KR102244639B1 - Structure of clean room - Google Patents

Abstract

The present invention relates to a clean room structure in which a fan filter unit (FFU) is installed on the side to adjust the air flow while performing side blowing, and has a space of a certain size while separating or isolating it from the outside. A room portion formed so as to be; And an FFU unit installed on the side of the room unit to clean the inside of the room unit.

Description

Structure of clean room}

The technical field of the present invention relates to a clean room structure, and in particular, to a clean room structure in which a fan filter unit (FFU) is installed on the side to adjust the air flow while performing side blowing.

The clean room is a place to install stockers and indexers that store and move substrates during the production of products such as liquid crystal display devices and semiconductors. The structure is a turbulent flow method, a horizontal laminar flow method, and a vertical laminar flow method. It is designed, but most of them are using the vertical laminar flow method.

In the vertical laminar flow type clean room, a fan filter unit (FFU) is installed on the upper ceiling and a perforated grid is formed on the floor, so that the FFU filters the air from the top of the crane, rack master robot, and shelf. Clean air is blown, and a vacuum pump is installed under the perforated grid to suck in clean air. In this way, the air sucked from the perforated grid is circulated back to the fan filter unit. When there is no movement in the clean room by this configuration, the clean air flows from the upper ceiling to the lower floor, that is, the air flow stably descends so that environmental particulates in the clean room do not affect the substrate.

Korean Patent Laid-Open Publication No. 10-2007-0066706 (published on 27 June 2007) stably regulates the air flow in the clean room to reduce defects in semiconductors and display devices caused by environmental particulates. It is disclosed with respect to the clean room. According to the disclosed technology, a moving passage formed in the front and rear direction, a robot installed to be movable along the moving passage, an FFU installed on the ceiling to blow air downward, and a perforated grid installed on the floor to suck air blown from the FFU And, by including air flow eliminators provided at the front and rear ends of the moving passage, the air flow control device of the clean room is the most important air flow in the clean room if it is applied to the clean room of semiconductor and LCD manufacturing plants, especially to the automation line. The flow of air can be stably maintained, and thus, all defects due to air flow problems in the clean room can be reduced, thereby improving quality defects.

Korean Patent Registration No. 10-1260943 (registered on April 29, 2013) discloses a clean room FFU, an air chamber in which one open passage at the top protrudes in the lateral direction so as to communicate with the air conditioning pipe, and a hollow cavity with an open lower part. A filter housing having a structure, a blowing fan assembly mounted and fixed to the filter housing via a mounting bracket, a filter assembly airtightly installed at the lower portion of the filter housing corresponding to the lower portion of the air blower fan assembly, and airtightly at the lower portion of the filter housing. Including the installed filter, a first curved portion is formed on the entire upper edge of the inner wall of the air chamber, and one open passage is composed of a first curved portion and a first extended open air flow port, and surrounds the first extended open air flow port. The cross section is formed by a flow cover formed in a hemispherical shape, and a discharge opening is formed at the lower end of the filter housing, and an air DC discharge type air blade is supported by a hinge means to allow the hinge to rotate in the downward direction through the hinge means. On the inner wall of the filter housing, an elastic fixing lever means is fixedly installed so that the filter can be detached from below, and the elastic fixing lever means is a cam bracket rotating by a first axis, a cam bracket, and It is composed of a cam that rotates by a second shaft, and a damper is installed on the inlet side of one open passage to perform the function of introducing and blocking air, and the end side of the flow cover surrounds the inlet of the upper wall of the air chamber. 1 It is characterized in that a second extended open air flow port having a curvature is formed on the inner wall so that the air introduced through the extended open air flow port increases the fluidity of the air flowing into the inlet of the air chamber. According to the disclosed technology, it is possible to fundamentally prevent turbulence, confusion of airflow, and serious noise caused by blower filter unit (BFU) type blowers. Cleanliness and vertical laminar flow can be provided.

In the conventional clean room as described above, there are an upper FFU/lower floor method of ISO class 3 or higher, and an upper FFU/side exhaust method that maintains ISO class 1,000, and the upper FFU/lower floor method is FFU is placed on the upper part to drop dust under the perforated floor at the lower part, and the upper FFU/side exhaust method is a method to remove airflow to the side by installing an FFU on the upper part. However, since both of these methods have to be installed on the upper ceiling of the clean room, the installation cost is high, the maintenance cost is high, and it is impossible to change or relocate the layout.

Korean Patent Publication No. 10-2007-0066706 Korean Patent Registration No. 10-1260943

The problem to be solved by the present invention is to solve the above-described problems, and a clean room structure implemented to adjust the air flow while performing side air blowing by installing a fan filter unit (FFU) on the side. Is to provide.

As a means for solving the above-described problems, according to a feature of the present invention, a room part formed to have a space of a certain size while separating or isolating from the outside; And an FFU unit installed on the side of the room unit to clean the interior of the room unit.

In one embodiment, the room portion, a frame member for forming a frame; A cover member covering the frame member to separate or isolate the frame member; And a floor member for forming a floor.

In one embodiment, the frame member is characterized in that it is made of a square pipe.

In one embodiment, the frame member is characterized in that formed by assembling a reinforcement iron file.

In one embodiment, the cover member is formed of an antistatic vinyl to prevent static electricity generated therein from being charged.

In one embodiment, the floor member is formed of an antistatic tile to prevent static electricity generated on the floor from being charged.

In one embodiment, the room portion is characterized in that it further comprises a coupling member for coupling the cover member to the frame member.

In one embodiment, the coupling member forms a line groove in the frame member, and when the frame member and the cover member are coupled, the cover member is inserted into the line groove and then the cover member is fixed to the cover member. It characterized in that it is fixed by inserting into the line groove.

In an embodiment, the coupling member includes a locking jaw line at both sides of the line groove, and includes a locking protrusion line at a portion of the fixing bar inserted into the line groove, so that the fixing bar is attached to the line groove. When inserted, the locking protrusion line is inserted into the locking jaw line so that the fixing bar is fixed to the line groove.

In one embodiment, the FFU unit is characterized in that a plurality of FFUs are arranged side by side on the side of the room unit, or a plurality of FFUs are stacked on the side of the room unit in a plurality of stages.

In one embodiment, the FFU unit, during normal operation, blows clean air to the side up to a preset maximum distance, and discharges the side-ventilated air through a suction unit installed at an upper portion or a front and rear portion of the opposite end of the side of the room unit. It is characterized by that.

In one embodiment, the FFU unit is characterized in that during the rest operation, in order to maintain only the positive pressure and prevent foreign matter from flowing in, the internal airflow amount is set to be equal to or less than the preset positive pressure maintenance amount.

In an embodiment, the FFU unit, when restarting after rest, performs a forced airflow adjustment mode in order to achieve a preset cleanliness within a preset time.

In one embodiment, the FFU unit is installed on the right side and the left side of the room unit to blow or blow-suck the clean air to be concentrated in a necessary part.

In one embodiment, the FFU unit is disposed on the right side and the left side of the room unit to perform blowing and blowing, respectively, or performing blowing and suction, respectively.

In an exemplary embodiment, the clean room structure further includes a suction unit installed at an upper portion or front and rear portions of an end opposite to a side surface of the room unit to suck air inside the room unit.

In one embodiment, the suction unit is characterized in that the airflow is adjusted to the upper portion or front and rear portions of the opposite end of the side surface of the room portion to exhaust the air to the outside of the room portion.

In one embodiment, the suction unit, when the FFU unit is installed on both sides of the room unit, is installed on the front or rear of the clean air required part of the room, and the air inside the room part is provided to the clean air required part of the room It is characterized in that the airflow is adjusted to the front or the rear of the room and exhausted to the outside of the room unit.

In one embodiment, the suction unit is characterized in that the air sucked in the room unit is discharged to the FFU unit to be filtered as clean air.

As an effect of the present invention, by installing a fan filter unit (FFU) on the side to provide a clean room structure implemented to adjust the air flow while performing side air blowing, the installation cost and maintenance cost are inexpensive, and the layout ( Layout) can be changed or relocated.

According to the present invention, it is possible to adjust the blown air flow at the top or the middle portion, and thus has the effect of maintaining a high degree of cleanliness in the required portion. In addition, according to the present invention, the FFU is disposed on the right side and the left side of the clean room to adjust the airflow by blowing or blowing-suction, thereby maintaining a high degree of cleanliness.

1 is a diagram illustrating a clean room structure according to an embodiment of the present invention.
FIG. 2 is a diagram illustrating a room unit and an FFU unit in FIG. 1.
3 is a view for explaining the coupling member in FIG. 2.
FIG. 4 is a diagram for explaining normal operation of the FFU unit in FIG. 2.
5 is a view for explaining the rest operation of the FFU unit in FIG. 2.
6 is a diagram illustrating another example of the FFU unit in FIG. 2.
FIG. 7 is a diagram illustrating blowing and blowing of the FFU unit in FIG. 2.
8 is a diagram for explaining the blowing and suction of the FFU unit in FIG. 2.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those of ordinary skill in the art may easily implement the present invention. However, since the description of the present invention is merely an embodiment for structural or functional description, the scope of the present invention should not be construed as being limited by the embodiments described in the text. That is, since the embodiments can be variously changed and have various forms, the scope of the present invention should be understood to include equivalents capable of realizing the technical idea. In addition, since the object or effect presented in the present invention does not mean that a specific embodiment should include all or only such effects, the scope of the present invention should not be understood as being limited thereto.

The meaning of the terms described in the present invention should be understood as follows.

Terms such as "first" and "second" are used to distinguish one component from other components, and the scope of rights is not limited by these terms. For example, a first component may be referred to as a second component, and similarly, a second component may be referred to as a first component. When a component is referred to as being "connected" to another component, it is to be understood that although it may be directly connected to the other component, another component may exist in the middle. On the other hand, when it is mentioned that a component is "directly connected" to another component, it should be understood that there is no other component in the middle. On the other hand, other expressions describing the relationship between components, that is, "between" and "just between" or "neighboring to" and "directly neighboring to" should be interpreted as well.

Singular expressions are to be understood as including plural expressions unless the context clearly indicates otherwise, and terms such as "comprises" or "have" refer to the specified features, numbers, steps, actions, components, parts, or these. It is to be understood that it is intended to designate that a combination exists and does not preclude the presence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

All terms used herein have the same meaning as commonly understood by one of ordinary skill in the field to which the present invention belongs, unless otherwise defined. Terms defined in commonly used dictionaries should be interpreted as having meanings in the context of related technologies, and cannot be interpreted as having an ideal or excessively formal meaning unless explicitly defined in the present invention.

Now, a clean room structure according to an embodiment of the present invention will be described in detail with reference to the drawings.

1 is a diagram illustrating a clean room structure according to an embodiment of the present invention, FIG. 2 is a diagram illustrating a room part and an FFU part in FIG. 1, and FIG. 3 is a view illustrating a coupling member in FIG. 2, 4 is a view for explaining the normal operation of the FFU unit in Fig. 2, Fig. 5 is a view for explaining the rest operation of the FFU unit in Fig. 2, Fig. 6 is a view for explaining another example of the FFU unit in Fig. , FIG. 7 is a view for explaining the blowing and blowing of the FFU unit in FIG. 2, and FIG. 8 is a view for explaining the blowing and suction of the FFU unit in FIG. 2.

Referring to FIG. 1, the clean room structure 100 includes a room unit 110 and an FFU unit 120.

The room unit 110 is formed to have a space of a certain size while separating or isolating it from the outside.

In one embodiment, the room unit 110, when operating a facility installed inside in a large floor method, the distance between the front and the rear * the distance between the sides * the size of the height, for example, 6 (m) It can be *10(m)*3(m), and it can also be set as 6(m)*20(m)*3(m) by doubling the distance between sides.

In one embodiment, the room unit 110, as illustrated in FIG. 2, includes a frame member 111, a cover member 112, and a floor member 113, so that the manufacturing cost can be very low.

The frame member 111 forms a frame for the room portion 110.

In one embodiment, the frame member 111 may be formed of a square pipe.

In one embodiment, the frame member 111, as shown in the enlarged drawing of FIG. 2, can be formed by assembling a reinforcing iron pile, so that assembly is simple, and movement and installation can be convenient.

The cover member 112 separates or isolates the frame member 111 by covering the frame member 111.

In an embodiment, the cover member 112 may be formed of an antistatic vinyl to prevent static electricity generated inside the room 110 from being charged.

The floor member 113 forms the floor of the room unit 110.

In an embodiment, the floor member 113 may be formed of an antistatic tile (or an epoxy coating for a clean room) to prevent static electricity generated on the floor of the room 110 from being charged.

In an embodiment, the room unit 110 may further include a coupling member 114 as shown in the enlarged view of FIG. 2.

The coupling member 114 couples the cover member 112 to the frame member 111.

In one embodiment, the coupling member 114, as shown in Figure 3, by forming a line groove 1141 in the frame member 111, when the frame member 111 and the cover member 112 After inserting the cover member 112 into the line groove 1141, the cover member 112 may be inserted into the line groove 1141 with a long bar-shaped fixing bar 1142 to be fixed.

The line groove 1141 is provided with a locking protrusion line 1143 on both sides of the line, and the fixing bar 1142 has a locking protrusion line 1144 at a portion inserted into the line groove 1141, thereby fixing the bar 1142 When inserted into the line groove 1141, the locking protrusion line 1144 is inserted into the locking jaw line 1143 so that the fixing bar 1142 is fixed to the line groove 1141.

In one embodiment, the room unit 110 may install the FFU unit 120 on the inner side, and alternatively, by forming an opening on the side and installing the FFU unit 120 in the opening, not only cost reduction but also installation is also possible. You can make it easier. At this time, when installing the FFU unit 120 in the opening, in order to remove the gap between the frame member 111 and the FFU unit 120 in the opening, the cover member 112 is placed in the opening using an adhesive or the like. By attaching and installing between the frame member 111 and the FFU unit 120, the gap between the frame member 111 and the FFU unit 120 in the opening can be eliminated.

The FFU unit 120 is installed on the side of the room unit 110 to clean the interior of the room unit 110.

In one embodiment, the FFU unit 120, as shown in Fig. 2, may be arranged side by side on the side of the room unit 110 as a plurality of FFU, or a plurality of FFU on the side of the room unit 110 It can also be stacked in two tiers (that is, stacked).

In one embodiment, the FFU unit 120, when made of a plurality of FFU, in order to remove the gap between the plurality of FFU, by attaching and installing the cover member 112 between the plurality of FFU using an adhesive, etc. Given, it is possible to eliminate the gap between a plurality of FFU.

In one embodiment, the FFU unit 120 is installed on one side during normal operation, as shown in FIG. 4, when operating the facility installed inside the room unit 110 in a large floor method. By activating a plurality of FFUs, clean air can be blown to the side up to a preset maximum distance (for example, 10 (m)), and at this time, the air blown from the side is directed to the opposite side of the side of the room unit 110. It may be discharged through the suction unit 130 installed at the top or front and rear of the end.

In one embodiment, the FFU unit 120, when operating the facility installed inside the room unit 110 in a large floor method, 1 (m) * 1 (m) size of the FFU stacked in multiple stages You can also adjust the height. At this time, when the FFU is loaded in multiple stages, the parts that are in contact between the FFUs can be attached and fixed to each other using an adhesive, etc., and the outer surfaces of the plurality of FFUs can be formed in an integrated form. It can be fixed even more firmly by banding with a banding device or the like.

In one embodiment, the FFU unit 120, when operating the equipment installed inside the room unit 110 in a large floor method, as shown in Figure 5, during the rest operation, the operator to the room unit ( 110), and in order to keep only the positive pressure and prevent foreign matter from flowing in, the internal ventilation volume can be set below the preset positive pressure maintenance amount (for example, 30% of normal operation). You can reduce the cost efficiently.

In one embodiment, the FFU unit 120, when the operator is not working, prevents only the inflow of external dust by adjusting the internal airflow amount to a preset positive pressure maintenance amount (for example, 30% of normal operation). Maintenance costs can be minimized by maintaining the cleanliness, and also when the worker comes out to rest and enters again, a work space (that is, an area close to the FFU unit 120) without having to go through a separate air shower. You can walk to reach it.

In one embodiment, the FFU unit 120, when operating the facility installed inside the room unit 110 in a large floor method, when restarting after a break, a preset time (for example, 5 minutes) The forced airflow adjustment mode can be performed in order to achieve a preset cleanliness within the range.

In one embodiment, the FFU unit 120, when performing the forced airflow adjustment mode, may provide side-air blowing with a preset forced airflow adjustment blowing amount (for example, an airflow volume increased by 30% from normal operation).

In one embodiment, the FFU unit 120, as shown in Figure 6, is installed on both sides of the room unit 110 (that is, the right side and the left side), Super Clean (Class 1) in a narrow space. ) Can be maintained.

In one embodiment, the FFU unit 120, for example, the size of the room unit 110, 6 (m) * 20 (m) * 3 (m), that is, in the case of doubling the distance between sides, in both directions ( That is, it can be installed on both sides) so that the positive pressure is discharged to the middle part.

In one embodiment, the FFU unit 120 may maintain a high degree of cleanliness by placing the FFU on the right side and the left side of the room unit 110 to blow or blow-suction, so that clean air is concentrated in a necessary part. .

In one embodiment, the FFU unit 120, in the case of a table type that performs assembly, inspection, etc. on a small table, is installed on the right side and the left side of the room unit 110 to blow or blow-suction from both sides. Thus, the best cleanliness can be made at all times.

In one embodiment, the FFU unit 120, by arranging the FFU on the right side or the left side of the room unit 110, respectively, as shown in Figure 7 to perform blowing and blowing, or blowing as shown in Figure 8 And suction can also be performed respectively.

The clean room structure 100 having the configuration as described above may further include a suction unit 130 as shown in FIG. 1.

The suction unit 130 is installed in the upper or front and rear portions of the opposite end of the side of the room unit 110 on which the FFU unit 120 is installed, and sucks air inside the room unit 110.

In one embodiment, the suction unit 130, as shown in Figure 4, by adjusting the air flow in the air inside the room unit 110 to the top or front and rear of the opposite end of the side of the room unit 110 to the outside of the room unit 110 It can be exhausted with.

In one embodiment, the suction unit 130, as shown in Figure 6, when the FFU unit 120 is installed on both sides (ie, the right and left side) of the room unit 110, the room unit 110 It can be installed in the front or rear of the clean air required part (for example, the central part of the room 110), and air flows inside the room 110 to the front or rear of the clean air required part of the room 110 By adjusting and exhausting the air to the outside of the room unit 110 ^{, it is possible to always achieve a Class 1 of 0.3 (um/m 3} ) or more by the exhausted air flow, and make it possible to maintain a zero state of particles. have.

In an embodiment, the suction unit 130 may discharge the air sucked from the inside of the room unit 110 to the FFU unit 120 to be filtered as clean air.

In one embodiment, the suction unit 130, when performing the forced air flow adjustment mode, the air inside the room 110 at a preset forced air flow adjustment suction amount (for example, a suction amount increased by 30% from normal operation). You can inhale.

The clean room structure 100 having the configuration as described above, by installing the FFU unit 120 on the side of the room unit 110 to adjust the blowing air flow while performing side blowing, it is possible to maintain a desired cleanliness. , Installation cost and maintenance cost are inexpensive, and layout change or relocation is possible.

The clean room structure 100 having the configuration as described above can maintain a high degree of cleanliness in a necessary part by adjusting the blown air flow in the upper or middle part of the room part 110, and the right side of the room part 110 And by arranging the FFU unit 120 on the left side of the air flow can be adjusted by blowing or blowing-suction to maintain a high degree of cleanliness.

The clean room structure 100 having the above-described configuration is installed on the right side and left side of the room unit 110 to maintain the best cleanliness in the shortest space by blowing-blowing or blowing-suction, and is installed on the table. It can implement Class 1 in precision work such as inspection, assembly, printing, painting, etc., and also maintain the best cleanliness while the operator is working. And the clean room structure 100 having the configuration as described above, when entering or leaving the separated or isolated room unit 110, the positive pressure is always applied even without installing a separate air shower, the dust of the operator's clean clothes Can be removed, and when reaching the FFU unit 120 and the near area with a work space, it is possible to maintain the cleanliness of the operator, work clothes, and the cleanliness of the room unit 110.

According to the clean room structure 100 having the configuration as described above, in the prior art, the airflow descending from the upper part and the structure to be discharged from the upper part to the lower part or to be discharged to the left and right. It is possible to completely improve the excessive points, such as eddy current control and equipment cost.

As described above, the embodiments of the present invention are not implemented only through the above-described apparatus and/or operation method, but through a program for realizing a function corresponding to the configuration of the embodiment of the present invention, a recording medium in which the program is recorded, etc. It may be implemented, and this implementation can be easily implemented by an expert in the technical field to which the present invention belongs from the description of the above-described embodiment. Although the embodiments of the present invention have been described in detail above, the scope of the present invention is not limited thereto, and various modifications and improvements by those skilled in the art using the basic concept of the present invention defined in the following claims are also provided. It belongs to the scope of rights.

100: clean room structure
110: room part
111: frame member
112: cover member
113: floor member
114: coupling member
1141: line groove
1142: fixed bar
1143: locking jaw line
1144: stumbling line
120: FFU unit
130: suction unit

Claims (5)

A room part formed to have a space of a certain size while being separated or isolated from the outside; And an FFU unit installed on the side of the room unit to clean the inside of the room unit. The room portion, a frame member for forming a frame; A cover member covering the frame member to separate or isolate the frame member; And a floor member for forming a floor; The floor member is formed of an antistatic tile or an epoxy coating to prevent static electricity generated on the floor from being charged; The FFU unit, during normal operation, laterally blows clean air up to a preset maximum distance, and discharges the side-ventilated air through a suction unit installed in an upper portion or a front and rear portion of the opposite end of the side of the room unit;
The FFU unit maintains cleanliness by preventing only the inflow of external dust by adjusting the internal airflow amount with a preset positive pressure maintenance amount in order to prevent the operator from going through a separate air shower when not working; Upon restarting after rest, a forced airflow adjustment mode is performed to achieve a preset cleanliness within a preset time; When performing the forced air flow adjustment mode, the side air is blown with the previously set forced air flow adjustment air volume, which is 30% higher than the normal operation; It adjusts the height of the FFU by loading multiple stages, and when the FFU is loaded in multiple stages, the parts in contact between the FFUs are attached and fixed to each other. Clean room structure, characterized in that the outer surface of the FFU is bent and fixed with a bending mechanism.
delete The method of claim 1, wherein the frame member,
Clean room structure, characterized in that formed by assembling reinforced iron piles.
delete The method of claim 1, wherein the room unit,
And a coupling member for coupling the cover member to the frame member.

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