotated in different directions. Depending on the positions of the linear transfer line and the position of the central robot, different directions of rotation are included. Thus, to access the objects, the robot moves in a z-direction from the manual loading station to the overhead loading station, the objects rotate from linear positions to radial positions, and the robot can access the rotated objects. have.

18A and 18B illustrate example flowcharts for accessing overhead loading stations, in accordance with an embodiment of the present invention. In FIG. 18A, the robot moves upward and the carrier is radially oriented and rotated to be picked up by the robot. Operation 180 rotates the carrier support (optional) so that the carrier can be accessed by the OHT arm.

Operation 181 receives the carrier on the carrier support by the OHT arm. Operation 182 rotates the carrier support such that the carrier faces the central robot arm. Operation 183 moves the robot arm to an appropriate height level (optional). Operation 184 picks up the carrier by the robotic arm.

In FIG. 18B, the robot moves upwards and places the carrier on the loading station. Thereafter, the loading station is oriented linearly and rotated to be picked up by overhead transport. Operation 185 rotates the carrier support to face the central robot arm (optional). Operation 186 places the carrier on the carrier support by the robot arm. Operation 187 rotates the carrier support such that the carrier can be accessed by the OHT arm. Operation 188 moves the robot arm to an appropriate height level (optional). Operation 189 receives the carrier at the OHT station.

In one embodiment, the present invention discloses a loading and unloading station for a cleaner system that uses a nitrogen purge for the volume inside the objects. In order to maintain the level of cleanliness for the object inside the carrier, the internal volume is continuously purged with an inert gas such as nitrogen. Accordingly, the present invention discloses an inert gas purge for a transport and / or storage station that ensures a constant purge of the internal volume.

19 illustrates an example transfer and / or storage station with purge nozzles, in accordance with an embodiment of the present invention. The dual container carrier 190 is disposed on the nitrogen purge nozzles 194 of the station 192. As the nitrogen nozzles 194 provide nitrogen 195 to the bottom support of the dual container carrier 190, the volume inside the outer container is continuously purged with refreshed nitrogen.

In one embodiment, the present invention discloses an EUV stocker system and process for storage of EUV carriers. The EUV stocker system includes one or more cleaning chambers (e.g., decontamination chambers), purge gas storage stations and compartments, a robotic arm with sensors to detect purge gas operation, for data collection at the stocker. Monitor carriers, a monitor station for data and power transfer, a rotating overhead loading station, and a purge gas loading and unloading station.

Claims (10)

A device for monitoring the status of a stocker,
The stocker is configured to store a plurality of workpieces, each of which includes an inner container and an outer container, the device comprising:
One or more sensors coupled to or within an exterior surface of the device, the device comprising a size and shape similar to a workpiece;
A memory coupled to the sensors for storing data collected by the sensors; And
A battery coupled to the memory for powering the memory
Including,
The volume inside the outer container is purged with an inert gas,
Device for monitoring the status of the stalker. The method of claim 1,
The sensor is configured to detect a gas flow, the device for monitoring the status of the stocker. The method of claim 1,
The sensor is configured to detect the quality of the gas flow, the device for monitoring the status of the stocker. The method of claim 1,
And the quality of gas flow comprises at least one of the composition of the gas flow, and the level of particles in the gas flow. The method of claim 1,
The sensor is configured to detect a condition of the stocker, wherein the sensor is configured to detect a characteristic of the atmosphere. The method of claim 5,
Wherein the characteristic comprises at least one of temperature, cleanliness, and level of particulates. The method of claim 1,
And the sensors collect data as a function of time. The method of claim 1,
And a controller for operating the sensors and the memory. The method of claim 1,
Further comprising an interface to the sensors for communicating with a data processing system. A method for monitoring the status of a stalker,
The stocker is configured to store a plurality of workpieces each including an inner container and an outer container, the method comprising:
Transferring the device to a storage compartment of the stocker, the device comprising a size and shape similar to the workpiece, the device configured to be transported by the same mechanism as the workpiece, the device being the workpiece Configured to be disposed in the storage compartment, wherein a volume inside the outer container is purged with an inert gas;
Collecting data regarding gas flow or atmosphere by the device; And
Transferring the device to another storage compartment
And a status for monitoring the status of the stocker.

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