KR102139868B1 - Micro-mirror embedded imaging device for 3d imaging and manufacturing method for the imaging device - Google Patents

Abstract

The present invention relates to a method for manufacturing a micro-mirror for 3D imaging, an imaging device in which a micro-mirror manufactured accordingly is inserted into a cover glass, and a manufacturing method thereof, the first cover glass and the second cover of different sizes Forming an overlap region of the flow path layer and the stage on the glass, inserting a micro mirror into any one or more of the first cover glass and the second cover glass on which the overlap region is formed, and the first cover glass and the And combining the flow path layers formed on each of the second cover glasses to form an imaging device for 3D imaging.

Description

MICRO-MIRROR EMBEDDED IMAGING DEVICE FOR 3D IMAGING AND MANUFACTURING METHOD FOR THE IMAGING DEVICE

The present invention relates to an imaging device in which a micro-mirror for 3D imaging is integrated and a manufacturing method thereof, and more specifically, a method for manufacturing a trapezoidal-shaped micro-sized mirror, and a micro-mirror manufactured accordingly to cover glass coverslip).

With the growth of the biosensor market using microfluidics, research into cells, flowable particles, and fluid analysis in the channels using microfluidic channels has been actively conducted. In addition, there is an increasing demand for 3D measurement technology to observe cell structure and interaction between cells within a 3D culture of cells and 3D metrics using a hydrogel. For this study, common 3D imaging techniques such as confocal microscopes and hologram imaging have been used. However, this technique requires complicated optical equipment such as confocal microscopy and image processing steps due to limited accessibility and slow imaging speed.

In order to overcome the above-mentioned limitation, the conventional Korean Patent Publication No. 10-2015-0112312, “Micro-fluid channel including micro-prism mirror and manufacturing method thereof,” is cheap and simple by inserting a micro-prism mirror inside the micro-fluid. It provides 3D measurement method.

However, since the microfluidic device in which the prism mirror of the prior art is inserted is combined with a poly-di-methyl-siloxane (PDMS) microchannel, the device itself has a certain thickness (>several mm) or more. , There is a limitation that the working distance is short (<1mm) and the compatibility with a high magnification lens is poor. In addition, the prior art poses a problem of reducing the performance of the measurement image as a thick PDMS substrate is used.

Korean Patent Publication No. 10-2015-0112312 (published on October 7, 2015), “Microfluidic channel containing micro prism mirror and manufacturing method thereof”

An object of the present invention is to provide a 3D imaging that can simultaneously observe the top and side of a sample using an imaging device in which a trapezoidal micro mirror is coupled to a cover glass.

A method of manufacturing an imaging device according to an embodiment of the present invention includes fabricating a device using first cover glasses and second cover glasses of different sizes in which overlap regions of a flow path layer and a stage are formed, wherein the overlap regions are formed. Inserting a micro-mirror into any one or more of the first cover glass and the second cover glass, and combining the flow path layer formed on each of the first cover glass and the second cover glass to obtain an imaging device for three-dimensional imaging. And forming.

In the manufacturing of the device, a plurality of first flow path layers may be formed on both sides of the first cover glass, and a plurality of second flow path layers may be formed on both sides of the second cover glass.

In the manufacturing of the device, the stage is formed between the plurality of flow path layers formed on one of the first cover glass and the second cover glass, and any one of the plurality of flow path layers and the stage An interval for inserting the micro mirror may be formed therebetween.

In the inserting of the micro-mirror, the micro-mirror may be inserted between a plurality of the flow path layers formed on each of the first cover glass and the second cover glass.

The inserting of the micro-mirror may include inserting a single micro-mirror into each of the first cover glass and the second cover glass, or a plurality of cover glasses on any one of the first cover glass and the second cover glass. The micro mirror can be inserted.

In the inserting of the micro-mirror, a single micro-mirror may be inserted into each of the first cover glass and the second cover glass to provide the micro-mirrors opposite to each other in the imaging device.

The step of inserting the micro-mirror may provide the micro-mirrors arranged in series on a straight line in the imaging device by inserting a plurality of the micro-mirrors into one of the first and second cover glasses. Can.

The forming of the imaging device may be performed by combining the plurality of first flow path layers formed on the first cover glass and the plurality of second flow path layers formed on the second cover glass to be aligned with each other.

An imaging device according to an embodiment of the present invention includes a first cover glass, a first flow path layer formed in plural on both sides of the first cover glass, a second flow path layer coupled to the first flow path layer, and a plurality of the second flow paths It includes a second cover glass formed on both sides of the layer and a micro-mirror formed in plurality between the combined first flow path layer and the second flow path layer.

In addition, the imaging device according to an embodiment of the present invention may further include a stage formed between the plurality of micromirrors formed to position the sample.

The micro-mirrors are formed on each of the first cover glass and the second cover glass to show mutually opposite shapes, or a plurality of the first cover glass and the second cover glass are formed in a plurality to form a series arrangement in a straight line It can represent the form.

The imaging device may include capillary channels due to the combination of the first cover glass and the second cover glass of different sizes.

The manufacturing method of the micro mirror according to an embodiment of the present invention is a step of manufacturing a mold mold having a trapezoidal and triangular shape by cutting a metal plate by end milling, and replicating the mold mold to emboss embossed poly-di-methyl-siloxane ) Forming a mold, forming a negative PDMS mold through replica molding using the embossed PDMS mold, and placing the negative PDMS mold on a PDMS plate to form a microfluidic channel And filling the microfluidic channel with a UV curable polymer, followed by curing to form a microstructure and coating the microstructure with a reflective material to form a reflective coating film.

In the step of manufacturing the mold mold, a mold mold having a trapezoidal or triangular shape including a side at a 45° angle may be manufactured on the metal plate by using an end milling technique.

In addition, the manufacturing method of the micro-mirror according to an embodiment of the present invention may further include the step of passivating by forming a passivation film on the micro-mirror on which the reflective coating film is formed.

In the passivating step, the passivation film may be directly formed only on the micro mirror on which the reflective coating film is formed.

In the passivating step, the passivation film may be entirely formed on the glass substrate on which the micromirror on which the reflective coating layer is formed and the micromirror on which the reflective coating layer is formed are integrated.

Micro mirror manufactured by the method described above.

According to an embodiment of the present invention, a three-dimensional analysis of an object to be observed is compatible with various microscope systems (Bright-filed microscope, Fluorescent microscope, holographic microscopy, etc.) without additional optical devices using an imaging device in which a micro mirror is coupled to a cover glass. Can provide

In addition, according to an embodiment of the present invention, by using a cover glass as a substrate, it is possible to provide high compatibility and convenience of use with a high magnification lens having a short focal length.

1 is a schematic diagram for explaining a method of manufacturing a micro mirror according to an embodiment of the present invention.
Figure 2 shows an example of a micro mirror showing the shape of a cross according to an embodiment of the present invention.
Figure 3 shows a schematic diagram for explaining the process of forming and passivating the reflective coating film of the micro mirror according to an embodiment of the present invention.
Figure 4 shows a scanning electron micrograph image of a micro-mirror according to an embodiment of the present invention.
5 is a schematic diagram illustrating a method of manufacturing an imaging device according to an embodiment of the present invention.
6 is a cross-sectional view of a substrate used in manufacturing a device according to an embodiment of the present invention.
7A and 7B show schematic diagrams of an imaging device according to an embodiment of the present invention.
8 shows an example of a cover glass design used as a substrate according to an embodiment of the present invention.
9 shows an actual image of an imaging device according to an embodiment of the present invention.
10 is a schematic diagram illustrating a structure for acquiring an image in an imaging device manufactured according to an embodiment of the present invention.
11 illustrates an image obtained by simultaneously observing a sample positioned on a stage in a top view and a side view according to an embodiment of the present invention.
FIG. 12 illustrates an image obtained by simultaneously observing a sample positioned in a 3D hydrogel matrix according to an embodiment of the present invention in a top view and a side view.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited or limited by the embodiments. In addition, the same reference numerals shown in each drawing denote the same members.

In addition, terms used in the present specification (terminology) are terms used to properly express a preferred embodiment of the present invention, which may vary according to viewers, operators' intentions, or customs in the field to which the present invention pertains. Therefore, definitions of these terms should be made based on the contents throughout the present specification.

Hereinafter, a micro-mirror according to an embodiment of the present invention and a manufacturing method thereof will be described in detail with reference to FIGS. 1 to 4.

1 shows a schematic diagram for explaining a method of manufacturing a micro mirror according to an embodiment of the present invention, and FIG. 2 shows an example of a micro mirror showing a cross shape according to an embodiment of the present invention. In addition, Figure 3 shows a schematic diagram for explaining the process of forming and passivating the reflective coating film of the micro mirror according to an embodiment of the present invention, Figure 4 is a scanning electron micrograph of the micro mirror according to an embodiment of the present invention It shows the image.

Referring to FIG. 1, in step (a), a mold mold 110 having a trapezoidal or triangular shape is manufactured on a metal plate using an end milling technique.

The manufacturing method of the micromirror according to an embodiment of the present invention may produce a trapezoidal or triangular mold mold 110 having a 45° angle by scraping a metal plate with a cutting tool having an angle of 45° in step (a). .

The method of manufacturing a micro mirror according to an embodiment of the present invention can form a trench showing a 45° bevel angle more accurately using an end milling technology that can arbitrarily adjust the height and size of a reflective surface, thereby manufacturing It is possible to more efficiently manufacture an imaging device in which a micro mirror is inserted.

In the method of manufacturing a micro mirror according to an embodiment of the present invention, various types of mold molds may be manufactured using end milling technology. 2(a) and 2(b), a manufacturing method of a micro mirror according to an embodiment of the present invention is, for example, an end (1 letter) type mold mold using an end milling technique ((a ), (b)) can be produced. In addition, referring to FIGS. 2(c) and 2(d), a method of manufacturing a micro mirror according to an embodiment of the present invention is another example, by adding an imaging direction to a mold mold of a straight (1 letter) shape ( As shown in c) and (d), a cross-shaped mold mold can be manufactured, and after the cross-shaped micro-mirror is manufactured using the produced mold mold, an imaging device in which the mold is inserted can be manufactured. In the case of an imaging device in which a cross-shaped micro-mirror is inserted as shown in FIG. 2, more information on the side of the sample can be measured.

Referring back to FIG. 1, a method of manufacturing a micro mirror according to an embodiment of the present invention replicates a mold mold 110 to emboss an embossed poly-di-methyl-siloxane (PDMS) mold 120. After formation, the negative PDMS mold 130 is formed through replica molding using the embossed PDMS mold 120 ((b), (c) of FIG. 1).

Next, when the negative PDMS mold 130 is placed on the PDMS plate, between the micro trench formed in the negative PDMS mold 130 and the PDMS plate, as shown in FIG. 1(d), the microfluidic channel 140 is formed. Then, the microfluidic channel 140 is filled with a UV curable polymer through a capillary action and cured by UV exposure to form a microstructure 150.

Referring to FIG. 3, a method of manufacturing a micro mirror according to an embodiment of the present invention forms a reflective coating layer 151 by coating a reflective material on the micro structure 150. For example, the bevel surface of the microstructure 150 may be coated through a metal thin film deposition process such as sputtering a reflective material containing aluminum or silver.

Subsequently, the method for manufacturing a micro mirror according to an embodiment of the present invention may be passivated by forming a passivation film 152 on the micro structure 150 on which the reflective coating film 151 is formed. According to an embodiment of the present invention, a method for manufacturing a micro mirror may form a passivation film 152 on a micro structure 150 on which a reflective coating film 151 is formed to block contact with a measurement sample (fluid). .

The manufacturing method of the micro mirror according to an embodiment of the present invention may directly form the passivation film 152 only on the micro structure 150 on which the reflective coating film 151 is formed, as shown in FIG. 3(a). 3, the passivation film 152 may be entirely formed on the glass substrate 160 on which the micro-structure 150 and the micro-mirror on which the reflective coating film 151 is formed are integrated.

At this time, the passivation film 152 may be a transparent film that can be coated with a uniform thickness, for example, an aluminum oxide film (AlOx), a silicon oxide film (SiOx), a silicon nitride film (SiNx), or a polymer thin film.

4 shows an electron microscope image of the microstructure 150 manufactured as described above. Referring to FIG. 4, it can be seen that a passivation layer is formed on the trapezoidal microstructure 150 and is immobilized.

According to one embodiment of the present invention, it is possible to manufacture a micro mirror at a low cost, and mass production of a high quality micro mirror is possible. In addition, by manufacturing micro-sized micro-mirrors, it can be applied to various applications for obtaining 3D information with high spatio-temporal resolution, bright-field microscope, fluorescence microscope and holography microscope ( It is compatible with various microscope systems such as holographic microscopy.

Hereinafter, the imaging device 200 into which the microstructure 150 manufactured by the above-described method is inserted and a method of manufacturing the same will be described in detail.

Hereinafter, an imaging device and a method of manufacturing the same according to an embodiment of the present invention will be described in detail with reference to FIGS. 5 to 9.

5 is a schematic view illustrating a method of manufacturing an imaging device according to an embodiment of the present invention, and FIG. 6 is a cross-sectional view of a substrate used in manufacturing a device according to an embodiment of the present invention. 7B shows a schematic diagram of an imaging device according to an embodiment of the invention. Further, FIG. 8 shows an example of a cover glass design used as a substrate according to an embodiment of the present invention, and FIG. 9 shows an actual image of an imaging device according to an embodiment of the present invention.

Referring to FIG. 5, a method of manufacturing an imaging device according to an embodiment of the present invention includes flow path layers 171 and 172 and stages on the first cover glass 161 and the second cover glass 162 of different sizes. After forming the overlap region and inserting the micro mirror 180 into any one or more of the first cover glass 161 and the second cover glass 162 where the overlap region is formed, the first cover glass 161 and the second The flow path layers 171 and 172 formed on each of the cover glasses 162 are combined to form an imaging device 200 for three-dimensional imaging. At this time, the overlap region points to the flow path layers 171 and 172 and the stage 190.

Referring to FIG. 6, it can be seen that the overlap region of the flow path layer and the stage is patterned on the substrate. More specifically, in FIG. 6, a plurality of first flow path layers 171 are formed on both sides of the first cover glass 161 shown on the left side, and a plurality of sides are formed on both sides of the second cover glass 161 shown on the right side. The second flow path layer 172 may be formed. In addition, the stage 190 may be formed between the plurality of flow path layers 171 or 172 formed on any one of the first cover glass 161 and the second cover glass 162, and the plurality of first A gap for inserting the micro mirror 180 may be formed between any one of the flow path layers 171 or one of the plurality of second flow path layers 172 and the stage 190.

At this time, the flow path layers 171 and 172 are formed at a predetermined distance on the cover glass, as shown in FIGS. 5 and 6, and may be formed to have a flat cross-sectional area.

A method of manufacturing an imaging device according to an embodiment of the present invention includes a plurality of first flow path layers 171 or a plurality of second flow path layers 172 formed on each of the first cover glass 161 and the second cover glass 162. The micro-mirror 180 can be inserted therebetween. For example, a single micro-mirror 180 may be inserted into each of the first cover glass 161 and the second cover glass 162, and as another example, the first cover glass 161 and the second cover glass 162 ) A plurality of micro-mirrors 180 may be inserted into any one cover glass.

Hereinafter, the above-described embodiment will be described in more detail. Hereinafter, it has been described that the stage 190 is formed only on one cover glass 161, but is not limited thereto, and the stage 190 may be formed on any one of the first cover glass 161 and the second cover glass 162. It is natural that you can.

Referring to FIG. 7A, one micro mirror 180 is inserted into each of the first cover glass 161 and the second cover glass 162, and the micro mirror 180 formed on the first cover glass 161 Is characterized in that it is formed in the gap between the first flow path layer 171 and the stage 190. Subsequently, an imaging device in which a plurality of first flow path layers 171 formed on the first cover glass 161 and a plurality of second flow path layers 172 formed on the second cover glass 162 are aligned with each other to be combined with each other. 200 is produced.

The imaging device 200 in FIG. 7A includes two micro mirrors 180 formed opposite each other based on the stage 190. Due to the two micro mirrors 180 that are opposite to each other, compatibility with a transmission mode microscope for a measurement sample located on the stage 190 is possible.

Referring to FIG. 7B, two micro-mirrors 180 are inserted into the first cover glass 161, and two micro-mirrors 180 formed on the first cover glass 161 have respective first flow path layers on both sides. It is characterized in that it is formed in the gap between (171) and the stage (190). At this time, although the two micro-mirrors 180 are inserted on the first cover glass 161 in FIG. 7B, this is inserted into the first cover glass 161 including the stage 190. Since it is characterized in that, the two micro-mirrors 180 and the stage 190 may be formed on the second cover glass 162 rather than the first cover glass 161.

Subsequently, an imaging device in which a plurality of first flow path layers 171 formed on the first cover glass 161 and a plurality of second flow path layers 172 formed on the second cover glass 162 are aligned with each other to be combined with each other. 200 is produced.

The imaging device 200 in FIG. 7B includes a micro-mirror 180 arranged in series on a straight line with respect to the stage 190, and on the stage 190 due to two micro-mirrors 180 arranged in series It is compatible with a microscope that enables reflection mode for the measurement sample to be positioned. Accordingly, the microscope can simultaneously observe the left and right sides of the measurement sample of the imaging device 200.

The imaging device 200 manufactured by the method of manufacturing an imaging device according to an embodiment of the present invention includes a first cover glass 161 and a second cover glass 162 of different sizes as illustrated in FIG. 8. It shows the combined form. In the present invention, by using the cover glass 161, 162 as a substrate of the imaging device 200, it is possible to have compatibility with a high magnification lens of a microscope.

In addition, referring to FIG. 9, the combined shape of the first cover glass 161 and the second cover glass 162 of different sizes indicates that the imaging device 200 has a capillary channel shape, thereby injecting additional samples. Samples can be easily injected into the device without equipment (right image). At this time, the size of the capillary channel can be variously adjusted by adjusting the spacing of the flow path layer and the height of the pattern.

10 is a schematic diagram illustrating a structure for acquiring an image in an imaging device manufactured according to an embodiment of the present invention.

The microscope system 300 can simultaneously measure the top-view and side-view of the measurement sample in the imaging device 200 through two methods of FIGS. 10(a) and 10(b). have. In this case, the microscope system 300 may be any one of various microscope systems, such as a bright-field microscope, a fluorescent microscope, and a holographic microscopy. In addition, depending on the configuration of the microscope lens and illumination, it is possible to apply to both a reflective microscope or a transmission microscope type configuration using devices with different micro-mirror orientations, such as the examples of 7a and 7b. When a straight (1-character) type mirror is inserted, the side view can be observed in one direction, and when a cross-shaped mirror is used, it is possible to observe the side view in two directions.

Referring to Figure 10 (a), the imaging device 200 according to an embodiment of the present invention is to further pattern the stage (stage, 190) in the center of the capillary channel, the microscope system 300 is on the stage 190 The top-view and side-view of the measurement sample being located can be observed simultaneously. At this time, the height of the stage and the refractive index of the materials constituting the stage can be arbitrarily adjusted.

Referring to Figure 10 (b), the imaging device 200 according to an embodiment of the present invention, without the stage 190, a state in which a measurement sample is floated on a 3D matrix such as a hydrogel (hydrogel) The microscopic system 300 can simultaneously observe a top-view and a side-view of a measurement sample floating in a 3D matrix.

11 is a view showing an image of a sample positioned on a stage according to an embodiment of the present invention observed simultaneously in a top view and a side view.

11 shows an image of simultaneously observing a top view and a side view of a sample (cell) positioned on a stage using an imaging device manufactured according to an embodiment of the present invention. FIG. 11(a) shows a schematic view of an imaging device including a sample located on the stage, and FIG. 11(b) shows a top view and a side view of a red blood cell (RBC) positioned on the stage. The observed image is shown, and FIG. 11(c) shows an image obtained by adhering Hela cells onto a stage and observing a top view and a side view.

As illustrated in FIG. 11, a side illumination scan and side measurement of a measurement sample positioned on a stage can be easily performed using an imaging device according to an embodiment of the present invention including a micro mirror. Furthermore, the side scattering information can be collected without rotating the measurement sample by using the imaging device according to an embodiment of the present invention, and can be regarded as rotation of spatial coordinates.

FIG. 12 illustrates an image obtained by simultaneously observing a sample located in a 3D hydrogel matrix according to an embodiment of the present invention in a top view and a side view.

12 shows an image of simultaneously observing a top view and a side view of a sample (cell) fixed in a 3D hydrogel matrix using an imaging device manufactured according to an embodiment of the present invention. 12(a) shows a schematic view of an imaging device including a sample located in a 3D hydrogel matrix and a microscope system observing the same, and FIG. 12(b) is a top view of Hela cells fixed in a 3D hydrogel matrix And a bright field image observing the side view, and FIG. 12(c) shows a fluorescence image observing the top and side views of the Hela cells fixed in the 3D hydrogel matrix.

Referring to FIG. 12, it can be confirmed that the top and side surfaces of a measurement sample (Hela cells) fixed in a 3D hydrogel matrix are easily observed using an imaging device according to an embodiment of the present invention. That is, by using the imaging device according to the embodiment of the present invention, side scattering information can be collected without rotating the measurement sample fixed in the 3D hydrogel matrix, and can be regarded as rotation of spatial coordinates.

The imaging device incorporating a micro-mirror for 3D imaging of the present invention and its manufacturing method can measure a wide main lobe by using a trapezoidal-shaped micro-mirror, and provide improved performance for 3D RI reconstruction of a sample can do.

As described above, although the embodiments have been described by a limited embodiment and drawings, those skilled in the art can make various modifications and variations from the above description. For example, the described techniques are performed in a different order than the described method, and/or the components of the described system, structure, device, circuit, etc. are combined or combined in a different form from the described method, or other components Alternatively, even if replaced or substituted by equivalents, appropriate results can be achieved.

Therefore, other implementations, other embodiments, and equivalents to the claims are also within the scope of the following claims.

Claims (18)

Fabricating the device using the first cover glass and the second cover glass of different sizes in which overlapping regions of the flow path layer and the stage are formed;
Inserting a micro mirror into any one or more of the first cover glass and the second cover glass on which the overlap region is formed; And
Forming an imaging device for 3D imaging by combining the flow path layers formed on each of the first cover glass and the second cover glass
Method of manufacturing an imaging device comprising a. According to claim 1,
The step of manufacturing the device
A method of manufacturing an imaging device, wherein a plurality of first flow path layers are formed on both sides of the first cover glass, and a plurality of second flow path layers are formed on both sides of the second cover glass. According to claim 2,
The step of manufacturing the device
The stage is formed between the plurality of flow path layers formed on one of the first cover glass and the second cover glass, and the micro mirror is inserted between any one of the plurality of flow path layers and the stage. Method for manufacturing an imaging device, characterized in that to form a gap for. According to claim 1,
The step of inserting the micro-mirror
A method of manufacturing an imaging device that inserts the micro-mirror between a plurality of the flow path layers formed on each of the first cover glass and the second cover glass. According to claim 4,
The step of inserting the micro-mirror
An imaging device that inserts a single micromirror into each of the first cover glass and the second cover glass, or inserts a plurality of the micromirrors into any one of the first cover glass and the second cover glass. Method of manufacture. The method of claim 5,
The step of inserting the micro-mirror
A method of manufacturing an imaging device, characterized in that a single micro mirror is inserted into each of the first cover glass and the second cover glass to provide the micro mirrors opposite to each other in the imaging device. The method of claim 5,
The step of inserting the micro-mirror
Manufacturing of an imaging device, characterized in that a plurality of micromirrors are inserted into one of the first cover glass and the second cover glass to provide the micromirrors arranged in series on the imaging device. Way. According to claim 2,
The step of forming the imaging device
A method of manufacturing an imaging device, wherein the plurality of first flow path layers formed on the first cover glass and the plurality of second flow path layers formed on the second cover glass are aligned with each other to be combined. A first cover glass;
A first flow path layer formed in plural on both sides of the first cover glass;
A second flow path layer coupled to the first flow path layer;
A second cover glass having a plurality of the second flow path layers formed on both sides; And
A plurality of micro mirrors formed between the combined first flow path layer and the second flow path layer
Imaging device comprising a. The method of claim 9,
A stage formed between the plurality of micromirrors formed to place a sample
Imaging device further comprising a. The method of claim 9,
The micro mirror
It is formed on each of the first cover glass and the second cover glass to show a mutually opposite form, or a plurality of the first cover glass and the second cover glass is formed in series to indicate a form arranged in series on a straight line Imaging device, characterized in that. The method of claim 9,
The imaging device
Imaging device comprising a capillary channel due to the combination of the first cover glass and the second cover glass of different sizes. Cutting a metal plate by end milling to produce a trapezoidal and triangular shaped mold mold;
Duplicating the mold mold to form an embossed poly-di-methyl-siloxane (PDMS) mold;
Forming an intaglio PDMS mold through replica molding using the embossed PDMS mold;
Placing the negative PDMS mold on the PDMS plate to form a microfluidic channel;
Filling the microfluidic channel with a UV curable polymer, followed by curing to form a microstructure; And
Forming a reflective coating film by coating a reflective material on the microstructure
Method of manufacturing a micro-mirror comprising a. The method of claim 13,
The step of manufacturing the mold mold
A method of manufacturing a micro-mirror, characterized in that a mold mold having a trapezoidal or triangular shape including a side at a 45° angle is manufactured on the metal plate using an end milling technique. The method of claim 13,
Forming a passivation film on the micro mirror on which the reflective coating film is formed to passivate the film
Method of manufacturing a micro-mirror further comprising. The method of claim 15,
The passivating step is
A method of manufacturing a micro mirror in which the passivation film is directly formed only on the micro mirror on which the reflective coating film is formed. The method of claim 15,
The passivating step is
The micro-mirror manufacturing method of forming the passivation film as a whole on the glass substrate on which the micro-mirror on which the reflective coating film is formed and the micro-mirror on which the reflective coating film is formed are integrated. A micro-mirror manufactured according to claim 13.

Images