KR102299873B1 - Chamber unit for high voltage discharging experiment - Google Patents

Abstract

A chamber unit for a high voltage discharge experiment according to an embodiment of the present invention includes: a chamber having a space set therein; first and second power connections configured to supply power from the outside to the inside of the chamber; a first support part electrically connected to the first power connection part; a second support part electrically connected to the second power connection part; and a first electrode and a second electrode mounted on the first support part and the second support part, respectively, and causing a discharge in the space between them by electrical energy transmitted through the first and second power connection parts, , A chamber unit for a high voltage discharge experiment according to an embodiment of the present invention comprises: a chamber having a space set inside; first and third power connections configured to supply power from the outside to the inside of the chamber; a first support part electrically connected to the first power connection part; a third support part electrically connected to the third power connection part; and a first electrode and a second electrode respectively mounted on the first support part and the third support part, and causing a discharge in a space between them by electrical energy transmitted through the first and third power connection parts. .

Description

CHAMBER UNIT FOR HIGH VOLTAGE DISCHARGING EXPERIMENT}

The present invention relates to a chamber unit for a high voltage discharge experiment, and more particularly, by controlling the pressure or vacuum degree inside the chamber, applying power to two electrodes disposed therein, generating a discharge between them, and observing it It relates to a chamber unit for a high voltage discharge experiment in which the material properties of the chamber are improved.

In general, a vacuum device implements a vacuum state or a pressure state, and can be used to conduct various experiments or to manufacture or process specific parts in each state. do.

In order for the vacuum processing apparatus to perform vacuum processing, an electrode is installed in the main body of a chamber having a processing space formed therein, and power is applied to the electrode in a set vacuum state to form plasma to deposit and etch the surface of the substrate seated on the electrode. A vacuum treatment can be performed, such as, and it can be applied to a process of manufacturing a battery.

For example, in the process of manufacturing a battery, when the electrolyte is charged between each structure constituting the electrode assembly or the microstructure of the electrode or separator, vacuum and pressurization are repeated to evenly charge the electrolyte while reducing the charging time. can be used

In recent years, atmospheric pressure plasma is rapidly being utilized not only in the environmental field but also in the semiconductor and display industries, and in order to generate plasma, particles must be accelerated to some extent by an electric field and have energy. It must be accelerated in a low-density space with a relatively long free-travel distance, and most plasmas are generated in a vacuum state lower than atmospheric pressure.

On the other hand, a conventional vacuum chamber is manufactured by welding plate-shaped plates to each other to form a hexahedron with a vacuum space inside, or by welding plate-shaped plates to a frame made of a hexahedral frame by welding. was difficult to observe.

Since the above-mentioned contents are written only to understand the background technology, they may include contents other than the known technology.

Application No. 10-2007-0010205 Application No. 10-2011-0014490 Application No. 10-2015-0048968

Embodiments of the present invention control the pressure or vacuum degree inside the chamber, apply power to two electrodes disposed therein, generate a discharge between them, and observe the high voltage discharge experiment in which the material properties of the chamber are improved. To provide a chamber unit for

A chamber unit for a high voltage discharge experiment according to an embodiment of the present invention includes: a chamber having a space set therein; first and second power connections configured to supply power from the outside to the inside of the chamber; a first support part electrically connected to the first power connection part; a second support part electrically connected to the second power connection part; and a first electrode and a second electrode respectively mounted on the first support part and the second support part, and causing a discharge in a space between them by electrical energy transmitted through the first and second power connection parts. .

In the chamber unit for a high voltage discharge experiment according to an embodiment of the present invention, the first electrode and the second electrode may be disposed with a set interval in the vertical direction.

In the chamber unit for a high voltage discharge experiment according to an embodiment of the present invention, the second support portion may include: a first member having a lower end coupled to the second power connection portion and extending upwardly; a second member coupled to the first member and extending in a horizontal direction; a third member coupled to the second member and extending downwardly; and a connecting member coupled to the third member, wherein the second electrode may be coupled to a front end of the connecting member.

In the chamber unit for a high voltage discharge experiment according to an embodiment of the present invention, a first hole into which a first mounting pin formed on the first electrode is inserted in a downward direction is formed in the first support part, and the first hole is formed in the connection member An insertion hole into which the second mounting pin formed in the second electrode is inserted may be formed.

In the chamber unit for a high voltage discharge experiment according to an embodiment of the present invention, the first and second power connection parts may include first and second penetration parts configured to penetrate the lower part of the chamber from the outside to the inside; and first and second coupling parts respectively coupled to the first and second penetration parts in the chamber and coupled to the first and second support parts.

A chamber unit for a high voltage discharge experiment according to an embodiment of the present invention includes: a chamber having a space set therein; first and third power connections configured to supply power from the outside to the inside of the chamber; a first support part electrically connected to the first power connection part; a third support part electrically connected to the third power connection part; and a first electrode and a second electrode respectively mounted on the first support part and the third support part, and causing a discharge in a space therebetween by electrical energy transmitted through the first and third power connection parts. .

In the chamber unit for a high voltage discharge experiment according to an embodiment of the present invention, the first electrode and the second electrode may be disposed at a set interval in a horizontal direction.

In the chamber unit for a high voltage discharge experiment according to an embodiment of the present invention, the third support portion may include a fourth member having a lower end coupled to the third power connection portion and extending upwardly; a fifth member coupled to the fourth member and extending in a horizontal direction; and a connecting member coupled to the fifth member, wherein the second electrode may be coupled to a front end of the connecting member.

In the chamber unit for a high voltage discharge experiment according to an embodiment of the present invention, a second hole into which a first mounting pin formed on the first electrode is inserted in a horizontal direction is formed in the first support part, and the second hole is formed in the connection member An insertion hole into which the second mounting pin formed in the second electrode is inserted may be formed.

In the chamber unit for a high voltage discharge experiment according to an embodiment of the present invention, the first and third power connection parts may include: first and third penetration parts configured to penetrate the lower part of the chamber from the outside to the inside; and first and third coupling parts respectively coupled to the first and third penetration parts in the chamber and coupled to the first and second support parts.

In the chamber unit for a high voltage discharge experiment according to an embodiment of the present invention, the chamber may be made of a transparent polycarbonate material so that the inner space of the chamber and the first and second electrodes are visible from the outside.

In the chamber unit for a high voltage discharge experiment according to an embodiment of the present invention, the first and second electrodes may have a spherical shape having a set outer diameter.

In the chamber unit for a high voltage discharge experiment according to an embodiment of the present invention, at least one of a vacuum sensing unit sensing the vacuum pressure inside the chamber and a pressure sensing unit sensing the pressure may be configured.

In the chamber unit for a high voltage discharge experiment according to an embodiment of the present invention, a vacuum pump connected to the inside of the chamber through a first line; a gas tank connected to the inside of the chamber through a second line; a power unit supplying power to the first and second electrodes; and sensing the pressure or vacuum level inside the chamber from the vacuum sensing unit or the pressure sensing unit, controlling the operation of the first and second control valves provided in the first and second lines, and controlling the operation of the vacuum pump To control the pressure or vacuum degree inside the chamber to a set value, and may further include a controller for controlling the size of the power supplied to the first and second electrodes through the power unit to the set value.

According to embodiments of the present invention, the chamber is manufactured to withstand pressure and vacuum using polycarbonate having a set thickness (eg, 30t), is manufactured to be suitable for high voltage discharge experiments, and the polycarbonate used is When a discharge experiment is performed inside the chamber using a transparent material, the discharge phenomenon occurring inside the chamber can be observed in various directions related to the pipe.

In addition, the chamber made of polycarbonate exhibits high physical properties such as transparency, impact resistance, heat resistance, flame retardancy, dimensional stability, weather resistance, and self-extinguishability. It has an impact strength that is more than twice that of ordinary glass and more than 250 times that of ordinary glass.

In addition, the chamber made of polycarbonate has excellent acid and oil resistance, is strong against ultraviolet rays, is alkaline, and is easily brittle and deformable as a substitute for acrylic. have.

In addition, the chamber made of polycarbonate has, on average, high physical properties among engineering plastics, can be used for optical purposes using a transparent property, is relatively inexpensive, and has excellent mechanical strength.

The above-mentioned effects according to the embodiments of the present invention are not limited to the described contents, and may further include effects predictable from the specification and drawings.

1 is an internal cross-sectional view showing an overall assembly state of a chamber unit for a high voltage discharge experiment according to a first embodiment of the present invention.
2 is a partial cross-sectional view of a chamber unit for a high voltage discharge experiment according to a first embodiment of the present invention.
3 is an exploded cross-sectional view of a chamber unit for a high voltage discharge experiment according to a first embodiment of the present invention.
4 is an internal cross-sectional view showing the entire assembly state of the chamber unit for the high voltage discharge experiment according to the second embodiment of the present invention.
5 is a partial cross-sectional view of a chamber unit for a high voltage discharge experiment according to a second embodiment of the present invention.
6 is an exploded cross-sectional view of a chamber unit for a high voltage discharge experiment according to a second embodiment of the present invention.
7 is a schematic configuration diagram of a chamber unit for a high voltage discharge experiment according to a third embodiment of the present invention.
8 is a partial perspective view of a chamber unit according to an embodiment of the present invention.

It should be understood that the present invention is not limited to the specific embodiments described below, and includes all modifications, equivalents and substitutes included in the spirit and scope of the present invention.

The terms used herein are used to describe specific embodiments, and are not intended to limit the present invention. A singular expression may include a plural expression unless the context clearly dictates otherwise.

Terms such as “include” or “have” mean that there is a possibility to further include other components or actions in addition to the components or actions described in the specification. Terms such as first, second, etc. are not intended to limit the components, and are for the purpose of distinguishing one component from other components.

Hereinafter, an embodiment of a chamber unit for a high voltage discharge experiment according to the present invention will be described in detail with reference to the accompanying drawings.

1 is an internal cross-sectional view showing an overall assembly state of a chamber unit for a high voltage discharge experiment according to a first embodiment of the present invention.

Referring to FIG. 1 , the chamber unit includes a chamber 100 , a first electrode 101 , a second electrode 102 , a first support part 111 , a first power connection part 121 , and a second power connection part 122 . , a third power connection unit 123 , a second support unit 112 , a pressure sensing unit 130 , and a vacuum sensing unit 140 , and the chamber 100 is made of a polycarbonate material, and from the outside to the inside It can be made of a transparent material that allows space to be seen.

The first electrode 101 and the second electrode 102 may have a spherical shape having a preset outer diameter, and the first support part 111 and the second support part 112 may include the first and second electrodes. 101 and 102 are supported, respectively, and the first and second electrodes 101 and 102 are disposed with a set gap from each other.

A first power connection part 121, a second power connection part 122, and a third power connection part 123 are configured in a lower portion of the chamber 100, and the first power connection part 121 is connected to the first support part ( 111 ) transmits external power to the first electrode 101 , and the second power connection unit 122 transmits external power to the second electrode 102 through the second support unit 112 .

As shown, the first and second electrodes 101 and 102 are arranged with gaps set in the vertical direction, and they can perform a discharge function in a preset vacuum or pressurized state using power supplied from the outside. , the user can easily observe the inside through the chamber 100 made of a transparent polycarbonate material.

In addition, an inlet/outlet pipe 150 for regulating the internal pressure is configured on one side of the chamber 100, and valves may be further configured here.

2 is a partial cross-sectional view of a chamber unit for a high voltage discharge experiment according to a first embodiment of the present invention, and FIG. 3 is a partial exploded cross-sectional view of a chamber unit for a high voltage discharge experiment according to the first embodiment of the present invention.

2 and 3 , the first power connection part 121 includes a first penetration part 231 penetrating the lower part of the chamber 100 to the inside and outside and the lower end of the first support part 111 is inserted. It includes a first coupling portion 221 to be coupled.

A lower end of the first support part 111 has a structure to be inserted into the first coupling part 221 , and a first mounting extending from one side of the first electrode 101 is disposed on an upper portion of the first support part 111 . A first hole 301 into which the pin 241 is vertically inserted is formed.

In addition, a second hole 302 into which the first mounting pin 241 of the first electrode 101 is horizontally inserted is also formed in the upper portion of the first support part 111 .

The first electrode 101 and the second electrode 102 have a sphere shape having a preset outer diameter, and a first mounting pin 241 and a second mounting pin 242 are integrally connected to one side of each.

The second power connection part 122 includes a second penetration part 232 penetrating the lower part of the chamber 100 in and out and a second coupling part 222 in which the lower end of the second support part 112 is inserted and coupled. and the second support part 112 includes a first member 211 , a second member 212 , and a third member 213 .

The lower end of the first member 211 is inserted into the second coupling portion 222 and has a structure extending to the upper portion by a set distance, and one end of the second member 212 is attached to the first member 211 . It is inserted and coupled, and the other end of the second member 212 extends a set distance in the horizontal direction.

A lower end of the third member 213 passes through the second member 212 vertically and is inserted into and coupled to the connecting member 220 . One end of the connecting member 220 is coupled to a lower end of the third member 213 , and a second mounting pin 242 connected to the second electrode 102 is inserted into the other end of the connecting member 220 . It is inserted into the hole 320 and coupled.

In an embodiment of the present invention, a preset gap may be maintained between the first electrode 101 and the second electrode 102 , and the fixing part 240 is screwed to the second member 212 . The gap between the first and second electrodes 101 and 102 may be adjusted by adjusting the vertical position of the third member 213 .

4 is an internal cross-sectional view showing an overall assembly state of a chamber unit for a high voltage discharge experiment according to a second embodiment of the present invention.

Referring to FIG. 4 , the chamber unit includes a chamber 100 , a first electrode 101 , a second electrode 102 , a first support part 111 , a first power connection part 121 , and a second power connection part 122 . , a third power connection part 123 , a third support part 1400 , a pressure sensing unit 130 , an inlet/outlet pipe 150 , and a vacuum sensing unit 140 , and the chamber 100 is made of a polycarbonate material. It can be made of a transparent material that can be seen inside from the outside.

The first electrode 101 and the second electrode 102 may have a spherical shape having a preset outer diameter, and the first support part 111 and the third support part 400 may include the first and second electrodes. (101, 102) are supported, respectively.

A first power connection part 121, a second power connection part 122, and a third power connection part 123 are configured in a lower portion of the chamber 100, and the first power connection part 121 is connected to the first support part ( 111 ) transmits external power to the first electrode 101 , and the third power connection unit 123 transmits external power to the second electrode 102 through the third support unit 400 .

As shown, the first and second electrodes 101 and 102 are arranged with a gap set in the horizontal direction, and they can perform a discharge function in a preset vacuum or pressurized state using power supplied from the outside. .

5 is a partial cross-sectional view of a chamber unit for a high voltage discharge experiment according to a second embodiment of the present invention, and FIG. 6 is a partial exploded cross-sectional view of a chamber unit for a high voltage discharge experiment according to a second embodiment of the present invention.

5 and 6 , the first power connection part 121 includes a first penetration part 231 penetrating the lower part of the chamber 100 to the inside and outside and the lower end of the first support part 111 are inserted. It includes a first coupling portion 221 to be coupled.

A lower end of the first support part 111 has a structure to be inserted into the first coupling part 221 , and a first mounting extending from one side of the first electrode 101 is disposed on an upper portion of the first support part 111 . A second hole 302 into which the pin 241 is horizontally inserted is formed. In addition, a first hole 301 into which the first mounting pin 241 of the first electrode 101 is vertically inserted is also formed in the upper portion of the first support part 111 .

The first electrode 101 and the second electrode 102 have a sphere shape having a preset outer diameter, and a first mounting pin 241 and a second mounting pin 242 are integrally connected to one side of each.

The third power connection part 123 includes a third penetration part 533 penetrating the lower part of the chamber 100 in and out and a third coupling part 523 into which the lower end of the third support part 400 is inserted and coupled. and the third support part 400 includes a fourth member 504 and a fifth member 505 .

The lower end of the fourth member 504 is inserted into the third coupling portion 523 and has a structure extending to the upper portion by a set distance, and one end of the fifth member 505 is attached to the fourth member 504 . inserted and penetrated through it.

One end of the fifth member 505 passing through the fourth member 504 is inserted into and coupled to one end of the connecting member 220 . side, one end of the connecting member 220 is coupled to one end of the fifth member 505 , and a second mounting pin 242 connected to the second electrode 102 is attached to the other end of the connecting member 220 . It is inserted into the formed insertion hole 320 and coupled.

7 is a schematic configuration diagram of a chamber unit for a high voltage discharge experiment according to a third embodiment of the present invention.

Referring to FIG. 7 , the chamber unit includes a controller 700 , a vacuum pump 720 , a gas tank 730 , a first control valve 731 , a second control valve 732 , a power unit 710 , and a chamber ( 100), pressure sensing unit 130, vacuum sensing unit 140, first power connecting unit 121, second power connecting unit 122, third power connecting unit 123, first supporting unit 111, second It includes a support 112 , a first electrode 101 , and a second electrode 102 .

The controller 700 senses the pressure in the chamber 100 from the vacuum sensing unit 140 and the pressure sensing unit 130 , and operates the first control valve 731 and the second control valve 732 . control, and control the operation of the vacuum pump 720 to control the pressure or vacuum degree inside the chamber 100, and to control the gas concentration therein.

In addition, the controller 700 controls the power unit 710 to supply power supplied to the first and second electrodes 101 and 102 through the first, second, and third power connection units 121 , 122 and 123 . can be controlled

The first support part 111 and the second support part 112 are made of a conductive material through which electricity easily passes, and a discharge is formed between the first and second electrodes 101 and 102, and the user can use transparent polycarbonate. It is possible to easily check the internal state through the chamber 100 of the material.

8 is a partial perspective view of a chamber unit according to an embodiment of the present invention.

The chamber 100 according to an embodiment of the present invention is manufactured to withstand pressure and vacuum by using a polycarbonate material (thickness: 30T) to be suitable for high voltage discharge experiments, and the polycarbonate used is made of a transparent material. When the discharge experiment is performed inside the chamber 100 , the discharge phenomenon occurring inside the chamber 100 can be observed in various directions related to the related tube.

The chamber made of polycarbonate is a type of thermoplastic and exhibits high physical properties such as transparency, impact resistance, heat resistance, flame retardancy, dimensional stability, weather resistance, and self-extinguishability. It has an impact strength of about 150 times or more and more than 250 times that of ordinary glass.

In addition, the chamber made of polycarbonate has excellent acid resistance and oil resistance, is strong against ultraviolet rays, is alkaline, and is easily broken and deformed as a substitute for acrylic.

In particular, the chamber made of polycarbonate has, on average, high physical properties among engineering plastics, can be used for optical purposes using transparent properties, is relatively inexpensive, and has excellent mechanical strength.

Additionally, the specific gravity of polycarbonate is 1,2, the tensile strength is 500 to 700 km/cm2, the elongation is 50 to 100%, the compressive strength is 800 km/cm2, and the flexural strength is 850 to 950 kg/cm2. cm2, the flexural modulus is 2.1 or more, the impact strength is 50 to 100 (M87-91, R122-124), the thermal conductivity is 4.6 (10-4cal/cmsec℃), and the specific heat is 0.26-0.28cal/℃g , the coefficient of thermal expansion is 6-7 (10-5mm/mm ℃), the thermal deformation temperature is 134-140 ℃, the light transmittance is 85-91%, and the degree of yellowing (3 years) is 2% or less.

Although the embodiments of the present invention have been described above, the spirit of the present invention is not limited to the embodiments presented herein, and those skilled in the art who understand the spirit of the present invention can add components within the scope of the same spirit. , changes, deletions, additions, etc. may easily suggest other embodiments, but this will also fall within the scope of the present invention.

100: chamber 101: first electrode
102: second electrode 111: first support
112: second support 400: third support
121: first power connection 122: second power connection
123: third power connection unit 130: pressure sensing unit
140: vacuum sensing unit 150: inlet and outlet pipe
211: first member 212: second member
213: third member 504: fourth member
505: fifth member 220: connecting member
221: first coupling part 222: second coupling part
523: third coupling portion 231: first through portion
232: second through portion 533: third through portion
240: fixing part 241: first mounting pin
242: second mounting pin 301: first hole
302: second hole 320: insertion hole
700: controller 710: power unit
731: first control valve 732: second control valve
720: vacuum pump 730: gas tank

Claims (14)

A chamber in which a space set inside is formed;
first and second power connections configured to connect power from the outside to the inside of the chamber;
a first support part electrically connected to the first power connection part;
a second support part electrically connected to the second power connection part; and
a first electrode and a second electrode mounted on the first and second support parts, respectively, and generating a discharge in a space therebetween by electrical energy transmitted through the first and second power connection parts;
including,
The first electrode and the second electrode are characterized in that they are disposed at a distance set in the vertical direction,
The second support part,
a first member having a lower end coupled to the second power connector and extending upwardly;
a second member coupled to the first member and extending in a horizontal direction;
a third member coupled to the second member and extending downwardly; and
a connecting member coupled to the third member; including, wherein the second electrode is coupled to the front end of the connection member. The method of claim 1,
The first and second power connection parts,
first and second penetrating portions configured to penetrate the lower portion of the chamber from the outside to the inside; and
first and second coupling parts respectively coupled to the first and second penetration parts in the chamber and coupled to the first and second support parts; A chamber unit for a high voltage discharge experiment comprising a. delete delete The method of claim 1,
A first hole is formed in the first support part into which a first mounting pin formed on the first electrode is inserted in a downward direction,
The chamber unit for a high voltage discharge experiment, characterized in that the connection member has an insertion hole into which a second mounting pin formed on the second electrode is inserted. a chamber having a space set inside;
first and third power connections configured to supply power from the outside to the inside of the chamber;
a first support part electrically connected to the first power connection part;
a third support part electrically connected to the third power connection part; and
a first electrode and a second electrode mounted on the first and third support parts, respectively, and generating a discharge in a space therebetween by electrical energy transmitted through the first and third power connection parts;
including,
The first electrode and the second electrode are characterized in that they are disposed at a distance set in the horizontal direction,
The third support part,
a fourth member having a lower end coupled to the third power connector and extending upwardly;
a fifth member coupled to the fourth member and extending in a horizontal direction; and
a connecting member coupled to the fifth member; including, wherein the second electrode is coupled to the front end of the connection member. 7. The method of claim 6,
The first and third power connection parts,
first and third through portions configured to penetrate the lower portion of the chamber from the outside to the inside; and
first and third coupling portions respectively coupled to the first and third through portions in the chamber and coupled to the first and second supporting portions; A chamber unit for a high voltage discharge experiment comprising a. delete delete 7. The method of claim 6,
A second hole is formed in the first support part into which a first mounting pin formed in the first electrode is inserted in a horizontal direction,
The chamber unit for a high voltage discharge experiment, characterized in that the connection member has an insertion hole into which a second mounting pin formed on the second electrode is inserted. 7. The method of any one of claims 1 and 6,
The chamber unit for a high voltage discharge experiment, characterized in that the chamber is made of a transparent polycarbonate material so that the inner space of the chamber and the first and second electrodes are visible from the outside. 7. The method of any one of claims 1 and 6,
The first and second electrodes are a chamber unit for a high voltage discharge experiment, characterized in that the spherical shape having a set outer diameter. 7. The method of any one of claims 1 and 6,
The chamber unit for a high voltage discharge experiment, characterized in that at least one of a vacuum sensing unit sensing the vacuum pressure inside the chamber and a pressure sensing unit sensing the pressure. 14. The method of claim 13,
a vacuum pump connected to the inside of the chamber through a first line;
a gas tank connected to the inside of the chamber through a second line;
a power unit supplying power to the first and second electrodes; and
Sensing the pressure or vacuum level inside the chamber from the vacuum sensing unit or the pressure sensing unit, controlling the operation of the first and second control valves provided in the first and second lines, and controlling the operation of the vacuum pump a controller for controlling the pressure or vacuum degree inside the chamber to a set value, and controlling the magnitude of power supplied to the first and second electrodes through the power unit to a set value; Chamber unit for high voltage discharge experiment, characterized in that it further comprises.

Images